CN107871818A - Oled堆叠膜的质量评估的系统、设备和方法 - Google Patents
Oled堆叠膜的质量评估的系统、设备和方法 Download PDFInfo
- Publication number
- CN107871818A CN107871818A CN201711385871.XA CN201711385871A CN107871818A CN 107871818 A CN107871818 A CN 107871818A CN 201711385871 A CN201711385871 A CN 201711385871A CN 107871818 A CN107871818 A CN 107871818A
- Authority
- CN
- China
- Prior art keywords
- view data
- threshold
- grad
- light
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 61
- 238000013441 quality evaluation Methods 0.000 title description 8
- 230000007547 defect Effects 0.000 claims abstract description 39
- 239000011248 coating agent Substances 0.000 claims abstract description 24
- 238000000576 coating method Methods 0.000 claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 24
- 230000000246 remedial effect Effects 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims description 81
- 238000012545 processing Methods 0.000 claims description 74
- 239000007788 liquid Substances 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 17
- 238000007639 printing Methods 0.000 claims description 14
- 238000011049 filling Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 3
- 238000003475 lamination Methods 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims 2
- 238000005516 engineering process Methods 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 92
- 239000010408 film Substances 0.000 description 44
- 239000007789 gas Substances 0.000 description 39
- 238000004458 analytical method Methods 0.000 description 32
- 238000001914 filtration Methods 0.000 description 29
- 230000006870 function Effects 0.000 description 27
- 238000010586 diagram Methods 0.000 description 16
- 230000033001 locomotion Effects 0.000 description 12
- 238000005259 measurement Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000011159 matrix material Substances 0.000 description 11
- 230000002950 deficient Effects 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 238000007689 inspection Methods 0.000 description 9
- 238000003384 imaging method Methods 0.000 description 8
- 230000014509 gene expression Effects 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 7
- 238000000746 purification Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 238000007641 inkjet printing Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000007667 floating Methods 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 238000013480 data collection Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000003134 recirculating effect Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 238000000528 statistical test Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 235000009470 Theobroma cacao Nutrition 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 244000240602 cacao Species 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000009885 systemic effect Effects 0.000 description 1
- 210000003684 theca cell Anatomy 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0008—Industrial image inspection checking presence/absence
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10024—Color image
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20072—Graph-based image processing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30121—CRT, LCD or plasma display
Landscapes
- Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Coating Apparatus (AREA)
- Image Analysis (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361766064P | 2013-02-18 | 2013-02-18 | |
US61/766064 | 2013-02-18 | ||
CN201480009276.4A CN105900418B (zh) | 2013-02-18 | 2014-02-13 | Oled堆叠膜的质量评估的系统、设备和方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480009276.4A Division CN105900418B (zh) | 2013-02-18 | 2014-02-13 | Oled堆叠膜的质量评估的系统、设备和方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107871818A true CN107871818A (zh) | 2018-04-03 |
CN107871818B CN107871818B (zh) | 2020-04-07 |
Family
ID=51351209
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480009276.4A Active CN105900418B (zh) | 2013-02-18 | 2014-02-13 | Oled堆叠膜的质量评估的系统、设备和方法 |
CN201711385871.XA Active CN107871818B (zh) | 2013-02-18 | 2014-02-13 | Oled堆叠膜的质量评估的系统、设备和方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480009276.4A Active CN105900418B (zh) | 2013-02-18 | 2014-02-13 | Oled堆叠膜的质量评估的系统、设备和方法 |
Country Status (7)
Country | Link |
---|---|
US (4) | US9443299B2 (zh) |
EP (1) | EP2957102A4 (zh) |
JP (5) | JP6490013B2 (zh) |
KR (4) | KR102121089B1 (zh) |
CN (2) | CN105900418B (zh) |
TW (1) | TWI619939B (zh) |
WO (1) | WO2014127125A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102121089B1 (ko) | 2013-02-18 | 2020-06-09 | 카티바, 인크. | Oled 스택 필름의 품질 평가를 위한 시스템, 장치, 및 방법 |
CN107075767B (zh) * | 2014-11-26 | 2021-09-03 | 科迪华公司 | 环境受控的涂层系统 |
FR3053126B1 (fr) * | 2016-06-27 | 2019-07-26 | Saint-Gobain Glass France | Procede et dispositif de localisation de l'origine d'un defaut affectant un empilement de couches minces deposees sur un substrat |
US9961783B2 (en) | 2016-07-08 | 2018-05-01 | Kateeva, Inc. | Guided transport path correction |
CN106920828B (zh) * | 2017-03-29 | 2019-11-05 | 京东方科技集团股份有限公司 | 一种有机电致发光显示面板及制备方法 |
WO2018195030A1 (en) | 2017-04-20 | 2018-10-25 | Kateeva, Inc. | Analysis of material layers on surfaces, and related systems and methods |
WO2019099415A1 (en) * | 2017-11-14 | 2019-05-23 | Kateeva, Inc. | Systems and methods for profiling material layers on a substrate |
CN108010946B (zh) * | 2017-11-27 | 2022-02-25 | 京东方科技集团股份有限公司 | 一种像素界定层、阵列基板及显示装置 |
US10586325B2 (en) * | 2018-01-02 | 2020-03-10 | Bae Systems Controls Inc. | Delamination tracking systems and methods |
EP3569332A1 (en) * | 2018-05-14 | 2019-11-20 | Siemens Aktiengesellschaft | Method of providing a dataset, additive manufacturing method, computer program product and computer readable medium |
CN110232680B (zh) * | 2019-05-30 | 2021-04-27 | 广智微芯(扬州)有限公司 | 一种图像模糊度评价方法及装置 |
US11876022B2 (en) * | 2019-12-17 | 2024-01-16 | Tokyo Electron Limited | Substrate treatment method and substrate treatment system |
CN114022403A (zh) * | 2020-07-16 | 2022-02-08 | 京东方科技集团股份有限公司 | 检测显示面板不良的方法及装置 |
KR102661443B1 (ko) * | 2020-09-10 | 2024-04-30 | 세메스 주식회사 | 기판 처리 장치, 잉크젯 장치 및 메인터넌스 방법 |
CN113256635B (zh) * | 2021-07-15 | 2021-10-15 | 武汉中导光电设备有限公司 | 缺陷检测方法、装置、设备及可读存储介质 |
CN114708325A (zh) * | 2022-03-31 | 2022-07-05 | 南通华烨塑料工业有限公司 | 一种基于橡胶喷霜缺陷的橡胶生产问题快速定位方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1947153A (zh) * | 2003-12-12 | 2007-04-11 | 斯皮德莱技术公司 | 用于检测印刷焊锡膏中缺陷的系统和方法 |
US20100039510A1 (en) * | 2008-08-13 | 2010-02-18 | Apollo Systems, Llc | Method and DEVICE for PRINT INSPECTION |
Family Cites Families (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6411377B1 (en) * | 1991-04-02 | 2002-06-25 | Hitachi, Ltd. | Optical apparatus for defect and particle size inspection |
JPH04355353A (ja) * | 1991-05-31 | 1992-12-09 | Fuji Photo Film Co Ltd | 欠陥検査装置 |
US5764209A (en) * | 1992-03-16 | 1998-06-09 | Photon Dynamics, Inc. | Flat panel display inspection system |
US6947587B1 (en) * | 1998-04-21 | 2005-09-20 | Hitachi, Ltd. | Defect inspection method and apparatus |
JP2001041899A (ja) * | 1999-07-27 | 2001-02-16 | Toshiba Corp | 紙葉類の汚れ具合識別装置 |
US7289154B2 (en) * | 2000-05-10 | 2007-10-30 | Eastman Kodak Company | Digital image processing method and apparatus for brightness adjustment of digital images |
AU2002219847A1 (en) * | 2000-11-15 | 2002-05-27 | Real Time Metrology, Inc. | Optical method and apparatus for inspecting large area planar objects |
JP3985891B2 (ja) * | 2001-12-13 | 2007-10-03 | シャープ株式会社 | 画像欠陥検出装置および画像欠陥検出方法 |
US7146017B2 (en) * | 2002-05-02 | 2006-12-05 | Harman International Industries, Incorporated | Electrical connectors for electro-dynamic loudspeakers |
DE10233947A1 (de) * | 2002-07-25 | 2004-02-12 | Siemens Ag | Windkraftanlage |
US20040207836A1 (en) * | 2002-09-27 | 2004-10-21 | Rajeshwar Chhibber | High dynamic range optical inspection system and method |
US6916221B2 (en) * | 2002-11-18 | 2005-07-12 | Eastman Kodak Company | Determining defects in OLED devices |
US7308157B2 (en) * | 2003-02-03 | 2007-12-11 | Photon Dynamics, Inc. | Method and apparatus for optical inspection of a display |
JP3854585B2 (ja) * | 2003-03-17 | 2006-12-06 | 独立行政法人科学技術振興機構 | 液晶パネルの表示欠陥検出方法及び表示欠陥検査装置 |
US7366344B2 (en) * | 2003-07-14 | 2008-04-29 | Rudolph Technologies, Inc. | Edge normal process |
JP2005118752A (ja) * | 2003-10-20 | 2005-05-12 | Seiko Epson Corp | 薄膜形成方法及び液滴吐出装置 |
JP2005181040A (ja) * | 2003-12-18 | 2005-07-07 | Seiko Epson Corp | 表示パネルの欠陥検出方法及びその検出装置並びに表示パネルの製造方法 |
EP1605403A1 (en) * | 2004-06-08 | 2005-12-14 | STMicroelectronics S.r.l. | Filtering of noisy images |
KR20050122972A (ko) * | 2004-06-26 | 2005-12-29 | 삼성전자주식회사 | 유기 발광소자 분석방법 |
JP4759957B2 (ja) * | 2004-08-26 | 2011-08-31 | パナソニック電工株式会社 | 検査・計測用プログラムの作成方法並びにそのプログラムを作成するためのコンピュータプログラム及び検査・計測用プログラムの作成装置 |
JP4550559B2 (ja) * | 2004-11-24 | 2010-09-22 | シャープ株式会社 | 外観検査装置、外観検査方法およびコンピュータを外観検査装置として機能させるためのプログラム |
JP2006170922A (ja) * | 2004-12-20 | 2006-06-29 | Topcon Corp | 外観検査方法およびその装置 |
KR101387785B1 (ko) * | 2005-01-21 | 2014-04-25 | 포톤 다이나믹스, 인코포레이티드 | 자동 결함 복구 시스템 |
TWI318685B (en) * | 2005-07-28 | 2009-12-21 | Applied Materials Inc | Methods and apparatus for concurrent inkjet printing and defect inspection |
JP2007066561A (ja) * | 2005-08-29 | 2007-03-15 | Toshiba Matsushita Display Technology Co Ltd | 表示装置の製造装置及び製造方法 |
JP2007065561A (ja) | 2005-09-02 | 2007-03-15 | Toppan Printing Co Ltd | 電気泳動表示装置用前面板の検査方法および検査装置 |
KR20070028709A (ko) * | 2005-09-07 | 2007-03-13 | 정이호 | 유기발광장치 검사시스템 |
JP4657869B2 (ja) * | 2005-09-27 | 2011-03-23 | シャープ株式会社 | 欠陥検出装置、イメージセンサデバイス、イメージセンサモジュール、画像処理装置、デジタル画像品質テスタ、欠陥検出方法、欠陥検出プログラム、およびコンピュータ読取可能な記録媒体 |
JP2008145226A (ja) * | 2006-12-08 | 2008-06-26 | Olympus Corp | 欠陥検査装置及び欠陥検査方法 |
US7714996B2 (en) * | 2007-01-23 | 2010-05-11 | 3i Systems Corporation | Automatic inspection system for flat panel substrate |
US20080278598A1 (en) * | 2007-05-11 | 2008-11-13 | Michael Philip Greenberg | Devices, Systems, and Methods Regarding Camera Imaging |
JP4664327B2 (ja) * | 2007-05-16 | 2011-04-06 | 株式会社日立ハイテクノロジーズ | パターン検査方法 |
JP2008286728A (ja) * | 2007-05-21 | 2008-11-27 | Toppan Printing Co Ltd | 検査装置および方法 |
CN101861516B (zh) | 2007-10-05 | 2013-09-11 | 株式会社尼康 | 显示器件的缺陷检测方法及显示器件的缺陷检测装置 |
JP5163940B2 (ja) * | 2007-11-21 | 2013-03-13 | 横河電機株式会社 | 画質検査装置および画質検査方法 |
JP2010159979A (ja) | 2009-01-06 | 2010-07-22 | Hitachi Ltd | 外観検査方法及び外観検査システム |
JP2010197352A (ja) * | 2009-02-27 | 2010-09-09 | Hitachi High-Technologies Corp | 欠陥検査方法及び欠陥検査装置 |
JP2010218814A (ja) * | 2009-03-16 | 2010-09-30 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンスパネルの製造装置及び製造方法 |
US8035812B2 (en) | 2009-03-24 | 2011-10-11 | Qualcomm Mems Technologies, Inc. | System and method for measuring display quality with a hyperspectral imager |
US8259198B2 (en) * | 2009-10-20 | 2012-09-04 | Apple Inc. | System and method for detecting and correcting defective pixels in an image sensor |
JP5589472B2 (ja) * | 2010-03-19 | 2014-09-17 | 凸版印刷株式会社 | 有機el基板検査装置及び検査方法 |
US8459773B2 (en) | 2010-09-15 | 2013-06-11 | Electronics For Imaging, Inc. | Inkjet printer with dot alignment vision system |
US8721392B2 (en) * | 2011-06-28 | 2014-05-13 | Corning Incorporated | Glass edge finishing method |
JP2013160629A (ja) * | 2012-02-06 | 2013-08-19 | Hitachi High-Technologies Corp | 欠陥検査方法、欠陥検査装置、プログラムおよび出力部 |
US9743057B2 (en) | 2012-05-31 | 2017-08-22 | Apple Inc. | Systems and methods for lens shading correction |
KR102121089B1 (ko) | 2013-02-18 | 2020-06-09 | 카티바, 인크. | Oled 스택 필름의 품질 평가를 위한 시스템, 장치, 및 방법 |
-
2014
- 2014-02-13 KR KR1020157025541A patent/KR102121089B1/ko active IP Right Grant
- 2014-02-13 CN CN201480009276.4A patent/CN105900418B/zh active Active
- 2014-02-13 KR KR1020207002185A patent/KR20200011577A/ko not_active Application Discontinuation
- 2014-02-13 KR KR1020187031355A patent/KR20180120810A/ko not_active Application Discontinuation
- 2014-02-13 EP EP14751566.2A patent/EP2957102A4/en not_active Withdrawn
- 2014-02-13 US US14/180,015 patent/US9443299B2/en active Active
- 2014-02-13 CN CN201711385871.XA patent/CN107871818B/zh active Active
- 2014-02-13 KR KR1020207015814A patent/KR20200067917A/ko not_active Application Discontinuation
- 2014-02-13 WO PCT/US2014/016255 patent/WO2014127125A1/en active Application Filing
- 2014-02-13 JP JP2015558128A patent/JP6490013B2/ja active Active
- 2014-02-18 TW TW103105246A patent/TWI619939B/zh active
-
2016
- 2016-08-29 US US15/250,283 patent/US9812672B2/en active Active
-
2017
- 2017-09-19 US US15/709,320 patent/US10347872B2/en active Active
- 2017-12-28 JP JP2017253296A patent/JP6615172B2/ja active Active
-
2019
- 2019-05-29 US US16/425,915 patent/US10886504B2/en active Active
- 2019-11-05 JP JP2019200828A patent/JP6867712B2/ja active Active
-
2021
- 2021-04-02 JP JP2021063587A patent/JP2021122009A/ja active Pending
-
2022
- 2022-12-26 JP JP2022209107A patent/JP2023038215A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1947153A (zh) * | 2003-12-12 | 2007-04-11 | 斯皮德莱技术公司 | 用于检测印刷焊锡膏中缺陷的系统和方法 |
US20100039510A1 (en) * | 2008-08-13 | 2010-02-18 | Apollo Systems, Llc | Method and DEVICE for PRINT INSPECTION |
Also Published As
Publication number | Publication date |
---|---|
US9812672B2 (en) | 2017-11-07 |
JP2021122009A (ja) | 2021-08-26 |
US20170077461A1 (en) | 2017-03-16 |
WO2014127125A1 (en) | 2014-08-21 |
JP2018049851A (ja) | 2018-03-29 |
TWI619939B (zh) | 2018-04-01 |
TW201439525A (zh) | 2014-10-16 |
CN105900418B (zh) | 2018-01-12 |
JP6867712B2 (ja) | 2021-05-12 |
US9443299B2 (en) | 2016-09-13 |
JP6615172B2 (ja) | 2019-12-04 |
KR20200011577A (ko) | 2020-02-03 |
KR20200067917A (ko) | 2020-06-12 |
US20190280251A1 (en) | 2019-09-12 |
US10886504B2 (en) | 2021-01-05 |
US10347872B2 (en) | 2019-07-09 |
JP2023038215A (ja) | 2023-03-16 |
KR102121089B1 (ko) | 2020-06-09 |
JP6490013B2 (ja) | 2019-03-27 |
EP2957102A4 (en) | 2016-11-02 |
US20140233843A1 (en) | 2014-08-21 |
CN107871818B (zh) | 2020-04-07 |
JP2020017549A (ja) | 2020-01-30 |
KR20180120810A (ko) | 2018-11-06 |
JP2016517164A (ja) | 2016-06-09 |
US20180366687A1 (en) | 2018-12-20 |
CN105900418A (zh) | 2016-08-24 |
EP2957102A1 (en) | 2015-12-23 |
KR20150121084A (ko) | 2015-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105900418B (zh) | Oled堆叠膜的质量评估的系统、设备和方法 | |
CN110047770B (zh) | 基片的缺陷检查装置、基片的缺陷检查方法和存储介质 | |
US7275005B2 (en) | Worked product appearance inspection method and system therefore | |
CN109859171A (zh) | 一种基于计算机视觉和深度学习的楼面缺陷自动检测方法 | |
CN101076831A (zh) | 数字视频中的赝像减少 | |
JP7166189B2 (ja) | 画像生成装置、検査装置及び画像生成方法 | |
CN104811692A (zh) | 用于测试摄像模组的图片及其方法 | |
JP4709762B2 (ja) | 画像処理装置及び方法 | |
CN116977316A (zh) | 一种复杂外形构件损伤缺陷全场检测与量化评估方法 | |
KR101261016B1 (ko) | 평판패널 기판의 자동광학검사 방법 및 그 장치 | |
Pahwa et al. | Automated void detection in TSVs from 2D X-ray scans using supervised learning with 3D X-ray scans | |
KR102523770B1 (ko) | 딥러닝을 활용한 머신 비전 기반의 전장 부품의 품질 관리 시스템 및 방법 | |
WO2023223883A1 (ja) | コンピュータプログラム、および、データ処理装置 | |
KR20220163694A (ko) | 딥러닝 기반의 결함값 분포에 기초한 부품의 품질 관리 시스템 및 방법 | |
CN116539642A (zh) | 透明产品的缺陷位置检测方法及装置 | |
CN114998278A (zh) | 基于特征金字塔网络fpn的nled/qled/oled像素缺陷检测方法及系统 | |
CN112689852A (zh) | 至少两个样本之间的多种类型的缺陷之中的至少一种类型的缺陷的分析 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: System, equipment and method for quality evaluation of OLED stack film Effective date of registration: 20210112 Granted publication date: 20200407 Pledgee: Shaoxing Binhai New Area integrated circuit industry equity investment fund partnership (L.P.) Pledgor: KATEEVA, Inc. Registration number: Y2021990000034 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20221210 Granted publication date: 20200407 Pledgee: Shaoxing Binhai New Area integrated circuit industry equity investment fund partnership (L.P.) Pledgor: KATEEVA, Inc. Registration number: Y2021990000034 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: System, equipment, and method for quality evaluation of OLED stacked films Effective date of registration: 20230625 Granted publication date: 20200407 Pledgee: Xinji Co.,Ltd. Pledgor: KATEEVA, Inc. Registration number: Y2023990000313 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right |