CN107949810B - 光刻设备中的图形化装置冷却系统 - Google Patents

光刻设备中的图形化装置冷却系统 Download PDF

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Publication number
CN107949810B
CN107949810B CN201680041170.1A CN201680041170A CN107949810B CN 107949810 B CN107949810 B CN 107949810B CN 201680041170 A CN201680041170 A CN 201680041170A CN 107949810 B CN107949810 B CN 107949810B
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China
Prior art keywords
patterning device
temperature
sensor
projection system
lithographic apparatus
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CN201680041170.1A
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English (en)
Chinese (zh)
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CN107949810A (zh
Inventor
L·J·A·范博克霍温
C·C·瓦尔德
M·L·范德加格
J·G·C·库南
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ASML Holding NV
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ASML Holding NV
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201680041170.1A 2015-07-14 2016-06-17 光刻设备中的图形化装置冷却系统 Active CN107949810B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562192347P 2015-07-14 2015-07-14
US62/192,347 2015-07-14
PCT/EP2016/063984 WO2017008996A1 (en) 2015-07-14 2016-06-17 Patterning device cooling systems in a lithographic apparatus

Publications (2)

Publication Number Publication Date
CN107949810A CN107949810A (zh) 2018-04-20
CN107949810B true CN107949810B (zh) 2020-12-11

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CN201680041170.1A Active CN107949810B (zh) 2015-07-14 2016-06-17 光刻设备中的图形化装置冷却系统

Country Status (6)

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US (1) US10281830B2 (enExample)
JP (1) JP6572378B2 (enExample)
CN (1) CN107949810B (enExample)
NL (1) NL2016984A (enExample)
TW (1) TWI620035B (enExample)
WO (1) WO2017008996A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107219729B (zh) * 2017-07-17 2018-10-26 深圳市华星光电技术有限公司 曝光机及遮光叶片
WO2020064240A1 (en) * 2018-09-27 2020-04-02 Asml Netherlands B.V. A level sensor and a lithographic apparatus incorporating a level sensor
JP7227834B2 (ja) * 2019-04-16 2023-02-22 キヤノン株式会社 基板処理装置及び物品の製造方法
US12169369B2 (en) * 2021-08-30 2024-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. Storage for extreme ultraviolet light lithography

Citations (6)

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JP2002359178A (ja) * 2001-05-31 2002-12-13 Canon Inc 投影露光方法および投影露光装置
CN101216667A (zh) * 2007-12-28 2008-07-09 上海宏力半导体制造有限公司 一种可提高空间成像套刻检验精准度的光刻方法
CN101989037A (zh) * 2009-08-07 2011-03-23 中芯国际集成电路制造(上海)有限公司 降低光罩上沉淀物雾状缺陷的方法
CN102243441A (zh) * 2010-05-12 2011-11-16 上海微电子装备有限公司 温度控制装置、应用其的投影曝光装置及温度控制方法
WO2014067802A1 (en) * 2012-10-31 2014-05-08 Asml Holding N.V. Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
CN104611669A (zh) * 2015-03-04 2015-05-13 信利（惠州）智能显示有限公司 一种掩膜板的制作方法

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US5581324A (en) * 1993-06-10 1996-12-03 Nikon Corporation Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors
JPH06349700A (ja) 1993-06-10 1994-12-22 Nikon Corp 投影露光装置
JP3316983B2 (ja) 1993-11-26 2002-08-19 株式会社ニコン 投影露光方法及び装置、並びに素子製造方法
JP3622867B2 (ja) 1995-04-13 2005-02-23 株式会社ニコン 露光装置及び露光方法
JPH0992613A (ja) * 1995-09-21 1997-04-04 Nikon Corp 温調装置及び走査型露光装置
JPH10247617A (ja) * 1997-03-03 1998-09-14 Nikon Corp 投影露光方法及び投影露光装置
JPH10289874A (ja) 1997-04-16 1998-10-27 Nikon Corp 露光装置
JP2002198277A (ja) 2000-12-22 2002-07-12 Canon Inc 補正装置、露光装置、デバイス製造方法及びデバイス
JP2003222991A (ja) * 2002-01-29 2003-08-08 Canon Inc レチクル及びレチクル製造装置及びレチクル検査装置及びレチクル保管容器及び露光装置
KR100707307B1 (ko) * 2005-05-10 2007-04-12 삼성전자주식회사 레티클의 열적 변형을 방지할 수 있는 노광 설비 및 노광방법
US7935546B2 (en) * 2008-02-06 2011-05-03 International Business Machines Corporation Method and apparatus for measurement and control of photomask to substrate alignment
JP2013502063A (ja) 2009-08-11 2013-01-17 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング マスクの大きさを一定に維持するための方法および装置
NL2007615A (en) * 2010-11-30 2012-05-31 Asml Netherlands Bv Method of operating a patterning device and lithographic apparatus.
WO2014005780A1 (en) 2012-07-06 2014-01-09 Asml Netherlands B.V. A lithographic apparatus
KR101963012B1 (ko) * 2014-01-16 2019-03-27 가부시키가이샤 니콘 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법

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* Cited by examiner, † Cited by third party
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JP2002359178A (ja) * 2001-05-31 2002-12-13 Canon Inc 投影露光方法および投影露光装置
CN101216667A (zh) * 2007-12-28 2008-07-09 上海宏力半导体制造有限公司 一种可提高空间成像套刻检验精准度的光刻方法
CN101989037A (zh) * 2009-08-07 2011-03-23 中芯国际集成电路制造(上海)有限公司 降低光罩上沉淀物雾状缺陷的方法
CN102243441A (zh) * 2010-05-12 2011-11-16 上海微电子装备有限公司 温度控制装置、应用其的投影曝光装置及温度控制方法
WO2014067802A1 (en) * 2012-10-31 2014-05-08 Asml Holding N.V. Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
CN104611669A (zh) * 2015-03-04 2015-05-13 信利（惠州）智能显示有限公司 一种掩膜板的制作方法

Also Published As

Publication number Publication date
TWI620035B (zh) 2018-04-01
WO2017008996A1 (en) 2017-01-19
TW201712436A (zh) 2017-04-01
JP6572378B2 (ja) 2019-09-11
US20180196360A1 (en) 2018-07-12
CN107949810A (zh) 2018-04-20
US10281830B2 (en) 2019-05-07
JP2018520387A (ja) 2018-07-26
NL2016984A (en) 2017-01-19

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