CN108054196B - 半导体功率器件的终端结构及其制作方法 - Google Patents
半导体功率器件的终端结构及其制作方法 Download PDFInfo
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- CN108054196B CN108054196B CN201711299152.6A CN201711299152A CN108054196B CN 108054196 B CN108054196 B CN 108054196B CN 201711299152 A CN201711299152 A CN 201711299152A CN 108054196 B CN108054196 B CN 108054196B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000002347 injection Methods 0.000 claims abstract description 162
- 239000007924 injection Substances 0.000 claims abstract description 162
- 238000000407 epitaxy Methods 0.000 claims abstract description 114
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000000149 penetrating effect Effects 0.000 claims abstract description 12
- 238000002513 implantation Methods 0.000 claims description 87
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 31
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 31
- 229920005591 polysilicon Polymers 0.000 claims description 15
- 239000007943 implant Substances 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 9
- 230000003071 parasitic effect Effects 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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CN201711299152.6A CN108054196B (zh) | 2017-12-08 | 2017-12-08 | 半导体功率器件的终端结构及其制作方法 |
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CN201711299152.6A CN108054196B (zh) | 2017-12-08 | 2017-12-08 | 半导体功率器件的终端结构及其制作方法 |
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CN108054196A CN108054196A (zh) | 2018-05-18 |
CN108054196B true CN108054196B (zh) | 2020-09-04 |
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CN201711299152.6A Expired - Fee Related CN108054196B (zh) | 2017-12-08 | 2017-12-08 | 半导体功率器件的终端结构及其制作方法 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1011146B1 (en) * | 1998-12-09 | 2006-03-08 | STMicroelectronics S.r.l. | Method of manufacturing an integrated edge structure for high voltage semiconductor devices |
CN104183626A (zh) * | 2014-08-20 | 2014-12-03 | 佛山芯光半导体有限公司 | 超结半导体器件的终端结构及其制造方法 |
EP3012870A1 (en) * | 2014-10-20 | 2016-04-27 | ABB Technology AG | Edge termination for high voltage semiconductor devices |
CN105814690A (zh) * | 2013-12-16 | 2016-07-27 | Abb 技术有限公司 | 用于半导体器件的边缘终止和对应的制造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120273916A1 (en) * | 2011-04-27 | 2012-11-01 | Yedinak Joseph A | Superjunction Structures for Power Devices and Methods of Manufacture |
TW201438232A (zh) * | 2013-03-26 | 2014-10-01 | Anpec Electronics Corp | 半導體功率元件及其製作方法 |
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2017
- 2017-12-08 CN CN201711299152.6A patent/CN108054196B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1011146B1 (en) * | 1998-12-09 | 2006-03-08 | STMicroelectronics S.r.l. | Method of manufacturing an integrated edge structure for high voltage semiconductor devices |
CN105814690A (zh) * | 2013-12-16 | 2016-07-27 | Abb 技术有限公司 | 用于半导体器件的边缘终止和对应的制造方法 |
CN104183626A (zh) * | 2014-08-20 | 2014-12-03 | 佛山芯光半导体有限公司 | 超结半导体器件的终端结构及其制造方法 |
EP3012870A1 (en) * | 2014-10-20 | 2016-04-27 | ABB Technology AG | Edge termination for high voltage semiconductor devices |
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Effective date of registration: 20200806 Address after: 210000 Kechuang building, Futian Road, Zhetang street, Lishui Economic Development Zone, Nanjing City, Jiangsu Province Applicant after: Nanjing Lishui hi tech Venture Capital Management Co.,Ltd. Address before: 518000 Guangdong city of Shenzhen province Baoan District Fuyong Street Peace community Junfeng Industrial Zone A3 building the first floor Applicant before: SHENZHEN JINGTE SMART MANUFACTURING TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210114 Address after: 211299 science and technology innovation center, No.5 Shiqiu Avenue, Shiqiu street, Lishui District, Nanjing City, Jiangsu Province Patentee after: Jiangsu Qinglian Optoelectronic Technology Research Institute Co., Ltd Address before: 210000 Kechuang building, Futian Road, Zhetang street, Lishui Economic Development Zone, Nanjing, Jiangsu Province Patentee before: Nanjing Lishui hi tech Venture Capital Management Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20200904 Termination date: 20201208 |