CN108174619B - 摄像元件及摄像装置 - Google Patents

摄像元件及摄像装置 Download PDF

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Publication number
CN108174619B
CN108174619B CN201680057084.XA CN201680057084A CN108174619B CN 108174619 B CN108174619 B CN 108174619B CN 201680057084 A CN201680057084 A CN 201680057084A CN 108174619 B CN108174619 B CN 108174619B
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light
imaging element
region
microlens
incident
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CN108174619A (zh
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石田知久
渡边佳之
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Nikon Corp
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Nikon Corp
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8067Reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor

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  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
CN201680057084.XA 2015-09-30 2016-09-26 摄像元件及摄像装置 Active CN108174619B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211045472.XA CN115295569A (zh) 2015-09-30 2016-09-26 摄像元件及摄像装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015-195347 2015-09-30
JP2015195347 2015-09-30
PCT/JP2016/078278 WO2017057277A1 (ja) 2015-09-30 2016-09-26 撮像素子および撮像装置

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CN108174619B true CN108174619B (zh) 2022-09-20

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US (2) US20180294300A1 (enExample)
EP (1) EP3358620B1 (enExample)
JP (3) JPWO2017057277A1 (enExample)
KR (4) KR102623653B1 (enExample)
CN (2) CN108174619B (enExample)
WO (1) WO2017057277A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6780662B2 (ja) * 2016-01-22 2020-11-04 ソニー株式会社 受光装置、制御方法、及び、電子機器
JP6700811B2 (ja) * 2016-01-26 2020-05-27 キヤノン株式会社 半導体装置および半導体装置の製造方法
JP2018060980A (ja) 2016-10-07 2018-04-12 キヤノン株式会社 撮像表示装置及びウェアラブルデバイス
JP7267940B2 (ja) * 2018-02-01 2023-05-02 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその製造方法、並びに電子機器
CN109033913A (zh) * 2018-07-25 2018-12-18 维沃移动通信有限公司 一种识别码的识别方法及移动终端
US11955502B2 (en) 2018-09-11 2024-04-09 Sony Semiconductor Solutions Corporation Solid-state image sensor to reduce display unevenness of a captured image
US11985443B2 (en) 2018-11-21 2024-05-14 Sony Semiconductor Solutions Corporation Solid-state image sensor
TWI861140B (zh) * 2019-06-26 2024-11-11 日商索尼半導體解決方案公司 攝像裝置
CN112018140A (zh) * 2020-08-14 2020-12-01 清华大学 基于随机形状单元的微型光谱芯片
JP2022086611A (ja) * 2020-11-30 2022-06-09 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置及びその製造方法
KR20220144222A (ko) 2021-04-19 2022-10-26 삼성전자주식회사 이미지 센서
CN120092510A (zh) * 2022-11-30 2025-06-03 索尼半导体解决方案公司 光学检测装置和电子设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212668A (ja) * 2009-03-10 2010-09-24 Internatl Business Mach Corp <Ibm> 遮光部を含む画素センサ・セルおよび製造方法
CN104637963A (zh) * 2013-11-08 2015-05-20 索尼公司 固态摄像器件、固态摄像器件的制造方法和电子装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3799304A (en) 1972-10-30 1974-03-26 Twin Disc Inc Hydraulic control system for power transmission having a modulated friction clutch
JPS5547260U (enExample) 1978-09-26 1980-03-27
JP2004304105A (ja) * 2003-04-01 2004-10-28 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
JP4341421B2 (ja) * 2004-02-04 2009-10-07 ソニー株式会社 固体撮像装置
JP2005303081A (ja) * 2004-04-13 2005-10-27 Matsushita Electric Ind Co Ltd 光センサーおよび固体撮像装置
JP2006344754A (ja) * 2005-06-08 2006-12-21 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
JP2007201047A (ja) * 2006-01-25 2007-08-09 Matsushita Electric Ind Co Ltd 固体撮像装置およびその製造方法
JP2008060195A (ja) * 2006-08-30 2008-03-13 Nikon Corp 固体撮像装置およびその製造方法
US7781715B2 (en) * 2006-09-20 2010-08-24 Fujifilm Corporation Backside illuminated imaging device, semiconductor substrate, imaging apparatus and method for manufacturing backside illuminated imaging device
JP4649390B2 (ja) * 2006-09-20 2011-03-09 富士フイルム株式会社 裏面照射型撮像素子の製造方法
JP5568880B2 (ja) * 2008-04-03 2014-08-13 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および電子機器
KR101776955B1 (ko) * 2009-02-10 2017-09-08 소니 주식회사 고체 촬상 장치와 그 제조 방법, 및 전자 기기
JP4816768B2 (ja) 2009-06-22 2011-11-16 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP4798232B2 (ja) * 2009-02-10 2011-10-19 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP5513623B2 (ja) * 2010-08-24 2014-06-04 富士フイルム株式会社 固体撮像装置
JP2012156310A (ja) * 2011-01-26 2012-08-16 Sony Corp 固体撮像素子、固体撮像素子の製造方法、および電子機器
JP5810551B2 (ja) * 2011-02-25 2015-11-11 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP6299058B2 (ja) * 2011-03-02 2018-03-28 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法及び電子機器
JP5794068B2 (ja) * 2011-09-16 2015-10-14 ソニー株式会社 固体撮像素子および製造方法、並びに電子機器
JP2013098446A (ja) * 2011-11-04 2013-05-20 Sony Corp 固体撮像素子、固体撮像素子の製造方法、及び、電子機器
TW201334169A (zh) * 2012-02-10 2013-08-16 Sony Corp 攝像元件、製造裝置及方法、及攝像裝置
JP6065448B2 (ja) * 2012-08-03 2017-01-25 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法及び電子機器
JP5547260B2 (ja) 2012-10-22 2014-07-09 株式会社東芝 固体撮像装置
JP2014096490A (ja) * 2012-11-09 2014-05-22 Sony Corp 撮像素子、製造方法
US8773562B1 (en) * 2013-01-31 2014-07-08 Apple Inc. Vertically stacked image sensor
JP2015012126A (ja) * 2013-06-28 2015-01-19 ソニー株式会社 固体撮像素子および駆動方法、並びに電子機器
US9356061B2 (en) * 2013-08-05 2016-05-31 Apple Inc. Image sensor with buried light shield and vertical gate
US9305952B2 (en) * 2013-08-27 2016-04-05 Semiconductor Components Industries, Llc Image sensors with inter-pixel light blocking structures
JP2015065270A (ja) * 2013-09-25 2015-04-09 ソニー株式会社 固体撮像装置およびその製造方法、並びに電子機器
JP6196911B2 (ja) * 2014-02-05 2017-09-13 オリンパス株式会社 固体撮像装置および撮像装置
KR102154184B1 (ko) * 2014-03-10 2020-09-09 삼성전자 주식회사 이미지 센서 및 이를 제조하는 방법
KR102363433B1 (ko) * 2015-01-15 2022-02-16 삼성전자주식회사 이미지 센서
KR102225297B1 (ko) * 2015-09-30 2021-03-09 가부시키가이샤 니콘 촬상 소자 및 촬상 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212668A (ja) * 2009-03-10 2010-09-24 Internatl Business Mach Corp <Ibm> 遮光部を含む画素センサ・セルおよび製造方法
CN104637963A (zh) * 2013-11-08 2015-05-20 索尼公司 固态摄像器件、固态摄像器件的制造方法和电子装置

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JP7383597B2 (ja) 2023-11-20
WO2017057277A1 (ja) 2017-04-06
JP2023017991A (ja) 2023-02-07
KR20240010528A (ko) 2024-01-23
EP3358620A1 (en) 2018-08-08
EP3358620A4 (en) 2019-04-24
KR102488709B1 (ko) 2023-01-13
KR20180048900A (ko) 2018-05-10
KR20230009533A (ko) 2023-01-17
EP3358620B1 (en) 2025-08-20
JP2021044572A (ja) 2021-03-18
CN108174619A (zh) 2018-06-15
JPWO2017057277A1 (ja) 2018-07-26
CN115295569A (zh) 2022-11-04
KR102623653B1 (ko) 2024-01-10
US20220085220A1 (en) 2022-03-17
US20180294300A1 (en) 2018-10-11
KR20200145850A (ko) 2020-12-30

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