CN107931846B - Laser deburring processing equipment - Google Patents

Laser deburring processing equipment Download PDF

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Publication number
CN107931846B
CN107931846B CN201711402331.8A CN201711402331A CN107931846B CN 107931846 B CN107931846 B CN 107931846B CN 201711402331 A CN201711402331 A CN 201711402331A CN 107931846 B CN107931846 B CN 107931846B
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China
Prior art keywords
laser
mirror
parabolic
truncated cone
circular truncated
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CN201711402331.8A
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Chinese (zh)
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CN107931846A (en
Inventor
王强
朱兴华
陆洪飞
朱刚贤
刘卫兵
陈添禹
刘凯
王明娣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Huaya Intelligent Technology Co ltd
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Suzhou Huaya Intelligent Technology Co ltd
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Publication of CN107931846A publication Critical patent/CN107931846A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots

Abstract

The invention discloses laser deburring processing equipment which comprises a mechanical arm, a laser and an optical head device, wherein the mechanical arm is arranged on a cross beam and can be adjusted at the position of a free end, the laser is arranged on the free end of the mechanical arm, the optical head device is arranged on the output end of the laser, the optical head device comprises a laser sleeve arranged at the output end of the laser, a focusing mirror arranged on a light-emitting path of the laser, a circular truncated cone reflector and a parabolic reflector which are coaxially arranged with the focusing mirror, the circular truncated cone mirror surface of the circular truncated cone reflector is positioned on the light-emitting path of the laser and is opposite to the parabolic mirror surface of the parabolic reflector, and the circular truncated cone mirror surface and the parabolic mirror surface are both positioned on. The processing device is simple in structure, small burrs formed after the large burrs are removed by laser can be removed at one time while the small burrs are removed by laser scanning, and the efficiency of laser deburring is greatly improved.

Description

Laser deburring processing equipment
Technical Field
The invention relates to laser deburring processing equipment.
Background
Burrs are irregular metal parts such as various sharp corners, burrs and the like at the transition position of the surface of a workpiece in the metal processing process. With the progress of society and the gradual improvement of industrialization and automation level, the requirements of customers on the manufacturing precision and quality of products are higher and higher, and the service conditions of the products are also more and more rigorous. The existence of burrs not only affects the progress of parts, but also affects the reliability of the whole machine, and further causes the fault of mechanical products, so that the deburring becomes a key process in the part processing process.
In order to solve the problem of burrs, various deburring methods are developed, and the deburring process is developed from early manual and mechanical operation to automation. The prior common deburring methods include a roller grinding method, a high-temperature deburring method, a mechanical brush deburring method, an extrusion honing deburring method, a magnetic grinding method, a water jet deburring method and the like. In recent years, with the rapid development of laser technology, and due to the advantages of non-contact, green and environmental protection of laser processing, laser deburring is gradually and widely applied.
The basic principle of the laser deburring technology is that by utilizing the characteristics of high intensity, large energy density, strong focusing property and good directivity of laser, a laser beam emitted from a laser passes through an optical device, so that the laser beam is focused into light spots with different diameters, and burrs on parts are scanned, so that the burrs are melted and vaporized, and finally the burrs are removed.
However, the existing laser deburring technology has the following defects: aiming at the large burr, after the large burr is removed by adopting laser, the small burr is always remained on the workpiece, and secondary deburring treatment is needed to be carried out, so that the treatment efficiency is greatly reduced.
Disclosure of Invention
The invention aims to provide a laser deburring processing device which is used for improving the efficiency of laser deburring processing.
In order to achieve the purpose, the invention adopts the technical scheme that: a laser deburring processing device comprises a base, a workbench which is arranged on the base in a position adjustable mode in the horizontal direction and used for bearing a workpiece to be processed, a cross beam which is erected on the base and located above the workbench, a mechanical arm which is arranged on the cross beam and is adjustable in free end position, a laser which is arranged on the free end of the mechanical arm, and an optical head device which is arranged on the output end of the laser, wherein the optical head device comprises a laser sleeve which is arranged on the output end of the laser, a focusing mirror which is arranged on the light-emitting path of the laser, a circular table reflecting mirror and a parabolic reflecting mirror which are coaxially arranged with the focusing mirror, the circular table mirror surface of the circular table reflecting mirror is located on the light-emitting path of the laser and is opposite to the parabolic mirror surface of the parabolic reflecting mirror, and the circular truncated cone mirror surface and the parabolic mirror surface are both positioned on the circumferential outer side of the focusing mirror.
Preferably, a part of the laser beams output by the laser is collected by the focusing mirror to form a first laser beam, and the rest of the laser beams are reflected by the circular truncated cone reflector and then reflected by the parabolic reflector to form an annular second laser beam projected on the circumferential outer side of the first laser beam.
Preferably, the circular truncated cone reflector is provided with a through hole which penetrates along the axial direction, and the focusing mirror is arranged in the through hole; the parabolic reflector is provided with a hollow cavity which penetrates through the parabolic reflector along the axial direction, and the circular truncated cone reflector is positioned in the hollow cavity.
Preferably, the optical head device further comprises a circular truncated cone base for mounting the circular truncated cone reflector and a parabolic mirror base for mounting the parabolic reflector, and the circular truncated cone base and the parabolic mirror base are coaxially arranged and fixed with each other.
Furthermore, the parabolic mirror base and the circular truncated cone mirror base are detachably and fixedly connected through a plurality of pin shafts extending along the radial direction.
Preferably, the laser sleeve comprises a collimating mirror connecting piece connected with the output end of the laser and a hollow conical protective sleeve connected with the collimating mirror in a matched mode, a laser projection space for laser beams output by the laser to pass through is formed between the collimating mirror connecting piece and the conical protective sleeve, and the focusing mirror, the circular truncated cone reflector and the parabolic reflector are all arranged in the laser projection space.
Further, the collimating mirror connecting piece has the spliced pole of cavity tube-shape and is located the connection round platform of spliced pole below, the top of toper protective sheath have with the spacing round platform of connection can be dismantled to the round platform, connect the round platform with form between the spacing round platform and be used for the installation accommodation space of focusing mirror, round platform speculum and parabolic speculum.
Preferably, the robot arm comprises a base mounted on the cross beam, a first bogie with an upper portion connected to the base in a manner of rotating around a vertical axis, a second bogie connected to a lower end portion of the first bogie in a manner of rotating around a horizontal axis, and a mounting seat connected to a lower end portion of the second bogie, and the laser is mounted on the mounting seat.
Furthermore, the second bogie comprises a plurality of supports which are connected end to end in sequence, and the axial lead of the relative switching between two adjacent supports is parallel to the axial lead in the horizontal direction.
Furthermore, the crossbeam extends along the X direction, still be equipped with between the base with the crossbeam and be used for driving the base is along the translation actuating mechanism of X direction translation, the workstation can be along Y to set up with the translation on the frame.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages: the laser deburring processing equipment has a simple structure, can enable a laser beam emitted by a laser to be projected to a workpiece to be processed at a set incident angle for deburring processing, and utilizes an additional optical head device to enable the laser beam emitted by the laser to be split into two laser beams with different powers, so that light spots with different powers and diameters can be projected to the workpiece to be processed to respectively remove burrs with different sizes, and simultaneously, small burrs formed after the large burrs are removed by laser can be removed at one time while the small burrs are removed by laser scanning, thereby greatly improving the efficiency of laser deburring.
Drawings
FIG. 1 is a schematic view of the overall structure of the laser deburring processing apparatus of the present invention;
FIG. 2 is a schematic working diagram of a mechanical arm in the laser deburring processing equipment of the present invention;
FIG. 3 is a schematic structural diagram of a mechanical arm in the laser deburring processing equipment of the present invention;
fig. 4 is a front view of the overall structure of an optical head apparatus employed in the present invention;
FIG. 5 is a schematic sectional view taken along line A-A of FIG. 4 and showing a laser beam transmission path;
FIG. 6 is a schematic diagram of laser beam transmission in an optical head device according to the present invention;
FIG. 7 is an exploded view of a laser cover of the optical head device used in the present invention;
FIG. 8 is a schematic view showing a structure of a stage mirror in the optical head device used in the present invention;
FIG. 9 is a schematic structural view of a truncated cone base in the optical head device employed in the present invention;
fig. 10 is a schematic view of a parabolic mirror in the optical head apparatus used in the present invention;
FIG. 11 is a schematic view of a parabolic mirror mount of the optical head apparatus used in the present invention;
wherein: 1. a collimating mirror connecting piece; 1a, connecting columns; 1b, connecting the circular truncated cones; 2. a tapered protective sheath; 2a, a main body part; 2b, a limiting circular table; 2c, limiting step surfaces; 3. a focusing mirror; 4. a circular truncated cone reflector; 4a, a circular truncated cone mirror surface; 4b, through holes; 5. a parabolic reflector; 6. a circular truncated cone mirror base; 7. an objective lens holder;
8. a mechanical arm; 81. a base; 82. a first bogie; 83. a second bogie; 831. 832, a bracket; 84. a mounting seat; 9. a laser; 10. an optical head device; 11. a machine base; 12. a column; 13. a cross beam; 14. a work table; 20. and (5) processing the workpiece.
Detailed Description
The technical solution of the present invention is further explained with reference to the drawings and the specific embodiments.
The laser deburring apparatus shown in fig. 1 to 3 includes a base 11, a table 14 mounted on the base 11 to be adjustable in position in the horizontal direction and for carrying a workpiece 20 to be machined, and a cross member 13 erected on the base 11 and located above the table 14. The processing apparatus further comprises a robot arm 8 mounted on the beam 13 and having an adjustable free end position, a laser 9 mounted on the free end of the robot arm 8, and an optical head device 10 mounted on the output end of the laser 9.
Referring to fig. 1 to 3, specifically, two columns 12 are respectively disposed on the left and right sides of the machine base 11, and a cross beam 13 extends in the X direction and is erected at the upper ends of the two columns 12. The robot arm 8 includes a base 81 mounted on the cross member 13, a first bogie 82 having an upper portion connected to the base 81 so as to be rotatable about a vertical axis, a second bogie 83 connected to a lower end portion of the first bogie 82 so as to be rotatable about a horizontal axis, and a mounting base 84 connected to a lower end portion of the second bogie 83, and the laser 9 is mounted on the mounting base 84. The second bogie 83 includes a plurality of supports connected end to end in sequence, and the axis of the two adjacent supports in relative rotation is parallel to the horizontal axis of the second bogie 82 in relative rotation connection with the first bogie 82. There are two brackets 831 and 832, respectively, one end of the bracket 831 is connected to the first bogie 82 around a first horizontal axis, the other end of the bracket 831 is connected to one end of the bracket 832 around a second horizontal axis, and the other end of the bracket 832 is connected to the mounting seat 84. In this way, the robot arm 8 on which the laser 9 is mounted can adjust the length in the Z-axis direction, and can rotate in the Z-direction and in the direction around the horizontal rotation axis so that the laser beam emitted from the laser 9 is aligned at the position to be processed on the workpiece 20 to be processed at a set inclination angle.
The base 81 is arranged on the beam 13 in a manner of being capable of translating along the X direction, a translation driving mechanism for driving the base 81 to translate along the X direction is further arranged between the base 81 and the beam 13, and the workbench 14 is arranged on the machine base 11 in a manner of being capable of translating along the Y direction. Thus, the relative position between the processing position of the workpiece 20 to be processed and the laser 9 along the X direction and the Y direction is adjusted.
Referring to fig. 4 to 11, the optical head device 10 installed at the output end of the laser 9 includes a laser sleeve installed at the output end of the laser 9, a focusing mirror 3 disposed on the light emitting path of the laser 9, and a circular truncated cone reflecting mirror 4 and a parabolic reflecting mirror 5 coaxially disposed with the focusing mirror 3, wherein the circular truncated cone mirror surface of the circular truncated cone reflecting mirror 4 is located on the light emitting path of the laser 9 and is disposed opposite to the parabolic mirror surface of the parabolic reflecting mirror 5, and the circular truncated cone mirror surface and the parabolic mirror surface are both located at the circumferential outer side of the focusing mirror 3. Thus, a part of the laser beams output by the laser 9 is condensed by the focusing mirror 3 to form a first laser beam, and the other part of the laser beams is reflected by the circular table reflecting mirror 4 and then reflected by the parabolic reflecting mirror 5 to form an annular second laser beam projected on the circumferential outer side of the first laser beam.
In the present embodiment, a fiber laser is used as the laser, and the optical head device 10 has the following specific structure: referring to fig. 7 to 11, the laser sleeve includes a collimating mirror connector 1 for connecting with an output end of a laser 9 and a hollow conical protective sleeve 2 coupled with the collimating mirror connector 1, a laser projection space through which a laser beam output by the laser 9 is projected is formed between the collimating mirror connector 1 and the conical protective sleeve 2, and the focusing mirror 3, the circular truncated cone reflector 4 and the parabolic reflector 5 are all disposed in the laser projection space.
Referring to fig. 7, the collimator lens connector 1 has a hollow cylindrical connecting post 1a and a connecting circular truncated cone 1b located below the connecting post 11a, the conical protective sleeve 2 has a conical main body 2a and a limiting circular truncated cone 2b located at the top of the main body 2a, and a limiting step surface 2c is located at the joint of the limiting circular truncated cone 2b and the main body 2 a. The connecting round table 1b and the limiting round table 2b are detachably connected, and an accommodating space for installing the focusing mirror 3, the round table reflecting mirror 4 and the parabolic reflecting mirror 5 is formed between the connecting round table 1b and the limiting round table 2 b.
Referring to fig. 4 to 11, the circular truncated cone reflector 4 has a circular truncated cone mirror surface 4a having a tapered surface, and further has a through hole 4b penetrating in the axial direction, and the focusing mirror 3 is provided in the through hole 4b and is disposed coaxially with the circular truncated cone reflector 4. The parabolic reflector 5 has a parabolic mirror surface (not shown) obtained by rotationally extending a parabola as a generatrix, the parabolic reflector has a hollow cavity passing through in the axial direction, the circular truncated cone reflector 4 is located in the hollow cavity, and the circular truncated cone mirror surface 4a is arranged opposite to the parabolic mirror surface.
The optical head device 10 further comprises a circular truncated cone base 6 for mounting the circular truncated cone reflector 4 and a parabolic mirror base 7 for mounting the parabolic reflector 5, wherein the circular truncated cone base 6 and the parabolic mirror base 7 are coaxially arranged and fixed with each other. Specifically, a plurality of pin holes extending along the radial direction are formed in the circumferential direction of the parabolic mirror base 7 and the circular truncated cone mirror base 6, and the parabolic mirror base and the circular truncated cone mirror base are detachably and fixedly connected through a plurality of pin shafts extending along the radial direction. When the circular truncated cone mirror is installed, the circular truncated cone reflector 4 can be installed on the circular truncated cone mirror base 6, and the focusing mirror 3 is placed between the circular truncated cone reflector 4 and the circular truncated cone mirror base 6; the parabolic reflector 5 is arranged on the parabolic reflector seat 7, then the parabolic reflector seat 7 and the circular truncated cone reflector seat 6 are fixedly arranged along the radial direction, then the parabolic reflector seat 7 with the circular truncated cone reflector 4, the focusing mirror 3 and the parabolic reflector 5, namely the circular truncated cone reflector seat 6, is arranged on the limiting step surface 2c of the conical protective sleeve 2, and finally the collimating mirror connecting piece 1 is connected with the conical protective sleeve 2 in a matching mode, so that the optical head device is installed. When in use, the connecting column 1a of the collimation connecting piece 1 is directly connected with the output end of the laser 9.
Thus, the middle part of the parallel laser beams output by the laser 9 is directly gathered by the focusing mirror 3 to form a first laser beam with higher power, the other part of the parallel laser beams is projected onto the circular table mirror surface 41 of the circular table reflecting mirror 4, then the circular table mirror surface 41 reflects the first laser beam onto the parabolic mirror surface of the parabolic reflecting mirror 5, and then the second laser beam with lower power is formed by the reflection of the parabolic mirror surface, and the projection of the second laser beam forms a ring shape surrounding the circumferential outer side of the first laser beam on the projection focusing surface of the first laser beam.
When the laser deburring processing equipment is used for deburring processing of the workpiece 20 to be processed, the laser deburring processing equipment can be used according to the following steps:
firstly, acquiring a three-dimensional image of a workpiece 10 to be deburred, and acquiring the image through a CCD data acquisition system; and then comparing the acquired three-dimensional image with a design drawing of the workpiece 10 to be deburred, automatically acquiring all areas of the workpiece 10 to be deburred, which need to deburre burrs, acquiring the sizes of all burrs, dividing the burrs with the sizes larger than a set size range into large burrs, and dividing the burrs with the sizes smaller than the set size range into small burrs.
Then, firstly, carrying out laser scanning processing on the large burr, and then carrying out laser scanning processing on the small burr, specifically: when large burrs are processed, the first laser beam projected by the optical head device 10 is aligned to the large burrs so as to cut off the large burrs by adopting high-power laser, and the second laser beam cannot act on the burrs due to low energy; and when the large burr is removed, the residual small burr is directly subjected to the energy focused by the second laser beam, so that the small burr is melted to form a round angle to remove the burr. After all the large burrs are removed, all the small burrs can be removed.
In summary, the laser deburring device of the present invention has a simple structure, and can project the laser beam emitted by the laser 9 onto the workpiece 20 to be machined at a set incident angle for deburring, and the additional optical head device 10 is utilized to split the laser beam emitted by the laser 9 into two laser beams with different powers, so that the laser spots with different powers and diameters can be projected onto the workpiece 20 to be machined, and the burrs with different sizes can be removed by laser respectively, and simultaneously, the small burrs formed after the large burrs are removed by laser can be removed at one time while the laser is scanned and removed, thereby greatly improving the efficiency of laser deburring.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims (6)

1. The utility model provides a laser burring processing equipment, includes the frame, install position-adjustable on the horizontal direction just be used for bearing the workstation of treating the processing work piece on the frame, erect and be in on the frame and be located the crossbeam of workstation top, its characterized in that: the processing equipment further comprises an mechanical arm which is arranged on the cross beam and has an adjustable free end position, a laser which is arranged on the free end of the mechanical arm, and an optical head device which is arranged on an output end of the laser, wherein the optical head device comprises a laser sleeve which is arranged on the output end of the laser, a focusing mirror which is arranged on a light-emitting path of the laser, a round table reflecting mirror and a parabolic reflecting mirror which are coaxially arranged with the focusing mirror, a round table mirror surface of the round table reflecting mirror is positioned on the light-emitting path of the laser and is opposite to a parabolic mirror surface of the parabolic reflecting mirror, the round table mirror surface and the parabolic mirror surface are both positioned on the circumferential outer side of the focusing mirror, the round table reflecting mirror is provided with a through hole which the through hole passes along the axial direction, the focusing mirror is arranged in the through hole, and the parabolic reflecting mirror is provided with a hollow cavity, the circular truncated cone reflector is positioned in the hollow cavity, a part of laser beams output by the laser is gathered by the focusing mirror to form a first laser beam which is directly projected on a workpiece to be processed, the rest of the laser beams are firstly reflected by the circular truncated cone reflector and then reflected by the parabolic reflector to form an annular second laser beam which is projected on the circumferential outer side of the first laser beam, wherein the power of the first laser beam is greater than that of the second laser beam, the first laser beam and the second laser beam are directly projected on the workpiece to be processed and have different spot diameters, the laser sleeve comprises a collimating mirror connecting piece which is connected with the output end of the laser and a hollow conical protective sleeve which is matched with the collimating mirror, and a laser projection space through which the laser beams output by the laser are projected is formed between the collimating mirror connecting piece and the conical protective sleeve, focus mirror, round platform speculum and parabolic speculum are all located in the laser projection space, the collimating mirror connecting piece has the spliced pole of cavity tube-shape and is located the connection round platform of spliced pole below, the top of toper protective sheath have with the spacing round platform of connection can be dismantled to the round platform, connect the round platform with form between the spacing round platform and be used for the installation focus mirror, round platform speculum and parabolic speculum's accommodation space.
2. The laser burring processing apparatus of claim 1, characterized in that: the optical head device also comprises a circular truncated cone mirror seat used for mounting the circular truncated cone reflector and a parabolic mirror seat used for mounting the parabolic reflector, and the circular truncated cone mirror seat and the parabolic mirror seat are coaxially arranged and are mutually fixed.
3. The laser burring processing apparatus of claim 2, characterized in that: the parabolic mirror base is detachably and fixedly connected with the circular truncated cone mirror base through a plurality of pin shafts extending along the radial direction.
4. The laser burring processing apparatus of any one of claims 1 to 3, wherein: the mechanical arm comprises a base installed on the cross beam, a first bogie, a second bogie and a mounting seat, wherein the upper portion of the base is rotationally connected with the base around a vertical axis, the second bogie is rotationally connected with the lower end portion of the first bogie around a horizontal axis, the mounting seat is connected with the lower end portion of the second bogie, and the laser is installed on the mounting seat.
5. The laser burring processing apparatus of claim 4, wherein: the second bogie comprises a plurality of supports which are connected end to end in sequence, and the axial lead of the opposite switching between two adjacent supports is parallel to the axial lead in the horizontal direction.
6. The laser burring processing apparatus of claim 4, wherein: the crossbeam extends along X to, the base with still be equipped with between the crossbeam and be used for driving the base is along X to the translation actuating mechanism of translation, the workstation can be followed Y to setting up with translation on the frame.
CN201711402331.8A 2017-12-22 2017-12-22 Laser deburring processing equipment Active CN107931846B (en)

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EP3666449B1 (en) * 2018-12-13 2022-02-09 Pfeiffer Vacuum Gmbh Method and device for deburring a vacuum pump component

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CN204524556U (en) * 2015-02-28 2015-08-05 南京中科煜宸激光技术有限公司 A kind of laser welding system with decontamination function
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