CN107931846A - A kind of laser deburring process equipment - Google Patents
A kind of laser deburring process equipment Download PDFInfo
- Publication number
- CN107931846A CN107931846A CN201711402331.8A CN201711402331A CN107931846A CN 107931846 A CN107931846 A CN 107931846A CN 201711402331 A CN201711402331 A CN 201711402331A CN 107931846 A CN107931846 A CN 107931846A
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- CN
- China
- Prior art keywords
- laser
- round platform
- process equipment
- parabolic mirror
- focus lamp
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
Abstract
The invention discloses a kind of laser deburring process equipment, the process equipment includes being installed on crossbeam and the adjustable mechanical arm of free end position, laser on the free end of mechanical arm, and the optical-head apparatus on the output terminal of laser, wherein, optical-head apparatus includes the laser set installed in laser output, arranged on the focus lamp gone out on light path of laser, with the round platform speculum and parabolic mirror of the concentric setting of focus lamp, the round platform minute surface of round platform speculum is located at going out on light path and being oppositely arranged with the parabolic mirror surface of parabolic mirror for laser, and round platform minute surface is respectively positioned on the outer circumferential of focus lamp with parabolic mirror surface.The processing unit (plant) is simple in structure, enables to disposably be removed while laser scanning removes in the small burr for big burr formed after laser ablation, greatly increases the efficiency of laser deburring.
Description
Technical field
The present invention relates to a kind of laser deburring process equipment.
Background technology
Burr is the irregular metals such as various wedge angles, the flash occurred in process of metal working in workpiece surface transition position
Part.With the development of the society, and industrialization stepped up with automatization level, the accuracy of manufacture, matter of the client to product
Amount requires higher and higher, and the condition that product is on active service is also increasingly harsher.The presence of burr not only have impact on the progress of part, and
The reliability of complete machine is influenced, and then the failure of engineering goods can be caused, therefore, deburring has become the pass in part process
Key process.
In order to solve the problems, such as burr, the method for various deburrings is also come into being, and debarring process is also by the hand of early stage
Work, mechanical operation develop to the direction of automation.Burr removing method common at present has roller polishing, high temperature deburring
The methods of method, brusher Trimming, extrusion honing Trimming, magnetic finishing, water injection deburring.And in recent years, with
Developing rapidly for laser technology, and since Laser Processing has the advantage such as non-contact, environmentally protective, using laser deburring
Progressively it is more and more widely used.
The basic principle of laser deburring technology is, using laser has intensity height, energy density is big, focusing is strong, side
The characteristics of tropism is good, the laser beam sent from laser passes through Optical devices, makes laser beam focus into the hot spot of different-diameter, right
Burr on part is scanned, so that burr fusing, vaporization, finally remove burr, it is with the efficient, scope of application
The advantages that wide.
However, it is commonly present the defects of following in existing laser deburring technology:For big burr, when using laser ablation
After big burr, small burr is often remained on workpiece, it is also necessary to carry out secondary deburring processing, cause the big for the treatment of effeciency
It is big to reduce.
The content of the invention
The object of the present invention is to provide a kind of laser deburring process equipment, to improve the efficiency of laser deburring processing.
To reach above-mentioned purpose, the technical solution adopted by the present invention is:A kind of laser deburring process equipment, including machine
Seat, in the horizontal direction position are adjustably mounted on the engine base and for carrying the workbench of workpiece to be processed, setting up
Crossbeam on the engine base and above the workbench, the process equipment further include on the crossbeam and from
By the adjustable mechanical arm of end position, the laser on the free end of the mechanical arm, and installed in described
Optical-head apparatus on the output terminal of laser, wherein, the optical-head apparatus includes swashing installed in the laser output
Light set, the focus lamp gone out on light path arranged on the laser, with the round platform speculum of the concentric setting of the focus lamp and
Parabolic mirror, the round platform minute surface of the round platform speculum be located at the laser go out on light path and with the parabolic reflective
The parabolic mirror surface of mirror is oppositely arranged, and the round platform minute surface is respectively positioned on the outer circumferential of the focus lamp with the parabolic mirror surface.
Preferably, the part in the laser beam of the laser output assembles to form first laser through the focus lamp
Beam, the remainder of the laser beam is first reflected through the round platform speculum, then reflects to form throwing through the parabolic mirror
Penetrate the annular second laser beam in the first laser beam outer circumferential.
Preferably, the round platform speculum have axially through through hole, the focus lamp be arranged on the through hole in;Institute
State parabolic mirror have axially through hollow cavity, the round platform speculum is located in the hollow cavity.
Preferably, the optical-head apparatus further includes round platform microscope base for installing the round platform speculum and for installing
The parabolic microscope base of parabolic mirror is stated, round platform microscope base setting concentric with the parabolic microscope base simultaneously interfixes.
Further, can by multiple axis pins extended in a radial direction between the parabolic microscope base and the round platform microscope base
Releasably it is fixedly connected.
Preferably, the laser set includes being used for collimating mirror connector and the institute being connected with the laser output
The matched hollow form taper protective case of collimating mirror is stated, is formed between the collimating mirror connector and the taper protective case and supplies institute
State the laser projection space that the laser beam of laser output is cast through, the focus lamp, round platform speculum and parabolic reflective
Mirror is arranged in the laser projection space.
Further, the collimating mirror connector has the connecting pole of hollow tube-shape and the company below the connecting pole
Connect round platform, the top of the taper protective case has a limit round table being detachably connected with the round platform, the connection round platform with
The accommodation space for being used for installing the focus lamp, round platform speculum and parabolic mirror is formed between the limit round table.
Preferably, the mechanical arm is rotated including the pedestal on the crossbeam, top around vertical direction axial line
The first bogie that ground is connected on the pedestal, around horizontal direction axial line be pivotally connected to the first bogie lower end
Second bogie in portion, the mounting base for being connected to the second bogie bottom, the laser are installed on the mounting base
On.
Further, second bogie includes more stents connecting successively of head and the tail, adjacent two stents it
Between with respect to switching axial line it is parallel with the horizontal direction axial line.
Further, the crossbeam is additionally provided with for driving the base along X to extension between the pedestal and the crossbeam
Seat can be translationally arranged on the engine base along X to the translational drive mechanism of translation, the workbench along Y-direction.
Due to the utilization of above-mentioned technical proposal, the present invention has following advantages compared with prior art:The laser of the present invention
Deburring equipment, its is simple in structure, enables to the laser beam that laser is sent to be thrown with the incident angle of setting
It is mapped on workpiece to be processed and carries out deburring, and causes the laser beam that laser is sent using additional optical-head apparatus
The different laser beam of two strands of power is formed by beam splitting, so as on workpiece to be processed projection form different capacity and diameter
Hot spot, the burr different to size carries out laser ablation respectively, while can also cause after laser ablation is carried out to big burr
The small burr formed is disposably removed while laser scanning removes, and greatly increases the efficiency of laser deburring.
Brief description of the drawings
Attached drawing 1 is the overall structure diagram of the laser deburring process equipment of the present invention;
Attached drawing 2 is the operating diagram of mechanical arm in laser deburring process equipment of the invention;
Attached drawing 3 is the structure diagram of mechanical arm in laser deburring process equipment of the invention;
Attached drawing 4 is the overall structure front view of the optical-head apparatus used in the present invention;
Attached drawing 5 be along attached drawing 4 A-A to sectional structure illustrate and beam transmission path schematic diagram;
Attached drawing 6 is the transmission schematic diagram in the present invention using laser beam in optical-head apparatus;
Attached drawing 7 is the structural decomposition diagram that laser covers in the optical-head apparatus used in the present invention;
Attached drawing 8 is the structure diagram of round platform speculum in the optical-head apparatus used in the present invention;
Attached drawing 9 is the structure diagram of round platform microscope base in the optical-head apparatus used in the present invention;
Attached drawing 10 is the structure diagram of parabolic mirror in the optical-head apparatus used in the present invention;
Attached drawing 11 is the structure diagram of parabolic microscope base in the optical-head apparatus used in the present invention;
Wherein:1st, collimating mirror connector;1a, connecting pole;1b, connection round platform;2nd, taper protective case;2a, main part;It is 2b, spacing
Round platform;2c, limiting stand terrace;3rd, focus lamp;4th, round platform speculum;4a, round platform minute surface;4b, through hole;5th, parabolic mirror;6、
Round platform microscope base;7th, parabolic microscope base;
8th, mechanical arm;81st, pedestal;82nd, the first bogie;83rd, the second bogie;831st, 832, stent;84th, mounting base;9th, swash
Light device;10th, optical-head apparatus;11st, engine base;12nd, column;13rd, crossbeam;14th, workbench;20th, workpiece to be processed.
Embodiment
Technical scheme is further elaborated with specific embodiment below in conjunction with the accompanying drawings.
Referring to the laser deburring process equipment shown in Fig. 1 to Fig. 3, including engine base 11, position is adjustable in the horizontal direction
Site preparation is installed on engine base 11 and for carrying the workbench 14 of workpiece to be processed 20, being erected on engine base 11 and be located at workbench
The crossbeam 13 of 14 tops.The process equipment further includes on crossbeam 13 and the adjustable mechanical arm 8 of free end position, installation
Laser 9 on the free end of the mechanical arm 8, and the optical-head apparatus 10 on the output terminal of laser 9.
Referring to shown in Fig. 1 to Fig. 3, specifically, the left and right sides of engine base 11 is arranged with two root posts 12, crossbeam 13 along X to
Extend and be erected at the upper end of two root posts 12.Mechanical arm 8 is including the pedestal 81 on crossbeam 13, top around vertical direction
The first bogie 82 that axial line is pivotally connected on pedestal 81, around horizontal direction axial line be pivotally connected to the first steering
Second bogie 83 of 82 bottom of frame, the mounting base 84 for being connected to 83 bottom of the second bogie, laser 9 are installed on the peace
Fill on seat 84.Wherein, the second bogie 83 includes the more stents that head and the tail connect successively, transfers relatively between adjacent two stents
Axial line and opposite first bogie 82 rotation connection of the second bogie 82 horizontal direction axial line it is parallel.Stent herein
There are two, be respectively stent 831 and 832, one end of stent 831 is connected on the first bogie 82 around first level axial line,
The other end of stent 831 is connected to one end of stent 832 around the second horizontal axis line, the other end of stent 832 then with mounting base
84 are connected.In this way, the mechanical arm 8 for being equipped with laser 9 can realize the adjustment along Z-direction length, and realize Z-direction
Rotation and the rotation around horizontal rotation direction of principal axis so that the laser beam that laser 9 is sent is treated with the angle of inclination alignment set
Position to be processed in workpieces processing 20.
Pedestal 81 can be additionally provided with for driving on crossbeam 13 along X to translationally setting between pedestal 81 and crossbeam 13
Translational drive mechanism of the pedestal 81 along X to translation, workbench 14 can be translationally arranged on engine base 11 along Y-direction.So realize and treat
Along X to the adjusting with Y-direction relative position between the Working position and laser 9 of workpieces processing 20.
Referring to shown in Fig. 4 to Figure 11, include installed in the optical-head apparatus 10 of 9 output terminal of laser defeated installed in laser 9
The laser of outlet covers and goes out the focus lamp 3 on light path arranged on laser 9, and anti-with the round platform of 3 concentric setting of focus lamp
Penetrate mirror 4 and parabolic mirror 5, wherein, the round platform minute surface of round platform speculum 4 be located at laser 9 go out on light path and and parabolic
The parabolic mirror surface of speculum 5 is oppositely arranged, and round platform minute surface is respectively positioned on the outer circumferential of focus lamp 3 with parabolic mirror surface.In this way, by
A part of line focus mirror 3 aggregation in the laser beam that laser 9 exports forms first laser beam, and remaining part then first passes through
Round platform speculum 4 reflect reflected to form again through parabolic mirror 5 annular second for being incident upon first laser beam outer circumferential swash
Light beam.
In the present embodiment, laser uses optical fiber laser, and the concrete structure of optical-head apparatus 10 is as follows:Referring to Fig. 7 extremely
Shown in Figure 11, laser set includes the collimating mirror connector 1 for being connected with the output terminal of laser 9 and is connected with the collimating mirror
The matched hollow form taper protective case 2 of part 1, forms between collimating mirror connector 1 and taper protective case 2 and is exported for laser 9
The laser projection space that is cast through of laser beam, focus lamp 3, round platform speculum 4 and parabolic mirror 5 are arranged on above-mentioned
In laser projection space.
Shown in Figure 7, collimating mirror connector 1 has the connecting pole 1a of hollow tube-shape and below connecting pole 11a
Round platform 1b is connected, taper protective case 2 has the main part 2a and the limit round table 2b at the top of main part 2a of taper, this is spacing
Round platform 2b has limiting stand terrace 2c with main part 2a joints.Removably connect between connection round platform 1b and limit round table 2b
Connect, and form the accommodation space for being used for installing focus lamp 3, round platform speculum 4 and parabolic mirror 5 between the two.
Referring to shown in Fig. 4 to Figure 11, round platform speculum 4 has the round platform minute surface 4a of taper surface, it also has passes through vertically
The through hole 4b worn, focus lamp 3 are arranged in through hole 4b and are set with 4 coaxial heart of round platform speculum.Parabolic mirror 5 has
The parabolic mirror surface for being rotated extension as busbar by parabola and being obtained(Do not indicated in figure), which has passes through vertically
The hollow cavity worn, round platform speculum 4 is located in above-mentioned hollow cavity, and round platform minute surface 4a is oppositely arranged with parabolic mirror surface.
The optical-head apparatus 10 further includes round platform microscope base 6 for installing round platform speculum 4 and for installing parabolic mirror 5
Parabolic microscope base 7, round platform microscope base 6 sets and interfixes with 7 coaxial inner conductor of parabolic microscope base.Specifically, parabolic microscope base 7 and round platform
Multiple pin holes radially extended are offered in the circumferential direction of microscope base 6, between the two can by multiple axis pins radially extended
Releasably it is fixedly connected.During specific installation, first round platform speculum 4 can be installed on round platform microscope base 6, and focus lamp 3 is placed in
Between round platform speculum 4 and round platform microscope base 6;Parabolic mirror 5 is installed on parabolic microscope base 7, then by parabolic microscope base 7 and circle
Radially secure installation between platform microscope base 6, then the parabolic lens that round platform speculum 4, focus lamp 3 and parabolic mirror 5 will be provided with
Seat 7- round platforms microscope base 6 is seated on the limiting stand terrace 2c of taper protective case 2, is finally protected collimating mirror connector 1 and taper
Set 2 is connected, that is, completes the installation of the optical-head apparatus.The connecting pole 1a and laser 9 of connector 1 are then collimated when in use
Output terminal is directly connected to.
So through laser 9 export parallel laser beam, center section line focus mirror 3 directly aggregation formed power compared with
High first laser beam, another part are then projected on the round platform minute surface 41 of round platform speculum 4, then are reflexed to by round platform minute surface 41
In the parabolic mirror surface of parabolic mirror 5, then lower-powered second laser beam reflected to form by parabolic mirror surface, in first laser beam
Projection focusing surface on, second laser beam projects the annular to be formed and be disposed around first laser beam outer circumferential.
, can be according to following step when carrying out deburring to workpiece to be processed 20 using the laser deburring process equipment
It is rapid to carry out:
The 3-D view for treating deburring workpiece 10 is obtained first, its image can be obtained by ccd data acquisition system;Then will
The 3-D view got is compared with the design drawing of workpiece 10 to be de-burred, automatically obtains workpiece 10 to be de-burred
On need all areas of flash removed, and obtain jagged size, burr size be more than to the hair for being sized scope
Thorn is divided into big burr, and burr size is divided into small burr less than the burr for being sized scope.
Next laser scanning processing first is carried out for big burr, then laser scanning processing is carried out to small burr, be specially:
When being processed for big burr so that the first laser beam projected through optical-head apparatus 10 is directed at big burr, to be adopted to big burr
Cut off with the laser of relatively high power, second laser beam can not work burr since energy is small at this time;When big burr
Remaining small burr is then directly subject to the energy effect that second laser beam focuses on after the completion of removal, so that small burr be melted to be formed
Fillet is to remove flash removed.After all big burrs remove, it can be removed again for all small burrs.
To sum up, laser deburring process equipment of the invention, its is simple in structure, the laser for enabling to laser 9 to send
Light beam can be projected with the incident angle of setting and deburring is carried out on workpiece to be processed 20, and utilize additional shaven head
Device 10 is so that the laser beam that laser 9 is sent forms the different laser beam of two strands of power by beam splitting, so as to be added
Projection forms the hot spot of different capacity and diameter on work workpiece 20, and the burr different to size carries out laser ablation respectively, at the same time
It can also to carry out while laser scanning removes disposably in the small burr for big burr formed after laser ablation
Remove, greatly increase the efficiency of laser deburring.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar can understand present disclosure and implement according to this, and it is not intended to limit the scope of the present invention.It is all according to the present invention
The equivalent change or modification that Spirit Essence is made, should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of laser deburring process equipment, including engine base, position is adjustably mounted at the engine base in the horizontal direction
The upper and crossbeam for carrying the workbench of workpiece to be processed, being erected on the engine base and be located above the workbench, its
It is characterized in that:The process equipment further includes on the crossbeam and the adjustable mechanical arm of free end position, is installed on
Laser on the free end of the mechanical arm, and the optical-head apparatus on the output terminal of the laser, its
In, the optical-head apparatus includes the laser set installed in the laser output, goes out light path arranged on the laser
On focus lamp, with the round platform speculum and parabolic mirror of the concentric setting of the focus lamp, the circle of the round platform speculum
Platform minute surface is located at going out on light path and being oppositely arranged with the parabolic mirror surface of the parabolic mirror for the laser, and the circle
Platform minute surface is respectively positioned on the outer circumferential of the focus lamp with the parabolic mirror surface.
2. laser deburring process equipment according to claim 1, it is characterised in that:The laser light of the laser output
A part in beam assembles to form first laser beam through the focus lamp, and the remainder of the laser beam is first through the round platform
Speculum reflects, then annular second for being incident upon the first laser beam outer circumferential is reflected to form through the parabolic mirror
Laser beam.
3. laser deburring process equipment according to claim 1, it is characterised in that:The round platform speculum has along axis
To perforative through hole, the focus lamp is arranged in the through hole;The parabolic mirror have axially through hollow cavity, institute
Round platform speculum is stated to be located in the hollow cavity.
4. laser deburring process equipment according to claim 1, it is characterised in that:The optical-head apparatus, which further includes, to be used for
The round platform microscope base of the round platform speculum and the parabolic microscope base for installing the parabolic mirror be installed, the round platform microscope base with
The parabolic microscope base is concentric to be set and interfixes.
5. laser deburring process equipment according to claim 4, it is characterised in that:The parabolic microscope base and the round platform
Between microscope base connection is removably secured by multiple axis pins extended in a radial direction.
6. laser deburring process equipment according to claim 1, it is characterised in that:The laser set includes being used for and institute
Collimating mirror connector and the matched hollow form taper protective case of the collimating mirror that laser output is connected are stated, it is described
The laser being cast through for the laser beam of laser output is formed between collimating mirror connector and the taper protective case
Projecting space, the focus lamp, round platform speculum and parabolic mirror are arranged in the laser projection space.
7. laser deburring process equipment according to claim 6, it is characterised in that:During the collimating mirror connector has
The connecting pole of empty tube shape and the connection round platform below the connecting pole, the top of the taper protective case have and the circle
The limit round table that platform is detachably connected, it is described connection round platform and the limit round table between formed be used for install the focus lamp,
The accommodation space of round platform speculum and parabolic mirror.
8. laser deburring process equipment according to any one of claims 1 to 7, it is characterised in that:The mechanical arm includes
Pedestal, top on the crossbeam are pivotally connected to the first steering on the pedestal around vertical direction axial line
Frame, around horizontal direction axial line be pivotally connected to the second bogie of the first bogie bottom, be connected to described
The mounting base of two bogie bottoms, the laser are installed in the mounting base.
9. laser deburring process equipment according to claim 8, it is characterised in that:Second bogie includes head and the tail
The more stents to connect successively, the axial line with respect to switching and the horizontal direction axial line between adjacent two stents
It is parallel.
10. laser deburring process equipment according to claim 8, it is characterised in that:The crossbeam is along X to extension, institute
State the translational drive mechanism being additionally provided between pedestal and the crossbeam for driving the pedestal along X to translation, the workbench
Can translationally it be arranged on the engine base along Y-direction.
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CN201711402331.8A CN107931846B (en) | 2017-12-22 | 2017-12-22 | Laser deburring processing equipment |
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CN107931846B CN107931846B (en) | 2020-06-26 |
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EP3666449A1 (en) * | 2018-12-13 | 2020-06-17 | Pfeiffer Vacuum Gmbh | Method of deburring a vacuum pump component |
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Publication number | Priority date | Publication date | Assignee | Title |
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EP3666449A1 (en) * | 2018-12-13 | 2020-06-17 | Pfeiffer Vacuum Gmbh | Method of deburring a vacuum pump component |
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