CN206455303U - A kind of laser deburring equipment - Google Patents
A kind of laser deburring equipment Download PDFInfo
- Publication number
- CN206455303U CN206455303U CN201720174311.9U CN201720174311U CN206455303U CN 206455303 U CN206455303 U CN 206455303U CN 201720174311 U CN201720174311 U CN 201720174311U CN 206455303 U CN206455303 U CN 206455303U
- Authority
- CN
- China
- Prior art keywords
- laser
- workpiece
- processed
- workbench
- deburring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Landscapes
- Laser Beam Processing (AREA)
Abstract
The utility model discloses a kind of laser deburring equipment, burr for removing workpiece to be processed surface, the equipment includes support, it is used for the workbench for placing the workpiece to be processed on the support, conveying device for multiple workpieces to be processed to be one by one sent to feeding station, for the feeding device being transferred to the workpiece to be processed at the feeding station on the workbench, overturning and positioning device for the workpiece to be processed on the workbench overturn repositioning, the equipment also includes the laser processing device at least with laser work head, the laser work head is located at the top of the workbench to be scanned the upper lateral part of the workpiece to be processed deburring processing according to setting scanning pattern.The device structure is simple, and high in machining efficiency, cost is relatively low, disclosure satisfy that the requirement of the laser deburring processing of most of part at present.
Description
Technical field
The utility model is related to a kind of laser deburring equipment.
Background technology
In each technical process of metal works machine-shaping, various points often occur at the interface surfaces of workpiece
The irregular metal part such as angle, flash, i.e. burr.The presence of burr is a kind of manufacturing deficiency for workpiece, it is necessary to logical
The manufacturing procedure of past flash removed is removed it.
Go the process of flash removed both to require a great deal of time, will also result in the rising of work pieces process cost.To realize
Burr on efficient removal workpiece, various burr removing methods also arise at the historic moment, and common are roller polishing, high temperature unhairing
The methods such as thorn, brusher deburring, extrusion honing deburring, magnetic finishing, water injection deburring.And in recent years, with sharp
The fast development of light technology, the burr for using a laser to remove on workpiece is also of increased attention with applying.
The general principle of laser deburring technology is, using laser has intensity height, energy density is big, focusing is strong, side
The characteristics of tropism is good, the laser beam sent from laser passes through Optical devices, makes laser beam focus into the hot spot of different-diameter, right
Burr on part is scanned, so that burr fusing, gasification, finally remove burr, it has efficiency high, the scope of application
Wide the advantages of.For various sizes of burr, then can by controlling the laser beam focus hot spot of different-diameter, adjustment laser
Energy density, is finally reached the purpose of flash removed.
However, being typically each by changing when carrying out deburring processing to workpiece using laser equipment in the prior art
Become the movement locus of laser work head, so that its track along burr on workpiece carries out deburring processing, so not only make
Into the complication of handling process, processing efficiency is relatively low, and cost is relatively also higher.
The content of the invention
The purpose of this utility model is to provide laser that is a kind of simple in construction and can realizing high efficiency deburring and gone
Burr equipment.
To reach above-mentioned purpose, the technical solution adopted in the utility model is：A kind of laser deburring equipment, for removing
The burr on workpiece to be processed surface, the equipment is used to place the workpiece to be processed including support, on the support
Workbench, the conveying device for multiple workpieces to be processed to be one by one sent to feeding station, for by the feeding
Feeding device that the workpiece to be processed at station is transferred on the workbench, for treating described on the workbench
The overturning and positioning device that workpiece carries out upset repositioning is processed, the equipment also includes the laser at least with laser work head
Processing unit (plant), the laser work head be located at the workbench top with according to setting scanning pattern to the workpiece to be processed
Upper lateral part be scanned deburring processing.
Preferably, the workbench is adjustably arranged on the support along X to, Y-direction position, the support and the work
Make to be provided with X-Y to drive mechanism between platform；Vertically apart from adjustably between the laser work head and the workbench
Set.
Preferably, the workpiece to be processed has multiple placed sides being seated on the workbench, and the upset is determined
Position device causes the workpiece to be processed to be supported on the placed side on the workbench when workpiece to be processed is overturn
Change.
Further, the overturning and positioning device includes being used to capture the clamping jaw of the workpiece to be processed, for driving
State clamping jaw lifting and the overturning drive device for driving the clamping jaw to be rotated in perpendicular.
Further, the overturning and positioning device also include being used for driving the clamping jaw along X to, Y-direction, Z-direction move
X-Y-Z is to drive mechanism.
Preferably, the conveying device includes conveyer belt, front and rear biography of multiple workpieces to be processed along the conveyer belt
Direction compartment of terrain is sent to be placed on the conveyer belt, described feeding station is located at the leading section of the conveyer belt.
Further, the feeding device is described to be processed including being used for the feeding station gripping from the conveyer belt
The holder of workpiece, the Y-Z moved along Y-axis and Z axis for driving the holder are to drive mechanism.
Preferably, the laser processing device is also included in the laser for being used to send laser beam, the laser work head
Exported provided with scanning galvanometer with the laser beam for producing the laser according to setting scanning pattern.
Due to the utilization of above-mentioned technical proposal, the utility model has following advantages compared with prior art：This practicality is new
The laser deburring equipment of type, its is simple in construction, high in machining efficiency, and cost is relatively low, disclosure satisfy that current most of part
The requirement of laser deburring processing.
Brief description of the drawings
Accompanying drawing 1 is the stereogram of workpiece to be processed-turbine case in the utility model embodiment；
Accompanying drawing 2 be the embodiment of the utility model one in deburring equipment overall structure diagram；
Accompanying drawing 3 removes the structural representation after outer cover for the deburring equipment of accompanying drawing 2；
Accompanying drawing 4 for accompanying drawing 2 deburring equipment in table device structural representation；
Accompanying drawing 5 for accompanying drawing 2 deburring equipment in conveying device structural representation；
Accompanying drawing 6 for accompanying drawing 2 deburring equipment in feeding device structural representation；
Accompanying drawing 7 for accompanying drawing 2 deburring equipment in overturning and positioning device structural representation；
Wherein：10th, workpiece to be processed-turbine case；1a, 1b, 2a, 3a, treat deburring position；
1st, support；2nd, conveying device；21st, conveyer belt；
3rd, feeding device；31st, holder；32nd, Z-direction drive mechanism；33rd, Y-direction drive mechanism；
4th, table device；41st, workbench；42nd, Y-direction drive mechanism；43rd, X is to drive mechanism；44th, Y-direction motor；45、X
To motor；
5th, overturning and positioning device；51st, clamping jaw；52nd, rotating seat；53rd, electric rotating machine；54th, lifting seat；55th, X is to driving machine
Structure；56th, X is to motor；57th, Y-direction drive mechanism；58th, Y-direction motor；
6th, laser processing device；61st, laser work head.
Embodiment
The technical solution of the utility model is further elaborated with specific embodiment below in conjunction with the accompanying drawings.
Shown in Figure 1 is to need the turbine case 10 of deburring in the present embodiment, and it is formed by casting, and is had
Multiple machined surfaces, are often burr generation and the position assembled at the position that two adjacent machined surfaces connect, this is adjacent
The position that two machined surfaces connect also is formed to go at 1a, 1b, 2a, 3a in the position of flash removed, such as Fig. 1.In difference
Machined surface between laser beam flying when also just forming Laser Processing deburring of the intersection that connects scanning track, such as 1a, 1b,
Contour line at 2a, 3a is corresponding scanning pattern.
The laser deburring equipment of the present embodiment is shown referring to Fig. 2, Fig. 3, it includes support 1, is used on support 1
Place the workbench 41 of workpiece to be processed, the conveying device 2 for multiple workpieces to be processed to be one by one sent to feeding station,
For the workpiece to be processed on above-mentioned feeding station is transferred on workbench 41 feeding device 3, for workbench 41
Workpiece to be processed carry out upset repositioning overturning and positioning device 5, the equipment also include at least have laser work first 61
Laser processing device 6, laser work first 61 is located at the top of workbench 41 to treat workpiece according to the scanning pattern of setting
Upper lateral part is scanned deburring processing.
Shown in Figure 5, conveying device 2 includes conveyer belt 21, biography of multiple turbine cases 10 to be processed along conveyer belt 21
On the conveyer belt 21 for sending the arrangement of direction compartment of terrain, the direction of transfer of the conveyer belt 21 is set along the longitudinal direction herein, feeding station
Positioned at the leading section of conveyer belt 21.
Shown in Figure 6, feeding device 3 includes being used for the clamping that turbine case 10 is gripped from the feeding station on conveyer belt 21
Part 31, the Y-Z moved along Y-direction and Z-direction for driving holder 31 are to drive mechanism.Specifically, the feeding device 3 is arranged at
Expect the side of station, Y-Z drives the Z-direction drive mechanism 32 of the lifting of holder 31 and for driving folder to drive mechanism including being used for
Gripping member and the common Y-direction drive mechanism 33 moved along Y-direction of Z-direction drive mechanism 32.When turbine case 10 to be processed is by conveyer belt 21
When being sent to the feeding station of its leading section, holder 31 is first moved to the top of feeding station, then declines and clamps turbine
Rise after shell 10, holder 31 is then moved to the top of workbench 41 along Y-direction, then falls holder 31 and puts turbine case 10
To workbench 41.
Shown in Figure 4, the workbench 41 is adjustably arranged on support 1 along X to, Y-direction position, support 1 and workbench
Provided with X-Y to drive mechanism between 41, the X-Y specifically includes Y-direction drive mechanism 42, Y-direction motor 44, X to drive to drive mechanism
Motivation structure 43 and X are to motor 45.Laser work first 61 is liftably set, so as between workbench 41 vertically
Distance is adjustably set so that the certain height position that laser beam can be focused on turbine case 10 carries out laser scanning unhairing
Thorn processing.In laser work first 61 during laser scanning manufacturing is focused on to turbine case 10, by laser work first 61 along Z
The movement of the lifting of axle and workbench 41 along X to, Y-direction adjusts both relative positions, to realize that precisely focusing on scanning goes
Burr is processed.
It is shown in Figure 1, in the present embodiment, the turbine case 10 of laser deburring processing is treated, it has multiple be seated in
Placed side on workbench 41, such as its bottom surface, top surface and right flank, can directly be put turbine case 10 by one of face
Positioned on workbench 41, without using other clamping devices during laser deburring processing come to whirlpool
Hub 10 is clamped.And when needing to change placed side, then realized by overturning and positioning device 5.
Shown in Figure 7, the overturning and positioning device 5 includes being used to capture the clamping jaw 51 of workpiece to be processed, for driving folder
Pawl 51 lifts and driven the overturning drive device that clamping jaw 51 rotates in perpendicular, and the overturning and positioning device also includes being used for
Clamping jaw 51 is driven along X to, the X-Y-Z that moves of Y-direction and Z-direction to drive mechanism.Specifically, clamping jaw 51 is arranged on rotating seat 52,
Rotating seat 52 is driven to rotate by electric rotating machine 53；Electric rotating machine 53 is arranged on lifting seat 54, and the lifting seat 54 can be along Z-direction liter
Drop ground is set, and the lower section of lifting seat 54 is provided with X to drive mechanism 55, X to motor 56, Y-direction drive mechanism 57 and Y-direction motor 58
And realize X to the movement with Y-direction.So may be such that clamping jaw 51 accurately to capture turbine case 10 and reapposed after being overturn to
On workbench 41.
Laser processing device 6 also includes the laser for being used to send laser beam（Not shown in figure）, in laser work first 61
Provided with scanning galvanometer（Not shown in figure）So as to the laser beam that produces laser according to setting scanning pattern output.It is above-mentioned
Scanning pattern be laser deburring processing before be just set in laser processing device 6, laser work first 61 during processing
According to above-mentioned scanning pattern outgoing laser beam just deburring processing can be carried out to the position scanned.And setting above-mentioned scanning road
During footpath, user can be according to the 3-D graphic of turbine case 10 to be de-burred, and directly obtain needs flash removed on the turbine case 10
The contour pattern at position, then according to the contour pattern, obtains scanning road when scanning deburring respectively for laser beam
Footpath.
So, the laser process equipment of the present embodiment to turbine case 10 when carrying out laser deburring processing, according to as follows
Process is realized：
Referring to shown in Fig. 2, Fig. 3, turbine case 10 to be processed is transferred into front end by the conveyer belt 21 of conveying device 2
At feeding station, the holder 31 of feeding device 3 is moved to the top of feeding station and grips turbine case 10, holder 31 and work
Make platform 41 and carry out X to the cooperation adjustment with Y-direction position so that when holder 31 is located at the top of workbench 41, holder 31 will
Turbine case 10 is placed to workbench 41, during the initial position, and turbine case 10 is seated in work as placed side by its bottom surface
Make on platform 41.
Then, laser work first 61 to its upper lateral part on turbine case 10 to just carrying out laser deburring processing, laser work
Make first 61 and focus to set height position, then the position progress laser of lower deburring processing in need of the height and position is swept
Retouch, laser beam is scanned along all scanning patterns under the height and position；Then first 61 refocusing of laser work is to next high
Position is spent, then all scanning patterns that need to be gone corresponding to flash removed position under the height and position are scanned successively.Herein, swash
When light work first 61 first focuses to height and position corresponding with the top surface of turbine case 10, laser beam is according to position 1a's to be de-burred
Scanning pattern carries out laser scanning deburring successively；Then, laser work first 61 declines and focuses to next height and position, laser
Beam carries out laser scanning processing successively according to position 1b to be de-burred scanning pattern.In this way, realizing to the upside of turbine case 10
The laser deburring processing in portion.
Then, the turbine case 10 on the crawl workbench 41 of clamping jaw 51 of overturning and positioning device 5, and it is vertically turned over
Turn 90 ° so that it is repositioned on workbench 41 by right flank as placed side, and laser work first 61 is focused on simultaneously again
Deburring is scanned to the position 2a that need to remove flash removed.The laser deburring of the right side of turbine case 10 is handled in this way, realizing.
The turbine case 10 on workbench 41 is captured again followed by, the clamping jaw 51 of overturning and positioning device 5, then by it along vertical
Direction overturns 90 °, is passed to top surface and is repositioned at as placed side on workbench 41, laser work first 61 is focused on simultaneously again
Deburring is scanned to the position 3a that need to remove flash removed.The laser deburring of the bottom side of turbine case 10 is handled in this way, realizing.
Finally, the clamping jaw 51 of overturning and positioning device 5 captures the turbine case 10 on workbench 41 again, it is overturn 180 ° again
Behind position, discharge station is fed directly to；Or the holder 31 on feeding device 3 by workbench 41 it is machined completion and
The turbine case 10 resetted is carried on conveyer belt 21 again carries out blanking.
It the above is only the laser deburring equipment to made by the grade of turbine case 10 has the product of multiple placed sides.
During to the processing of the laser deburrings of other complex parts, then need during the entire process of laser deburring is processed by clamping machine
Structure to carry out clamping position, the sidepiece just first to laser work 61 for making its needs be handled by laser deburring to workpiece to be processed.
That is, the laser deburring method of use is specifically carried out in accordance with the following steps：
（1）Figure is pre-processed, and according to the 3-D view of workpiece to be de-burred, obtaining needs flash removed position on the workpiece
Contour pattern；
（2）Scanning pattern is obtained, according to above-mentioned contour pattern, is obtained when scanning deburring respectively for laser beam
Multiple scanning patterns；
（3）Position workpiece so that laser work head of the one of sidepiece of workpiece just to laser processing device；
（4）Laser deburring, laser work head according on workpiece with its just to sidepiece on all scanning pattern rail
Mark carries out laser scanning, realizes that the deburring to the sidepiece is handled；
（5）Reposition workpiece so that another sidepiece of workpiece is just to laser work head, repeat step（4）, until work
All scanning patterns so just realize the laser deburring processing to workpiece by laser scanning on part.
In above-mentioned steps（1）With step（2）In, for parts such as such as casting, can according to the different machined surfaces on casting it
Between the position that connects determine to go flash removed position, and obtain the contour pattern for going to flash removed position, the contour pattern that is,
What the intersection connected between different machined surfaces was formed, be scanning road when can determine that laser beam flying according to the contour pattern
Footpath.
In step（3）、（4）In, usual laser work head is arranged on the top of workpiece, and laser work head is to just right on workpiece
When all scanning patterns on its sidepiece are scanned processing, laser work head is according to scanning pattern to be scanned and laser work
The spacing size made between head is scanned processing successively.Specifically, laser work head focuses to different height position successively,
The scanning pattern for treating different height position on processing sidepiece respectively carries out laser scanning；When laser work head focuses to a certain height
When spending, laser work head carries out laser scanning to all scanning patterns under sustained height position on the sidepiece.
In step（5）In, can be by the way of upset workpiece, to cause the different sidepieces of workpiece just during repositioning workpiece
To laser work head.
To sum up, in laser deburring equipment of the present utility model, during laser deburring, the position of laser work head
Put and be not required to change substantially, and the workpiece for treat deburring is repositioned so that laser beam is to just right on workpiece
The sidepiece of laser work head carries out laser scanning manufacturing successively, is then swept during laser scanning according to the scanning pattern obtained in advance
Processing is retouched, its process velocity is fast, the laser deburring processing of the high-volume that is particularly suitable for use in part can be effectively improved sharp
The efficiency of light deburring.The device structure is also very simple, and cost is relatively low, disclosure satisfy that the laser of most of part at present
The requirement of deburring processing.
Above-described embodiment is only to illustrate technical concepts and features of the present utility model, and its object is to allow be familiar with technique
Personage can understand content of the present utility model and implement according to this, protection domain of the present utility model can not be limited with this.
All equivalent change or modifications made according to the utility model Spirit Essence, should all cover protection domain of the present utility model it
It is interior.
Claims (8)
1. a kind of laser deburring equipment, the burr for removing workpiece to be processed surface, it is characterised in that：The equipment includes
Support, on the support be used for place the workpiece to be processed workbench, for by multiple workpieces to be processed by
The conveying device of feeding station is sent to individually, for the workpiece to be processed at the feeding station to be transferred into the work
Make the feeding device on platform, the upset for the workpiece to be processed on the workbench overturn repositioning to position
Device, the equipment also includes the laser processing device at least with laser work head, and the laser work head is located at the work
Make the top of platform to be scanned the upper lateral part of the workpiece to be processed deburring processing according to setting scanning pattern.
2. laser deburring equipment according to claim 1, it is characterised in that：The workbench can to, Y-direction position along X
It is arranged on the support with adjusting, X-Y is provided between the support and the workbench to drive mechanism；The laser work head
Vertically distance is adjustably set between the workbench.
3. laser deburring equipment according to claim 1, it is characterised in that：The workpiece to be processed has multiple put
The placed side on the workbench is placed on, the overturning and positioning device causes described to be processed when the workpiece to be processed is overturn
The placed side of the workpiece support on the workbench changes.
4. laser deburring equipment according to claim 3, it is characterised in that：The overturning and positioning device includes being used to grab
Take the clamping jaw of the workpiece to be processed, for driving the clamping jaw to lift and driving what the clamping jaw rotated in perpendicular
Overturning drive device.
5. laser deburring equipment according to claim 4, it is characterised in that：The overturning and positioning device also includes being used for
The clamping jaw is driven along X to, the X-Y-Z that moves of Y-direction, Z-direction to drive mechanism.
6. laser deburring equipment according to claim 1, it is characterised in that：The conveying device includes conveyer belt, many
The individual workpiece to be processed is placed on the conveyer belt along the front and rear direction of transfer compartment of terrain of the conveyer belt, described feeding
Station is located at the leading section of the conveyer belt.
7. laser deburring equipment according to claim 6, it is characterised in that：The feeding device includes being used for from described
The feeding station grips the holder of the workpiece to be processed, for driving the holder to be transported along Y-axis and Z axis on conveyer belt
Dynamic Y-Z is to drive mechanism.
8. laser deburring equipment according to claim 1, it is characterised in that：The laser processing device also includes being used for
Send the laser of laser beam, in the laser work head provided with scanning galvanometer with the laser beam that produces the laser according to
Set scanning pattern output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720174311.9U CN206455303U (en) | 2017-02-24 | 2017-02-24 | A kind of laser deburring equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720174311.9U CN206455303U (en) | 2017-02-24 | 2017-02-24 | A kind of laser deburring equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206455303U true CN206455303U (en) | 2017-09-01 |
Family
ID=59690551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720174311.9U Withdrawn - After Issue CN206455303U (en) | 2017-02-24 | 2017-02-24 | A kind of laser deburring equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206455303U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106862775A (en) * | 2017-02-24 | 2017-06-20 | 苏州贝亚敏光电科技有限公司 | A kind of laser deburring method and apparatus |
| CN107755903A (en) * | 2017-11-17 | 2018-03-06 | 广州市艾派克智能激光科技有限公司 | A kind of compressor of air conditioner cylindrical shell end face laser facing attachment and method |
| CN107900520A (en) * | 2017-12-20 | 2018-04-13 | 广东国玉科技有限公司 | A kind of bar code dispels equipment |
| CN107931846A (en) * | 2017-12-22 | 2018-04-20 | 苏州华亚智能科技股份有限公司 | A kind of laser deburring process equipment |
| CN108247147A (en) * | 2018-03-01 | 2018-07-06 | 温州康通环保科技有限公司 | A kind of three-way pipe is responsible for automatic chamfering deburring device |
| CN113547219A (en) * | 2021-07-21 | 2021-10-26 | 深圳泰德激光科技有限公司 | Laser anode oxide film removing device |
| WO2022005491A1 (en) * | 2020-06-29 | 2022-01-06 | Ipg (Beijing) Fiber Laser Technology Co., Ltd. | Laser deburring and chamfering method and system |
| CN115194426A (en) * | 2022-08-04 | 2022-10-18 | 昆山科钢机械有限公司 | Groove milling and drilling combined machining process |
-
2017
- 2017-02-24 CN CN201720174311.9U patent/CN206455303U/en not_active Withdrawn - After Issue
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106862775A (en) * | 2017-02-24 | 2017-06-20 | 苏州贝亚敏光电科技有限公司 | A kind of laser deburring method and apparatus |
| CN106862775B (en) * | 2017-02-24 | 2019-03-05 | 苏州贝亚敏光电科技有限公司 | A kind of laser deburring method and apparatus |
| CN107755903A (en) * | 2017-11-17 | 2018-03-06 | 广州市艾派克智能激光科技有限公司 | A kind of compressor of air conditioner cylindrical shell end face laser facing attachment and method |
| CN107900520A (en) * | 2017-12-20 | 2018-04-13 | 广东国玉科技有限公司 | A kind of bar code dispels equipment |
| CN107931846A (en) * | 2017-12-22 | 2018-04-20 | 苏州华亚智能科技股份有限公司 | A kind of laser deburring process equipment |
| CN107931846B (en) * | 2017-12-22 | 2020-06-26 | 苏州华亚智能科技股份有限公司 | Laser deburring processing equipment |
| CN108247147A (en) * | 2018-03-01 | 2018-07-06 | 温州康通环保科技有限公司 | A kind of three-way pipe is responsible for automatic chamfering deburring device |
| WO2022005491A1 (en) * | 2020-06-29 | 2022-01-06 | Ipg (Beijing) Fiber Laser Technology Co., Ltd. | Laser deburring and chamfering method and system |
| CN113547219A (en) * | 2021-07-21 | 2021-10-26 | 深圳泰德激光科技有限公司 | Laser anode oxide film removing device |
| CN115194426A (en) * | 2022-08-04 | 2022-10-18 | 昆山科钢机械有限公司 | Groove milling and drilling combined machining process |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206455303U (en) | A kind of laser deburring equipment | |
| CN106862775A (en) | A kind of laser deburring method and apparatus | |
| CN105537835B (en) | Battery core automatic spot-welding device and automatic spot welding method thereof | |
| JP6935224B2 (en) | Wafer generation method | |
| KR20180063832A (en) | METHOD FOR PRODUCING SiC WAFER | |
| CN107824970A (en) | A kind of battery case laser high-speed scanning welding system and method for work based on galvanometer | |
| CN107790898A (en) | The generation method of SiC wafer | |
| KR20200031515A (en) | Wafer generating method and laser processing apparatus | |
| JPS6316895A (en) | Laser beam machine | |
| JP2008178886A (en) | Marking method of product information | |
| CN207681748U (en) | A kind of laser deburring processing unit (plant) | |
| CN106975972A (en) | Fully automatic machine feeding device and its automatic charging method | |
| CN101877370B (en) | Device for manufacturing thin layer solar cell modules | |
| CN114473188A (en) | Laser processing method and device for stripping wafer | |
| CN117862682A (en) | Laser film removing equipment and method for lithium battery cell insulating protective film | |
| JP5397768B2 (en) | Laser processing apparatus and laser processing method | |
| CN212191234U (en) | Metal parts assembly line 3D printing device | |
| CN217493055U (en) | Processing device for forming modified layer in silicon carbide crystal ingot | |
| JP6884203B2 (en) | Working machine and calculation method | |
| CN216576044U (en) | Dual-wavelength laser optical processing equipment | |
| CN110385607A (en) | The shaping methods of cutting tool | |
| CN206270652U (en) | Laser direct-writing double-side exposure device | |
| CN213337398U (en) | PCBA circuit board defect detection device | |
| CN216397396U (en) | Silicon chip carrier cleaning equipment for photovoltaic cell | |
| KR101030292B1 (en) | Machining apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170901 Effective date of abandoning: 20190305 |