CN209162182U - A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode - Google Patents
A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode Download PDFInfo
- Publication number
- CN209162182U CN209162182U CN201821808837.9U CN201821808837U CN209162182U CN 209162182 U CN209162182 U CN 209162182U CN 201821808837 U CN201821808837 U CN 201821808837U CN 209162182 U CN209162182 U CN 209162182U
- Authority
- CN
- China
- Prior art keywords
- pivoted frame
- impressed current
- current anode
- rotation
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of hollow film-plated machine cavity bodies for being equipped with rotation impressed current anode, including cavity shell, ionization source flange, impressed current anode swing-around trajectory, pivoted frame driver plate, support pivoted frame pedestal, pivoted frame main shaft, impressed current anode insulating layer, impressed current anode rotary shaft, impressed current anode rotation pearl component, pivoted frame turntable, pivoted frame support base and pivoted frame main shaft driver plate.The utility model passes through the transformation to cavity body structure and pivoted frame structure, logical plated-through-hole, which is difficult to, for specific workpiece provides impressed current anode under revolution state, specific workpiece through-hole plated film aspect ratio is improved, so that specific workpiece increases inner hole logical a possibility that plating in certain size range.
Description
Technical field
The utility model relates to PVD multi-arc ion coating technical field of surface more particularly to a kind of outfit rotation auxiliary
The hollow film-plated machine cavity body of anode is to be equipped with rotation impressed current anode in workpiece through-hole, it is deep to improve plated film in PVD tube type work piece hole
Diameter ratio.
Background technique
PVD multi-arc ion coating is to be machined one of the process for treating surface being most widely used at present, high ionization level,
The characteristics of good combination power, so that this technology still has irreplaceable status, PVD multi sphere ion in industrial production now
Coating technology steams target by the arc discharge between target and anode casing using cathode target as evaporation source using arc discharge
Hair, is passed through working gas, so that plasma is formed in space, to substrate work-piece deposition film under vacuum conditions.
Nowadays, PVD multi-arc ion coating has obtained in the industrial production in the film deposition techniques of outer surface of workpiece
It is widely applied, such as cutter, stamping die, has not only saved production cost, reduced the loss and environmental pollution of raw material, and
And achieve huge economic benefit.But similarly possess plated film by the workpiece of working face of inner surface in the industrial production
Demand, such as engine cylinder barrel, interior punch die, axle sleeve and cavity plate.Such workpiece is using inner surface as military service working face, often because in
The forms such as wall abrasion, corrosion are destroyed, its working efficiency and service life are reduced.But by multi sphere ion plating technology itself
Limitation, the plated film aspect ratio of usual small-bore workpiece through-hole is only 1:1, at present the relevant technologies about PVD inner wall deposition film
The raising of plated film aspect ratio is realized by being equipped with impressed current anode into hole, or even is realized within the scope of certain size logical
Plating, but this technology is now based only upon large-size workpiece use, or by tubular workpiece directly as cavity, not for small size
It is more difficult to realize with type workpiece with the mode for being equipped with impressed current anode production in furnace simultaneously, therefore the utility model patent designs
It is a kind of to provide respectively the cavity of impressed current anode on demand when same furnace produces for variety classes workpiece.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of outfit rotation proposed is auxiliary
The hollow film-plated machine cavity body of supporing yang pole.
To achieve the goals above, the utility model adopts the technical scheme that
A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode, including cavity shell, ionization source flange, impressed current anode
Swing-around trajectory, pivoted frame driver plate, support pivoted frame pedestal, pivoted frame main shaft, impressed current anode insulating layer, impressed current anode rotary shaft, auxiliary sun
Pole rotates pearl component, pivoted frame turntable, pivoted frame support base and pivoted frame main shaft driver plate.
Preferably, it is furnished with recirculated water cooling interlayer in the cavity shell and ionization source flange, provides cooling for cavity, it is described
Cavity in cavity shell is closed greatly behind the door, the cavity shell generally cylindrical type.
Preferably, the impressed current anode swing-around trajectory is welded on cavity shell, the cavity gate in the cavity shell
After closing, the impressed current anode swing-around trajectory forms round continuous orbit.
Preferably, pivoted frame, the support pivoted frame pedestal and pivoted frame support base are equipped in the cavity in the cavity shell
Docking, two cylinder shift forks of the pivoted frame driver plate are caught in pivoted frame main shaft driver plate, and the speed reducer rotates pivoted frame driver plate, the pivoted frame
Driver plate stirs pivoted frame main shaft driver plate, and the pivoted frame main shaft drives pivoted frame turntable and the rotation of impressed current anode rotary shaft.
Preferably, the impressed current anode rotation pearl component is fixed in impressed current anode rotary shaft, adjusts suitable distance, institute
The ball for stating impressed current anode rotation pearl component enters impressed current anode swing-around trajectory and is attached thereto and drives rotation.
Preferably, the impressed current anode insulating layer makes impressed current anode rotary shaft and pivoted frame spindle insulating, the pivoted frame driver plate
It insulate with cavity shell, the pivoted frame turntable built-in electrical insulation structure makes pivoted frame turntable and pivoted frame support base insulate.
Preferably, the grid bias power supply anode connects on cavity shell, and grid bias power supply cathode is connect by pivoted frame driver plate to be turned
On frame, impressed current anode rotary shaft connect to provide rotation impressed current anode with cavity shell, is made by impressed current anode insulating layer auxiliary
Supporing yang pole rotary shaft and pivoted frame spindle insulating.
Preferably, various fixed anode auxiliary members can be equipped in the impressed current anode rotary shaft to introduce anode in workpiece
Hole, the workpiece are connected with cathode pivoted frame.
The utility model has the advantages that；
1, it is suitable for being equipped with small-sized deep hole product rotation impressed current anode, can satisfy the need that multiple types product is produced with furnace
It asks, reduces production cost；
2, impressed current anode installation, disassembly mode are easy, and cost is relatively low for Furnace body retrofit, and will not influence coating machine original production side
Formula.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of outfit rotate the cavity body structure of hollow film-plated machine cavity body of impressed current anode and show
It is intended to；
Fig. 2 is structure enlargement diagram at A in Fig. 1；
Fig. 3 be the utility model proposes a kind of outfit rotate the pivoted frame structure of hollow film-plated machine cavity body of impressed current anode and show
It is intended to；
Fig. 4 is structure enlargement diagram at B in Fig. 3.
In figure: 1 cavity shell, 2 ionization source flanges, 3 impressed current anode swing-around trajectories, 4 pivoted frame driver plates, 5 support pivoted frame pedestals,
6 pivoted frame main shafts, 7 impressed current anode insulating layers, 8 impressed current anode rotary shafts, 9 impressed current anodes rotate pearl component, 10 pivoted frame turntables, 11 turns
Frame support base, 12 pivoted frame main shaft driver plates.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
In the description of the present invention, it should be understood that term " on ", "lower", "front", "rear", "left", "right",
The orientation or positional relationship of the instructions such as "top", "bottom", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
Referring to Fig.1-4, a kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode, including cavity shell 1, ionization source method
Orchid 2, impressed current anode swing-around trajectory 3, pivoted frame driver plate 4, support pivoted frame pedestal 5, pivoted frame main shaft 6, impressed current anode insulating layer 7, auxiliary
Anode rotary shaft 8, impressed current anode rotation pearl component 9, pivoted frame turntable 10, pivoted frame support base 11 and pivoted frame main shaft driver plate 12, chamber
It is furnished with recirculated water cooling interlayer in body shell layer 1 and ionization source flange 2, provides cooling for cavity, the cavity in cavity shell 1 is closed big
Behind the door, the generally cylindrical type of cavity shell 1.
Wherein, impressed current anode swing-around trajectory 3 is welded on cavity shell 1, after the cavity gate in cavity shell 1 is closed,
Impressed current anode swing-around trajectory 3 forms round continuous orbit, is equipped with pivoted frame in the cavity in cavity shell 1, support pivoted frame pedestal 5 with
Pivoted frame support base 11 is docked, and two cylinder shift forks of pivoted frame driver plate 4 are caught in pivoted frame main shaft driver plate 12, and speed reducer rotates pivoted frame driver plate
4, pivoted frame driver plate 4 stirs pivoted frame main shaft driver plate 12, and pivoted frame main shaft 6 drives pivoted frame turntable 10 and impressed current anode rotary shaft 8 to rotate.
Wherein, impressed current anode rotation pearl component 9 is fixed in impressed current anode rotary shaft 8, adjusts suitable distance, auxiliary sun
The ball of pole rotation pearl component 9 enters impressed current anode swing-around trajectory 3 and is attached thereto and drives rotation, and impressed current anode insulating layer 7 makes
Impressed current anode rotary shaft 8 and pivoted frame main shaft 6 insulate, and pivoted frame driver plate 4 and cavity shell 1 insulate, 10 built-in electrical insulation knot of pivoted frame turntable
Structure makes pivoted frame turntable 10 and pivoted frame support base 11 insulate.
Wherein, grid bias power supply anode connects on cavity shell 1, and grid bias power supply cathode is connect on pivoted frame by pivoted frame driver plate 4,
Impressed current anode rotary shaft 8 connect to provide rotation impressed current anode with cavity shell 1, makes to assist by impressed current anode insulating layer 7
Anode rotary shaft 8 and pivoted frame main shaft 6 insulate, and can be equipped with various fixed anode auxiliary members in impressed current anode rotary shaft 8 and draw anode
Enter inner hole of workpiece, workpiece is connected with cathode pivoted frame, introduces impressed current anode, and plasma density in workpiece hole can be improved, and promotes work
Part inner hole deposition accumulates film, improves plated film aspect ratio and logical a possibility that plating in workpiece hole.
In the utility model, the workpiece with through-hole is fixed on the bull stick of pivoted frame, takes down impressed current anode rotation pearl portion
Part 9 places pivoted frame in the cavity, after docking cavity inner support pivoted frame pedestal 5 with pivoted frame support base 11, pivoted frame driver plate 4
Two cylinder shift forks be caught in pivoted frame main shaft driver plate 12, open turret motor power supply, after confirmation pivoted frame rotation is errorless, close pivoted frame electricity
Source；Will, impressed current anode rotation pearl component 9 is installed back in impressed current anode rotary shaft 8, and makes turning for impressed current anode rotation pearl component 9
Pearl enters impressed current anode swing-around trajectory 3 and is attached thereto and can drive rotation, is connecting in impressed current anode rotary shaft 8 suitable solid
Determine anode auxiliary member and be introduced into product inner hole depths, and ensure not touch workpiece, measures impressed current anode rotary shaft 8 and pivoted frame is exhausted
Edge is good, closes cavity and vacuumizes, it is ensured that door body impressed current anode swing-around trajectory 3 and cavity impressed current anode swing-around trajectory 3 are intact
Docking, and impressed current anode rotary shaft 8 impressed current anode rotation pearl component 9 ball drive under on impressed current anode swing-around trajectory 3
Smooth rotation.It can normally be produced.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (8)
1. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode, including cavity shell (1), ionization source flange (2), auxiliary
It is anode swing-around trajectory (3), pivoted frame driver plate (4), support pivoted frame pedestal (5), pivoted frame main shaft (6), impressed current anode insulating layer (7), auxiliary
Supporing yang pole rotary shaft (8), impressed current anode rotation pearl component (9), pivoted frame turntable (10), pivoted frame support base (11) and pivoted frame main shaft
Driver plate (12).
2. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that described
It is furnished with recirculated water cooling interlayer in cavity shell (1) and ionization source flange (2), provides cooling for cavity, the cavity shell (1) is interior
Cavity close it is big behind the door, the cavity shell (1) generally cylindrical type.
3. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that described
Impressed current anode swing-around trajectory (3) is welded on cavity shell (1), described after the cavity gate in the cavity shell (1) is closed
Impressed current anode swing-around trajectory (3) forms round continuous orbit.
4. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that described
Pivoted frame is equipped in cavity in cavity shell (1), the support pivoted frame pedestal (5) is docked with pivoted frame support base (11), described
Two cylinder shift forks of pivoted frame driver plate (4) are caught in pivoted frame main shaft driver plate (12), and speed reducer rotates pivoted frame driver plate (4), and the pivoted frame is dialled
Disk (4) stirs pivoted frame main shaft driver plate (12), and the pivoted frame main shaft (6) drives pivoted frame turntable (10) and impressed current anode rotary shaft (8)
Rotation.
5. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that described
Impressed current anode rotation pearl component (9) is fixed on impressed current anode rotary shaft (8), adjusts suitable distance, the impressed current anode rotation
The ball of ball component (9) enters impressed current anode swing-around trajectory (3) and is attached thereto and drives rotation.
6. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that described
Impressed current anode insulating layer (7) makes impressed current anode rotary shaft (8) and pivoted frame main shaft (6) to insulate, the pivoted frame driver plate (4) and cavity shell
Layer (1) insulation, pivoted frame turntable (10) the built-in electrical insulation structure make pivoted frame turntable (10) and pivoted frame support base (11) to insulate.
7. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that bias
Power anode connects on cavity shell (1), and grid bias power supply cathode is connect on pivoted frame by pivoted frame driver plate (4), impressed current anode rotation
Axis (8) connect to provide rotation impressed current anode with cavity shell (1), revolves impressed current anode by impressed current anode insulating layer (7)
Shaft (8) and pivoted frame main shaft (6) are insulated.
8. a kind of hollow film-plated machine cavity body for being equipped with rotation impressed current anode according to claim 1, which is characterized in that described
It can be equipped with various fixed anode auxiliary members in impressed current anode rotary shaft (8), anode is introduced into inner hole of workpiece, the workpiece and cathode
Pivoted frame is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821808837.9U CN209162182U (en) | 2018-11-05 | 2018-11-05 | A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821808837.9U CN209162182U (en) | 2018-11-05 | 2018-11-05 | A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209162182U true CN209162182U (en) | 2019-07-26 |
Family
ID=67336635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821808837.9U Active CN209162182U (en) | 2018-11-05 | 2018-11-05 | A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209162182U (en) |
-
2018
- 2018-11-05 CN CN201821808837.9U patent/CN209162182U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102922095B (en) | Magnetic control electric arc rotation sensor for seam tracking | |
| CN103854819B (en) | A kind of the admixture plates the film method of neodymium iron boron rare earth permanent magnet device | |
| CN100392147C (en) | Pair target twin magnetic controlled sputtering ion plating deposition device | |
| CN103824693B (en) | A kind of manufacture method of the neodymium iron boron rare earth permanent magnet device with composite film coating | |
| CN110592544B (en) | Vertical magnetron sputtering coating device for long outer cladding tube | |
| CN103820765A (en) | Composite coating equipment and manufacturing method for neodymium iron boron rare-earth permanent magnetic device | |
| CN103436837B (en) | Improve rotary target material paint finishing | |
| CN103839641B (en) | The admixture plates the film equipment of a kind of neodymium iron boron rare earth permanent magnet device and manufacture method | |
| CN103820766B (en) | A kind of magnetic control film coating equipment of neodymium iron boron rare earth permanent magnet device and manufacture method | |
| CN101857951A (en) | Magnetron sputtering device | |
| CN103409725A (en) | Rotary alien target cathode mechanism and magnetron sputtering coating device | |
| CN103839671B (en) | A kind of manufacture method of neodymium iron boron rare earth permanent magnet device | |
| CN111424247B (en) | Rotary long-life multi-arc target and use method thereof | |
| CN209162182U (en) | A kind of hollow film-plated machine cavity body being equipped with rotation impressed current anode | |
| CN103938171B (en) | Improve the device and method of sputter cathode target utilization and coating uniformity | |
| CN203794978U (en) | Device for improving sputtering cathode target material utilization rate and coating uniformity | |
| CN212610873U (en) | Long-life multi-arc target suitable for continuous coating production | |
| CN206894988U (en) | A kind of cydariform rotation electrode | |
| CN104284504A (en) | Rotating anode plasma generator | |
| CN204644453U (en) | A kind of magnetic field rotating magnetic control post arc target | |
| CN208685051U (en) | A kind of extensible formula drum apparatus for vacuum coating | |
| CN111235531A (en) | Double-vacuum-chamber high-power electron beam evaporation continuous coating device | |
| CN203926694U (en) | A kind of magnetron sputtering plating umbrella gear transmission rotating end | |
| CN206157215U (en) | Novel rotating cathode | |
| CN2923740Y (en) | Target pole system of surface film coating apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |