CN2290608Y - Rotary magnetic-controlled column arc source multi-arc ion film caoating machine - Google Patents
Rotary magnetic-controlled column arc source multi-arc ion film caoating machine Download PDFInfo
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- CN2290608Y CN2290608Y CN 96218605 CN96218605U CN2290608Y CN 2290608 Y CN2290608 Y CN 2290608Y CN 96218605 CN96218605 CN 96218605 CN 96218605 U CN96218605 U CN 96218605U CN 2290608 Y CN2290608 Y CN 2290608Y
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Abstract
The utility model relates to a rotary magnetic-controlled column arc source multi-arc ion film coating machine, and a rotary magnetic-controlled column arc source is arranged in the center of a film coating chamber. The utility model is mainly composed of a film coating chamber, a workpiece rotating frame, a rotary magnetic-controlled column arc source, an air intake system, an arc source power supply, a baking heating source, an arc needle system, a vacuum system, and a workpiece biasing power supply. A tubular metal material is used as target material by the column arc source, and a plurality of bar-shaped permanent magnets are arranged in the tube to do rotary motion. The arc spots are distributed all along the column arc target source in the shape of line and scan along the surface of the column arc target. The rotary magnetic-controlled column arc source multi-arc ion film coating machine comprises vertical structure, horizontal structure, and box structure, which has the advantages of simple device structure and easy operation. The utility model is suitable for planting titanium nitride coating and is applied to the fields of super hard coated cutting tool, delicate jewelry made of titanium and gold, etc.
Description
The utility model relates to a kind of rotary magnetron column arc source multi-arc ion plating film machine.Belong to the plasma surface gas phase deposition technology.Be applied to fields such as machinery, weaving, aerospace, jewellery, architectural decoration, be particularly useful for finish layers such as depositing titanium nitride.
In the prior art, the arc source of installing in the multi-arc ion plating film machine, the employing diameter 60mm-100mm bar-shaped metal materials that has is done the little arc source of arc source target, as CN89200748.6, CN94207535.8 etc., the employing length 400mm-1500mm that has, the big arc of the rectangular plate shape of width 120mm-300mm source.As CN90100946.6 etc., this class arc source is installed on the plated film locular wall more, and workpiece pivoted frame and arc source are general, and promptly workpiece is laid between two parties at a distance of 100mm-250mm, and the coating chamber space availability ratio is low.And need to install several to dozens of this class little arc sources or big arc source in each coating chamber.Because each arc source is furnished with an arc power, striking pin and circuit kit Controlling System, but also need on the plated film locular wall, process a plurality of flange holes, so that little arc source or big arc source to be installed.Make complex structure, complex operation, the breakdown rate of this class multi-arc ion plating film machine big, coating quality is unstable.
In the multi-arc ion plating film machine of column arc of the prior art source, ring-type or column permanent magnet are installed in the column arc source of being adopted, permanent magnet is along post arc axially reciprocating, as CN91230847.8.CN 91105730.7 its electric arc arc spots in the form of a ring, along post arc axially reciprocating, with the even ablation that realizes target surface with along the plated film homogeneity of post arc length degree direction.This column arc source because the arc spot generally is the thin ring of light about diameter 70mm, makes the plasma density in the coating chamber low, and the arc spot ring of light under move to the top could be along film of post arc length degree direction plating, coated film deposition speed is low.
The purpose of this utility model provides a kind of rotary magnetron column arc source multi-arc ion plating film machine, it make the multi-arc ion plating film machine designs simplification, easy and simple to handle, the coating film thickness homogeneity range is big, equipment failure rate is low, film quality is stable.
The utility model is to realize like this.In coating chamber central authorities rotary magnetron column arc source is installed, a rotary magnetron column arc source only is installed in the coating equipment.Only join an arc power, striking pin and circuit kit Controlling System.The rotary magnetron column arc source diameter 50mm-100mm that is adopted, length 200mm-2000mm.Do target by tubular metal material, several strip permanent magnets are installed in the target pipe, permanent magnet rotates in post arc target pipe.After electric arc ignites, several arc burnings are arranged simultaneously, the arc spot is wire and distributes along post arc target total length, and only need a post arc source just can realize in the coating chamber homogeneity along post arc source length direction coating film thickness along post arc target surface scanning, coating equipment, because rotary magnetron column arc source is installed in coating chamber central authorities, for keeping between workpiece and the arc source at a distance of 100mm-250mm, the workpiece axis of rotation can be passed to the plated film locular wall, each workpiece plate size strengthens, the workpiece loading capacity increases, the coating chamber space availability ratio is big, the production efficiency height.Owing in the coating chamber rotary magnetron column arc source only is installed, only need an arc power, striking pin and circuit kit Controlling System, therefore the device structure of rotary magnetron column arc of the present utility model source multi-arc ion plating film machine is simple, easy and simple to handle, the low coating quality of failure rate is stable.
Rotary magnetron column arc of the present utility model source multi-arc ion plating film machine, mainly by coating chamber (1), workpiece pivoted frame (2), rotary magnetron column arc source (3), inlet system (4), arc source current (5) baking heating source (6), striking needle system (7), vacuum system (8), workpiece bias power supply (9) is formed.
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is that the 1st of the utility model rotary magnetron column arc source multi-arc ion plating film machine structure implements Li Jiantu
Fig. 2 is the 2nd an embodiment sketch of the utility model rotary magnetron column arc source multi-arc ion plating film machine structure
Fig. 3 is the 3rd an embodiment sketch of the utility model rotary magnetron column arc source multi-arc ion plating film machine structure.Wherein a is a front view, and b is a top view
In Fig. 1, coating equipment is a vertical structure, and rotary magnetron column arc source (3) is installed in the central authorities at coating chamber (1) top.The structure of coating chamber (1) can be vertical bell jar type, the vertical type that opens the door, also can be the vertical type of uncapping.The interface of vacuum system (8) is positioned at the bottom of coating chamber (1), also can be positioned at the sidewall of coating chamber (1).Workpiece pivoted frame (2) is made public spinning motion, also can be done revolution motion, spinning motion or motionless each post arc source and join an arc power, a striking needle system, circuit kit Controlling System around post arc source (3).Near coating chamber (1) inwall place baking heating source (6) is installed and is generally adopted tubular heater.Inlet system (4) is positioned at the top of coating chamber (1), also can be installed in the bottom or the sidewall of coating chamber (1).Workpiece connects the negative pole of workpiece negative bias power supply (9)
In Fig. 2, coating equipment is horizontal type structure, the magnetic control column of walking around arc source (3) is installed in the central authorities of coating chamber (1) end face, workpiece pivoted frame (2) is made spinning motion on every side, also can be made revolution motion or public spinning motion in post arc source (3), also can be motionless.The structure of coating chamber (1) can be that an end opens the door, and also can be to open the door in two ends.The interface of vacuum system (8) is positioned at the top of coating chamber (1) or each arc source of a side and joins an arc power, striking needle system, circuit kit Controlling System.Baking heating source (6) is installed, is generally adopted tubular heater near coating chamber (1) inwall place.Inlet system (7) is positioned at the end of coating chamber (1), also can be the bottom that is positioned at coating chamber (1).
In Fig. 3, coating equipment is a case structure, and wherein a is a front view, and b is a top view.Rotary magnetron column arc source (3) is installed in the top of coating chamber (1), and a coating equipment can be installed 1-5 post arc source, and an arc power, a striking needle system, circuit kit Controlling System are joined in each post arc source.Workpiece pivoted frame branch stands in the reciprocating or translational motion in the both sides in post arc source, also can rotate around arc source (3).The structure of coating chamber (1) can be to open the door in the case structure two ends, also can be that the open the door interface of vacuum system (8) of an end is positioned at the top of coating chamber, also can be positioned at the sidewall of coating chamber.A coating equipment can be installed 1-a plurality of vacuum systems.Between workpiece, also can generally adopt tubular heater in that baking heating source (6) is installed near coating chamber inwall place.Inlet system (4) is positioned at the top of coating chamber, also can be positioned at the sidewall of coating chamber (1).Present embodiment is applicable to the plating plate workpiece.
The key distinction of rotary magnetron column arc source multi-arc ion plating film machine of the present utility model and existing technology is that the arc source of being adopted is rotary magnetron column arc source (3), column arc source is close with workpiece pivoted frame length, when titanium-nitride, select for use the titanium pipe to do target in coating process, at first the vacuum tightness with coating chamber is evacuated to 1 * 10
-1Pa toasts heating to workpiece, applies the 50-1000V negative bias on the workpiece, starts Workpiece Rotating mechanism, feeds argon gas, and vacuum tightness is 1 * 10
-3Between the Pa-1Pa, with the striking pin rotary magnetron column arc source of igniting, titanium ion changes logical nitrogen after under the effect of workpiece negative bias workpiece being carried out ion bombardment and purifying and be heated to this preset temperature, just can obtain titanium nitride coating.Reach after the certain thickness, stop arc source, source of the gas, grid bias power supply, stop five rotating mechanisms, workpiece cools off under vacuum condition.Owing to only open a rotary magnetron column arc source, the arc spot is isometric with post arc source again, just can realize workpiece pivoted frame even plated film from top to bottom.Can save a plurality of arcs source, a plurality of striking needle system, overlap circuit control system more.The plated film locular wall needn't process the flange hole in a plurality of mounting plane arcs source.Device structure is simple, and failure rate is low.The operator only need open an arc source, is concerned about the working condition in an arc source, needn't start a plurality of arcs source, stares at the working condition in a plurality of arcs source, needn't worry to extinguish the quality that influences rete and the homogeneity of rete because of certain arc source, and is easy and simple to handle.Because the workpiece axis of rotation is passed to the plated film locular wall, the workpiece autorotation disk increases, and the workpiece loading capacity increases, and the coating chamber space availability ratio is big, the production efficiency height.
Claims (5)
1. rotary magnetron column arc source multi-arc ion plating film machine, mainly form by coating chamber (1), workpiece pivoted frame (2), rotary magnetron column arc source (3), inlet system (4), arc source current (5), baking heating source (6), striking needle system (2), vacuum system (8), workpiece bias power supply (9), it is characterized in that, rotary magnetron column arc source (3) is installed by central authorities at coating chamber (1), a coating equipment is only installed a post arc source, only join an arc power, striking pin and circuit kit Controlling System.
2. according to the described rotary magnetron column of claim 1. arc source multi-arc ion plating film machine, its special card is, a rotary magnetron column arc source (3) is installed by central authorities at coating chamber (1), the diameter 50mm-100mm in the rotary magnetron column arc source of being adopted, length 200mm-2000mm, do target by tubular metal material, several strip permanent magnets are installed in the target pipe, permanent magnet rotates in post arc target pipe, after electric arc ignites, several arc burnings are arranged simultaneously, and the arc spot distributes along post arc target total length along being wire, and scans along post arc target surface.
3. according to the described rotary magnetron column of claim 1. arc source multi-arc ion plating film machine, it is characterized in that, coating equipment is a vertical structure, rotary magnetron column arc source (3) is installed in the central authorities at coating chamber (1) top, the structure of coating chamber (1) can be vertical bell jar type, the vertical type that opens the door, also can be the vertical type of uncapping, and workpiece pivoted frame (2) is made public spinning motion, also can be made revolution motion, spinning motion or do not move around post arc source.
4. according to the described rotary magnetron column of claim 1. arc source multi-arc ion plating film machine, it is characterized in that, coating equipment is a horizontal type structure, rotary magnetron column arc source (3) is installed in the central authorities of coating chamber (1) end face, workpiece pivoted frame (2) is made spinning motion on every side in post arc source, also can make revolution motion or public spinning motion, also can be motionless, the structure of coating chamber (1) can be that an end opens the door, also can be to open the door in two ends.
5. according to the described rotary magnetron column of claim 1. arc source multi-arc ion plating film machine, it is characterized in that, coating equipment is a case structure, rotary magnetron column arc source (3) is installed in the top of coating chamber (1), a coating equipment can be installed 1-5 post arc source, and workpiece pivoted frame (2) divides the reciprocating or translational motion in both sides that stands in post arc source, also can rotate around post arc source, the structure of coating chamber can be to open the door in box two ends, also can be that an end opens the door.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96218605 CN2290608Y (en) | 1996-08-09 | 1996-08-09 | Rotary magnetic-controlled column arc source multi-arc ion film caoating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96218605 CN2290608Y (en) | 1996-08-09 | 1996-08-09 | Rotary magnetic-controlled column arc source multi-arc ion film caoating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2290608Y true CN2290608Y (en) | 1998-09-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96218605 Expired - Fee Related CN2290608Y (en) | 1996-08-09 | 1996-08-09 | Rotary magnetic-controlled column arc source multi-arc ion film caoating machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN2290608Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101654769B (en) * | 2009-08-26 | 2011-01-05 | 杭州泛亚卫浴股份有限公司 | Vacuum ion plating method |
| WO2015188353A1 (en) * | 2014-06-12 | 2015-12-17 | 深圳市大富精工有限公司 | Vacuum coating device |
| CN105970161A (en) * | 2016-06-24 | 2016-09-28 | 李晓马 | Stainless steel vacuum multi-arc ion plating horizontal furnace |
| CN106086792A (en) * | 2016-06-24 | 2016-11-09 | 李晓马 | A kind of stainless-steel vacuum plated film horizontal chamber furnace (oven) |
| CN107805786A (en) * | 2017-12-07 | 2018-03-16 | 北京泰科诺科技有限公司 | Multi sphere ion vacuum coating machine |
| CN107805785A (en) * | 2017-10-18 | 2018-03-16 | 东莞产权交易中心 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
-
1996
- 1996-08-09 CN CN 96218605 patent/CN2290608Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101654769B (en) * | 2009-08-26 | 2011-01-05 | 杭州泛亚卫浴股份有限公司 | Vacuum ion plating method |
| WO2015188353A1 (en) * | 2014-06-12 | 2015-12-17 | 深圳市大富精工有限公司 | Vacuum coating device |
| CN105970161A (en) * | 2016-06-24 | 2016-09-28 | 李晓马 | Stainless steel vacuum multi-arc ion plating horizontal furnace |
| CN106086792A (en) * | 2016-06-24 | 2016-11-09 | 李晓马 | A kind of stainless-steel vacuum plated film horizontal chamber furnace (oven) |
| CN107805785A (en) * | 2017-10-18 | 2018-03-16 | 东莞产权交易中心 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
| CN107805786A (en) * | 2017-12-07 | 2018-03-16 | 北京泰科诺科技有限公司 | Multi sphere ion vacuum coating machine |
| CN107805786B (en) * | 2017-12-07 | 2023-12-08 | 北京泰科诺科技有限公司 | Multi-arc ion vacuum coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |