CN107917918B - Detection method for identifying surface flaws of ultrathin transparent plate based on specular reflection - Google Patents
Detection method for identifying surface flaws of ultrathin transparent plate based on specular reflection Download PDFInfo
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- CN107917918B CN107917918B CN201711145236.4A CN201711145236A CN107917918B CN 107917918 B CN107917918 B CN 107917918B CN 201711145236 A CN201711145236 A CN 201711145236A CN 107917918 B CN107917918 B CN 107917918B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
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Abstract
The invention discloses a detection method for identifying surface flaws of an ultrathin transparent plate based on specular reflection. The method specifically comprises the following steps: irradiating a light source on one side of the ultrathin transparent plate to be detected, and respectively receiving the transmission light and the specular reflection light of the ultrathin transparent plate to be detected by a first photosensitive device and a second photosensitive device; if the dark spots are observed on the two photosensitive devices at the same time, the defects are positioned on the surface of the ultrathin transparent plate close to the light source; if the dark spots are observed on the first photosensitive device and no dark spots are observed on the second photosensitive device, the defect is positioned on the surface of the ultrathin transparent plate far away from the light source; if no dark spots are observed on both the first photosensitive device and the second photosensitive device, it is indicated that there are no defects on the ultra-thin transparent sheet. The detection method is simple and effective, has accurate detection result, and can quickly detect the micro defects on the upper surface and the lower surface of the ultrathin plate with the micron order.
Description
Technical Field
The invention relates to the application field of automatic detection and identification, in particular to a detection method for identifying defects such as tiny dust, scratches and the like on an ultrathin transparent plate in real time based on mirror reflection and distinguishing the defects on the upper surface or the lower surface of the plate.
Background
Optical displays have been used in many ways in the life and production of people. With the development of science and technology, display devices become thinner and thinner, and some companies have manufactured novel ultrathin flexible display screens, the thickness of which can reach the micron order. While the revolutionary rapid development of display devices has led to new and problematic issues.
In the production process of display devices such as screens, if cracks exist on the surface or fine dust is attached to the surface, the defects can bring great influence on the performance of the produced products, and can cause the devices to generate heat, fail to display normally, even explode and the like. In actual production, it is relatively easy to detect the presence of a defect foreign matter, but because the device is too thin, it is difficult to distinguish on which surface the defect is, resulting in having to clean both surfaces simultaneously, which greatly increases the amount of work.
Disclosure of Invention
Therefore, an object of the present invention is to provide a detection method for discriminating a flaw such as a fine dust, a scratch, etc. on an ultra-thin transparent plate based on specular reflection, which can discriminate whether the flaw is located on an upper surface or a lower surface.
The technical scheme adopted by the invention is as follows:
a detection method for identifying surface flaws of an ultrathin transparent plate based on specular reflection is characterized in that a light source is irradiated on one side of the ultrathin transparent plate to be detected, transmitted light passing through the ultrathin transparent plate to be detected is received by a first photosensitive device, and specular reflection light passing through the ultrathin transparent plate to be detected is received by a second photosensitive device; if the dark spots are observed to appear on the first photosensitive device and the second photosensitive device simultaneously, the defect is positioned on the surface, close to the light source, of the ultrathin transparent plate to be detected; if the first photosensitive device is observed to have dark spots and the second photosensitive device is not observed to have dark spots, the defect is positioned on the surface, far away from the light source, of the ultrathin transparent plate to be detected; if no dark spot is observed on the first photosensitive device and the second photosensitive device, the ultra-thin transparent plate to be detected has no defect.
Further, the light source is an LED white light, a laser, a desk lamp, an incandescent lamp or a super-continuous light.
Further, the material of the ultrathin transparent plate to be detected is plastic, glass or transparent crystal.
Further, the thickness of the ultrathin transparent plate to be detected is 1 micrometer to 10 centimeters.
Further, two surfaces of the ultra-thin transparent plate to be detected are parallel or not parallel to each other.
Further, two surfaces of the ultrathin transparent plate to be detected are flat surfaces or uneven surfaces.
Further, the first photosensitive device and the second photosensitive device adopt a light screen or a photosensitive sensor.
After passing through the thin plate to be measured, part of light is transmitted, and part of light is specularly reflected. Then, photosensitive devices are placed at positions where the transmitted light is received and at positions where the specular reflected light is received, respectively. When in detection, all defect information of the upper surface and the lower surface of the ultrathin plate can be displayed on the transmitted photosensitive device, no matter which surface of the transparent plate has defects such as dust and the like, the defects are in the light path of the transmitted light, the transmitted light passes through the defects, the light after passing through the defects is subjected to diffuse reflection, and small dark spots are displayed on the photosensitive device, namely the defect information of the surface of the ultrathin plate. When the light reflected by the mirror surface is irradiated to another photosensitive device, only the defect information of the side close to the light source (i.e. the light is incident to the first surface of the thin plate) can be displayed on the photosensitive device, but the defect information of the other side cannot be displayed because only the defect of the front surface of the thin plate is in the optical path of the mirror surface reflection light, and the defect of the other surface is not in the optical path of the mirror surface reflection light. Therefore, by observing whether or not there is a dark spot on the photosensitive device receiving the transmitted light, it is possible to know whether or not there is a defect information on the ultrathin plate, and by observing whether or not there is a dark spot on the photosensitive device receiving the specular reflection light, it is possible to determine on which side of the ultrathin plate the defect on the ultrathin plate is located.
The invention can detect whether the ultra-thin transparent plate has flaws and on which surface of the plate the flaws are specifically positioned by observing whether the transmitted light and the reflected light have dark spot information on the photosensitive device. The method is simple and effective, has accurate detection result, and can quickly detect micro flaws on the upper surface and the lower surface of the ultrathin plate with the micron order.
Drawings
FIG. 1 is a schematic view of an apparatus for detecting defects on a surface of an ultrathin film sample on a side thereof adjacent to a light source according to the present invention.
FIG. 2 is a schematic view of an apparatus for detecting defects on a surface of an ultrathin film sample remote from a light source according to the present invention.
In the figure, 1-a normal light source, 2-a transparent sheet to be detected, 3-a light screen receiving transmitted light, 4-a light screen receiving specular reflected light, 5-a flaw, and 6-a dark spot.
Detailed Description
The following further describes the embodiments of the present invention with reference to the drawings to clearly show the features of the present invention.
As shown in FIGS. 1 and 2, the detection method for identifying micro-defects on the upper and lower surfaces of an ultra-thin transparent plate based on specular reflection in the present embodiment uses a device including a common light source 1, a transparent sheet 2 to be detected, a light screen 3 for receiving transmitted light, and a light screen 4 for receiving specular reflection light. Ordinary light source 1 can adopt light sources such as ordinary LED lamp, laser, or domestic electric light, is detected transparent sheet 2 and is vertical to be placed, and becomes certain contained angle with the light that comes, and this contained angle only need satisfy light screen 3 and light screen 4 can receive respectively behind the measured sheet transmission light sum specular reflection light can. The angle between the ultrathin plate and the light source and the light screen can be adjusted at will, as long as the light screen can receive the transmitted light and the specular reflection light. The light screen can be replaced by any sensing device with light sensing capability, such as CMOS, CCD and the like.
When incident light impinges on the sheet, a portion of the light is transmitted to the screen 3 and a portion of the light is specularly reflected at the surface of the sheet. When a pattern of dark spots 6 is observed on the light screen 3, it indicates that there are flaws 5 (e.g., scratches, dust, black spots, etc.) on the transparent sheet 2 being inspected. Then, it is observed whether the light screen 4 also has the dark spot 6, if the pattern of the dark spot 6 is observed on the light screen 4, it is indicated that the defect 5 is located on the surface of the sheet to be measured close to the light source, and if the pattern of the dark spot 6 is not observed on the light screen 4, it is indicated that the defect 5 is located on the surface of the sheet to be measured far from the light source. Therefore, the invention can judge whether the flaw information exists on the detected transparent thin plate 2 by observing whether the light screen 3 has the dark spot 6, and more importantly, can judge on which surface the flaw of the detected thin plate is specifically positioned by observing whether the light screen 4 has the dark spot 6.
The transparent thin plate 2 to be detected can be an ultrathin transparent film made of transparent materials such as plastics, glass and transparent crystals, and the thickness range is 1 micrometer to 10 centimeters. The upper and lower surfaces of the transparent sheet 2 to be inspected may be unparallel and may be arbitrarily bent within 10 degrees. The two surfaces may be flat surfaces or uneven surfaces having a concavo-convex structure.
Fig. 1 shows that when a flaw 5 is on the side surface of the detected sheet near the light source, the light screen 3 has a dark spot pattern caused by diffuse reflection of the flaw surface, and the light screen 4 also has a dark spot pattern caused by diffuse reflection of the flaw surface.
Fig. 2 shows that when the flaw 5 is on the side surface of the detected sheet far from the light source, the light screen 3 has a dark spot pattern caused by diffuse reflection of the flaw surface, and the light screen 4 does not have a dark spot pattern caused by diffuse reflection of the flaw surface.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.
Claims (7)
1. A detection method for identifying surface flaws of an ultrathin transparent plate based on specular reflection is characterized in that a light source is irradiated on one side of the ultrathin transparent plate to be detected, transmitted light passing through the ultrathin transparent plate to be detected is received by a first photosensitive device, and specular reflection light passing through the ultrathin transparent plate to be detected is received by a second photosensitive device; if the dark spots are observed to appear on the first photosensitive device and the second photosensitive device simultaneously, the defect is positioned on the surface, close to the light source, of the ultrathin transparent plate to be detected; if the first photosensitive device is observed to have dark spots and the second photosensitive device is not observed to have dark spots, the defect is positioned on the surface, far away from the light source, of the ultrathin transparent plate to be detected; if no dark spot is observed on the first photosensitive device and the second photosensitive device, the ultra-thin transparent plate to be detected has no defect.
2. The specular reflection-based detection method for identifying surface flaws of an ultrathin transparent plate as claimed in claim 1, wherein the light source is an LED white light, a laser, a desk lamp, an incandescent lamp or a supercontinuum.
3. The detection method for identifying the surface flaws of the ultrathin transparent plate based on the specular reflection as claimed in claim 1, wherein the ultrathin transparent plate to be detected is made of plastic, glass or transparent crystal.
4. The detection method for identifying the surface flaws of the ultrathin transparent plate based on the specular reflection as claimed in claim 1, wherein the thickness of the ultrathin transparent plate to be detected is 1 micron to 10 cm.
5. The detection method for identifying the surface flaws of the ultrathin transparent plate based on the specular reflection as claimed in claim 1, wherein two surfaces of the ultrathin transparent plate to be detected are parallel or not parallel to each other.
6. The detection method for identifying the surface flaws of the ultrathin transparent plate based on the specular reflection as claimed in claim 1, wherein two surfaces of the ultrathin transparent plate to be detected are flat surfaces or uneven surfaces.
7. The detection method for identifying the surface flaws of the ultrathin transparent plate based on the specular reflection as claimed in claim 1, wherein the first photosensitive device and the second photosensitive device are light screens or photosensitive sensors.
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| CN201711145236.4A CN107917918B (en) | 2017-11-17 | 2017-11-17 | Detection method for identifying surface flaws of ultrathin transparent plate based on specular reflection |
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| CN201711145236.4A CN107917918B (en) | 2017-11-17 | 2017-11-17 | Detection method for identifying surface flaws of ultrathin transparent plate based on specular reflection |
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| CN107917918B true CN107917918B (en) | 2021-02-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109580660A (en) * | 2018-12-29 | 2019-04-05 | 重庆荣成玻璃制品有限公司 | Glass production side optical detection device |
| US11493336B2 (en) | 2020-06-22 | 2022-11-08 | Pixart Imaging Inc. | Optical navigation device which can determine dirtiness level of cover or fix multi light pattern issue |
| US11523722B2 (en) | 2019-05-28 | 2022-12-13 | Pixart Imaging Inc. | Dirtiness level determining method and electronic device applying the dirtiness level determining method |
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| CN105259189B (en) * | 2015-10-21 | 2019-04-16 | 凌云光技术集团有限责任公司 | The defect imaging system and method for glass |
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| JP2002062122A (en) * | 2000-08-23 | 2002-02-28 | Asahi Glass Co Ltd | Method and apparatus for measurement of shape of glass sheet |
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