CN108285146B - 多晶硅还原炉及使用多晶硅还原炉生长多晶硅的方法 - Google Patents
多晶硅还原炉及使用多晶硅还原炉生长多晶硅的方法 Download PDFInfo
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- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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Citations (1)
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JP2010195597A (ja) * | 2009-02-20 | 2010-09-09 | Mitsubishi Materials Corp | 多結晶シリコン製造装置 |
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CN101748482B (zh) * | 2008-12-19 | 2013-02-13 | 江苏中能硅业科技发展有限公司 | 制备高致密结构多晶硅的改进方法和装置 |
CN101973551B (zh) * | 2010-11-12 | 2012-05-02 | 天津大学 | 一种多晶硅还原炉 |
CN102701210A (zh) * | 2012-05-31 | 2012-10-03 | 四川瑞能硅材料有限公司 | 一种多晶硅还原炉 |
CN204224265U (zh) * | 2014-08-28 | 2015-03-25 | 上海森松新能源设备有限公司 | 多晶硅还原炉底盘装置 |
CN104609425B (zh) * | 2015-01-29 | 2017-07-11 | 天津大学 | 一种硅烷法制备多晶硅的设备 |
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JP2010195597A (ja) * | 2009-02-20 | 2010-09-09 | Mitsubishi Materials Corp | 多結晶シリコン製造装置 |
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Application publication date: 20180717 Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000325 Denomination of invention: Polysilicon reduction furnace and method of growing polysilicon using polysilicon reduction furnace Granted publication date: 20191220 License type: Common License Record date: 20220627 Application publication date: 20180717 Assignee: Inner Mongolia Xinte silicon material Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000326 Denomination of invention: Polysilicon reduction furnace and method of growing polysilicon using polysilicon reduction furnace Granted publication date: 20191220 License type: Common License Record date: 20220627 |