CN108118307A - Flexible intelligent spectral selection thermal isolation film and preparation method thereof - Google Patents
Flexible intelligent spectral selection thermal isolation film and preparation method thereof Download PDFInfo
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- CN108118307A CN108118307A CN201810128393.2A CN201810128393A CN108118307A CN 108118307 A CN108118307 A CN 108118307A CN 201810128393 A CN201810128393 A CN 201810128393A CN 108118307 A CN108118307 A CN 108118307A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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Abstract
The present invention relates to a kind of flexible intelligent spectral selection thermal isolation film and preparation method thereof, thermal isolation film includes the flexible substrate layer, the first high refractive index oxide layer, the first ag alloy layer, the first barrier layer, the second high refractive index oxide layer, the second ag alloy layer, the second barrier layer and the 3rd high refractive index oxide layer that set from inside to outside.The preparation method includes the following steps：Flexible parent metal is attached to Leng Gushang, using the twin column target structure of more target area medium frequency magnetron sputterings in the first high refractive index oxide of flexible parent metal successively successive sedimentation layer, the first ag alloy layer, the first barrier layer, the second high refractive index oxide layer, the second ag alloy layer, the second barrier layer and the 3rd high refractive index oxide layer.The heat-proof quality of above-mentioned thermal isolation film is preferable, while also has higher visible light transmittance, meets demand of the market to heat-insulated fine and high see-through thermal isolation film, promotes the development and application popularization of high-end thermal isolation film.
Description
Technical field
The present invention relates to the thermal isolation film fields that vehicle glass and building glass are pasted, and in particular to a kind of flexible intelligent spectrum
Selective thermal isolation film and preparation method thereof.
Background technology
Thermal isolation film is mainly used on building glass and vehicle glass, applied to can be risen on building glass and vehicle glass
The effects that barrier ultraviolet light, heat insulation sun, safety anti-explosive, protection privacy and saving room conditioning energy consumption.
With the construction of domestic heavy construction and the quick popularization of family saloon, the market demand of thermal isolation film progressively increases
Add.With growing, living standards of the people the raisings of science and technology and the proposition of low-carbon environment-friendly policy, to the performance of thermal isolation film
It, will be with high visible while with good heat-proof quality from the point of view of the development trend of thermal isolation film product it is required that higher and higher
Light transmission rate, i.e. so-called multilayer spectral selection thermal isolation film currently on the market.This thermal isolation film is under high vacuum environment, is answered
With the metal and oxide skin(coating) of magnetron sputtering technique successive sedimentation multi-layer nano thickness on the flexible parent metal of high-quality, using not
Interfere principle between nano thin-film, obtain it is extremely low in infrared region transmitance and in the higher light of visible region transmitance
Spectral selectivity thermal isolation film.Interference between plural layers makes the thickness of every tunic very clever to the Color influences of obtained thermal isolation film
Quick, i.e., only the guaranteed horizontal and vertical uniformity per layer film thickness can just obtain the uniform thermal isolation film of color.So production
This thermal isolation film is very high to the stability requirement of equipment and technique, and it is yield rate to restrict the main reason for product is popularized at present
It is low, it is at high price.
The content of the invention
Based on this, the present invention provides a kind of flexible intelligent spectral selection thermal isolation film, preferable with heat-proof quality, simultaneously
Also there is higher visible light transmittance, meet demand of the market to heat-insulated fine and high see-through thermal isolation film, promote high
Hold the development and application popularization of thermal isolation film.
The present invention also provides the preparation methods of above-mentioned flexible intelligent spectral selection thermal isolation film.
In order to achieve the object of the present invention, the present invention uses following technical scheme：
A kind of flexible intelligent spectral selection thermal isolation film, including set from inside to outside flexible substrate layer, the first high refraction
Rate oxide skin(coating), the first ag alloy layer, the first barrier layer, the second high refractive index oxide layer, the second ag alloy layer, the second barrier
Layer and the 3rd high refractive index oxide layer.
Above-mentioned flexible intelligent spectral selection thermal isolation film on flexible parent metal by being equipped with high refractive index oxide layer, silver
Seven tunics such as layer, nickel-chrome alloy layer, high refractive index oxide layer, silver layer, nickel-chrome alloy layer and high refractive index oxide layer so that
The heat-proof quality of the thermal isolation film is preferable, while also has higher visible light transmittance, meets market to heat-insulated very well and saturating
The demand of the high thermal isolation film of diopter promotes the development and application popularization of high-end thermal isolation film.
In wherein some embodiments, the thickness of the flexible substrate layer is 16 μm~100 μm；First high index of refraction
The thickness of oxide skin(coating) is 20nm~35nm；The thickness of first ag alloy layer is 6nm~15nm；The thickness of first barrier layer
For 1nm~5nm；The thickness of the second high refractive index oxide layer is 40nm~70nm；The thickness of second ag alloy layer
For 6nm~15n m；The thickness of second barrier layer is 1nm~5n m；The thickness of the 3rd high refractive index oxide layer is
20nm~35nm.
In wherein some embodiments, the flexible substrate layer is pet layer；The material of the first high refractive index oxide layer
Expect for the one or several kinds combination in titanium dioxide, niobium pentaoxide, tin indium oxide；The material of first ag alloy layer is
One kind in silver-platinum alloy, silver palladium alloy, yellow gold；The material of first barrier layer is nichrome, in titanium, stainless steel
One kind；The material of the second high refractive index oxide layer for titanium dioxide, niobium pentaoxide, one kind in tin indium oxide or
Several combinations of person；The material of second ag alloy layer is silver-platinum alloy, one kind in silver palladium alloy, yellow gold；Described
The material of two barrier layers is nichrome, one kind in titanium, stainless steel；The material of the 3rd high refractive index oxide layer is two
One or several kinds of combinations in titanium oxide, niobium pentaoxide, tin indium oxide.
A kind of preparation method of flexible intelligent spectral selection thermal isolation film, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, the roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material successively roll over by the first high refractive index oxide of successive sedimentation layer, the first ag alloy layer, the first barrier layer, the second height
Rate oxide skin(coating), the second ag alloy layer, the second barrier layer and the 3rd high refractive index oxide layer are penetrated, forms the choosing of flexible intelligent spectrum
Selecting property thermal isolation film.
In wherein some embodiments, coolant is disposed in the cold drum, the temperature of the coolant is controlled at -20 DEG C
In~0 DEG C.
In wherein some embodiments, the area that unreels of the roll-to-roll magnetic-control sputtering coiling film coating machine is disposed with suction tray
Pipe, the temperature of the absorption coil pipe are controlled in -150 DEG C~-120 DEG C.
In wherein some embodiments, more twin column target structures of target area medium frequency magnetron sputtering are arranged for a target area
There is the twin Style Columu Talget of a pair of of magnetron sputtering.
In wherein some embodiments, isolation gas has been passed through between each target area.
In wherein some embodiments, cloth in the Style Columu Talget in more twin column target structures of target area medium frequency magnetron sputtering
It is equipped with magnet steel；Cooling water is sprayed in the Style Columu Talget.
In wherein some embodiments, the roll-to-roll magnetic-control sputtering coiling film coating machine further includes several plated film areas, described
Plated film area is equipped with molecular pump and deep cooling coil pipe.
Description of the drawings
Fig. 1 is the schematic diagram of the flexible intelligent spectral selection thermal isolation film of the preferred embodiment of the present invention.
Specific embodiment
For the ease of understanding the present invention, the present invention will be described more fully below.But the present invention can be with perhaps
Mostly different form is realized, however it is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is to make
To the understanding more thorough and comprehensive of the disclosure.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The normally understood meaning of technical staff is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.
The present invention provides a kind of flexible intelligent spectral selection thermal isolation film 100, including the flexible parent metal set from inside to outside
The 10, first high refractive index oxide layer 20 of layer, the first ag alloy layer 30, the first barrier layer 40, the second high refractive index oxide layer
50th, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80.
The thermal isolation film of the present invention is that successive sedimentation is more successively on flexible parent metal by the more target area magnetron sputtering techniques of application
Layer nano coating, more target area magnetron sputtering techniques can obtain the intelligent light of the equal very little of horizontal and vertical aberration, high yield rate
Spectral selectivity thermal isolation film drastically increases the yield rate of product.Wherein, sputtering refers to that there is the particle bombardment of certain energy to consolidate
Body surface face so that molecular solids or atom leave solid, the phenomenon that injection from surface.Sputter coating refers to utilize particle bombardment
The splash effect that target generates so that target atom or molecule are projected from the surface of solids, and film is formed in deposition on substrate
Process.
Magnetron sputtering refers to be filled with the inert gases such as argon gas nitrogen in the vacuum chamber of low pressure, lazy after electrode is powered
Property gas glow discharge form charged ion, charged ion constantly hits target material surface, finally intended particle made to be sputtered onto substrate
On deposition film forming, and magnetic field is introduced between the two poles of the earth of glow discharge, electronics electric field and magnetic field collective effect next time
Rotation is advanced, and extends the running orbit of electronics so that the probability that electronics and charged particle and gas molecule collide improves, and adds
Fast deposition velocity.
Optionally, flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is titanium dioxide, five
Aoxidize one or several kinds of combinations in two niobiums, tin indium oxide；The material of first ag alloy layer 30 is silver-platinum alloy, silver-colored palladium closes
One kind in gold, silver copper alloy；The material of first barrier layer 40 is nichrome, one kind in titanium, stainless steel；Second high refraction
The material of rate oxide skin(coating) 50 is titanium dioxide, one or several kinds of combinations in niobium pentaoxide, tin indium oxide；Second silver medal closes
The material of layer gold 60 is silver-platinum alloy, one kind in silver palladium alloy, yellow gold；The material of second barrier layer 70 closes for nickel chromium triangle
One kind in gold, titanium, stainless steel；The material of 3rd high refractive index oxide layer 80 is titanium dioxide, niobium pentaoxide, indium oxide
One or several kinds of combinations in tin.
In a wherein embodiment, the thickness of flexible substrate layer 10 is 16 μm~100 μm；First high refractive index oxide layer
20 thickness is 20nm~35nm；The thickness of first ag alloy layer 30 is 6nm~15nm；The thickness of first barrier layer 40 is 1nm
~5nm；The thickness of second high refractive index oxide layer 50 is 40nm~70nm；The thickness of second ag alloy layer 60 for 6nm~
15nm；The thickness of second barrier layer 70 is 1nm~5nm；The thickness of 3rd high refractive index oxide layer 80 is 20nm~35nm.
In another embodiment, the thickness of flexible substrate layer 10 is 50 μm~70 μm；First high refractive index oxide layer 20
Thickness be 30nm~35nm；The thickness of first ag alloy layer 30 is 10nm~15nm；The thickness of first barrier layer 40 for 3nm~
5nm；The thickness of second high refractive index oxide layer 50 is 50nm~60nm；The thickness of second ag alloy layer 60 is 6nm~10nm；
The thickness of second barrier layer 70 is 2nm~5nm；The thickness of 3rd high refractive index oxide layer 80 is 20nm~30nm.
Above-mentioned flexible intelligent spectral selection thermal isolation film 100 on flexible parent metal by being equipped with high refractive index oxide
Seven layers of layer, silver layer, nickel-chrome alloy layer, high refractive index oxide layer, silver layer, nickel-chrome alloy layer and high refractive index oxide layer etc.
Film so that the heat-proof quality of the thermal isolation film is preferable, while also have higher visible light transmittance, meet market to it is heat-insulated very
The demand of good and high see-through thermal isolation film, promotes the development and application popularization of high-end thermal isolation film.
The present invention also provides a kind of preparation methods of flexible intelligent spectral selection thermal isolation film 100, include the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
In wherein some embodiments, coolant is disposed in cold drum, the temperature of coolant is controlled in -20 DEG C~0 DEG C.
Since particle bombardment PET base material can generate heat in coating process, which is for cooling down flexible PET base material, Yi Mianre
Deformation.
The area that unreels of roll-to-roll magnetic-control sputtering coiling film coating machine is disposed with absorption coil pipe, adsorb coil pipe temperature control-
In 150 DEG C~-120 DEG C.Steam is adsorbed by adsorbing coil pipe in the area that unreels of the coating machine, makes to unreel the steam moment that area releases
By the absorption of absorption coil pipe, so as to ensure to unreel the vacuum degree in area.Cooling medium is generally passed through in absorption coil pipe to freeze.
More twin column target structures of target area medium frequency magnetron sputtering are disposed with the twin column of a pair of of magnetron sputtering for a target area
Target.It is that a target area can individually deposit a kind of film.Isolation gas has been passed through between each target area.Each plated film area atmosphere is steady
Qualitative and gas purity is from realizing by the air bound between target area.
Roll-to-roll magnetic-control sputtering coiling film coating machine further includes several plated film areas, and plated film area is equipped with molecular pump and deep cooling disk
Pipe.Plated film area is by being equipped with independent molecular pump and deep cooling coil pipe, to ensure the vacuum degree in each plated film area.More target area intermediate frequency magnetic
Control sputters in the Style Columu Talget in twin column target structure and is disposed with magnet steel；Cooling water is sprayed in Style Columu Talget.
The twin Style Columu Talget of medium frequency magnetron sputtering is to the stability of coating process and the thickness of institute's deposition film and color
Uniformity plays a crucial role, wherein, the exchange of intermediate frequency twin target anode and cathode eliminates " sparking " phenomenon of sputtering process；Pass through conjunction
Removing the work puts the magnet steel in Style Columu Talget, and the horizontal sputtering for making target is uniform, i.e., the thickness of lateral deposition film and color on base material
Uniformity；Direct-cooled (target and cooling water contact directly) of Style Columu Talget makes the constant temperature of sputtering target, ensures target material surface sputtering
Stability, that is, ensure longitudinal thickness of deposition film and the uniformity of color on base material.
In another embodiment, which is refrigerant or chilled water；Isolation gas is inert gas.
In wherein some embodiments, the preparation method of flexible intelligent spectral selection thermal isolation film 100, including walking as follows
Suddenly：Light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor institute's deposition film on the base material
Thickness and color；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film.
Beneficial effects of the present invention：The present invention utilizes the roll-to-roll more target chamber magnetic-control sputtering coiling film coating machines voluntarily developed,
By optimizing the air bound between magnetron sputtering sputtering source intermediate frequency twin Style Columu Talget, vacuum-pumping system and sputtering target area from ensureing
The stability of the coating process in each plated film area and the uniformity of target material surface sputtering, and then obtain horizontal, longitudinal thicknesses of layers
Consistent with color, the high intelligent spectral selection thermal isolation film of yield rate drastically increases the cost performance of product, promotes high
Hold the development and popularization and application of thermal isolation film.
The technical solution that will be further illustrated the present invention below by several embodiments.
Embodiment 1：
The preparation method of the flexible intelligent spectral selection thermal isolation film 100 of the present invention, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
Wherein, light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor on the base material
The thickness and color of institute's deposition film；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film
Degree；Flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is titanium dioxide；First ag alloy layer 30
Material be silver-platinum alloy；The material of first barrier layer 40 is titanium；The material of second high refractive index oxide layer 50 is titanium dioxide
Titanium；The material of second ag alloy layer 60 is silver palladium alloy；The material of second barrier layer 70 is stainless steel；3rd high index of refraction aoxidizes
The material of nitride layer 80 is tin indium oxide；The thickness of flexible substrate layer 10 is 16 μm；The thickness of first high refractive index oxide layer 20
For 20nm；The thickness of first ag alloy layer 30 is 6nm；The thickness of first barrier layer 40 is 1nm；Second high refractive index oxide layer
50 thickness is 40nm；The thickness of second ag alloy layer 60 is 6nm；The thickness of second barrier layer 70 is 1nm；3rd high index of refraction
The thickness of oxide skin(coating) 80 is 20nm.
Embodiment 2：
The preparation method of the flexible intelligent spectral selection thermal isolation film 100 of the present invention, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
Wherein, light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor on the base material
The thickness and color of institute's deposition film；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film
Degree；Flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is titanium dioxide；First ag alloy layer 30
Material be silver-platinum alloy；The material of first barrier layer 40 is titanium；The material of second high refractive index oxide layer 50 is titanium dioxide
Titanium；The material of second ag alloy layer 60 is silver palladium alloy；The material of second barrier layer 70 is stainless steel；3rd high index of refraction aoxidizes
The material of nitride layer 80 is tin indium oxide；The thickness of flexible substrate layer 10 is 56 μm；The thickness of first high refractive index oxide layer 20
For 27nm；The thickness of first ag alloy layer 30 is 10nm；The thickness of first barrier layer 40 is 3nm；Second high refractive index oxide
The thickness of layer 50 is 55nm；The thickness of second ag alloy layer 60 is 10nm；The thickness of second barrier layer 70 is 3nm；3rd high folding
The thickness for penetrating rate oxide skin(coating) 80 is 27nm.
Embodiment 3：
The preparation method of the flexible intelligent spectral selection thermal isolation film 100 of the present invention, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
Wherein, light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor on the base material
The thickness and color of institute's deposition film；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film
Degree；Flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is titanium dioxide；First ag alloy layer 30
Material be silver-platinum alloy；The material of first barrier layer 40 is titanium；The material of second high refractive index oxide layer 50 is titanium dioxide
Titanium；The material of second ag alloy layer 60 is silver palladium alloy；The material of second barrier layer 70 is stainless steel；3rd high index of refraction aoxidizes
The material of nitride layer 80 is tin indium oxide；The thickness of flexible substrate layer 10 is 100 μm；The thickness of first high refractive index oxide layer 20
For 35nm；The thickness of first ag alloy layer 30 is 15nm；The thickness of first barrier layer 40 is 5nm；Second high refractive index oxide
The thickness of layer 50 is 70nm；The thickness of second ag alloy layer 60 is 15nm；The thickness of second barrier layer 70 is 5nm；3rd high folding
The thickness for penetrating rate oxide skin(coating) 80 is 35nm.
Embodiment 4：
The preparation method of the flexible intelligent spectral selection thermal isolation film 100 of the present invention, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
Wherein, light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor on the base material
The thickness and color of institute's deposition film；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film
Degree；Flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is niobium pentaoxide；First ag alloy layer
30 material is yellow gold；The material of first barrier layer 40 is nichrome；The material of second high refractive index oxide layer 50
For titanium dioxide；The material of second ag alloy layer 60 is silver palladium alloy；The material of second barrier layer 70 is stainless steel；3rd high folding
The material for penetrating rate oxide skin(coating) 80 is tin indium oxide；The thickness of flexible substrate layer 10 is 50 μm；First high refractive index oxide layer
20 thickness is 30nm；The thickness of first ag alloy layer 30 is 10nm；The thickness of first barrier layer 40 is 3nm；Second high refraction
The thickness of rate oxide skin(coating) 50 is 50nm；The thickness of second ag alloy layer 60 is 6nm；The thickness of second barrier layer 70 is 2nm；The
The thickness of three high refractive index oxide layers 80 is 20nm.
Embodiment 5：
The preparation method of the flexible intelligent spectral selection thermal isolation film 100 of the present invention, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
Wherein, light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor on the base material
The thickness and color of institute's deposition film；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film
Degree；Flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is niobium pentaoxide；First ag alloy layer
30 material is yellow gold；The material of first barrier layer 40 is nichrome；The material of second high refractive index oxide layer 50
For titanium dioxide；The material of second ag alloy layer 60 is silver palladium alloy；The material of second barrier layer 70 is stainless steel；3rd high folding
The material for penetrating rate oxide skin(coating) 80 is tin indium oxide；The thickness of flexible substrate layer 10 is 60 μm；First high refractive index oxide layer
20 thickness is 32nm；The thickness of first ag alloy layer 30 is 12nm；The thickness of first barrier layer 40 is 4nm；Second high refraction
The thickness of rate oxide skin(coating) 50 is 55nm；The thickness of second ag alloy layer 60 is 8nm；The thickness of second barrier layer 70 is 3nm；The
The thickness of three high refractive index oxide layers 80 is 25nm.
Embodiment 6：
The preparation method of the flexible intelligent spectral selection thermal isolation film 100 of the present invention, includes the following steps：
Flexible parent metal is provided and the roll-to-roll magnetron sputtering with the twin column target structure of more target area medium frequency magnetron sputterings is rolled up
Around coating machine, roll-to-roll magnetic-control sputtering coiling film coating machine includes cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexibility
The another side of base material the first high refractive index oxide of successive sedimentation layer 20, the first ag alloy layer 30, the first barrier layer 40, successively
Two high refractive index oxide layers 50, the second ag alloy layer 60, the second barrier layer 70 and the 3rd high refractive index oxide layer 80 are formed
Flexible intelligent spectral selection thermal isolation film 100.
Wherein, light transmittance, reflectivity and the chromatography of film are detected by online optical measuring system to monitor on the base material
The thickness and color of institute's deposition film；The power of power supply, which is connected, by adjusting each pair twin target controls the thickness of every layer film
Degree；Flexible substrate layer 10 is pet layer；The material of first high refractive index oxide layer 20 is niobium pentaoxide；First ag alloy layer
30 material is yellow gold；The material of first barrier layer 40 is nichrome；The material of second high refractive index oxide layer 50
For titanium dioxide；The material of second ag alloy layer 60 is silver palladium alloy；The material of second barrier layer 70 is stainless steel；3rd high folding
The material for penetrating rate oxide skin(coating) 80 is tin indium oxide；The thickness of flexible substrate layer 10 is 70 μm；First high refractive index oxide layer
20 thickness is 35nm；The thickness of first ag alloy layer 30 is 15nm；The thickness of first barrier layer 40 is 5nm；Second high refraction
The thickness of rate oxide skin(coating) 50 is 60nm；The thickness of second ag alloy layer 60 is 10nm；The thickness of second barrier layer 70 is 5nm；
The thickness of 3rd high refractive index oxide layer 80 is 30nm.
Comparative example 1：
A kind of thermal isolation film passes through the more target area magnetron sputtering techniques of application successive sedimentation indium oxide successively on flexible parent metal PET
Tin high refractive index oxide layer, nichrome barrier layer, titanium dioxide high refractive index oxide layer, yellow gold and titanium barrier
Layer.
Wherein, the thickness of pet layer is 56 μm；The thickness of tin indium oxide high refractive index oxide layer is 27nm；Nichrome
The thickness of barrier layer is 3nm；The thickness of titanium dioxide high refractive index oxide layer is 55nm；The thickness of yellow gold is 10nm；
The thickness of titanium barrier layer is 3nm.
Comparative example 2：
A kind of thermal isolation film is sequentially coated with tin indium oxide high refractive index oxide by paint-on technique on flexible parent metal PET
Layer, nichrome barrier layer, titanium dioxide high refractive index oxide layer, yellow gold and titanium barrier layer.
Wherein, the thickness of pet layer is 56 μm；The thickness of tin indium oxide high refractive index oxide layer is 27nm；Nichrome
The thickness of barrier layer is 3nm；The thickness of titanium dioxide high refractive index oxide layer is 55nm；The thickness of yellow gold is 10nm；
The thickness of titanium barrier layer is 3nm.
The present invention uses the thermal isolation film obtained by Examples 1 to 6 and the thermal isolation film obtained by comparative example 1, comparative example 2
Rubber alcohol abrasion wear test machine tests its wear-resisting property, its ultraviolet light is tested using model LH1013 optical transmittance testers
Transmitance, infrared light transmission and visible light transmittance, as shown in table 1：
Table 1
| Project | Hardness | Wearability | Ultraviolet ray transmissivity | Visible light transmittance | Infrared light transmittance |
| Comparative example 1 | 2H | P grades | 18% | 72% | 28% |
| Comparative example 2 | 2H | P grades | 23% | 70% | 25% |
| Embodiment 1 | 3H | T grades | 14% | 80% | 22% |
| Embodiment 2 | 3H | T grades | 10% | 78% | 20% |
| Embodiment 3 | 3H | T grades | 12% | 75% | 24% |
| Embodiment 4 | 3H | T grades | 13% | 75% | 21% |
| Embodiment 5 | 3H | T grades | 9% | 82% | 22% |
| Embodiment 6 | 3H | T grades | 10% | 77% | 20% |
By comparing above, compared with the thermal isolation film of comparative example, thermal isolation film of the invention in ultraviolet ray transmissivity and
Visible light transmittance, infrared light transmittance will be far superior to existing thermal isolation film in the market.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
Cannot the limitation to the scope of the claims of the present invention therefore be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the guarantor of the present invention
Protect scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of flexible intelligent spectral selection thermal isolation film, which is characterized in that including set from inside to outside flexible substrate layer,
One high refractive index oxide layer, the first ag alloy layer, the first barrier layer, the second high refractive index oxide layer, the second ag alloy layer,
Second barrier layer and the 3rd high refractive index oxide layer.
2. flexible intelligent spectral selection thermal isolation film according to claim 1, which is characterized in that the flexible substrate layer
Thickness is 16 μm~100 μm；The thickness of the first high refractive index oxide layer is 20nm~35nm；The thickness of first ag alloy layer
It spends for 6nm~15nm；The thickness of first barrier layer is 1nm~5nm；The thickness of the second high refractive index oxide layer is
40nm~70nm；The thickness of second ag alloy layer is 6nm~15nm；The thickness of second barrier layer is 1nm~5nm；
The thickness of the 3rd high refractive index oxide layer is 20nm~35nm.
3. flexible intelligent spectral selection thermal isolation film according to claim 1, which is characterized in that the flexible substrate layer is
Pet layer；The material of the first high refractive index oxide layer for titanium dioxide, niobium pentaoxide, one kind in tin indium oxide or
Several combinations of person；The material of first ag alloy layer is silver-platinum alloy, one kind in silver palladium alloy, yellow gold；Described
The material of one barrier layer is nichrome, one kind in titanium, stainless steel；The material of the second high refractive index oxide layer is two
One or several kinds of combinations in titanium oxide, niobium pentaoxide, tin indium oxide；The material of second ag alloy layer is that silver-colored platinum closes
One kind in gold, silver palldium alloy, yellow gold；The material of second barrier layer is one in nichrome, titanium, stainless steel
Kind；The material of the 3rd high refractive index oxide layer is titanium dioxide, a kind of or several in niobium pentaoxide, tin indium oxide
Kind combination.
4. a kind of preparation method of flexible intelligent spectral selection thermal isolation film, which is characterized in that include the following steps：
Flexible parent metal is provided and the roll-to-roll magnetic-control sputtering coiling with the twin column target structure of more target area medium frequency magnetron sputterings plates
Film machine, the roll-to-roll magnetic-control sputtering coiling film coating machine include cold drum；
Flexible parent metal is attached to Leng Gushang on one side, using the twin column target structure of more target area medium frequency magnetron sputterings in flexible parent metal
Another side the first high refractive index oxide of successive sedimentation layer, the first ag alloy layer, the first barrier layer, the second high index of refraction successively
Oxide skin(coating), the second ag alloy layer, the second barrier layer and the 3rd high refractive index oxide layer form flexible intelligent spectral selection
Thermal isolation film.
5. the preparation method of flexible intelligent spectral selection thermal isolation film according to claim 4, which is characterized in that described cold
Coolant is disposed in drum, the temperature of the coolant is controlled in -20 DEG C~0 DEG C.
6. the preparation method of flexible intelligent spectral selection thermal isolation film according to claim 4, which is characterized in that the volume
Absorption coil pipe is disposed with to the area that unreels of volume magnetic-control sputtering coiling film coating machine, the temperature of the absorption coil pipe is controlled at -150 DEG C
In~-120 DEG C.
7. the preparation method of flexible intelligent spectral selection thermal isolation film according to claim 4, which is characterized in that described more
Medium frequency magnetron sputtering twin column target structure in target area is disposed with the twin Style Columu Talget of a pair of of magnetron sputtering for a target area.
8. the preparation method of flexible intelligent spectral selection thermal isolation film according to claim 7, which is characterized in that each described
Isolation gas has been passed through between target area.
9. the preparation method of flexible intelligent spectral selection thermal isolation film according to claim 7, which is characterized in that described more
Magnet steel is disposed in Style Columu Talget in the twin column target structure of target area medium frequency magnetron sputtering；It is sprayed with cooling down in the Style Columu Talget
Water.
10. the preparation method of flexible intelligent spectral selection thermal isolation film according to claim 4, which is characterized in that described
Roll-to-roll magnetic-control sputtering coiling film coating machine further includes several plated film areas, and the plated film area is equipped with molecular pump and deep cooling coil pipe.
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| US5563734A (en) * | 1993-04-28 | 1996-10-08 | The Boc Group, Inc. | Durable low-emissivity solar control thin film coating |
| CN102168246A (en) * | 2011-03-29 | 2011-08-31 | 核工业西南物理研究院 | Large-area high-uniformity transparent conducting film deposited on flexible substrate and preparation method thereof |
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