CN107907929A - A kind of light beam form regulation system - Google Patents
A kind of light beam form regulation system Download PDFInfo
- Publication number
- CN107907929A CN107907929A CN201711302626.8A CN201711302626A CN107907929A CN 107907929 A CN107907929 A CN 107907929A CN 201711302626 A CN201711302626 A CN 201711302626A CN 107907929 A CN107907929 A CN 107907929A
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- light beam
- fine motion
- angle
- motion motor
- lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention discloses a kind of light beam form regulation system, light beam form regulation system includes the grand dynamic adjustment module of light beam and light beam fine motion adjustment module, laser beam initially enters the light beam fine motion adjustment module and carries out fine motion attitude stabilization, one beam-splitting optical grating is passed through by the outgoing beam after light beam fine motion adjustment module adjustment again, light beam after the beam-splitting optical grating beam splitting enters back into the grand dynamic adjustment module of the light beam and carries out grand dynamic pose adjustment, effectively scanning interferometer field exposing light beam posture is carried out with this to be directed toward control and jitter suppression, achieve the purpose that the precision and stability for ensureing exposed laser Shu Zhixiang, good holographic grating groove profile is obtained to scanning interferometer exposure to provide a strong guarantee, raising to scanning interferometer field exposure technique and technological level is of great significance.
Description
Technical field
The present invention relates to spectral technique field, and in particular to is exposed in scanning interferometer in the light path for making holographic grating
Grand, micro- two-stage light beam form regulation system.
Background technology
Scanning interferometer field exposure technique is a kind of method for making holographic grating, it uses small-bore laser beam as exposure
Radiant.Laser beam needs that light beam direction posture is adjusted in exposure process, to ensure the overlapping accuracy of left and right light beam,
In traditional static holographic grating making, laser beam only has center section to participate in exposure after expanding, overall to interfering beam
Coincidence degree require relatively low, light beam regulation generally use manual adjustment, and in the exposure system of scanning interferometer field, grade ruler
Very little exposing light beam integrally participates in exposing, and light beam pointing accuracy directly affects the quality for producing grating mask, manual adjustment essence
Degree obviously is difficult to meet the requirements.Simultaneously because drift characteristic existing for laser beam itself, and workbench vibration, optical element are shaken
The beam drifts caused by factor such as dynamic, external environment disturbance are shaken, and cause light beam pointing accuracy to decline in exposure process,
The uniformity of mask, degradation are produced in influence.In order to meet that scan exposure system is directed toward wanting for these two aspects for light beam
Ask, devise grand dynamic adjustment module and light beam direction is carried out being accurately positioned adjustment, devise fine motion adjustment module and light beam is directed toward
Stability carries out closed-loop control, and requirement of the grating to light beam pointing accuracy and stability is made to reach scan exposure.
The content of the invention
In view of this, an embodiment of the present invention provides a kind of light beam form regulation system, for being exposed to scanning interferometer field
The posture of laser beam carries out grand, micro- two-stage adjustment, ensures the precision and stability of exposed laser Shu Zhixiang, good complete to obtain
Cease grating flute profile.
A kind of light beam form regulation system is provided in the embodiment of the present invention, for scan exposure light path, it includes：Light beam is grand
Dynamic adjustment module, the grand dynamic adjustment module of light beam include the first fine motion motor, the second fine motion motor, the 3rd fine motion motor, the
Four fine motion motors, benchmark grating, semi-transparent semi-reflecting lens, the first plane mirror, the first beam splitter prism, grand dynamic-position decoupling lens,
Position-CMOS, the second plane mirror, grand dynamic-angle decoupling lens and angle-CMOS；Light beam fine motion adjusts module, described
Light beam fine motion adjustment module is arranged on above the grand dynamic adjustment module of the light beam, and the light beam fine motion adjustment module includes the first piezoelectricity
Beat mirror, the second piezoelectricity beat mirror, polarization beam splitter prism, the second beam splitter prism, the 3rd plane mirror, fine motion-angle decoupling
Lens, angle-PSD, fine motion-position decoupling lens, position-PSD and fourth plane speculum；What one light source laser was sent
Laser beam, initially enters the light beam fine motion adjustment module and carries out fine motion attitude stabilization, module tune is adjusted by the light beam fine motion
For outgoing beam after whole again by a beam-splitting optical grating, the light beam after the beam-splitting optical grating beam splitting enters back into the grand dynamic adjustment of the light beam
Module carries out grand dynamic pose adjustment.
Alternatively, when laser beam enters light beam fine motion adjustment module progress fine motion attitude stabilization, first pass around described
First piezoelectricity beat mirror and the second piezoelectricity beat mirror, are then divided into s light and p light, p light by the polarization beam splitter prism
It is divided into the first transmitted light beam and the first the reflected beams by second beam splitter prism, described in first transmitted light beam passes through
3rd plane mirror is turned back, and decoupling lens by the fine motion-angle enters the angle-PSD, first reflected light
Beam enters the position-PSD by the fine motion-position decoupling lens, s light by the fourth plane speculum turn back to
It is divided into the exposing light beam of two beams of left and right after the beam-splitting optical grating.
Alternatively, control FPGA boards are further included and are used for photoelectric signal transformation, the control FPGA boards include a piezoelectricity
Beat mirror controller；Angle-the PSD is connected with the control FPGA boards, the position-PSD and the control FPGA plates
Card connection, the first piezoelectricity beat mirror is connected with the piezoelectricity beat mirror controller, the second piezoelectricity beat mirror with it is described
Piezoelectricity beat mirror controller connects；Light beam into the angle-PSD and the position-PSD passes through the control FPGA boards
Photoelectric signal transformation is carried out, transformed electric signal is passed to the piezoelectricity beat mirror controller, the piezoelectricity beat mirror controller
The first piezoelectricity beat mirror is driven to stablize respectively to the orientation angle and orientation of light beam with the second piezoelectricity beat mirror
Control, realizes that light beam is directed toward closed loop locking.
Alternatively, the exposing light beam of two beam of left and right enters the grand dynamic pose adjustment of the grand dynamic adjustment module progress of the light beam, right
The exposing light beam of side after the second fine motion motor and the first fine motion motor, reenters successively and is incident upon the benchmark grating
On, left side exposing light beam after the 3rd fine motion motor and the 4th fine motion motor, reenters successively and is incident upon the benchmark
On grating, the light beam after the benchmark grating, finally passes sequentially through the semi-transparent semi-reflecting lens and first plane reflection
After mirror, it is incident to first beam splitter prism and is divided into the second transmitted light beam and the second the reflected beams, the second transmitted light beam passes through
After second plane mirror is turned back, lens are decoupled by the grand dynamic-angle and enter the angle-CMOS, second is anti-
Irradiating light beam enters the position-CMOS by the grand dynamic-position decoupling lens.
Alternatively, Industrial Control Computer is further included, the angle-CMOS and the position-CMOS are connected to institute by USB
State Industrial Control Computer, the Industrial Control Computer by Ethernet interface to the second fine motion motor, the first fine motion motor,
The 3rd fine motion motor and the 4th fine motion motor output drive signal so that the first fine motion motor and described second
Fine motion motor respectively accurately adjusts the light beam direction orientation on right side with angle, the 3rd fine motion motor and the described 4th
Fine motion motor respectively accurately adjusts the light beam orientation angle in left side with orientation.
Alternatively, the semi-transparent semi-reflecting lens be arranged on left side exposing light beam incide in the light path of the benchmark grating.
Alternatively, the beam-splitting optical grating is the straight groove transmission grating that line density is 600gr/mm.
Alternatively, the first fine motion motor, the second fine motion motor, the 3rd fine motion motor and described 4th micro-
Dynamic motor is two-dimensional micromotion motor.
Alternatively, the grand dynamic-position decoupling lens are bore Φ 25mm, and focal length is the planoconvex spotlight of 300mm, described grand
Dynamic-angle decoupling lens are bore Φ 25mm, and focal length is the planoconvex spotlight of 400mm.
Alternatively, the fine motion-angle decoupling lens are bore Φ 25mm, and focal length is the planoconvex spotlight of 1000mm, described
Fine motion-position decoupling lens are bore Φ 25mm, and focal length is the planoconvex spotlight of 100mm.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
Light beam form regulation system provided by the invention includes the grand dynamic adjustment module of light beam and light beam fine motion adjustment module, swashs
Light beam initially enters the light beam fine motion adjustment module and carries out fine motion attitude stabilization, after light beam fine motion adjustment module adjustment
Outgoing beam again by a beam-splitting optical grating, the light beam after the beam-splitting optical grating beam splitting enters back into the grand dynamic adjustment module of the light beam
Grand dynamic pose adjustment is carried out, effectively scanning interferometer field exposing light beam posture is carried out with this to be directed toward control and jitter suppression, is reached
To the precision and the purpose of stability for ensureing exposed laser Shu Zhixiang, good holographic grating groove profile is obtained to scanning interferometer exposure
Provide a strong guarantee, the raising to scanning interferometer field exposure technique and technological level is of great significance.
Brief description of the drawings
Fig. 1 is the light channel structure figure of the light beam form regulation system of one embodiment of the invention；
Fig. 2 is the overall structure figure of the light beam form regulation system of one embodiment of the invention.
Reference numeral：Light source laser 1；The grand dynamic adjustment module I of light beam；Light beam fine motion adjusts module ii；Beam-splitting optical grating 2；
First fine motion motor 3；Second fine motion motor 4；3rd fine motion motor 5；4th fine motion motor 6；Benchmark grating 7；Semi-transparent semi-reflecting lens
8；First plane mirror 9；First beam splitter prism 10；Grand dynamic-position decoupling lens 11；Position-CMOS12；Second plane reflection
Mirror 13；Grand dynamic-angle decoupling lens 14；Angle-CMOS15；First piezoelectricity beat mirror 16；Second piezoelectricity beat mirror 17；Polarization point
Beam prism 18；Second beam splitter prism 19；3rd plane mirror 20, fine motion-angle decoupling lens 21, angle-PSD22 (positions
Sensitive detector is used for measurement angle), fine motion-position decoupling lens 23, position-PSD24；Fourth plane speculum 25；Control
FPGA boards 28；Industrial Control Computer 27；Show input equipment 29.
Embodiment
In order to make those skilled in the art more fully understand the present invention program, below in conjunction with the embodiment of the present invention
Attached drawing, is clearly and completely described the technical solution in the embodiment of the present invention, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiments obtained without making creative work, should all belong to the model that the present invention protects
Enclose.
Fig. 1 is refer to, for a kind of light beam form regulation system of the present invention, for scan exposure light path, it includes：Light source
The grand dynamic adjustment module I of laser 1, light beam and light beam fine motion adjustment module ii.
Fig. 1 is refer to, it is micro- that the grand dynamic adjustment module I of light beam includes the first fine motion motor 3, the second fine motion motor the 4, the 3rd
It is dynamic motor 5, the 4th fine motion motor 6, benchmark grating 7, semi-transparent semi-reflecting lens 8, the first plane mirror 9, the first beam splitter prism 10, grand
It is dynamic-position decoupling lens 11, position-CMOS12 (locations complementary metal-oxide semiconductor (MOS)), the second plane mirror 13, grand
Dynamic-angle decoupling lens 14 and angle-CMOS15 (angled complimentary metal-oxide semiconductor (MOS)).Grand dynamic-angle the decoupling
The lens 14 and angle-CMOS15 is used to carry out light beam orientation angle accurate measurement, the grand dynamic-position decoupling lens 11
It is used to be directed toward light beam orientation progress accurate measurement with the position-CMOS12.
Fig. 1 is refer to, the light beam fine motion adjustment module ii is arranged on above the grand dynamic adjustment module I of the light beam, the light
Shu Weidong adjustment module iis include the first piezoelectricity beat mirror 16, the second piezoelectricity beat mirror 17, polarization beam splitter prism 18, the second beam splitting
Prism 19, the 3rd plane mirror 20, fine motion-angle decouple lens 21, (position sensitive detector is used to measure angle-PSD22
Angle), fine motion-position decoupling lens 23, position-PSD24 and fourth plane speculum 25.The fine motion-angle decoupling is saturating
The mirror 21 and angle-PSD22 is used to carry out light beam orientation angle high speed real-time measurement, the fine motion-position decoupling lens
23 are used to be directed toward light beam the high speed real-time measurement of orientation progress with the position-PSD24.
Fig. 1 is refer to, the laser beam that light source laser 1 is sent, initially enters the light beam fine motion adjustment module ii and carry out
Fine motion attitude stabilization, by the outgoing beam after light beam fine motion adjustment module ii adjustment again by a beam-splitting optical grating 2, described point
Light beam after 2 beam splitting of beam grating enters back into the grand dynamic adjustment module I of the light beam and carries out grand dynamic pose adjustment.Described in laser beam enters
When light beam fine motion adjustment module ii carries out fine motion attitude stabilization, the first piezoelectricity beat mirror 16 and the described second pressure are first passed around
Electric beat mirror 17, is then divided into s light and p light by the polarization beam splitter prism 18, and p light passes through second beam splitter prism 19
It is divided into the first transmitted light beam and the first the reflected beams, first transmitted light beam passes through 20 folding of the 3rd plane mirror
Return, decoupling lens 21 by the fine motion-angle enters the angle-PSD22, and first the reflected beams are by described micro-
Dynamic-position decoupling lens 23 enter the position-PSD24, and s light is turned back to described point by the fourth plane speculum 25
It is divided into the exposing light beam of two beams of left and right after beam grating 2.The exposing light beam of two beam of left and right enters the grand dynamic adjustment module I of the light beam
Grand dynamic pose adjustment is carried out, the exposing light beam on right side is successively by the second fine motion motor 4 and the first fine motion motor 3
Afterwards, reenter and be incident upon on the benchmark grating 7, left side exposing light beam is micro- by the 3rd fine motion motor 5 and the described 4th successively
After dynamic motor 6, reenter and be incident upon on the benchmark grating 7, the light beam after the benchmark grating 7, finally passes sequentially through described
Semi-transparent semi-reflecting lens 8 are with after first plane mirror 9, being incident to first beam splitter prism 10 and being divided into the second transmitted light beam
With the second the reflected beams, the second transmitted light beam passes through the grand dynamic-angle solution after second plane mirror 13 is turned back
Coupling lens 14 enter the angle-CMOS12, and the second the reflected beams enter institute by the grand dynamic-position decoupling lens 11
Rheme puts-CMOS15.The exposing light beam that the semi-transparent semi-reflecting lens 8 are arranged on left side is incided in the light path of the benchmark grating 7.
Fig. 2 is refer to, in one of the embodiments, light beam form regulation system further includes control FPGA boards 28 and is used for
Photoelectric signal transformation, the control FPGA boards 28 include a piezoelectricity beat mirror controller.Angle-the PSD22 and the control
FPGA boards 28 processed connect, and the position-PSD24 is connected with the control FPGA boards 28, the first piezoelectricity beat mirror 16
It is connected with the piezoelectricity beat mirror controller, the second piezoelectricity beat mirror 17 is connected with the piezoelectricity beat mirror controller.Into
The light beam for entering the angle-PSD22 and position-PSD24 carries out photoelectric signal transformation by the control FPGA boards 28,
Transformed electric signal is passed to the piezoelectricity beat mirror controller, and the piezoelectricity beat mirror controller drives first piezoelectricity inclined
Put mirror 16 and stability contorting is carried out to the orientation angle and orientation of light beam respectively with the second piezoelectricity beat mirror 17, realize that light beam refers to
Locked to closed loop.
It refer to Fig. 2, light beam form regulation system further includes Industrial Control Computer 27, the angle-CMOS12 and described
Position-CMOS15 is connected to the Industrial Control Computer 27 by optical transmission of information into the Industrial Control Computer 27 by USB, institute
It is micro- to the second fine motion motor 4, the first fine motion motor the 3, the described 3rd by Ethernet interface to state Industrial Control Computer 27
Dynamic motor 5 and 6 output drive signal of the 4th fine motion motor so that the first fine motion motor 3 and second fine motion electricity
Machine 4 respectively accurately adjusts the light beam direction orientation on right side with angle, the 3rd fine motion motor 5 and the 4th fine motion
Motor 6 respectively accurately adjusts the light beam orientation angle in left side with orientation, you can completes light beam and is directed toward position and angle
Alignment adjustment, through the first fine motion motor 3 with the right side light beam of the second fine motion motor 4 and through the 3rd fine motion motor
5 form exposure interference fringe with the left side light beam of the 4th fine motion motor 6 on grating substrate.The Industrial Control Computer 27
It is connected with a display input equipment 29, display input equipment 29 is used to operate for operator.
In one of which embodiment, light source laser 1 uses Kr+ lasers, launch wavelength 413.1nm.It is described
Beam-splitting optical grating 2 is the straight groove transmission grating that line density is 600gr/mm.The first fine motion motor 3, second fine motion electricity
Machine 4, the 3rd fine motion motor 5 and the 4th fine motion motor 6 are all the two-dimensional micromotion motors for Newfocus companies
Picomotor8816.The benchmark grating 7 needs to be selected according to actual requirement equal with the holographic grating incisure density to be made
Straight groove reflecting grating.First plane mirror 9, second plane mirror 13, the 3rd plane mirror
20th, the fourth plane speculum 25 and the 5th plane mirror 18 are substrate of glass aluminum reflector.
Grand dynamic-position decoupling the lens 11 are bore Φ 25mm, and focal length is the planoconvex spotlight of 300mm, the grand dynamic-angle
Degree decoupling lens 14 are bore Φ 25mm, and focal length is the planoconvex spotlight of 400mm.The fine motion-angle decoupling lens 21 are bore
Φ 25mm, focal length are the planoconvex spotlight of 1000mm, and the fine motion-position decoupling lens 23 are bore Φ 25mm, focal length 100mm
Planoconvex spotlight.
Position-the CMOS12 and angle-the CMOS15 selects the DCC1024M of THORLABS.First piezoelectricity
Beat mirror 16 selects the S-330.20L of German PI Corp. with the second piezoelectricity beat mirror 17.Angle-the PSD22 and institute
Rheme puts the OBP-U-9L that-PSD24 selects Newport companies.The control FPGA boards 28 select NI companies
PXI7852R boards.The Industrial Control Computer of the selection of Industrial Control Computer 27 with superior performance CPU, with gigabit network interface, USB
Interface, pci interface.
Claims (10)
- A kind of 1. light beam form regulation system, for scan exposure light path, it is characterised in that including：The grand dynamic adjustment module of light beam, the grand dynamic adjustment module of the light beam include the first fine motion motor, the second fine motion motor, the 3rd micro- Dynamic motor, the 4th fine motion motor, benchmark grating, semi-transparent semi-reflecting lens, the first plane mirror, the first beam splitter prism, grand dynamic-position Decouple lens, position-CMOS, the second plane mirror, grand dynamic-angle decoupling lens and angle-CMOS；Light beam fine motion adjusts module, and the light beam fine motion adjustment module is arranged on above the grand dynamic adjustment module of the light beam, the light Shu Weidong adjustment modules include the first piezoelectricity beat mirror, the second piezoelectricity beat mirror, polarization beam splitter prism, the second beam splitter prism, the Three plane mirrors, fine motion-angle decoupling lens, angle-PSD, fine motion-position decoupling lens, position-PSD and Siping City Face speculum；The laser beam that one light source laser is sent, initially enters the light beam fine motion adjustment module and carries out fine motion attitude stabilization, by Outgoing beam after the light beam fine motion adjustment module adjustment is again by a beam-splitting optical grating, the light beam after the beam-splitting optical grating beam splitting Enter back into the grand dynamic adjustment module of the light beam and carry out grand dynamic pose adjustment.
- 2. light beam form regulation system as claimed in claim 1, it is characterised in that：Laser beam is adjusted into the light beam fine motion When module carries out fine motion attitude stabilization, the first piezoelectricity beat mirror and the second piezoelectricity beat mirror, Ran Houtong are first passed around Cross the polarization beam splitter prism and be divided into s light and p light, p light by second beam splitter prism be divided into the first transmitted light beam and First the reflected beams, first transmitted light beam are turned back by the 3rd plane mirror, are decoupled by the fine motion-angle Lens enter the angle-PSD, and first the reflected beams enter institute's rheme by the fine motion-position decoupling lens - PSD is put, s light is divided into the exposing light beam of two beams of left and right after the fourth plane speculum is turned back to the beam-splitting optical grating.
- 3. light beam form regulation system as claimed in claim 2, it is characterised in that：Further include control FPGA boards and be used for photoelectricity Signal is changed, and the control FPGA boards include a piezoelectricity beat mirror controller；Angle-the PSD is connected with the control FPGA boards, and the position-PSD is connected with the control FPGA boards, institute State the first piezoelectricity beat mirror to be connected with the piezoelectricity beat mirror controller, the second piezoelectricity beat mirror and the piezoelectricity beat mirror Controller connects；Light beam into the angle-PSD and position-PSD carries out photoelectric signal transformation by the control FPGA boards, Transformed electric signal is passed to the piezoelectricity beat mirror controller, and the piezoelectricity beat mirror controller drives first piezoelectricity inclined Put mirror and stability contorting is carried out to the orientation angle and orientation of light beam respectively with the second piezoelectricity beat mirror, realize that light beam is directed toward and close Ring locks.
- 4. light beam form regulation system as claimed in claim 2, it is characterised in that：Described in the exposing light beam of two beam of left and right enters The grand dynamic adjustment module of light beam carries out grand dynamic pose adjustment, the exposing light beam on right side successively by the second fine motion motor with it is described After first fine motion motor, reenter and be incident upon on the benchmark grating, left side exposing light beam successively by the 3rd fine motion motor with After the 4th fine motion motor, reenter and be incident upon on the benchmark grating, the light beam after the benchmark grating, finally leads to successively The semi-transparent semi-reflecting lens are crossed with after first plane mirror, being incident to first beam splitter prism and being divided into the second transmitted light Beam and the second the reflected beams, the second transmitted light beam pass through the grand dynamic-angle solution after second plane mirror is turned back Coupling lens enter the angle-CMOS, and the second the reflected beams enter institute's rheme by the grand dynamic-position decoupling lens Put-CMOS.
- 5. light beam form regulation system as claimed in claim 4, it is characterised in that：Further include Industrial Control Computer, the angle- The CMOS and position-CMOS is connected to the Industrial Control Computer by USB, and the Industrial Control Computer passes through Ethernet interface The second fine motion motor, the first fine motion motor, the 3rd fine motion motor and the 4th fine motion motor output are driven Dynamic signal so that the first fine motion motor and the second fine motion motor the light beam on right side is directed toward respectively orientation and angle into The accurate adjustment of row, the 3rd fine motion motor and the 4th fine motion motor respectively to the light beam orientation angle in left side and orientation into The accurate adjustment of row.
- 6. light beam form regulation system as claimed in claim 4, it is characterised in that：The semi-transparent semi-reflecting lens are arranged on left side Exposing light beam is incided in the light path of the benchmark grating.
- 7. light beam form regulation system as claimed in claim 1, it is characterised in that：The beam-splitting optical grating is that line density is The straight groove transmission grating of 600gr/mm.
- 8. light beam form regulation system as claimed in claim 1, it is characterised in that：The first fine motion motor, described second Fine motion motor, the 3rd fine motion motor and the 4th fine motion motor are two-dimensional micromotion motor.
- 9. light beam form regulation system as claimed in claim 1, it is characterised in that：Grand dynamic-position decoupling the lens are mouth Footpath Φ 25mm, focal length are the planoconvex spotlight of 300mm, and the grand dynamic-angle decoupling lens are bore Φ 25mm, focal length 400mm Planoconvex spotlight.
- 10. light beam form regulation system as claimed in claim 1, it is characterised in that：The fine motion-angle decoupling lens are mouth Footpath Φ 25mm, focal length are the planoconvex spotlight of 1000mm, and the fine motion-position decoupling lens are bore Φ 25mm, focal length 100mm Planoconvex spotlight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711302626.8A CN107907929A (en) | 2017-12-11 | 2017-12-11 | A kind of light beam form regulation system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711302626.8A CN107907929A (en) | 2017-12-11 | 2017-12-11 | A kind of light beam form regulation system |
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| Publication Number | Publication Date |
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| CN107907929A true CN107907929A (en) | 2018-04-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711302626.8A Pending CN107907929A (en) | 2017-12-11 | 2017-12-11 | A kind of light beam form regulation system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109782382A (en) * | 2018-12-25 | 2019-05-21 | 中国科学院长春光学精密机械与物理研究所 | The preparation method of high opening area critical angle transmission grating |
| CN113049599A (en) * | 2021-03-25 | 2021-06-29 | 深圳中科飞测科技股份有限公司 | Adjusting method and device, detection equipment, readable storage medium and detection system |
| CN114815132A (en) * | 2022-05-16 | 2022-07-29 | 江苏镭创高科光电科技有限公司 | Dimming system and dimming method of gradient array reflector |
-
2017
- 2017-12-11 CN CN201711302626.8A patent/CN107907929A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| 王玮等: "扫描干涉场曝光光束自动对准及其收敛性分析", 《中国激光》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109782382A (en) * | 2018-12-25 | 2019-05-21 | 中国科学院长春光学精密机械与物理研究所 | The preparation method of high opening area critical angle transmission grating |
| CN113049599A (en) * | 2021-03-25 | 2021-06-29 | 深圳中科飞测科技股份有限公司 | Adjusting method and device, detection equipment, readable storage medium and detection system |
| CN114815132A (en) * | 2022-05-16 | 2022-07-29 | 江苏镭创高科光电科技有限公司 | Dimming system and dimming method of gradient array reflector |
| CN114815132B (en) * | 2022-05-16 | 2023-12-01 | 江苏镭创高科光电科技有限公司 | Dimming system and dimming method for gradient array reflector |
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Application publication date: 20180413 |