CN207259585U - A kind of vacuum ion membrane plating furnace body - Google Patents
A kind of vacuum ion membrane plating furnace body Download PDFInfo
- Publication number
- CN207259585U CN207259585U CN201721111459.4U CN201721111459U CN207259585U CN 207259585 U CN207259585 U CN 207259585U CN 201721111459 U CN201721111459 U CN 201721111459U CN 207259585 U CN207259585 U CN 207259585U
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- China
- Prior art keywords
- interfacing part
- source
- arc
- bleeding point
- vacuum
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Abstract
The utility model discloses a kind of vacuum ion membrane plating furnace body, vacuum chamber is cylindrical chamber, is set in the cylindrical chamber inner wall into bleeding point interfacing part and multi-arc source interfacing part, controlled sputtering source interfacing part；Air inlet and bleeding point are installed on into bleeding point interfacing part, air inlet and are connected with air inlet power source, and bleeding point is connected with vacuum extractor；Multi-arc source and multiple arc target, controlled sputtering source and magnetic controlled sputtering target are respectively arranged in multi-arc source interfacing part and controlled sputtering source interfacing part；The assisted heating device is installed inside the cylindrical chamber of vacuum chamber.Due to being equipped with arc source device and magnetic control sputtering device at the same time in vacuum chamber, multi-arc ion plating film can be both carried out on a coating machine, magnetron sputtering plating can be carried out again, also the plated film of two ways or a kind of first still another plated film of plated film can be carried out at the same time, have the advantages that a tractor serves several purposes, applicability are wide, coated product is abundant, arc source device and magnetic control sputtering device circumference array arrangement, ensure the uniformity of coating.
Description
Technical field
The utility model belongs to coating tool field, more particularly to a kind of vacuum ion membrane plating furnace body.
Background technology
Vacuum coating is in a vacuum by technologies such as the metal material sputter vaporizations of titanium, tungsten carbide, gold etc, in base material
A kind of upper Treatment of Metal Surface process for forming film, is widely used in lathe tool, milling cutter, digital cuttings, screw tap etc..
Every kind of coating machine has reapective features and use scope limitation, as need to be coated with a variety of different film layers and in metal and
Plated film is carried out in nonmetallic materials, it is necessary to purchase a variety of vacuum coating equipments, there are equipment investment it is big the shortcomings that, and pass through shaft
Column is driven to rotate, and the target release metal ions in vacuum coating equipment, metal ion are attached to workpiece surface,
In rotation process, target is facing away from all the time towards the one side of shaft, cause coating uniformity poor, influence product quality on workpiece.
Utility model content
In view of the problems of the existing technology, the utility model provides a kind of vacuum ion membrane plating furnace body.
The utility model is realized in this way a kind of vacuum ion membrane plating furnace body includes：
Vacuum chamber, air inlet, bleeding point, multi-arc source, controlled sputtering source, multiple arc target, magnetic controlled sputtering target, bleeding point, auxiliary
Heating unit；
The vacuum chamber is cylindrical chamber, is set in the cylindrical chamber inner wall into bleeding point interfacing part and multi-arc source docking
Part, controlled sputtering source interfacing part；
The air inlet and bleeding point are installed on described into bleeding point interfacing part, the air inlet and air inlet power source
Connection, the bleeding point are connected with vacuum extractor；
The multi-arc source and multiple arc target, controlled sputtering source and magnetic controlled sputtering target are respectively arranged in multi-arc source interfacing part and magnetic control
Sputtering source interfacing part；
The assisted heating device is installed inside the cylindrical chamber of the vacuum chamber.
Further, it is described into bleeding point interfacing part, multi-arc source interfacing part, controlled sputtering source interfacing part, assisted heating device
Circumference array is arranged centered on vacuum chamber axis.
Further, sealing card slot is set at the top of the vacuum chamber, and circumferentially array arranges fastening spiral shell to sealing card slot outer side edges
Keyhole.
Due to being equipped with arc source device and magnetic control sputtering device at the same time in vacuum chamber, can both be carried out on a coating machine more
Arc ion film plating, and magnetron sputtering plating can be carried out, it can also be carried out at the same time the plated film of two ways or first a kind of plated film is yet another
Kind plated film, has the advantages that a tractor serves several purposes, applicability are wide, coated product is abundant, arc source device and magnetic control sputtering device Circle-Array
Row arrangement, ensures the uniformity of coating.
Brief description of the drawings
Fig. 1 is the stereogram for the vacuum ion membrane plating furnace body that the utility model embodiment provides；
Fig. 2 is the cut-away view for the vacuum ion membrane plating furnace body that the utility model embodiment provides；
In figure：1st, fastening bolt holes；2nd, multi-arc source；3rd, multiple arc target；4th, card slot is sealed；5th, assisted heating device；6th, air inlet
Mouthful；7th, magnetic controlled sputtering target；8th, controlled sputtering source；9th, bleeding point；10th, vacuum chamber.
Embodiment
For that can further appreciate that the utility model content of the utility model, feature and effect, the following examples are hereby given, and
Attached drawing is coordinated to describe in detail as follows.
The structure of the utility model is explained in detail below in conjunction with the accompanying drawings.
A kind of vacuum ion membrane plating furnace body, including：
Vacuum chamber 10, air inlet 6, bleeding point 9, multi-arc source 2, controlled sputtering source 8, multiple arc target 3, magnetic controlled sputtering target 7, pumping
Mouth 9, assisted heating device 5；
The vacuum chamber 10 is cylindrical chamber, is set in the cylindrical chamber inner wall into bleeding point interfacing part and multi-arc source docking
Part, controlled sputtering source interfacing part；
The air inlet 6 and bleeding point 9 are installed on described into bleeding point interfacing part, the air inlet 6 and air inlet power source
Device connects, and the bleeding point 9 is connected with vacuum extractor；
The multi-arc source 2 and multiple arc target 3, controlled sputtering source 8 and magnetic controlled sputtering target 7 be respectively arranged in multi-arc source interfacing part and
Controlled sputtering source interfacing part, the external multi sphere target power supply of multi-arc source 2, the external magnetic control target power supply of controlled sputtering source 8；
The assisted heating device 5 is installed inside the cylindrical chamber of the vacuum chamber 10.
It is described into bleeding point interfacing part, multi-arc source interfacing part, controlled sputtering source interfacing part, assisted heating device with vacuum chamber
Circumference array is arranged centered on axis.
Sealing card slot 4 is set at the top of the vacuum chamber, and circumferentially array arranges fastening bolt holes 1 to 4 outer side edges of sealing card slot.
Due to being equipped with arc source device and magnetic control sputtering device at the same time in vacuum chamber, can both be carried out on a coating machine more
Arc ion film plating, and magnetron sputtering plating can be carried out, it can also be carried out at the same time the plated film of two ways or first a kind of plated film is yet another
Kind plated film, has the advantages that a tractor serves several purposes, applicability are wide, coated product is abundant, arc source device and magnetic control sputtering device Circle-Array
Row arrangement, ensures the uniformity of coating.
The above is only the preferred embodiment to the utility model, and not the utility model is made in any form
Limitation, it is every according to the technical essence of the utility model to any simple modification made for any of the above embodiments, equivalent variations with
Modification, belongs in the range of technical solutions of the utility model.
Claims (3)
1. a kind of vacuum ion membrane plating furnace body, including vacuum chamber, air inlet, bleeding point, multi-arc source, controlled sputtering source, multiple arc target,
Magnetic controlled sputtering target, assisted heating device, it is characterised in that：
The vacuum chamber is cylindrical chamber, is set in the cylindrical chamber inner wall into bleeding point interfacing part and multi-arc source interfacing part, magnetic
Control sputtering source interfacing part；
The air inlet and bleeding point are installed on described into bleeding point interfacing part, the air inlet and air inlet power source company
Connect, the bleeding point is connected with vacuum extractor；
The multi-arc source and multiple arc target, controlled sputtering source and magnetic controlled sputtering target are respectively arranged in multi-arc source interfacing part and magnetron sputtering
Source interfacing part；
The assisted heating device is installed inside the cylindrical chamber of the vacuum chamber.
2. vacuum ion membrane plating furnace body as claimed in claim 1, it is characterised in that described into bleeding point interfacing part, multi-arc source pair
Fitting, controlled sputtering source interfacing part, the assisted heating device circumference array centered on vacuum chamber axis are arranged.
3. vacuum ion membrane plating furnace body as claimed in claim 1, it is characterised in that sealing card slot is set at the top of the vacuum chamber,
Seal card slot outer side edges circumferentially array arrangement fastening bolt holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721111459.4U CN207259585U (en) | 2017-08-31 | 2017-08-31 | A kind of vacuum ion membrane plating furnace body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721111459.4U CN207259585U (en) | 2017-08-31 | 2017-08-31 | A kind of vacuum ion membrane plating furnace body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207259585U true CN207259585U (en) | 2018-04-20 |
Family
ID=61923583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721111459.4U Expired - Fee Related CN207259585U (en) | 2017-08-31 | 2017-08-31 | A kind of vacuum ion membrane plating furnace body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207259585U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107805785A (en) * | 2017-10-18 | 2018-03-16 | 东莞产权交易中心 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
| CN113337819A (en) * | 2021-07-08 | 2021-09-03 | 纳峰真空镀膜（上海）有限公司 | Coating equipment |
-
2017
- 2017-08-31 CN CN201721111459.4U patent/CN207259585U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107805785A (en) * | 2017-10-18 | 2018-03-16 | 东莞产权交易中心 | A kind of aluminium sheet processing Multi-arc type ion coating machine |
| CN113337819A (en) * | 2021-07-08 | 2021-09-03 | 纳峰真空镀膜（上海）有限公司 | Coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180420 Termination date: 20210831 |