CN111987579A - Pulse sequence modulation method based on Fabry-Perot interferometer - Google Patents
Pulse sequence modulation method based on Fabry-Perot interferometer Download PDFInfo
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- CN111987579A CN111987579A CN202010835918.3A CN202010835918A CN111987579A CN 111987579 A CN111987579 A CN 111987579A CN 202010835918 A CN202010835918 A CN 202010835918A CN 111987579 A CN111987579 A CN 111987579A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/1022—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
- H01S3/1024—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping for pulse generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
Abstract
The invention discloses a pulse sequence modulation method based on a Fabry-Perot interferometer, which is characterized in that ultrafast laser pulses adopt a modulator consisting of two modulation lenses which are arranged in parallel and plated with semi-transparent and semi-reflective films, a pulse sequence with time delay of femtosecond to nanosecond order and an energy distribution rule is generated, and when a pulse sequence transmitted by a second modulation lens is used, the output light of the modulator can be directly used; when the pulse sequence generated by the first modulation lens is used, a spectroscope is additionally arranged in front of the modulation lens, so that the pulse sequence generated by the first modulation lens is separated from the incident laser and is output in the direction vertical to the incident laser. Compared with the prior art, the invention has the advantages of high reliability and stability, simple optical path, convenient alignment and calibration of the optical path, and addition of a plurality of semi-transparent semi-reflecting mirrors between two modulation lenses, can also generate a more complex pulse sequence, better solves the problem of large error of the time-frequency domain pulse shaping method, and greatly reduces the complexity and the cost of the system.
Description
Technical Field
The invention relates to the technical field of ultrafast laser pulse modulation, in particular to a pulse sequence modulation method based on a Fabry-Perot interferometer.
Background
In recent years, in the field of ultrafast laser manufacturing, ultrafast laser pulse time domain shape control thought based on ablation cooling principle realizes high-precision, high-quality and high-efficiency manufacturing, and is widely concerned by scholars at home and abroad. The ultrafast laser has the characteristics of short duration and high peak power, has strong excitation and regulation capabilities when interacting with materials, greatly reduces the heat effect in the processing process, and has important application in the fields of ultrafast chemistry, ultrafast organisms, ultrafast laser manufacturing and the like. A specific method for regulating and controlling the time domain shape of an ultrafast laser pulse based on an ablation cooling principle is to modulate the ultrafast laser pulse into an ultrafast laser pulse sequence with the interval of femtosecond to nanosecond. However, the pulse repetition frequency of a general ultrafast laser is very low, the corresponding pulse interval period is generally not shorter than the nanosecond level, and how to obtain a pulse sequence with the pulse interval covering the femtosecond to the nanosecond level becomes a difficult problem. The time scale of femtoseconds to nanoseconds has far exceeded the frequency response limit of common electronic devices and can only be used optically.
At present, there are related shaping methods, such as a time-frequency domain pulse shaping method based on a spatial light modulator, a modulation method based on a michelson interferometer, a method for obtaining a pulse sequence by a birefringent crystal, and a pulse sequence modulation method based on a coating film. The time-frequency domain pulse shaping method based on the spatial light modulator adopts the spatial light modulator to carry out different phase delay on each pixel unit on the cross section of a light beam, thereby achieving the purpose of time and space shaping, and has the advantages of flexible modulation mode and high automation degree, but the method has high equipment cost, larger error and low light emitting efficiency, and the modulation interval can only reach 10 picoseconds at most. The conventional optical splitting and combining method based on the michelson interferometer can also generate a pulse sequence, the method uses the translation of a series of reflecting mirrors to control the optical path difference (namely, the sub-pulse interval), the optical path structure and the alignment method are simpler when the method is used for generating a double-pulse sequence, and the optical path structure becomes very complicated and the optical path alignment and calibration become very difficult once the number of sub-pulses is increased. The method for obtaining pulse sequence by using birefringent crystal adopts the characteristic of different propagation speeds of o light and e light of birefringent crystal, after the laser light passes through several birefringent crystals, the laser light is divided into several pulse sequences whose polarization directions are perpendicular, finally 45 deg. polaroid can be used to select the polarization direction of pulse train. The pulse sequence modulation lens based on the coating has the advantages of simple principle and simple equipment, does not relate to a complex light path, but the number of generated usable sub-pulses is very limited by the modulated pulse sequence, and when the reflectivity of the coated film is not properly selected, the energy of the first pulse is too high, so that the experimental result or the processing quality is influenced.
In summary, the time-frequency domain pulse shaping method in the prior art has large error and high cost, and has the problems of complicated optical path structure, difficult alignment adjustment, limited modulation interval of the birefringent crystal, unadjustable energy ratio, limited sub-pulse number of the pulse sequence modulation lens based on coating and overhigh first pulse energy of the beam splitting and combining method.
Disclosure of Invention
The invention aims to provide a pulse sequence modulation method based on a Fabry-Perot interferometer aiming at the defects of the prior art, which adopts a pulse sequence modulator consisting of two modulation lenses plated with semi-transparent and semi-reflective films to obtain a pulse sequence with a sub-pulse interval range covering femtosecond to nanosecond time delay and a specific energy distribution rule, has more flexible and convenient energy ratio modulation, better overcomes the defects of larger error and high cost of a time-frequency domain pulse shaping method, and effectively solves the problems of complex optical path structure, difficult alignment adjustment, limited modulation interval of a birefringent crystal, unadjustable energy ratio, limited quantity of sub-pulses of the pulse sequence modulation lenses based on film coating and overhigh first pulse energy. If a plurality of semi-transparent semi-reflecting mirrors are added between the two modulation lenses, a more complex pulse sequence can be generated, the light path structure is simple, the light path alignment and the adjustment and correction are convenient, the complexity and the cost of the system are greatly reduced, and the reliability and the stability are improved.
The purpose of the invention is realized as follows: a pulse sequence modulation method based on Fabry-Perot interferometer is characterized in that ultrafast laser pulses adopt a pulse sequence modulator which is composed of two modulation lenses which are arranged in parallel and plated with semi-transparent and semi-reflective films, pulse sequences with time delay of femtosecond to nanosecond magnitude and energy distribution rules are generated, the ultrafast laser pulses vertically enter a first modulation lens and reach a second modulation lens after penetrating through the first modulation lens, and the pulse sequences generated by the pulse sequence modulator are output from the second modulation lens or the first modulation lens; when a pulse sequence transmitted by the second modulation lens is required to be used, the output light of the modulator can be directly used, ultrafast laser pulses vertically enter the first modulation lens, reach the second modulation lens after penetrating through the first modulation lens, and the pulse sequence modulated by the first modulation lens and the second modulation lens is output from the second modulation lens; when a pulse sequence generated by the first modulation lens is required to be utilized, a spectroscope is additionally arranged in front of the modulation lens to separate the pulse sequence generated by the first modulation lens from incident laser, ultrafast pulse laser vertically enters a pulse sequence modulator after penetrating through a beam splitter arranged at an angle of 45 degrees with the laser propagation direction, and the modulated pulse sequence is output from the first modulation lens, reflected after encountering the beam splitter and output along the direction vertical to the incident laser.
The delay between two adjacent sub-pulses in the pulse sequence is 677 femtoseconds to 6.7 nanoseconds, and the distance between the corresponding modulation lenses is 100 micrometers to 1 meter.
The pulse sequence modulator consists of a first modulation lens and a second modulation lens which are parallel to each other, wherein the second modulation lens is controlled by the electric translation stage to be in a spatial position; the two modulation lenses are respectively plated with a semi-transparent semi-reflective film with specific reflectivity, and the distance between the two modulation lenses is determined by the delay between adjacent sub-pulses in a required pulse sequence; the relationship between the pulse delay and the distance between the two modulation lenses is as follows: the delay between two adjacent sub-pulses is equal to the time required for light to pass twice the optical path between the first modulation lens and the second modulation lens, i.e. represented by the following formula II:
wherein: Δ t represents the delay between adjacent sub-pulses in the pulse sequence generated by modulation, d is the distance between the first and second modulation mirrors, and c is the speed of light in vacuum.
The semi-transparent semi-reflecting mirror is coated with a dielectric film on a glass substrate by methods such as electron beam evaporation according to the applicable ultrafast laser wavelength range and the reflectivity determined by the neutron pulse energy distribution rule of the finally required pulse sequence.
The pulse sequence modulator operates as follows: two modulation lenses coated with a transflective film with a specific reflectivity are placed perpendicular to the incident laser path and parallel to each other. The ultrafast laser pulse is incident on the first modulation lens and is divided into two sub-pulses, and one pulse is reflected back to become a first sub-pulse output from the first modulation lens; another pulse penetrates through the first modulation lens and enters the interior of the pulse sequence modulator to be transmitted, then the pulse encounters the second modulation lens, light splitting is carried out again, the pulse is divided into a reflection sub-pulse and a transmission sub-pulse, the transmitted sub-pulse becomes the first sub-pulse output by the second modulation lens, the sub-pulse reflected by the second modulation lens returns to the first modulation lens, light splitting occurs at the first modulation lens again, one pulse is transmitted out to become a second sub-pulse output by the first modulation lens, the other reflected pulse continues to propagate in the pulse sequence modulator, repeating the steps repeatedly, continuously and sequentially outputting sub-pulses on the first modulation lens and the second modulation lens, attenuating the pulse energy once every time light splitting occurs until the final pulse energy is attenuated to 0, the pulse sequence modulator may output a set of pulse sequences at each of the first and second modulation optics. The reflectivity of the first modulation lens is represented by a, the reflectivity of the second modulation lens is represented by b, and the absorption loss is ignored, so that after modulation, the pulse sequence output from the first modulation lens except the first sub-pulse, the energy distribution of the following sub-pulses is in an equal ratio attenuation rule, and the attenuation coefficient is a & ltb & gt; the pulse sequence output from the second modulation lens starts from the first sub-pulse, the energy of each sub-pulse is attenuated according to an equal ratio rule, and the attenuation coefficient is a x b, so that the energy distribution rule of each sub-pulse in the output pulse sequence can be controlled by controlling the reflectivity of the two modulation lenses.
Compared with the prior art, the invention has the following beneficial effects and advantages:
1. the invention can directly generate a pulse sequence with specific femtosecond to nanosecond time delay and specific energy distribution rule only by using two semi-transparent semi-reflecting mirrors with specific reflectivity, does not need a complex light path, has simple light path alignment and adjustment and correction, greatly reduces the complexity and cost of the system, and improves the reliability and stability.
2. The distance between two modulation lenses is controlled, so that the time delay between sub-pulses in a pulse sequence can be controlled, the second modulation lens is arranged on the electric translation stage to control the time delay between the sub-pulses, the flatness of the lens is in the order of 60 nanometers, the distance between the lenses can reach 100 micrometers at the lowest by matching with the electric translation stage, the distance is equivalent to 677 femtoseconds of the sub-pulses, the distance between the lenses can reach more than 1 meter at the maximum, and the distance is equivalent to 6.7 nanoseconds of the pulse interval.
3. The invention can control the reflectivity of two modulation lenses, and can control the energy distribution rule of each sub-pulse in the output pulse sequence, and because the cost of a single half mirror is relatively low, a series of half mirrors with different reflectivities can be configured, and can be combined and used as required when in use.
4. The invention is improved by an optical method, the distance between modulation lenses can reach more than 5 meters, and the corresponding sub-pulse interval is 33 nanoseconds.
5. According to the invention, a plurality of half-transmitting and half-reflecting mirrors are added in the two modulation lenses, so that a more complex pulse sequence can be generated.
Drawings
Fig. 1 is a schematic structural diagram of a pulse sequence modulator of the present invention:
FIG. 2 is a schematic diagram of the optical path structure of embodiment 1;
FIG. 3 is a pulse sequence image after fine tuning the angle of the second modulation lens in accordance with embodiment 1;
fig. 4 is a schematic diagram of the optical path structure of embodiment 2.
Detailed Description
Referring to fig. 1, the pulse sequence modulator 3 is composed of a first modulation lens 4 and a second modulation lens 5, the ultrafast laser pulse 1 is vertically or obliquely incident on the first modulation lens 4, passes through the first modulation lens 4 and then reaches the second modulation lens 5, and the pulse sequence generated by the pulse sequence modulator 3 is output from the second modulation lens 5 or the first modulation lens. The ultrafast laser pulse 1 is obliquely incident, and if the incident light is vertically incident, the principle and effect are the same, except that the two groups of pulse sequences output at the time of vertical incidence are collinear. The pulse sequence output from the modulation lens is an energy decreasing pulse sequence, when a proper beam splitter is used for combination, the number of used sub-pulses can reach more than 20, and the energy of the first sub-pulse of the pulse sequence output from the first modulation lens 4 is often too high, so that the experimental result and the processing quality are influenced. Since the pulse sequence output from the first modulation lens 4 propagates in line with the incident laser light, a beam splitter is generally required to be added in front of the first modulation lens 4 to separate the pulse sequence from the incident laser light and output the separated pulse sequence. The pulse train output from the second modulation lens 5 can output a pulse train in which the energy decreases and the number of usable sub-pulses reaches 20 or more when the reflectivity is appropriately selected, and is widely used in experiments such as high-quality ultrafast laser processing and laser substance interaction.
In any one of the two groups of pulse sequences output from the second modulation lens 5 and the first modulation lens 4, the delay between two adjacent sub-pulses is equal and equal to the time required for light to pass through twice the optical path between the first modulation lens 4 and the second modulation lens 5, the larger the distance between the two modulation lenses is, the larger the delay between the adjacent sub-pulses in the output pulse sequence is, so that the delay between the sub-pulses in the finally generated pulse sequence can be controlled by controlling the distance between the two modulation lenses, the distance between the two modulation lenses can reach 100 micrometers at the minimum and can reach more than 1 meter at the maximum, therefore, the range of the sub-pulse delay can cover femtoseconds to nanoseconds, and the application is very wide.
The invention is further illustrated below with specific modulation of ultrafast laser pulses:
example 1
Referring to fig. 2, the pulse sequence modulator 3 is composed of a first modulating lens 4 and a second modulating lens 5, both of which are coated with a transflective film, the splitting ratio of which is 90/10, the wavelength range of the modulating lens is 700-1100 nm, and the distance between the first modulating lens 4 and the second modulating lens 5 is 10 cm. When the femtosecond laser with the center wavelength of 800nm and the pulse width of 60fs is input, the delay of adjacent sub-pulses in the pulse sequence output from the second modulation lens 5 is 670ps, and the energy ratio of each sub-pulse is: 1:0.81:0.66:0.53:0.43: … ….
The optical path connection of this embodiment is: the ultrafast laser pulse 1 vertically enters the first modulation lens 4, passes through the pulse sequence modulator 3 and then reaches the second modulation lens 5, and the specific working process is as follows:
1) the semi-transparent semi-reflective film with proper reflectivity is selected according to the requirement and is respectively arranged on the spectacle frame, the first modulation lens 4 is fixed on the optical platform, and the ultrafast pulse laser 1 is turned on to enable the laser to vertically enter the first modulation lens 4 and pass through the center of the lens.
2) And fixing the second modulation lens 5 on an electric translation table, enabling laser to pass through the center of the lens, adjusting the direction of the lens to enable the light spots emitted from the second modulation lens 5 to be in a concurrent point mode, and completing the installation of the pulse sequence modulator 3.
3) And a beam of pulse sequence with energy decreasing in equal ratio can be obtained at the second modulation lens 5, and the attenuation ratio of the pulse sequence is different according to the selection of the semitransparent and semi-reflective films with different reflectivity.
Referring to fig. 3, the angle of the second modulation lens 5 is finely adjusted to separate the light spots of each stage, and the pulse sequence with decreasing energy of each stage is shown in space.
Example 2
Referring to fig. 4, a pulse train modulator 3 composed of a first modulation lens 4 and a second modulation lens 5 is used, and a spectroscope 2 disposed at an angle of 45 ° to the laser propagation direction is added in front of the first modulation lens 4 to separate the pulse train generated from the first modulation lens 4 from the incident laser. The two modulation lenses are both coated with a semi-transparent semi-reflective film, the splitting ratio of the modulation lenses is 90/10, the applicable wavelength range of the modulation lenses is 700-1100 nm, and the distance between the first modulation lens 4 and the second modulation lens 5 is 10 cm. When the femtosecond laser with the central wavelength of 800nm and the pulse width of 60fs is input, the delay of adjacent sub-pulses in the pulse sequence output from one side of the spectroscope 2 is 670ps, and the energy proportion of each sub-pulse is as follows: the first pulse energy is very high, and the first pulse energy is high and can be used for other experiments after being reflected by the spectroscope 2, wherein the ratio of the first pulse energy to the second pulse energy is 90:0.73:0.59:0.48:0.39: … ….
The optical path connection of this embodiment is: ultrafast laser pulse 1 penetrates a spectroscope 2 arranged at an angle of 45 degrees with the laser propagation direction, vertically enters a first modulation lens 4, passes through a modulator 3 and reaches a second modulation lens 5, after modulation of the modulator 3, a pulse sequence is reflected from the first modulation lens 4 and propagates along the direction opposite to the incident laser, and after encountering the spectroscope 2, the pulse sequence is reflected and separated from the incident laser and is output along the direction vertical to the incident laser, and the specific working process is as follows:
1) selecting a semi-transparent semi-reflecting film with proper reflectivity according to the requirement, respectively installing the semi-transparent semi-reflecting film on a frame, fixing a modulation lens 4 on an optical platform, and turning on the ultrafast pulse laser 1 to enable the laser to vertically enter the first modulation lens 4 and pass through the center of the lens.
2) And fixing the second modulation lens 5 on an electric translation table, enabling laser to pass through the center of the lens, adjusting the direction of the lens to enable the light spots emitted from the second modulation lens 5 to be in a concurrent point mode, and completing the installation of the pulse sequence modulator 3.
3) A spectroscope 2 forming an angle of 45 degrees with the light propagation direction is arranged in front of the pulse sequence modulator 3, and the ultrafast pulse laser 1 is ensured to pass through the spectroscope 2 and then reach the pulse sequence modulator 3;
4) and a pulse sequence with the energy of the rest sub-pulses decreasing in an equal ratio except the first sub-pulse can be obtained in the direction perpendicular to the incident laser at one side of the spectroscope 2.
The above examples are only for further illustration of the present invention and are not intended to limit the present invention, and all equivalent implementations of the present invention should be included within the scope of the claims of the present invention.
Claims (4)
1. A pulse sequence modulation method based on Fabry-Perot interferometer is characterized in that ultrafast laser pulses adopt a pulse sequence modulator composed of two modulation lenses which are arranged in parallel and plated with semi-transparent and semi-reflective films, pulse sequences with time delay of femtosecond to nanosecond magnitude and energy distribution rules are generated, the ultrafast laser pulses vertically enter a first modulation lens and reach a second modulation lens after penetrating through the first modulation lens, and the pulse sequences generated by the pulse sequence modulator are output from the second modulation lens or the first modulation lens; when the first modulation lens outputs the pulse sequence, a spectroscope arranged at an angle of 45 degrees with the laser transmission direction is additionally arranged in front of the modulation lens, so that the pulse sequence generated by the first modulation lens is separated from the incident laser.
2. The fp-interferometer-based pulse sequence modulation method as recited in claim 1, wherein the reflectivity of the transflective film is determined according to the applicable ultrafast laser wavelength range and the distribution rule of the energy of the sub-pulses in the pulse sequence.
3. The method of claim 1, wherein the distance between the two modulating mirrors is determined by the delay between two adjacent sub-pulses in the pulse train generated by the modulation, and the distance is calculated by the following formula I:
delta t is the delay between adjacent sub-pulses in the pulse sequence generated by modulation; d is the distance between the two modulating lenses; c is the speed of light in vacuum.
4. The method of claim 3, wherein the delay between two adjacent sub-pulses in the pulse train is 677 femtoseconds to 6.7 nanoseconds, and the distance between two corresponding modulating mirrors is 100 micrometers to 1 meter.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113385837A (en) * | 2021-04-16 | 2021-09-14 | 华东师范大学 | Laser pulse sequence silicon hole processing system with adjustable sub-pulse time interval |
CN114280800A (en) * | 2021-12-23 | 2022-04-05 | 中国科学院西安光学精密机械研究所 | Space-time shaping device, space-time shaping system and method |
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US5778016A (en) * | 1994-04-01 | 1998-07-07 | Imra America, Inc. | Scanning temporal ultrafast delay methods and apparatuses therefor |
CN103928833A (en) * | 2014-04-11 | 2014-07-16 | 北京理工大学 | Pulse sequence modulator based on film coating |
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2020
- 2020-08-19 CN CN202010835918.3A patent/CN111987579A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5778016A (en) * | 1994-04-01 | 1998-07-07 | Imra America, Inc. | Scanning temporal ultrafast delay methods and apparatuses therefor |
CN103928833A (en) * | 2014-04-11 | 2014-07-16 | 北京理工大学 | Pulse sequence modulator based on film coating |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113385837A (en) * | 2021-04-16 | 2021-09-14 | 华东师范大学 | Laser pulse sequence silicon hole processing system with adjustable sub-pulse time interval |
CN114280800A (en) * | 2021-12-23 | 2022-04-05 | 中国科学院西安光学精密机械研究所 | Space-time shaping device, space-time shaping system and method |
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