CN108231611A - The integrated approach of two-sided surface-mount type semiconductor integrated circuit - Google Patents

The integrated approach of two-sided surface-mount type semiconductor integrated circuit Download PDF

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Publication number
CN108231611A
CN108231611A CN201611189633.7A CN201611189633A CN108231611A CN 108231611 A CN108231611 A CN 108231611A CN 201611189633 A CN201611189633 A CN 201611189633A CN 108231611 A CN108231611 A CN 108231611A
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CN
China
Prior art keywords
integrated circuit
semiconductor integrated
ceramic substrate
substrate
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611189633.7A
Other languages
Chinese (zh)
Inventor
胡锐
杨成刚
黄华
赵晓辉
路兰艳
王德成
唐拓
杨晓琴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guizhou Zhenhua Fengguang Semiconductor Co Ltd
Original Assignee
Guizhou Zhenhua Fengguang Semiconductor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guizhou Zhenhua Fengguang Semiconductor Co Ltd filed Critical Guizhou Zhenhua Fengguang Semiconductor Co Ltd
Priority to CN201611189633.7A priority Critical patent/CN108231611A/en
Publication of CN108231611A publication Critical patent/CN108231611A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4885Wire-like parts or pins
    • H01L21/4889Connection or disconnection of other leads to or from wire-like parts, e.g. wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8119Arrangement of the bump connectors prior to mounting
    • H01L2224/81193Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

In the outer surface of the ceramic pipe cap of advance sinter molding, required metal layer is formed with the mode of the sintering of coating metal paste, electroless plating or vacuum coating for the integrated approach of two-sided surface-mount type semiconductor integrated circuit;Upper and lower ceramic substrate is made with sintering process with low-temperature co-fired ceramics technique and thick film screen printing, semiconductor integrated circuit chip bonding region, surface metal-layer are respectively formed on upper and lower ceramic substrate, to outer pin;Semiconductor integrated circuit chip back bonding is carried out again;Chip is connected by the substrate for being then assembled with chip by two pieces Face to face with surface-mount type Integration Method, electrical pin is drawn respectively from the back side of upper and lower ceramic substrate, High Density Integration and two-sided pin so as to fulfill semiconductor integrated circuit, obtain two-sided surface-mount type semiconductor integrated circuit.The present invention solves the problems, such as that semiconductor integrated circuit is limited in change system miniaturization, integrated and lighting application field, and the device using the present invention is widely used in each industrial circle.

Description

The integrated approach of two-sided surface-mount type semiconductor integrated circuit
Technical field
The present invention relates to semiconductor integrated circuit, more specifically, are related to two-sided surface-mount type semiconductor integrated circuit Integrated approach.
Background technology
In the integrated technology of original semiconductor integrated circuit, semiconductor integrated circuit chip is encapsulated in metal base and gold Belong in pipe cap or be encapsulated in ceramic tube base in ceramic pipe cap, be first attached to semiconductor integrated circuit chip dress on Guan Ji, then adopt Use bonding wire(Spun gold or Si-Al wire)Carry out the wire bonding of chip and pin, complete entire electric appliance connection, finally by Guan Ji and Pipe cap is sealed.Main problem of the existing technology is:Interior of IC package is only capable of carrying out single stack package, no Encapsulated space can be made full use of to carry out the encapsulation of more IC chips;On the other hand, semiconductor integrated circuit package shell Pin only from single side draw, be not suitable for 3 D stereo assembling.These two aspects is all unfavorable for the miniaturization of change system, collection Into change and lighting.
The application part of semiconductor integrated circuit involved in Chinese patent database has thousands of, just having since 2015 57, illustrate that the field technology progress is very fast.Such as No. 2015209928947《A kind of anti-interference semiconductor integrated circuit》、 No. 2015209932124《A kind of anti-interference anticorrosive semiconductor integrated circuit》, No. 2015201161706《The void of integrated circuit Intend pattern and semiconductor integrated circuit》Deng;The application part for being related to semiconductor integrated circuit integrated approach has: No. 201510881974X《The integrated approach of anti-interference anticorrosive semiconductor integrated circuit》With No. 2015108817903《It is anti-interference The integrated approach of semiconductor integrated circuit》.However so far, it there is no and be related to the two-sided surface-mount type semiconductor integrated circuit side of integrating The application part of method.
Invention content
The present invention is intended to provide the integrated approach of two-sided surface-mount type semiconductor integrated circuit, makes full use of encapsulated space to carry out The encapsulation of more IC chips, the defects of original technology is overcome to be difficult to realize equipment miniaturization, integrated and lighting.
Designer for original semiconductor integrated circuit there are the problem of, the two-sided surface-mount type semiconductor provided integrates electricity Road integrated approach is:In the outer surface of the ceramic pipe cap of advance sinter molding, using the sintering of coating metal paste, electroless plating or The mode of vacuum coating forms required metal layer;Using low-temperature co-fired ceramics technique(LTCC techniques)And thick film screen printing and agglomerant Skill makes upper ceramic substrate and lower ceramic substrate, and semiconductor integrated circuit is respectively formed on upper ceramic substrate and lower ceramic substrate Chip bonding area, surface metal-layer, to outer pin;The back bonding of semiconductor integrated circuit chip is carried out again;Then by two pieces The substrate for being assembled with semiconductor integrated circuit chip is connected face-to-face, symmetrically with surface-mount type Integration Method chip, externally Electrical pin is drawn respectively from the back side of upper ceramic substrate and lower ceramic substrate, so as to fulfill the high density of semiconductor integrated circuit Integrated and two-sided pin, obtains two-sided surface-mount type semiconductor integrated circuit.
Above-mentioned two pieces of substrates for being assembled with semiconductor integrated circuit chip face-to-face, symmetrically attaching when be with ceramics thicken Layer is connected to become whole.
Above-mentioned two substrate and ceramic thickening layer have through-hole, and upper ceramic substrate and lower ceramic substrate have semiconductor to integrate respectively Circuit chip is connect by external electrical connection terminal with metal pins.
There is metal pad between above-mentioned external electrical connection terminal and ceramic substrate.
The metal pins direction of above-mentioned two substrate is on the contrary, metal pins have solder sphere.
The integrated approach of two-sided surface-mount type semiconductor integrated circuit has the following advantages:1. it can realize multiple semiconductor collection It is integrated into circuit chip bilayer, realizes High Density Integration;2. using two-sided pin, it can be achieved that 3 D stereo assembles;3. it can integrate More circuit functions realize the system integration;4. realizing surface-mount type installation, equipment volume, the high frequency performance of hoisting device are reduced; 5. improve the reliability of change system;6. extend to the High Density Integration of other circuit modules.
The present invention solves original semiconductor integrated circuit should in the minimizing of change system, integrated and lighting etc. The problem being restricted with field, the device using the present invention are widely used in space flight, aviation, ship, electronics, communication, medical treatment The fields such as equipment, Industry Control especially suitable for change system miniaturization, high frequency, highly reliable field, have a vast market Prospect and application space.
Description of the drawings
Fig. 1 is the semiconductor integrated circuit structure schematic diagram of original technology, and Fig. 2 is upper ceramic substrate, lower ceramic substrate Back side assembling schematic diagram, Fig. 3 are the assembling schematic diagram of the two-sided surface-mount type semiconductor integrated circuit of the present invention.
In figure, 1 is metal base, and 2 be metab, and 3 be metal pin, and 4 be metal pipe cap, and 5 integrate electricity for semiconductor Road chip, 6 be bonding wire, and 7 be upper ceramic substrate, and 8 be upper metal pins, and 9 be semiconductor-on-insulator IC chip, and 10 be electrical Bonding ribbon, 11 be ceramic thickening layer, and 12 be plated-through hole, and 13 be lower ceramic substrate, and 14 be upper ceramic substrate metal welding Disk, 15 be upper metal pins, and 16 be lower semiconductor IC chip, and 17 connect outdoor electrical for lower semiconductor IC chip End is connect, 18 be the external electrical connection terminal of semiconductor-on-insulator IC chip, and 19 be the electrical connection terminal of ceramic substrate.
Specific embodiment
Embodiment
The integrated approach of the two-sided surface-mount type semiconductor integrated circuit of structure such as Fig. 3
In the outer surface of the ceramic pipe cap 4 of advance sinter molding, using the sintering of coating metal paste, electroless plating or vacuum coating Mode form required metal layer;Upper ceramic substrate 7 is made with sintering process using low-temperature co-fired ceramics technique and thick film screen printing And lower ceramic substrate 13, be respectively formed on upper ceramic substrate 7 and lower ceramic substrate 13 semiconductor integrated circuit chip bonding region, Surface metal-layer, to outer pin;The back bonding of semiconductor integrated circuit chip 9,16 is carried out again;Then it is assembled with half by two pieces The substrate of conductor IC chip is connected face-to-face, symmetrically with surface-mount type Integration Method chip 9,16, electrical pin 8th, it 15 is drawn respectively from the back side of upper ceramic substrate 7 and lower ceramic substrate 13, so as to fulfill the high density of semiconductor integrated circuit Integrated and two-sided pin, obtains two-sided surface-mount type semiconductor integrated circuit.Two substrates 7,13 and ceramic thickening layer 11 have metal Change through-hole 12, upper ceramic substrate 7 and lower ceramic substrate 13 have semiconductor integrated circuit chip 9,16 by connecting to outdoor electrical respectively End 17,18 is connect to connect with metal pins 8,15.Externally there is metal pad between electrical connection terminal 17,18 and ceramic substrate 7,13 14.Metal pins 8,15 directions of two substrates 7,13 are on the contrary, metal pins 8,15 have solder sphere.

Claims (5)

1. the integrated approach of two-sided surface-mount type semiconductor integrated circuit, it is characterised in that in the ceramic pipe cap of advance sinter molding Outer surface forms required metal layer by the way of the sintering of coating metal paste, electroless plating or vacuum coating;It is total to using low temperature It burns ceramic process and thick film screen printing and makes upper ceramic substrate and lower ceramic substrate with sintering process, in upper ceramic substrate and lower ceramics Semiconductor integrated circuit chip bonding region, surface metal-layer are respectively formed on substrate, to outer pin;Semiconductor is carried out again integrates electricity The back bonding of road chip;Then the substrate for being assembled with semiconductor integrated circuit chip by two pieces surface-mount type Integration Method chip face Opposite is symmetrically connected, and external electrical pin is drawn respectively from the back side of upper ceramic substrate and lower ceramic substrate, so as to It realizes the High Density Integration of semiconductor integrated circuit and two-sided pin, obtains two-sided surface-mount type semiconductor integrated circuit.
2. integrated approach as described in claim 1, it is characterised in that described two pieces are assembled with semiconductor integrated circuit chip Substrate face-to-face, symmetrically attaching when with ceramics thickening layer be connected to become it is whole.
3. integrated approach as described in claim 1, it is characterised in that two substrate and ceramic thickening layer have through-hole, upper pottery Ceramic chip and lower ceramic substrate have semiconductor integrated circuit chip to be connect by external electrical connection terminal with metal pins respectively.
4. integrated approach as described in claim 1, it is characterised in that have between the external electrical connection terminal and ceramic substrate Metal pad.
5. integrated approach as described in claim 1, it is characterised in that the metal pins direction of two substrate is on the contrary, metal draws Foot has solder sphere.
CN201611189633.7A 2016-12-21 2016-12-21 The integrated approach of two-sided surface-mount type semiconductor integrated circuit Pending CN108231611A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611189633.7A CN108231611A (en) 2016-12-21 2016-12-21 The integrated approach of two-sided surface-mount type semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611189633.7A CN108231611A (en) 2016-12-21 2016-12-21 The integrated approach of two-sided surface-mount type semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
CN108231611A true CN108231611A (en) 2018-06-29

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080157295A1 (en) * 2006-12-20 2008-07-03 Custom One Design, Inc. Methods and apparatus for multichip module packaging
CN104157619A (en) * 2014-08-22 2014-11-19 山东华芯半导体有限公司 Novel PoP stack packaging structure and manufacture method thereof
CN104332457A (en) * 2014-09-05 2015-02-04 华进半导体封装先导技术研发中心有限公司 High-density IO interconnection package-on-package (PoP) structure and manufacturing process thereof
CN105514087A (en) * 2016-01-26 2016-04-20 中芯长电半导体(江阴)有限公司 Double-faced fan-out type wafer-level packaging method and packaging structure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080157295A1 (en) * 2006-12-20 2008-07-03 Custom One Design, Inc. Methods and apparatus for multichip module packaging
CN104157619A (en) * 2014-08-22 2014-11-19 山东华芯半导体有限公司 Novel PoP stack packaging structure and manufacture method thereof
CN104332457A (en) * 2014-09-05 2015-02-04 华进半导体封装先导技术研发中心有限公司 High-density IO interconnection package-on-package (PoP) structure and manufacturing process thereof
CN105514087A (en) * 2016-01-26 2016-04-20 中芯长电半导体(江阴)有限公司 Double-faced fan-out type wafer-level packaging method and packaging structure

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Application publication date: 20180629

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