CN104669712B - A kind of Ag alloys thermal isolation film and preparation method thereof - Google Patents

A kind of Ag alloys thermal isolation film and preparation method thereof Download PDF

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CN104669712B
CN104669712B CN201510108012.0A CN201510108012A CN104669712B CN 104669712 B CN104669712 B CN 104669712B CN 201510108012 A CN201510108012 A CN 201510108012A CN 104669712 B CN104669712 B CN 104669712B
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film
plated film
thermal isolation
nichrome
layer
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CN104669712A (en
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谈琦
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Qingdao Jiuyue New Material Technology Co.,Ltd.
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Sichuan Ya Li Supermembrane Science And Technology Ltd
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Abstract

The present invention relates to a kind of Ag alloys thermal isolation film and preparation method thereof.The thermal isolation film is made up of base material PET, ground floor NiCr plated films, second layer Ag alloy coatings and third layer NiCr plated film.The preparation method of the thermal isolation film is, on volume to volume flexibility magnetron sputtering coater, when base material PET is rotated with film coating roller, to plate NiCr, Ag alloy, NiCr trilamellar membrane in the another side of base material PET by the plated film area of several different targets.The Ag alloy thermal isolation films of gained of the invention have high visible light transmissivity, infrared ray obstruct height, good weatherability, the low advantage of production efficiency high cost, so as to increased the application of thermal isolation film, market scope is expanded, promotes thermal isolation film to develop to the direction of more energy efficient environmental protection.

Description

A kind of Ag alloys thermal isolation film and preparation method thereof
Technical field
The invention belongs to build and automobile adhesive film field, and in particular to a kind of Ag alloys with optical electivity permeability every Hotting mask and preparation method thereof.
Background technology
With development, the increasingly raising of living standards of the people and the proposition of " low-carbon (LC) life " idea of science and technology, to heat-insulated The performance requirement more and more higher of film, demand are also being stepped up.Thermal isolation film has been widely used in the curtain of heavy construction at present On the glass pane of wall glass and automobile.Using air-conditioning expense can be substantially reduced on the cladding glass of heavy construction, building is made Outward appearance has color attractive in appearance.Most automotive glazing all posts thermal isolation film at present, and thermal isolation film reduces ultraviolet to human body With the injury of in-car ornaments, slow down the aging of car facilities, reduce the temperature of environment inside car, improve the ring by bus of driver and crew Border, while also reducing the oil consumption of automobile, car cost is used in saving.From the point of view of development trend with regard to thermal isolation film product, with it is good every There to be high visible light transmissivity while hot property, that can realize the requirement at present has noble metal and TiO2Or ITO etc. is situated between The multilayer complex films of plasma membrane, but due to TiO2Sedimentation rate Deng deielectric-coating is very low, i.e. production efficiency very low price is very high unfavorable In popularization.For general metal film, high visible light transmissivity and high heat-proof quality are conflicting, by suitable Method and technique precious metals ag film in varying degrees be capable of achieving visible light transmissivity it is high while have preferable heat-proof quality, but There is the weather-proof sex chromosome mosaicisms such as oxidizable and sulfuration in metal Ag films.The present invention is prepared with weatherability by appropriate technique and method Good, the Ag alloy thermal isolation films that heat-proof quality is good and visible light transmissivity is higher.
The content of the invention
Present invention aims to the current market demand of thermal isolation film, there is provided a kind of with optical electivity permeability Ag alloy thermal isolation films, the thermal isolation film have high visible light transmissivity, infrared ray obstruct height, production efficiency height, low cost and other advantages, So as to greatly increase the application of thermal isolation film, expand market scope, promote the industrialization of thermal isolation film.
Invention further provides a kind of preparation method of above-mentioned Ag alloys thermal isolation film, can be obtained by the preparation method Obtain nanoscale, the Ag alloy thermal isolation films of size uniform.
For achieving the above object, technical scheme is as follows:Nichrome is plated on base material PET successively continuously (NiCr), yellow gold (AgCu) and nichrome (NiCr) trilamellar membrane.
Further, Ag alloys thermal isolation film as above, wherein, the thickness of base material PET is 13~100 μm;Ground floor is plated The thickness of film nickel-chrome alloy layer is 0.2~3nm;The thickness of second layer plated film yellow gold layer is 5~15nm;Third layer plated film nickel The thickness of chromium alloy layer is 0.2~3nm.
Further, Ag alloys thermal isolation film as above, wherein, the weight percentage of ground floor plated film nichrome For:Ni80%Cr20%;The weight percentage of second layer plated film yellow gold is:Ag (90~98) %Cu (2~10) %, it is excellent Elect Ag92.5%Cu7.5% as;The weight percentage of third layer plated film nichrome is:Ni80%Cr20%.
A kind of preparation method of Ag alloys thermal isolation film, the preparation of the thermal isolation film is using outfit magnetron sputtering intermediate frequency twin target Volume to volume magnetron sputtering coater, when base material PET rotates plated film area good by several airtight sexual isolation with film coating roller, Nichrome (NiCr), yellow gold (AgCu) and nichrome (NiCr) three layer are plated successively continuously in the another side of base material PET Film.
In plated film and reel system rotation process, what the coated surface on base material was in contact with it crosses roller and pressure roller can not phase To slip because relative slip scratches can coated surface, oxidizable at the scuffing of coated surface and sulfuration, i.e. weatherability are deteriorated; The method adopted in the present invention is that all of roller and pressure roller excessively are all equipped with self-aligning ball bearing, roller and pressure roller is all had very well Rotation flexibility, it is ensured that what base material was in contact with it cross roller and pressure roller does not have relative slip.The tension force of reel system is not Can be too big, tension force too conference is deteriorated the film layer drawing crack plated, i.e. weatherability.The tension force of reel system is by winding and unreeling Motor adjusting, the tension force of reel system be in order that base material and film coating roller laminating it is fine, in coating process, base material is received Type variable after heat is as far as possible little, therefore the tension force of reel system can not be too little, the Tensity size for winding and unreeling in the present invention Setting value is the same, and setting range is 150-220N.
Further, the preparation method of Ag alloys thermal isolation film as above, wherein, the thickness of base material PET is 13~100 μ m;The thickness of ground floor plated film nickel-chrome alloy layer is 0.2~3nm;The thickness of second layer plated film yellow gold layer is 5~15nm;The The thickness of triple-layer coating nickel-chrome alloy layer is 0.2~3nm.
Further, the preparation method of Ag alloys thermal isolation film as above, twin by medium frequency magnetron sputtering nichrome Target is coated with ground floor plated film nickel-chrome alloy layer, and the power bracket of intermediate frequency power supply is 1.5~5kw;By medium frequency magnetron sputtering silver-bearing copper Alloy twin target is coated with second layer plated film yellow gold, and the power bracket of intermediate frequency power supply is 10~30kw;Splashed by intermediate frequency magnetic control Penetrate nichrome twin target and be coated with third layer plated film nickel-chrome alloy layer, the power bracket of intermediate frequency power supply is 1.5~5kw.
Further, Ag alloys thermal isolation film as above, wherein, the weight percentage of ground floor plated film nichrome For:Ni80%Cr20%;The weight percentage of second layer plated film yellow gold is:Ag (90~98) %Cu (2~10) %, it is excellent Elect Ag92.5%Cu7.5% as;The weight percentage of third layer plated film nichrome is:Ni80%Cr20%.
Further, in order to the Ag alloy thermal isolation films of good weatherability are obtained, the depth of coating machine before plated film and in coating process Cooling system will run, vacuum chamber unreel area and each plated film area will arrange deep cooling coil pipe, it is when cryogenic system runs, deep The temperature of cooling coil be less than subzero 120 DEG C, vacuum the room in and base material release steam understand moment be solidified on deep cooling coil pipe, so First ensure that the vacuum needed for plated film, and second ensure that.
Beneficial effects of the present invention are as follows:The flatness and compactness on the surface of nichrome (NiCr) layer is all better than base material PET, in yellow gold (AgCu) layer that the surface of nichrome (NiCr) layer is coated with, can increase yellow gold (AgCu) layer fine and close Property and resistance to oxidation cure;Nichrome (NiCr) layer can play a protective role to yellow gold (AgCu) layer, increase resistance to oxidation Cure.
The present invention is obtained the silver-bearing copper film layer with alloy phase by way of doping, and remaining silverskin has higher in visible ray Transmitance, there is high reflectance infrared, that is, there is preferable optical electivity permeability;Again by being coated with nichrome (NiCr) transition zone and protective layer, and the control of technique obtains the good Ag alloys thermal isolation film of weatherability during being coated with.
When the timing of winding speed one of base material, the thickness of be coated with film layer is controlled by adjusting the power of each target Degree;As ground floor plated film and third layer plated film are all relatively thin, the too little electric discharge that can cause target material surface of power of intermediate frequency power supply is not Uniformly, the thickness of film plating layer is just uneven, and the transmitance and color of gained thermal isolation film is just uneven, so in order to ensure target table The uniformity of face electric discharge is the uniformity of be coated with film thickness on base material, and the power of intermediate frequency power supply can not be too little.
The thermal isolation film of gained of the invention has high visible light transmissivity, infrared ray obstruct height, production efficiency high cost low Advantage.
Description of the drawings
Fig. 1 is the structural representation of the Ag alloy thermal isolation films that the present invention has optical electivity permeability.
In figure, 1 is base material PET, and 2 is ground floor nichrome (NiCr), and 3 is second layer yellow gold (AgCu), and 4 is the Three layers of nichrome (NiCr).
Specific embodiment
The present invention is further detailed explanation with reference to the accompanying drawings and examples.
The heat-insulated membrane structure of Ag alloys provided by the present invention is as shown in figure 1, including base material PET 1, ground floor plated film nickel chromium triangle Alloy (NiCr) 2, second layer plated film yellow gold (AgCu) 3 and third layer plated film nichrome (NiCr) 4, each layer characteristic is such as Under:
Base material PET 1:For polyethylene terephthalate, English name:polyethylene terephthalate.It is thick Spend for 13~100 μm, with preferable heat resistance, heat resisting temperature >=120 DEG C.
Ground floor plated film nichrome (NiCr) 2:It is coated with by medium frequency magnetron sputtering nichrome twin target, power supply For intermediate frequency power supply, thicknesses of layers is coated with for 0.2~3nm.Wherein, when film layer is thicker, the surface of gained nichrome film is more smooth Densification, the structure of second layer plated film yellow gold (AgCu) being coated with the above can be finer and close, it is easier to forms flat crystal The yellow gold film plating layer of structure.But when nichrome thicknesses of layers is thicker, the visible light-transmissive of last gained thermal isolation film Rate can be relatively low.Preferably, ground floor plated film nichrome thicknesses of layers is 0.2~1.5nm.
Second layer plated film yellow gold (AgCu) 3:It is coated with by medium frequency magnetron sputtering yellow gold twin target, power supply For intermediate frequency power supply, thicknesses of layers is coated with for 5~15nm.The Main Function of Copper-cladding Aluminum Bar silver is to form the yellow gold with alloy phase Film layer, silver-copper alloy film have preferable resistance to oxidation curability.The Main Function of yellow gold (AgCu) film is to make use of Silverskin has higher transmitance to visible ray, has higher reflectivity to infrared ray.Preferably, second layer plated film yellow gold film Thickness degree is 5~12nm.
Third layer plated film nichrome (NiCr) 4:It is coated with by medium frequency magnetron sputtering nichrome twin target, power supply For intermediate frequency power supply, thicknesses of layers is coated with for 0.2~3nm.The Main Function of the tunic is protection second layer plated film yellow gold layer, Obtain the more preferable thermal isolation film of weatherability.Preferably, third layer plated film nichrome thicknesses of layers is 0.2~1.5nm.
Invention further provides the preparation method of above-mentioned Ag alloys thermal isolation film, specially:Magnetic control is reacted using intermediate frequency Sputter twin target technology base material PET 1 one side successively successive sedimentation ground floor nichrome 2, second layer yellow gold 3, Three layers of nichrome 4.
During underway frequency reaction magnetocontrol sputtering twin target plated film, in order to ensure that thicknesses of layers is uniform, in each plated film Qu Jun combines to supply using symmetrical three road of left, center, right supply and binary gas distribution technology.
Before plated film and in coating process, cryogenic system will run, will in unreel area and each plated film area of vacuum chamber Arrangement deep cooling coil pipe, when cryogenic system runs, the temperature of deep cooling coil pipe is less than subzero 120 DEG C.
During underway frequency reaction magnetocontrol sputtering twin target plated film, in order to monitor the transmissivity of deposited solar film, anti- Rate and color are penetrated, the spectrogram and chromaticity diagram of thermal isolation film are obtained using online optical monitoring equipment real-time monitoring.In order to ensure The uniformity of film is obtained, online optical monitoring device adopts multi-point monitoring, i.e., 3 are respectively evenly arranged on the direction of base material fabric width Control point.
, using many target coating machines of winding magnetron sputtering in being embodied as, specific process parameter is as shown in the following chart for the present invention:
Note:What the sputtering power in table referred to is exactly the power of intermediate frequency power supply.
Specifically winding magnetron sputtering membrane process is:Winding magnetron sputtering coater is mainly by vacuum system, winding system System, cryogenic system, intermediate frequency twin target and intermediate frequency power supply composition, wherein reel system are by unreeling and winding is constituted.In order to ensure The purity and quality of film plating layer, the background vacuum for unreeling area and plated film area will be less than 3.0x10-3Pa, by flowmeter control The sputter gas Ar of 180sccm is fed in each plated film area.When the winding speed of base material is certain, (winding speed of base material can Adjust in the range of 0~50m/min), by adjust each twin target intermediate frequency power supply power adjusting each layer of plated film Thickness.
Embodiment 1
The base material PET that thickness is 100 μm is chosen, using the volume to volume magnetron sputtering for being equipped with magnetron sputtering intermediate frequency twin target Film machine, it is when base material PET rotates plated film area good by several airtight sexual isolation with film coating roller, continuous successively in its another side Plating thickness is the nichrome (Ni80%Cr20%) of 0.2nm, thickness for 5nm yellow gold (Ag92.5%Cu7.5%) and Thickness is nichrome (Ni80%Cr20%) trilamellar membrane of 0.2nm, obtains final product Ag alloy thermal isolation films.
Using many target coating machines of winding magnetron sputtering in the present embodiment, specific process parameter is as shown in the following chart:
Embodiment 2
The base material PET that thickness is 13 μm is chosen, using the volume to volume magnetron sputtering for being equipped with magnetron sputtering intermediate frequency twin target Film machine, it is when base material PET rotates plated film area good by several airtight sexual isolation with film coating roller, continuous successively in its another side Nichrome (Ni80%Cr20%), yellow gold (Ag92.5%Cu7.5%) and thickness that thickness be 15nm of the plating thickness for 3nm Nichrome (Ni80%Cr20%) trilamellar membrane for 3nm is spent, Ag alloy thermal isolation films are obtained final product.
Using many target coating machines of winding magnetron sputtering in the present embodiment, specific process parameter is as shown in the following chart:
Embodiment 3
The base material PET that thickness is 80 μm is chosen, using the volume to volume magnetron sputtering for being equipped with magnetron sputtering intermediate frequency twin target Film machine, it is when base material PET rotates plated film area good by several airtight sexual isolation with film coating roller, continuous successively in its another side Nichrome (Ni80%Cr20%), yellow gold (Ag92.5%Cu7.5%) and thickness that thickness be 8nm of the plating thickness for 1nm Nichrome (Ni80%Cr20%) trilamellar membrane for 1nm is spent, Ag alloy thermal isolation films are obtained final product.
Using many target coating machines of winding magnetron sputtering in the present embodiment, specific process parameter is as shown in the following chart:
Embodiment 4
The base material PET that thickness is 50 μm is chosen, using the volume to volume magnetron sputtering for being equipped with magnetron sputtering intermediate frequency twin target Film machine, it is when base material PET rotates plated film area good by several airtight sexual isolation with film coating roller, continuous successively in its another side Plating thickness is the nichrome (Ni80%Cr20%) of 1.5nm, thickness for 12nm yellow gold (Ag92.5%Cu7.5%) and Thickness is nichrome (Ni80%Cr20%) trilamellar membrane of 1.5nm, obtains final product Ag alloy thermal isolation films.
Using many target coating machines of winding magnetron sputtering in the present embodiment, specific process parameter is as shown in the following chart:
From above-described embodiment 1~4 as can be seen that the visible light transmissivity energy of the Ag alloy thermal isolation films provided by the present invention Enough control 20~75%, particularly when the structure of Ag alloy thermal isolation films be NiCr (0.2~1.5nm)/AgCu (5~12nm)/ During NiCr (0.2~1.5nm), its visible light transmissivity can be controlled 50~75%, and the infrared light transmission to the structure It is very low, less than 10%, have the advantages that visible light transmissivity is high, infrared ray intercept it is high, with extraordinary application prospect and Market prospects.
One of ordinary skill in the art will be appreciated that embodiment described here is to aid in reader and understands this Bright principle, it should be understood that protection scope of the present invention is not limited to such especially statement and embodiment.This area It is each that those of ordinary skill can make various other without departing from essence of the invention according to these technologies enlightenment disclosed by the invention Plant concrete deformation and combine, these deformations and combination are still within the scope of the present invention.

Claims (4)

1. a kind of Ag alloys thermal isolation film, it is characterised in that:Continuously plate nichrome (NiCr), silver-bearing copper on base material PET successively to close Golden (AgCu) and nichrome (NiCr) trilamellar membrane;The weight percentage of ground floor plated film nichrome is:Ni80% Cr20%, its thickness are 0.2~1.5nm;The weight percentage of second layer plated film yellow gold is:Ag92.5%Cu7.5%, Its thickness is 5~12nm;The weight percentage of third layer plated film nichrome is:Ni80%Cr20%, its thickness be 0.2~ 1.5nm。
2. the preparation method of Ag alloys thermal isolation film described in claim 1, it is characterised in that:Using being equipped with, magnetron sputtering intermediate frequency is twin The volume to volume magnetron sputtering coater of target, treats that base material PET is rotated by the good plated film area of several airtight sexual isolation with film coating roller When, nichrome (NiCr), yellow gold (AgCu) and nichrome (NiCr) three are continuously plated successively in the another side of base material PET Tunic;The weight percentage of ground floor plated film nichrome is:Ni80%Cr20%, its thickness are 0.2~1.5nm;Second Layer plated film yellow gold weight percentage be:Ag92.5%Cu7.5%, its thickness are 5~12nm;Third layer plated film nickel chromium triangle The weight percentage of alloy is:Ni80%Cr20%, its thickness are 0.2~1.5nm.
3. the preparation method of Ag alloys thermal isolation film as claimed in claim 2, it is characterised in that:By medium frequency magnetron sputtering nickel chromium triangle Alloy twin target is coated with ground floor plated film nickel-chrome alloy layer, and the power bracket of intermediate frequency power supply is 1.5~5kw;By intermediate frequency magnetic control Sputtering yellow gold twin target is coated with second layer plated film yellow gold, and the power bracket of intermediate frequency power supply is 10~30kw;By in Frequency magnetron sputtering nichrome twin target is coated with third layer plated film nickel-chrome alloy layer, and the power bracket of intermediate frequency power supply is 1.5~ 5kw。
4. the preparation method of Ag alloys thermal isolation film as claimed in claim 2 or claim 3, it is characterised in that:Before plated film and plated film mistake The cryogenic system of coating machine is run in journey, vacuum chamber unreel area and each plated film area will arrange deep cooling coil pipe, deep cooling During system operation, the temperature of deep cooling coil pipe is less than subzero 120 DEG C.
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