CN107805786B - Multi-arc ion vacuum coating machine - Google Patents
Multi-arc ion vacuum coating machine Download PDFInfo
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- CN107805786B CN107805786B CN201711286957.7A CN201711286957A CN107805786B CN 107805786 B CN107805786 B CN 107805786B CN 201711286957 A CN201711286957 A CN 201711286957A CN 107805786 B CN107805786 B CN 107805786B
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 29
- 238000007789 sealing Methods 0.000 claims abstract description 45
- 238000005086 pumping Methods 0.000 claims abstract description 8
- 239000011553 magnetic fluid Substances 0.000 claims description 31
- 238000010438 heat treatment Methods 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 244000309464 bull Species 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract description 31
- 239000011248 coating agent Substances 0.000 abstract description 26
- 239000002245 particle Substances 0.000 abstract description 6
- 150000002500 ions Chemical class 0.000 description 29
- 230000033001 locomotion Effects 0.000 description 26
- 238000010891 electric arc Methods 0.000 description 16
- 230000005672 electromagnetic field Effects 0.000 description 12
- 238000007747 plating Methods 0.000 description 9
- 239000013077 target material Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 230000001360 synchronised effect Effects 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 7
- -1 argon ions Chemical class 0.000 description 6
- 238000007733 ion plating Methods 0.000 description 6
- 238000003754 machining Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910000975 Carbon steel Inorganic materials 0.000 description 3
- 239000010962 carbon steel Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multi-arc ion vacuum coating machine, which comprises a cavity, a vacuum pumping system and a multi-arc target assembly, wherein a rotating frame assembly is arranged in the cavity, a workbench is arranged on the rotating frame assembly, the rotating frame assembly is used for driving the workbench to rotate in the cavity, and the workbench is used for installing a workpiece; the vacuumizing system is connected with the cavity; the multi-arc target assembly comprises a plurality of cathode multi-arc target seats, permanent magnets are arranged on each cathode multi-arc target seat, the inner ends of each cathode multi-arc target seat are in sealing connection with the cavity through a straight pipe magnetic field superposition device, the inner ends of the cathode multi-arc target seats are connected with target seats sleeved in the straight pipe magnetic field superposition device, the target seats are used for installing targets, arc striking devices are arranged on each cathode multi-arc target seat, arc striking needles of the arc striking devices can contact the targets, and the straight pipe magnetic field superposition device can generate a changing magnetic field in a space where the targets are located. The multi-arc ion vacuum coating machine can effectively filter out large particles in the coating, so that the coating is compact and bright and has excellent performance.
Description
Technical Field
The invention relates to the technical field of ion plating, in particular to a multi-arc ion vacuum plating machine.
Background
In the twenty-first century, mechanical manufacturing technology has evolved toward high efficiency, high precision, high reliability, and specialization; in order to improve efficiency, machining precision, reliability and reduce cost, ultra-high cutting technology is developed, and high-performance cutters and high-performance hard coatings are required to be developed for machining superhard materials and difficult-to-machine materials; and a plurality of green manufacturing technologies which save energy, reduce consumption, protect environment and reduce pollution are not separated from the development of high-performance tools and dies. The ion plating machine can realize plating treatment on the cutter and the part die, so that the ion plating machine has excellent service performance, the hardness, the wear resistance, the corrosion resistance, the heat resistance, the lubricity and the like of the surface are obviously improved, and the quality (such as surface roughness, precision and the like) and the service life of the cutter and the part are greatly improved.
Compared with a common ion plating film plating machine, the multi-arc ion plating film plating device has the advantages of high deposition rate and high efficiency, more large particles in the coating, poor coating compactness and influence on the usability of a cutter and a workpiece. Especially for some finish machining tools and workpieces, the coating surface is rough, the friction force is large, and the service life of the finish machining tools and workpieces is directly influenced, so that the traditional ion plating film can not meet the plating film requirement of the product.
Disclosure of Invention
The invention aims to provide a multi-arc ion vacuum coating machine, which solves the problems in the prior art, can effectively filter out large particles in a coating, and ensures that the coating is compact and bright and has excellent performance.
In order to achieve the above object, the present invention provides the following solutions:
the invention provides a multi-arc ion vacuum coating machine which comprises a cavity, a vacuum pumping system and a multi-arc target assembly, wherein a rotating frame assembly is arranged in the cavity, a workbench is arranged on the rotating frame assembly, the rotating frame assembly is used for driving the workbench to rotate in the cavity, and the workbench is used for installing a workpiece; the vacuumizing system is connected with the cavity; the multi-arc target assembly comprises a plurality of cathode multi-arc target seats, each cathode multi-arc target seat is provided with a permanent magnet, each inner end of each cathode multi-arc target seat is in sealing connection with the cavity through a straight tube magnetic field superposition device, the inner end of each cathode multi-arc target seat is connected with a target seat sleeved in the straight tube magnetic field superposition device, the target seats are used for installing targets, each cathode multi-arc target seat is provided with an arc striking device, an arc striking needle of the arc striking device can contact the targets, and the straight tube magnetic field superposition device can generate a changing magnetic field in the space where the targets are located.
Preferably, the straight tube magnetic field superposition device comprises a straight tube and a conductive spiral coil, the straight tube is sleeved outside the target seat, one end of the straight tube is in sealing connection with the cathode multi-arc target seat, the other end of the straight tube is in sealing connection with the cavity, and the conductive spiral coil is sleeved outside the straight tube.
Preferably, the rotating frame assembly comprises a rotating disc shaft, a rotating disc, a first large gear and first small gears, wherein the rotating disc is coaxially and fixedly connected to the rotating disc shaft, the first large gear is coaxially sleeved on the rotating disc shaft and is circumferentially and fixedly connected to the bottom surface of the cavity, the first large gears are meshed with a plurality of the first small gears, each first small gear is fixedly connected with a workpiece mounting rod, each workpiece mounting rod penetrates through the rotating disc upwards, a part of each workpiece mounting rod located above the rotating disc is fixedly connected with a workbench, and the rotating frame assembly is driven by a rotary driving assembly.
Preferably, a shift lever is arranged on the turntable corresponding to each workpiece mounting rod, a second large gear is coaxially and movably sleeved on each workpiece mounting rod, and one end of each second large gear extends out of the workbench and is fixedly connected with the shift lever through a connecting rod; a pinion shaft is fixedly connected to each workbench, a second pinion is movably sleeved outside the pinion shaft, the second pinion is meshed with the second large gear, and the second pinion is used for installing a workpiece;
a workbench cover plate is arranged above the workbench, the workpiece mounting rod penetrates through the workbench cover plate, and the upper end of the second pinion stretches out of the workbench cover plate to mount a workpiece.
Preferably, the rotary driving assembly comprises a first motor, a belt pulley transmission group and a first magnetic fluid sealing device, wherein an output shaft of the first motor is connected with an input shaft of the first magnetic fluid sealing device through the belt pulley transmission group, an output shaft of the first magnetic fluid sealing device is fixedly connected with the turntable shaft, and the first magnetic fluid sealing device is connected on the bottom surface of the cavity in a sealing manner; a plurality of heating rods are arranged in the cavity, the top ends of the heating rods are fixedly connected to the top surface of the cavity at the periphery of the rotating frame assembly, and a plurality of thermocouples are arranged between the heating rods in the cavity.
Preferably, the first large gear is provided with a plurality of rotating frame fixing support pieces along the circumferential direction, and the lower end of each rotating frame fixing support piece is fixedly connected with the bottom surface of the cavity in the circumferential direction.
Preferably, the device further comprises a target baffle assembly, the target baffle assembly comprises a second motor, a second magnetic fluid sealing device and a baffle, an output shaft of the second motor is connected with an input shaft of the second magnetic fluid sealing device, an output shaft of the second magnetic fluid sealing device is connected with the baffle through a baffle connecting piece, the baffle is a cambered surface baffle and is positioned between the side wall of the cavity and the rotating frame assembly, and the second magnetic fluid sealing device is connected onto the top surface of the cavity in a sealing mode.
Preferably, the vacuum pumping system comprises a low vacuum pump and a high vacuum pump, wherein the low vacuum pump is connected with the cavity through a bypass valve, one end of the high vacuum pump is connected with the low vacuum pump through a backing valve, and the other end of the high vacuum pump is connected with the cavity through a pneumatic gate valve and a flow limiting valve assembly in sequence.
Preferably, a rotary table cover plate is arranged above the rotary table, the lower end of each deflector rod penetrates through the rotary table cover plate to be connected with the rotary table, and the lower end of each workpiece mounting rod penetrates through the rotary table cover plate and the rotary table in sequence and is connected with the corresponding first pinion.
Preferably, the rotary frame assembly further comprises a rotary frame cover plate, the upper ends of the deflector rods are in threaded connection with the rotary frame cover plate, and the upper ends of the workpiece mounting rods are movably arranged on the rotary frame cover plate in a penetrating mode.
Compared with the prior art, the invention has the following technical effects:
the invention provides a multi-arc ion vacuum coating machine, which is additionally provided with a straight pipe magnetic field superposition device, wherein the straight pipe magnetic field superposition device can generate a variable magnetic field in a space where a target is located, when the multi-arc ion vacuum coating machine works, the conductive solenoid is electrified, an electromagnetic field with larger vertical target surface component is generated in front of a plasma region through the conductive solenoid, and the principle of straight pipe magnetic field superposition is as follows: firstly, the movement rate of arc light on a target surface is increased through superposition of an electromagnetic field of the target surface and a permanent magnetic field of the target surface, so that the residence time of electrons in a discharge area of the target surface is reduced, and as the residence time of the arc light in a certain area of the target surface is longer, the heat generated is larger, large liquid drops (atomic clusters) are easier to ablate, so that the superposition of the magnetic fields can greatly reduce the occurrence of the large liquid drops by reducing the residence time of arc discharge spots in each area; the conductive solenoid coil of the straight tube magnetic field superposition device can pass through the variable current so as to generate a variable electromagnetic field, a component B3 of the variable electromagnetic field vertical to the target surface and a component B4 parallel to the target surface are respectively superposed with B1 and B2 generated by the permanent magnetic field, the component vertical to the target surface of the superposed magnetic field is (B1+B3), the component parallel to the target surface is (B2+B4), B1 and B2 generated by the permanent magnetic field are constant, B3 and B4 generated by the electromagnetic field are changed, and thus (B1+B3) and (B2+B4) generated by the superposed magnetic field are both changed, electrons on the target surface do circular motion with diameter change in the variable magnetic field, and the target surface electrons can move in a spiral state according to requirements, so that the movement track diameter of an arc discharge spot is changed along with the change of the magnetic field, and the arc discharge spot ablates the whole target surface; the superposition of the electromagnetic field and the permanent magnetic field can not only meet the requirement of ablating the whole target surface of the target material, but also meet the requirement of accelerating the movement of the arc spots, thereby reducing the residence time of the arc spots in each area of the target surface, greatly reducing the occurrence of large liquid drops, improving the coating quality and simultaneously improving the utilization rate of the target material.
According to the multi-arc ion vacuum coating machine, large particles in the coating can be effectively filtered through the straight pipe magnetic field superposition system, so that the coating on the surface of a workpiece is miniaturized, the coating has high toughness, high hardness and high oxidation resistance, the coating is firmly and brightly adhered to a substrate in the film layer deposition process, the coating is small in friction force, the performance is excellent, and the hardness, wear resistance, heat resistance, corrosion resistance and lubricating performance of the coating surface are all improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the overall structure of a multi-arc ion vacuum coating machine provided by the invention;
FIG. 2 is an enlarged schematic view of a portion of the multi-arc ion vacuum coater M of FIG. 1;
FIG. 3 is a left side view of the multi-arc ion vacuum coater of FIG. 1;
FIG. 4 is a top view of the multi-arc ion vacuum coater of FIG. 1;
FIG. 5 is a schematic diagram of a multi-arc target assembly of the multi-arc ion vacuum coater provided by the invention;
FIG. 6 is a schematic diagram of the trajectory of an arc discharge half-pitting target in an ion vacuum coater in the middle section of the prior art;
FIG. 7 is a schematic diagram of the track of an arc discharge pitting target in a multi-arc ion vacuum coating machine provided by the invention;
FIG. 8 is a schematic diagram of a magnetic field generated by a straight tube magnetic field superposition device in a multi-arc ion vacuum coating machine;
FIG. 9 is a schematic diagram of a spin stand assembly of a multi-arc ion vacuum coater according to the present invention;
FIG. 10 is a schematic view of a partial structure of a workbench of a multi-arc ion vacuum coating machine provided by the invention;
FIG. 11 is a schematic diagram of a target baffle assembly of a multi-arc ion vacuum coater according to the present invention;
FIG. 12 is a schematic diagram of a vacuum pumping system of a multi-arc ion vacuum coating machine according to the present invention;
in the figure: 1-a chamber; 11-heating rod; 12-thermocouple; 2-vacuumizing system; 21-a low vacuum pump; 22-high vacuum pump; a 23-bypass valve; 24-backing valve; 25-pneumatic gate valve; 26-a restrictor valve assembly; a 3-multi-arc target assembly; 31-cathode multi-arc backing plate; 32-permanent magnets; 33-carbon steel fixture; 34-straight tube magnetic field superposition device; 341-a straight tube; 342-a conductive solenoid; 35-a target holder; 36-target material; 37-arc striking device; 371-arc striking needle; a 4-rotating rack assembly; 41-a workbench; 411-second gearwheel; 412-a connecting rod; 413-a second pinion; 414—a table cover plate; 42-a turntable shaft; 43-a turntable; 431—a turntable cover plate; 44-a first gearwheel; 45-a first pinion; 46-a workpiece mounting bar; 461-a workpiece mounting plate; 47-a deflector rod; 48-rotating rack fixed support; 481-support block; 482-support rails; 49-rotating rack cover plate; 5-a rotary drive assembly; 51-a first motor; 52-pulley drive train; 53-a first magnetic fluid seal; 6-a target baffle assembly; 61-a second motor; 62-a second magnetic fluid seal; 63-a baffle; 631-baffle connection.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide a multi-arc ion vacuum coating machine, which solves the problems in the prior art, can effectively filter out large particles in a coating, and ensures that the coating is compact and bright and has excellent performance.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
The embodiment provides a multi-arc ion vacuum coating machine, which comprises a chamber 1, a vacuumizing system 2 and a multi-arc target assembly 3, wherein a rotating frame assembly 4 is arranged in the chamber 1, a workbench 41 is arranged on the rotating frame assembly 4, the rotating frame assembly 4 is used for driving the workbench 4 to rotate in the chamber 1, and the workbench 41 is used for installing a workpiece; the vacuumizing system 2 is connected with the chamber 1 to vacuumize the chamber 1; the multi-arc target assembly 3 comprises a plurality of cathode multi-arc target seats 31, a permanent magnet 32 is arranged on each cathode multi-arc target seat 31, in the embodiment, a carbon steel fixing piece 33 is connected on the outer end of each cathode multi-arc target seat 31 through bolts, one end of each carbon steel fixing piece 33 is adsorbed with one permanent magnet 32, and the permanent magnet 32 is fixed on each cathode multi-arc target seat 31; the inner end of each cathode multi-arc target seat 31 is in sealing connection with the cavity 1 through a straight tube magnetic field superposition device 34, the inner end of each cathode multi-arc target seat 31 is connected with a target seat 35 sleeved in the straight tube magnetic field superposition device 34, the target seat 35 is used for installing a target 36, each cathode multi-arc target seat 31 is provided with an arc striking device 37, an arc striking needle 371 of the arc striking device 37 can contact the target 36, and the straight tube magnetic field superposition device 34 can generate a variable magnetic field in the space where the target 36 is located.
In the multi-arc ion vacuum coating machine provided in this embodiment, as shown in fig. 5-8, when in use, the chamber 1 is connected with the positive electrode of the power supply, argon is filled in the chamber 1, the cathode multi-arc target seat 31 is connected with the negative electrode of the power supply, after the power supply is electrified, electrons move on the surface of the target 36, arc striking is performed through the striking device 37 to emit electrons on the surface of the target 36, joule heat is generated by the movement of the electrons on the target 36, so that metal on the surface of the target is melted and evaporated, the electrons emitted from the surface of the target 36 collide with gas in the space to ionize the gas, positively charged argon ions are formed, the target 36 is negatively charged, the argon ions are positively charged, the argon ions are continuously attracted to the vicinity of the surface of the target 36, the distance between the argon ions and the surface of the target is very close to form a very strong electric field, the electrons on the surface of the target 36 are continuously emitted under the effect of the electric field, the joule heat is continuously generated, and accordingly, the metal on the surface of the target 36 is continuously melted, and new argon ions are generated by continuously gas in the collision space, and are supplemented to the positively charged argon ions and circulated. The trajectory of the electron (i.e., arc discharge spot) movement on the surface of the target 36 determines the trajectory of the target metal melting, the workpiece is positioned in front of the target 36, and the evaporated target atoms or ions move to the surface of the workpiece and deposit on the workpiece to form a coating. The electron (arc discharge spot) movement position on the surface of the target 36 is related to the surface flatness of the target 36 without the action of a magnetic field, and the movement speed is slower than that of the target 36.
In the existing ion vacuum coating machine, a permanent magnet is arranged behind a cathode multi-arc target, and forms a permanent magnetic field on the surface of the target, so that the field strength is constant. In a certain area of the target surface, the multi-arc target permanent magnetic field generates a component B1 vertical to the target surface and a component B2 parallel to the target surface, the component B1 vertical to the target surface determines the motion track of the arc discharge spot on the target surface, and the magnetic field B2 parallel to the target surface determines the speed of the arc discharge spot moving along the circumference. If the permanent magnetic field (common cathode target) is only used, the influence of the permanent magnetic field on the movement track of electrons is small, the movement of electrons is random and the speed is slow, so that the electrons (arc discharge spots) move randomly and the speed is slow on the whole target surface, more large liquid drops are easy to form when the target material evaporates, more large particles are generated in the coating film, and the performance of a workpiece is influenced. When the permanent magnetic field is strong, the vertical component B1 and the horizontal component B2 of the target surface magnetic field are increased, the vertical component B1 of the target surface magnetic field influences the circular motion diameter of electrons, the B1 is increased, and the circular motion diameter of electrons is increased, so that arc discharge spots do circular motion at the edge of a cathode target; the horizontal component B2 of the target surface magnetic field influences the velocity of the electron circular motion, B2 is increased, and the velocity of the electron circular motion is increased. Because the permanent magnetic field is generated by the magnet, the field strength is a fixed value, the diameter of the electron doing circular motion in the magnetic field is unchanged, when the permanent magnetic field is strong, the arc spot is ablated into a circle, although the motion is fast, the arc spot is only ablated at the edge of the target, the whole target surface cannot be distributed, and the target utilization rate is low, as shown in fig. 6. In summary, in the existing ion vacuum coating machine, when a permanent magnetic field is strong, electrons (arc discharge spots) on the surface of a target move in the permanent magnetic field, the movement diameter is fixed under the constraint of the magnetic field, the target is ablated only by one circle, and the target utilization rate is low; the permanent magnetic field is weakened, the magnetic field constraint is lowered, the movement range of electrons (arc discharge spots) on the surface of the target material is enlarged, the speed is reduced, and large liquid drops are increased.
In the multi-arc ion vacuum coating machine in this embodiment, the straight tube magnetic field superposition device 34 includes a straight tube 341 and a conductive solenoid 342, the straight tube 341 is sleeved outside the target seat 35, one end of the straight tube 341 is in sealing connection with the cathode multi-arc target seat 31, the other end of the straight tube 341 is in sealing connection with the chamber 1, and the conductive solenoid 342 is sleeved outside the straight tube 341.
The invention adds a straight tube magnetic field superposition device 34, the straight tube magnetic field superposition device 34 can generate a changing magnetic field B in the space where the target 36 is located, when in operation, the conductive spiral coil 342 is electrified, and an electromagnetic field with larger vertical target surface component is generated in front of the plasma region through the conductive spiral coil 342, as shown in fig. 8, the principle of straight tube magnetic field superposition is as follows: firstly, through superposition of an electromagnetic field of a target surface (the surface of a target material) and a permanent magnetic field of the target surface, the movement rate of arc light on the target surface is increased, so that the residence time of electrons in a discharge area of the target surface is reduced, and as the residence time of the arc light in a certain area of the target surface is longer, the generated heat is larger, large liquid drops (atomic clusters) are easier to ablate, so that the superposition of the magnetic fields can greatly reduce the occurrence of the large liquid drops by reducing the residence time of arc discharge spots in each area; the conductive solenoid 342 of the straight tube magnetic field superposition device 34 can pass through the variable current, thereby generating a variable electromagnetic field B, the component B3 of the variable electromagnetic field B vertical to the target surface and the component B4 parallel to the target surface are respectively superposed with B1 and B2 generated by the permanent magnetic field, the component vertical to the target surface of the superposed magnetic field is (B1+B3), the component parallel to the target surface is (B2+B4), the component B1 and B2 generated by the permanent magnetic field are constant, and the B3 and B4 generated by the electromagnetic field are changed, so that the (B1+B3) and (B2+B4) generated by the superposed magnetic field are both changed, and electrons on the surface of the target 36 do circular motion with diameter change in the variable magnetic field, and the electrons on the target surface can move in a spiral state according to the requirement, so that the movement track diameter of an arc discharge spot is changed along with the change of the magnetic field, the arc discharge spot ablates the whole target surface, and the utilization rate of the target material is improved, as shown in fig. 7; the superposition of the electromagnetic field and the permanent magnetic field can not only meet the requirement of ablating the whole target surface of the target material, but also meet the requirement of accelerating the movement of the arc spots, thereby reducing the residence time of the arc spots in each area of the target surface, greatly reducing the occurrence of large liquid drops, improving the coating quality and simultaneously improving the utilization rate of the target material.
As shown in fig. 9-10, the rotary frame assembly 4 of the multi-arc ion vacuum coating machine in this embodiment includes a turntable shaft 42, a turntable 43, a first large gear 44 and a first small gear 45, the turntable 43 is coaxially and fixedly connected to the turntable shaft 42, the first large gear 44 is coaxially sleeved on the turntable shaft 42 and is circumferentially and fixedly connected to the bottom surface of the chamber 1, the first large gear 44 is meshed with a plurality of first small gears 45, each first small gear 45 is fixedly connected with a workpiece mounting rod 46, each workpiece mounting rod 46 passes through the turntable 43 upwards, and a workbench 41 is fixedly connected to a portion of each workpiece mounting rod 46 above the turntable 43; the rotating frame assembly 4 is driven by a rotating driving assembly 5, the rotating driving assembly 5 comprises a first motor 51, a belt pulley transmission group 52 and a first magnetic fluid sealing device 53, an output shaft of the first motor 51 is connected with an input shaft of the first magnetic fluid sealing device 53 through the belt pulley transmission group 52, an output shaft of the first magnetic fluid sealing device 53 is fixedly connected with the turntable shaft 42, and the first magnetic fluid sealing device 53 is connected on the bottom surface of the cavity 1 in a sealing mode.
As shown in fig. 10, a shift lever 47 is disposed on the turntable 43 corresponding to each workpiece mounting rod 46, a workbench 41 is mounted on each shift lever 47, a second large gear 411 is coaxially and movably sleeved on each workpiece mounting rod 46, each second large gear 411 is mounted on the corresponding workbench, and one end of each second large gear 411 extends out of the workbench 41 and is fixedly connected with the shift lever 47 through a connecting rod 412; each workbench 41 is fixedly connected with a pinion shaft, a second pinion 413 is movably sleeved outside the pinion shaft, the second pinion 413 is meshed with the second large gear 411, the second pinion 413 is used for installing a workpiece, and the workpiece and the second pinion 413 are coaxially installed.
With the above arrangement, after the first motor 51 is started, the first motor 51 rotates to drive a driving synchronous pulley mounted on an output shaft of the first motor 51 to rotate, the driving synchronous pulley and a driven synchronous pulley are driven by a synchronous belt, the driven synchronous pulley is fixed on an input shaft of the first magnetic fluid sealing device 53, an output shaft of the first magnetic fluid sealing device 53 is connected with the turntable shaft 42, the driving synchronous pulley drives the driven synchronous pulley to rotate, the driven synchronous pulley drives the turntable shaft 42 to rotate, thereby driving the turntable 43 mounted on the turntable shaft 42 to rotate, the first pinion 45 is fixed on the lower end of the workpiece mounting rod 46, the workpiece mounting rod 46 passes through the turntable 43 upwards, so that the first pinion 45 is fixed circumferentially relative to the turntable 43, the turntable 43 rotates, the first pinion 45 rotates along with the turntable 43, and the first pinion 45 rotates around the turntable shaft 42; the first large gear 44 is fixedly connected to the bottom surface of the chamber 1 in the circumferential direction, so that the first large gear 44 cannot rotate in the circumferential direction, the first small gear 45 is meshed with the first large gear 44 to rotate when the turntable 43 rotates around the turntable shaft 42, the first small gear 45 rotates to drive the workpiece mounting rod 46 to rotate, the workbench 41 is mounted on the workpiece mounting rod 46 and rotates along with the workpiece mounting rod 46, and therefore rotation of the workbench 41 around the turntable shaft 42 is achieved, rotation of a workpiece around the turntable shaft 42 and rotation of the workpiece around the workpiece mounting rod 46 are achieved, and the rotation is first-stage rotation and second-stage rotation of the workpiece. The workbench 41 is mounted on the workpiece mounting rod 46, during the rotation of the workpiece mounting rod 46, the second large gear 45 is blocked by the deflector rod 47 fixed on the turntable 43 and cannot rotate, the second small gear 413 is sleeved on the small gear shaft and rotates along with the workpiece mounting rod 46, the second small gear 413 is meshed with the second large gear 411, the second small gear 413 is meshed and rotated around the second large gear 411, a workpiece is coaxially mounted with the second small gear 413, and the second small gear 413 rotates to drive the workpiece to rotate, so that the workpiece rotates while revolving around the workpiece mounting rod 46, and the workpiece rotates as a third-stage rotation; the workpiece may not be coaxially mounted with the second pinion 413, so that the workpiece is mounted on the second pinion 413 to rotate about the axis of the pinion shaft with rotation of the second pinion 413, and three-stage rotation of the workpiece can be achieved.
The rotating frame assembly 4 can realize three-stage rotation of the workpiece around the rotating disc shaft 42, the workpiece around the workpiece mounting rod 46 and the workpiece rotation, so that revolution and rotation of each cutter sample are realized, each part of the sample is uniformly coated, the coating density is uniform, the compactness is good, and the quality of the workpiece is improved.
A table cover plate 414 is provided above the table 41, the work mounting rod passes through the table cover plate 414, and the upper end of the second pinion 413 protrudes out of the table cover plate 414 to mount the work. The workbench cover plate 414 can protect the workbench 41, the second large gear 411 and the second small gear 413 in the coating process, so that the workbench is prevented from being polluted by coating materials, and the quality of subsequent coating is prevented from being influenced.
As shown in fig. 4, a plurality of heating rods 11 are arranged in the chamber 1, the top ends of the heating rods 11 are fixedly connected to the top surface of the chamber 1 at the periphery of the rotating frame assembly 4, and a plurality of thermocouples 12 are arranged between the heating rods 11 in the chamber 1.
Specifically, in the multi-arc ion vacuum coating machine in this embodiment, 15 heating rods 11 are arranged on the outer ring of the chamber 1, and the environment and the workpiece of the chamber 1 can be heated under high vacuum condition before coating; three thermocouples 12 are uniformly distributed on the outer ring of the chamber heating rod 11, monitor the temperatures of different positions of the chamber 1, and can realize the control of the heating temperature of the heating rod 11 according to the temperatures monitored by the thermocouples 12, so that the temperatures of different positions of the chamber 1 are uniform, the uniform heating of samples is realized, the heating temperature can reach 500 ℃, and the uniformity of a temperature field is within 5%. In the use process of the equipment, the surfaces of the chamber wall, the sample and the like of the chamber 1 can absorb miscellaneous gas, the absorbed miscellaneous gas is difficult to be pumped out simply through the vacuum system 2, and the movement of the absorbed miscellaneous gas can be accelerated and the activity of the adsorbed miscellaneous gas can be enhanced at high temperature, so that the surface of the sample is separated from the surface of the sample and pumped out by the vacuum system 2, the degassing of the chamber 1 is realized, the miscellaneous gas in the coating process is reduced, the film layer is pure and compact, the bonding force of the film layer can be increased at high temperature, the film layer is not easy to fall off, and the service life of a cutter is greatly prolonged.
As shown in fig. 2, the first large gear 44 is circumferentially provided with a plurality of rotating frame fixing supports 48, and the lower end of each rotating frame fixing support 48 is fixedly connected with the bottom surface of the chamber 1 circumferentially. In a specific scheme, each rotating frame fixing support 48 includes a support block 481 and a support rail 482, the first large gear 44 is fixedly provided with a plurality of support blocks 481 along the circumferential direction, a support rail 482 is provided below each support block 481, the support rail 482 is a linear guide and is fixed on the bottom surface of the chamber 1, and the support blocks 481 are clamped on the support rails 482, so that the circumferential movement of the first large gear 44 can be limited.
As shown in fig. 11, the multi-arc ion vacuum coating machine in this embodiment further includes a target baffle plate assembly 6, where the target baffle plate assembly 6 includes a second motor 61, a second magnetic fluid sealing device 62 and a baffle plate 63, an output shaft of the second motor 61 is connected with an input shaft of the second magnetic fluid sealing device 62, an output shaft of the second magnetic fluid sealing device 62 is connected with the baffle plate 63 through a baffle plate connecting piece 631, the baffle plate 63 is a cambered baffle plate and is located between a side wall of the chamber 1 and the rotating frame assembly 4, and the second magnetic fluid sealing device 62 is connected on a top surface of the chamber 1 in a sealing manner. The second motor 61 is a stepping motor, the outer wall of the target baffle 63 is tightly attached to the inner side wall of the chamber 1, the target baffle 63 controls the rotating position through the number of steps of the second motor 61, the second motor 61 rotates, and the target baffle 63 can move to the front of the surface of the target 36 or to the front of the surface of the target 36, so that the unused target surface is shielded in the coating process, and the target 36 is prevented from being polluted by sputtering the coating onto the unused target surface, and the quality of a film layer is reduced; the target 36 to be used can be shielded by the target shield 63 before the film plating is started, and the target is washed, so that impurities on the current target 36 can be removed.
As shown in fig. 12, the vacuum pumping system 2 includes a low vacuum pump 21 and a high vacuum pump 22, the low vacuum pump 21 is connected to the chamber 1 through a bypass valve 23, one end of the high vacuum pump 22 is connected to the low vacuum pump 21 through a backing valve 24, and the other end of the high vacuum pump 22 is connected to the chamber 1 through a pneumatic gate valve 25 and a restrictor valve assembly 26 in sequence.
Wherein the low vacuum pump 21 adopts a mechanical pump, and is used for pumping low vacuum, and the high vacuum pump 22 adopts a molecular pump, and is used for pumping high vacuum. The pneumatic gate valve 25 is used for separating the chamber 1 from the high vacuum pump 22, because the high vacuum pump 22 rotates at a high speed to vacuumize, the high vacuum pump 22 can be opened only when the pressure at the two ends of the high vacuum pump 22 is below 5 Pa for protecting the blades and the vacuum at the two ends of the high vacuum pump 22 is below 5 Pa, so that the chamber 1 and the high vacuum pump 22 are required to be separated when the chamber 1 is vacuumized, the pneumatic gate valve 25 can be opened only when the low vacuum pump 21 vacuumizes the chamber 1 and the high vacuum pump 22 to a certain vacuum degree, the high vacuum pump 22 is communicated with the chamber 1, and the high vacuum is pumped for the chamber 1. The bypass air suction pipeline of the low vacuum pump 21 and the chamber 1 is provided with a bypass valve 23, the pipeline of the low vacuum pump 21 and the high vacuum pump 22 is provided with a backing valve 24, the pipeline of the high vacuum pump 22 and the chamber 1 is provided with a pneumatic gate valve 25 and a flow limiting valve component 26, the flow limiting valve component 26 comprises a circular plate and a stepping motor which are arranged in the air suction pipeline, the stepping motor controls the rotation of the circular plate, and the size of an air suction channel for vacuumizing the chamber 1 is controlled by rotating different angles, so that the coating pressure is controlled when coating is carried out. When the vacuumizing system 2 works, the mechanical pump 21 is firstly opened, the chamber 1 is vacuumized through the bypass air suction pipeline, after a certain vacuum degree (5 Pa) is achieved, the bypass valve 23 is closed, the backing valve 24 is opened, the molecular pump is also vacuumized to a certain vacuum degree (5 Pa) through the mechanical pump, at the moment, the molecular pump can be opened, the pneumatic gate valve 25 is opened to enable the molecular pump to be connected with the chamber 1, and high vacuum is pumped to the chamber 1. After the low vacuum and the high vacuum are pumped by a mechanical pump and a molecular pump, the equipment can be in the high vacuum environment required by film coating. When the molecular pump is started, the mechanical pump is also started, and the molecular pump is pumped out by the mechanical pump through the front stage.
A rotary table cover plate 431 is arranged above the rotary table 43, the lower ends of the deflector rods 47 penetrate through the rotary table cover plate 431 to be connected with the rotary table 43, and the lower ends of the workpiece mounting rods 46 penetrate through the rotary table cover plate 431 and the rotary table 43 in sequence and are connected with the corresponding first pinion gears 45.
Specifically, the first pinion 45 is connected to the workpiece mounting rod 46 through a workpiece mounting plate 461, the workpiece mounting plate 461 is clamped on the upper surface of the turntable 43, and the lower end of the workpiece mounting rod 46 is fixedly connected to the workpiece mounting plate 461. The turntable cover plate 431 can protect the turntable 43, the first large gear 44 and the first small gear 45 in the film plating process, so that the film plating material is prevented from polluting the workbench 41 to influence the quality of subsequent film plating.
The rotating frame assembly 4 further comprises a rotating frame cover plate 49, the upper ends of the shifting rods 47 are in threaded connection with the rotating frame cover plate 49, and the upper ends of the workpiece mounting rods 46 are movably arranged on the rotating frame cover plate 49 in a penetrating mode, so that the workpiece mounting rods 46 are stably mounted, and the position of the workpiece in the coating process is stable.
The principles and embodiments of the present invention have been described in detail with reference to specific examples, which are provided to facilitate understanding of the method and core ideas of the present invention; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (9)
1. A multi-arc ion vacuum coating machine is characterized in that: comprising the following steps:
the device comprises a chamber, wherein a rotating frame assembly is arranged in the chamber, a workbench is arranged on the rotating frame assembly, the rotating frame assembly is used for driving the workbench to rotate in the chamber, and the workbench is used for installing a workpiece;
the vacuumizing system is connected with the cavity; and
the multi-arc target assembly comprises a plurality of cathode multi-arc target seats, a permanent magnet is arranged on each cathode multi-arc target seat, the inner end of each cathode multi-arc target seat is in sealing connection with the cavity through a straight tube magnetic field superposition device, the inner end of each cathode multi-arc target seat is connected with a target seat sleeved in the straight tube magnetic field superposition device, the target seats are used for installing targets, each cathode multi-arc target seat is provided with an arc striking device, an arc striking needle of the arc striking device can contact the targets, and the straight tube magnetic field superposition device can generate a changing magnetic field in the space where the targets are located; the heating device comprises a cavity, and is characterized in that a plurality of heating rods are arranged in the cavity, the straight tube magnetic field superposition device comprises a straight tube and a conductive solenoid, the straight tube is sleeved outside the target seat, one end of the straight tube is in sealing connection with the cathode multi-arc target seat, the other end of the straight tube is in sealing connection with the cavity, and the conductive solenoid is sleeved outside the straight tube.
2. The multi-arc ion vacuum coating machine of claim 1, wherein: the rotary frame assembly comprises a rotary table shaft, a rotary table, first large gears and first small gears, wherein the rotary table is coaxially and fixedly connected to the rotary table shaft, the first large gears are coaxially sleeved on the rotary table shaft and are circumferentially and fixedly connected to the bottom surface of the cavity, the first large gears are meshed with a plurality of the first small gears, each first small gear is fixedly connected with a workpiece mounting rod, each workpiece mounting rod upwards penetrates through the rotary table, one workbench is fixedly connected to the part of each workpiece mounting rod located above the rotary table, and the rotary frame assembly is driven by a rotary driving assembly.
3. The multi-arc ion vacuum coating machine of claim 2, wherein: a deflector rod is arranged on the turntable corresponding to each workpiece mounting rod, a second large gear is coaxially and movably sleeved on each workpiece mounting rod, and one end of each second large gear extends out of the workbench and is fixedly connected with the deflector rod through a connecting rod; a pinion shaft is fixedly connected to each workbench, a second pinion is movably sleeved outside the pinion shaft, the second pinion is meshed with the second large gear, and the second pinion is used for installing a workpiece;
a workbench cover plate is arranged above the workbench, the workpiece mounting rod penetrates through the workbench cover plate, and the upper end of the second pinion stretches out of the workbench cover plate to mount a workpiece.
4. A multi-arc ion vacuum coater according to claim 2 or 3 wherein: the rotary driving assembly comprises a first motor, a belt pulley transmission group and a first magnetic fluid sealing device, wherein an output shaft of the first motor is connected with an input shaft of the first magnetic fluid sealing device through the belt pulley transmission group, an output shaft of the first magnetic fluid sealing device is fixedly connected with the turntable shaft, and the first magnetic fluid sealing device is connected to the bottom surface of the cavity in a sealing manner; the top end of the heating rod is fixedly connected to the top surface of the cavity at the periphery of the rotating frame assembly, and a plurality of thermocouples are arranged between the heating rods in the cavity.
5. The multi-arc ion vacuum coating machine of claim 2, wherein: the first bull gear is provided with a plurality of swivel mount fixed support piece along circumference, each swivel mount fixed support piece's lower extreme all with the bottom surface circumference fixed connection of cavity.
6. The multi-arc ion vacuum coating machine according to claim 1 or 2, wherein: the rotary rack comprises a chamber, a rotary rack assembly, a target baffle assembly, a first magnetic fluid sealing device, a second magnetic fluid sealing device and a second magnetic fluid sealing device, wherein the target baffle assembly comprises a second motor, the second magnetic fluid sealing device and a baffle, an output shaft of the second motor is connected with an input shaft of the second magnetic fluid sealing device, an output shaft of the second magnetic fluid sealing device is connected with the baffle through a baffle connecting piece, the baffle is a cambered surface baffle and is positioned between the side wall of the chamber and the rotary rack assembly, and the second magnetic fluid sealing device is connected onto the top surface of the chamber in a sealing mode.
7. The multi-arc ion vacuum coating machine of claim 1, wherein: the vacuum pumping system comprises a low vacuum pump and a high vacuum pump, the low vacuum pump is connected with the cavity through a bypass valve, one end of the high vacuum pump is connected with the low vacuum pump through a backing valve, and the other end of the high vacuum pump is connected with the cavity through a pneumatic gate valve and a flow limiting valve assembly in sequence.
8. A multi-arc ion vacuum coater according to claim 3 wherein: a rotary table cover plate is arranged above the rotary table, the lower end of each deflector rod penetrates through the rotary table cover plate to be connected with the rotary table, and the lower end of each workpiece mounting rod penetrates through the rotary table cover plate and the rotary table in sequence and is connected with the corresponding first pinion.
9. A multi-arc ion vacuum coater according to claim 3 wherein: the rotary frame assembly further comprises a rotary frame cover plate, the upper ends of the deflector rods are in threaded connection with the rotary frame cover plate, and the upper ends of the workpiece mounting rods are movably arranged on the rotary frame cover plate in a penetrating mode.
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| CN201711286957.7A CN107805786B (en) | 2017-12-07 | 2017-12-07 | Multi-arc ion vacuum coating machine |
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| CN201711286957.7A CN107805786B (en) | 2017-12-07 | 2017-12-07 | Multi-arc ion vacuum coating machine |
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