CN107805785A - A kind of aluminium sheet processing Multi-arc type ion coating machine - Google Patents
A kind of aluminium sheet processing Multi-arc type ion coating machine Download PDFInfo
- Publication number
- CN107805785A CN107805785A CN201710971071.XA CN201710971071A CN107805785A CN 107805785 A CN107805785 A CN 107805785A CN 201710971071 A CN201710971071 A CN 201710971071A CN 107805785 A CN107805785 A CN 107805785A
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- Prior art keywords
- vacuum chamber
- target platform
- rotary target
- arc source
- arc
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Treatment Of Fiber Materials (AREA)
Abstract
The invention discloses a kind of aluminium sheet processing Multi-arc type ion coating machine,Including vacuum chamber,The outer surface of vacuum chamber is provided with small multi-arc source and electromagnetism control large area arc source,The vertical center of vacuum chamber is provided with post arc source,The bottom of vacuum chamber is provided with rotary target platform,The left and right ends of rotary target platform are equipped with work rest,The bottom both sides of vacuum chamber are respectively equipped with vacuum-pumping system and plenum system,Vacuum chamber bottom is provided between hollow receiver,It is provided with hollow receiver and serves electric rotating machine,Cylindrical hole is provided with rotary target platform bottom centre position,Pilot sleeve is externally provided with around cylindrical hole,Electric rotating machine is served to be connected with swingle,Swingle is riveted in cylindrical hole through vacuum chamber bottom,Fixed between pilot sleeve and swingle by clip,Rotary target platform is provided with sleeve joint hole,Work rest is arranged in sleeve joint hole by several clutch shaft bearings,It is simple in construction,Plated film is stable,Improve the uniformity of each point film forming and the efficiency of plated film in vacuum chamber,Improve the yield rate of plated film.
Description
Technical field
The present invention relates to aluminium sheet processing technique field, specially a kind of aluminium sheet processing Multi-arc type ion coating machine.
Background technology
Arc ion plating obtains considerable hair in last decade as the mainstream technology for preparing various functions film and decorating film
Exhibition, it has been widely used in the surface peening and daily life of the anti-abrasive materials such as the various knives in industrial production, mould
The surface-beautifying technique of various metallic articles, handicraft.Key technology as ion plating --- arc source technology is also flown
Speed development.
At present when aluminium sheet is processed, it is necessary to various multilayer film and complex chemical compound films are continuously coated with to its surface, with to aluminium
Plate plays a part of protection, but during plated film, due to rotating the factor of dynamics and rotating speed, causes the efficiency of plated film
It is low, and film forming is unstable, causes the film plating layer on aluminium sheet uneven, the serious yield rate for reducing plated film, and due to
The simply rotation of rotary target platform, cause the demand to rotary power big, expend substantial amounts of electric energy.
The content of the invention
In order to overcome the shortcomings of prior art, the present invention provides a kind of aluminium sheet processing Multi-arc type ion coating machine,
Simple in construction, plated film is stable, improves the uniformity of each point film forming in vacuum chamber, the work of stabilising arc when playing aluminium sheet processing indirectly
With, the efficiency of plated film is improved, improves the yield rate of plated film, it is cost-effective, effectively can solve the problems, such as in background technology.
The technical solution adopted for the present invention to solve the technical problems is：Multi-arc type ion film plating is used in a kind of aluminium sheet processing
Machine, including vacuum chamber 1, the inner surface of the vacuum chamber 1 are provided with small multi-arc source 2 and electromagnetism control large area arc source 3, and in vacuum
The vertical center of room 1 is provided with post arc source 4, and the bottom of the vacuum chamber 1 is provided with rotary target platform 5, the left and right of the rotary target platform 5
Both ends are equipped with work rest 6, and vacuum-pumping system 7 and plenum system 8 are further respectively had in the bottom both sides of vacuum chamber 1；
The bottom of vacuum chamber 1 is provided with 9 between hollow receiver, and 9 interior are provided with serve electric rotating machine 10, the rotation between the hollow receiver
Turn to be provided with cylindrical hole 11 at the bottom centre position of target platform 5, pilot sleeve 12 is externally provided with around the cylindrical hole 11, it is described to serve rotation
Motor 10 is connected with swingle 13, and the swingle 13 passes through the bottom of vacuum chamber 1, and swingle 13 is riveted on the cylindricality
In hole 11, fixed between the pilot sleeve 12 and the swingle 13 by clip 14, the rotary target platform 5 is provided with socket
Hole 15, the work rest 6 are fixedly mounted in the sleeve joint hole 15 by several clutch shaft bearings 16.
As a kind of preferable technical scheme of the present invention, the vacuum chamber 1 is in the double-deck cylindrical structure of cavity, described true
Empty room 1 is made by double-layer stainless steel, and small multi-arc source 2 and electromagnetism control large area the arc source 3 is arranged in the vacuum chamber 1
Layer outer surface.
As a kind of preferable technical scheme of the present invention, small multi-arc source 2 and electromagnetism control large area the arc source 3 is on true
The axisymmetrical distribution of empty room 1, and the outboard end in small multi-arc source 2 and electromagnetism control large area arc source 3 is installed with arc source
Reflect catch 20.
As a kind of preferable technical scheme of the present invention, the vacuum-pumping system 7 and plenum system 8 are on the rotation
Target platform 5 is symmetric in the both sides of the rotary target platform 5.
As a kind of preferable technical scheme of the present invention, the pilot sleeve 12 and the bottom junction of vacuum chamber 1 are provided with the
Two bearings 17, the outer ring of the second bearing 17 are provided with some equally distributed C words buttons 18 in interval, and the second bearing
Filling anti-slip rubber 19 is additionally provided with 17 outer ring.
Compared with prior art, the beneficial effects of the invention are as follows：The present invention is simple in construction, and plated film is stable, by rotation
The friction of target platform and the improvement of stability, the uniformity of each point film forming in vacuum chamber is improved, stabilising arc when playing aluminium sheet processing indirectly
Effect, work rest realizes rotation when rotary target platform rotates in addition, so as to improve the efficiency of plated film, improves plated film
Yield rate, energy and processing cost are saved, is worthy to be popularized.
Brief description of the drawings
Fig. 1 is the overall front view structural representation of the present invention；
Fig. 2 is the mplifying structure schematic diagram of A in Fig. 1；
Fig. 3 is the second bearing structural representation of the present invention.
In figure：1- vacuum chambers；The small multi-arc sources of 2-；3- electromagnetism control large area arcs source；4- post arcs source；5- rotary target platforms；6- works
Part frame；7- vacuum-pumping systems；8- plenum systems；Between 9- hollow receivers；10- serves electric rotating machine；11- cylindrical holes；12- is oriented to
Sleeve；13- swingles；14- clips；15- sleeve joint holes；16- clutch shaft bearings；17- second bearings；18-C word buttons；19- fillings are anti-skidding
Rubber；Catch is reflected in 20- arcs source.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
The explanation of following embodiment is refer to the attached drawing, can be to the specific embodiment implemented to the example present invention.
The direction and position term that the present invention is previously mentioned, for example, " on ", " in ", " under ", "front", "rear", "left", "right", " interior ", "
Outside ", " side " etc., only it is direction and position with reference to annexed drawings.Therefore, the direction and position term used is to illustrate
And understand the present invention, and it is not used to the limitation present invention.
Embodiment：
As shown in Figure 1 to Figure 3, the invention provides a kind of aluminium sheet processing Multi-arc type ion coating machine, including vacuum chamber 1, institute
The surface for stating vacuum chamber 1 is provided with small multi-arc source 2 and electromagnetism control large area arc source 3, and the vacuum chamber 1 is in cavity cylindrical drum knot
Structure, the vacuum chamber 1 are made by double-layer stainless steel, and water-cooling sandwich, the water cooling are provided between the interlayer of the vacuum chamber 1
Interlayer is distributed around the internal layer of vacuum chamber 1, and small multi-arc source 2 and electromagnetism control large area the arc source 3 is arranged in the vacuum chamber 1
The axisymmetrical distribution of A Yu vacuum chambers 1 is rolled in layer outer surface, small multi-arc source 2 and electromagnetism control large area the arc source 3, and small
The outboard end in multi-arc source 2 and electromagnetism control large area arc source 3 is installed with arc source reflection catch 20, the upper end of vacuum chamber 1
Vertical center be provided with post arc source 4, the bottom of the vacuum chamber 1 is provided with rotary target platform 5, the left and right of the rotary target platform 5
Both ends are equipped with work rest 6, and the bottom both sides of the vacuum chamber 1 further respectively have vacuum-pumping system 7 and plenum system 8, institute
State vacuum-pumping system 7 and plenum system 8 are distributed in the rotary target platform 5 with the central point of the rotary target platform 5 two
Side.
The bottom of vacuum chamber 1 is provided with 9 between hollow receiver, and 9 interior are provided with serve electric rotating machine 10, institute between the hollow receiver
State and cylindrical hole 11 is provided with the bottom centre position of rotary target platform 5, pilot sleeve 12 is externally provided with around the cylindrical hole 11, it is described to serve
Electric rotating machine 10 is connected with swingle 13, and the swingle 13 is riveted in the cylindrical hole 11 through the bottom of vacuum chamber 1,
Fixed between the pilot sleeve 12 and the swingle 13 by clip 14, the clip 14 to be directed to sleeve 12 with rotation
Bull stick 13 is fixed together so that Stability Analysis of Structures when rotation of rotary target platform 5, rotation dynamics is uniform, the rotary target platform 5
Sleeve joint hole 15 is provided with, the work rest 6 is arranged in the sleeve joint hole 15 by several clutch shaft bearings 16, the first axle
Hold 16 bottoms for being separately mounted to work rest 6, and work rest 6 and the upper surface junction of rotary target platform 5.
Preferably, the pilot sleeve 12 is provided with second bearing 17, the second bearing with the bottom junction of vacuum chamber 1
17 outer ring is provided with some equally distributed C words buttons 18 in interval, and filling is additionally provided with the outer ring of the second bearing 17
Anti-slip rubber 19, the C words button 18 can be fixed between the upper and lower surface of the bottom of vacuum chamber 1, filling anti-slip rubber 19 to
Friction between increase and vacuum chamber 1, prevents to slide, and increases the stability of second bearing 17, so as to increase rotary target platform 5
Rotational stabilization, and reduce pilot sleeve 12 rotate when frictional force, effectively realize energy-conservation effect.
In summary, the main characteristic of the invention lies in that：The present invention is simple in construction, and plated film is stable, by rotary target platform
Friction and the improvement of stability, using second bearing, swingle and the coefficient of friction of vacuum chamber bottom are reduced, so as to realize section
Can, connection is consolidated between swingle and rotary target platform in addition so that spin stabilization, and it is identical to rotate each surface dynamics size,
The uniformity of each point film forming in vacuum chamber is improved, plays a part of stabilising arc during aluminium sheet processing indirectly, work rest passes through first in addition
When bearing, work rest realizes rotation when rotary target platform rotates, and so as to improve the efficiency of plated film, improves plated film
Yield rate, be worthy to be popularized.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit requires rather than described above limits, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Any reference in claim should not be considered as to the involved claim of limitation.
Claims (5)
1. a kind of aluminium sheet processing Multi-arc type ion coating machine, including vacuum chamber（1）, it is characterised in that：The vacuum chamber（1）'s
Inner surface is provided with small multi-arc source（2）With electromagnetism control large area arc source（3）, and in vacuum chamber（1）Vertical center be provided with post
Arc source（4）, the vacuum chamber（1）Bottom be provided with rotary target platform（5）, the rotary target platform（5）Left and right ends be equipped with work
Part frame（6）, in vacuum chamber（1）Bottom both sides further respectively have vacuum-pumping system（7）And plenum system（8）；
The vacuum chamber（1）Bottom is provided between hollow receiver（9）, between the hollow receiver（9）Interior be provided with serves electric rotating machine
（10）, the rotary target platform（5）Cylindrical hole is provided with bottom centre position（11）, around the cylindrical hole（11）It is externally provided with guide sleeve
Cylinder（12）, it is described to serve electric rotating machine（10）It is connected with swingle（13）, the swingle（13）Through the vacuum chamber（1）Bottom
End, and swingle（13）It is riveted on the cylindrical hole（11）It is interior, the pilot sleeve（12）With the swingle（13）Between lead to
Cross clip（14）It is fixed, the rotary target platform（5）It is provided with sleeve joint hole（15）, the work rest（6）Pass through several first axles
Hold（16）It is fixedly mounted on the sleeve joint hole（15）It is interior.
A kind of 2. aluminium sheet processing Multi-arc type ion coating machine according to claim 1, it is characterised in that：The vacuum chamber
（1）In the double-deck cylindrical structure of cavity, the vacuum chamber（1）It is made by double-layer stainless steel, the small multi-arc source（2）With
Electromagnetism control large area arc source（3）Installed in the vacuum chamber（1）Inner layer outer surface.
A kind of 3. aluminium sheet processing Multi-arc type ion coating machine according to claim 1, it is characterised in that：The small multi sphere
Source（2）With electromagnetism control large area arc source（3）Roll A Yu vacuum chambers（1）Axisymmetrical distribution, and in small multi-arc source（2）And electricity
Magnetic control large area arc source（3）Outboard end be installed with arc source reflection catch（20）.
A kind of 4. aluminium sheet processing Multi-arc type ion coating machine according to claim 1, it is characterised in that：The vacuum is taken out
Gas system（7）And plenum system（8）On the rotary target platform（5）It is symmetric in the rotary target platform（5）Both sides.
A kind of 5. aluminium sheet processing Multi-arc type ion coating machine according to claim 1, it is characterised in that：The guide sleeve
Cylinder（12）With vacuum chamber（1）Bottom junction is provided with second bearing（17）, the second bearing（17）Outer ring be provided with it is some
It is spaced equally distributed C words button（18）, and the second bearing（17）Outer ring on be additionally provided with filling anti-slip rubber（19）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710971071.XA CN107805785A (en) | 2017-10-18 | 2017-10-18 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710971071.XA CN107805785A (en) | 2017-10-18 | 2017-10-18 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107805785A true CN107805785A (en) | 2018-03-16 |
Family
ID=61585161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710971071.XA Pending CN107805785A (en) | 2017-10-18 | 2017-10-18 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107805785A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108486533A (en) * | 2018-05-29 | 2018-09-04 | 大连维钛克科技股份有限公司 | A kind of air charging system for min-cutter ion beam coating equipment |
| CN110952063A (en) * | 2019-12-01 | 2020-04-03 | 王彦军 | Deflection-preventing multi-arc ion composite coating machine for aluminum plate processing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108486533A (en) * | 2018-05-29 | 2018-09-04 | 大连维钛克科技股份有限公司 | A kind of air charging system for min-cutter ion beam coating equipment |
| CN110952063A (en) * | 2019-12-01 | 2020-04-03 | 王彦军 | Deflection-preventing multi-arc ion composite coating machine for aluminum plate processing |
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Application publication date: 20180316 |
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