CN208685051U - A kind of extensible formula drum apparatus for vacuum coating - Google Patents
A kind of extensible formula drum apparatus for vacuum coating Download PDFInfo
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- CN208685051U CN208685051U CN201821452024.0U CN201821452024U CN208685051U CN 208685051 U CN208685051 U CN 208685051U CN 201821452024 U CN201821452024 U CN 201821452024U CN 208685051 U CN208685051 U CN 208685051U
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Abstract
The utility model relates to a kind of extensible formula drum apparatus for vacuum coating comprising vaccum case, rotating actuator, rotation magnetic fluid seal, tubular rotation frame and workpiece roller；Rotating magnetic fluid seal includes fixing seal seat, drive shaft and shaft gear；It includes rear flange plate, forward flange ring and water cooling gusset that tubular, which rotates frame,；Drive shaft one end assembly connection tubular rotates frame, and the other end connect with rotating actuator and is also equipped with rotating water head；Center return pipe is also equipped with inside rotating water head；Center return pipe one end is protruded into inside rotating water head, and the other end is connect with tubular rotation frame.It is cooling that the utility model can make the roller for loading workpiece receive cooling water pressure contact, it can be used for high-volume little Bao dimension workpiece and constantly roll stirring and to constantly contact formula Forced water cooling, realize the application of uniformly aluminizing or be coated with other metallic diaphragms of the full surface of workpiece under temperature control condition.
Description
Technical field
The utility model belongs to vacuum coating equipment technical field, in particular to a kind of extensible formula for vacuum coating
Drum apparatus.
Background technique
Vacuum coating application for high-volume little Bao dimension workpiece generallys use the roller plated film mode horizontally rotated.
In the rotation of workpiece roller, the little Bao dimension workpiece loaded is realized the uniform of full surface by lasting rolling and stirring
Plated film.Easy to loading and unloading for a large amount of little Bao dimension workpieces, usual workpiece roller is designed to the structure of extensible vaccum case.?
When removing vaccum case, rotating actuator and workpiece roller are usually designed to the structure of easy and convenient disengagement；Moving into vacuum
When shell, rotating actuator and the easy and convenient connection again of workpiece roller, if necessary to also establish conductive connection simultaneously.
In aluminum film layer or other film layers compared with low-melting-point metal, due to high temperature heat radiation (evaporation plating during being coated with
Film) or discharge ion bombardment (cathode arc or magnetron sputtering) can all cause workpiece to be plated temperature increase.Workpiece temperature liter
Gao Hou will lead to metallic diaphragm recrystallization (phase transformation) or film layer stick to each other, reduce film quality；In addition some workpieces to be plated
Itself it is also required to control plated film at a lower temperature.
To solve these problems, cooling water can be passed directly on workpiece roller by transmission mechanism.For extensible
Formula workpiece roller, cooling water be frequently switched on and disconnect in vaccum case will be it is very difficult, can seriously reduce vacuum
The operational reliability and stability of coating machine, hardly have operability in actual production.If the workpiece roller of water cooling
It is fixed in vaccum case, and the daily easy to loading and unloading of a large amount of little Bao dimension workpieces can be seriously affected, also can seriously affect and hamper
The ordinary maintenance and maintenance for hindering coating machine itself cause difficulty lasting in plated film production, therefore are not also used at present.
Summary of the invention
In view of the above problems, the object of the present invention is to provide a kind of extensible formula roller dresses for vacuum coating
It sets, structure design is simple, reasonable, can persistently be subjected to cool to water and force contact cooling, can maintain during vacuum coating
Persistently horizontally rotate, can be used for high-volume little Bao dimension workpiece and constantly roll stirring and to constantly contact formula Forced water cooling, it is real
The application of uniformly aluminizing or be coated with other metallic diaphragms of the existing full surface of workpiece under temperature control condition.
The technical solution of the utility model is as follows:
The above-mentioned extensible formula drum apparatus for vacuum coating, including vaccum case, it is installed on the vaccum case
Rotating actuator and rotation magnetic fluid seal, the tubular rotation frame being installed on the inside of the vaccum case on the outside of rear end
And it is movably installed in the workpiece roller on the inside of the tubular rotation frame；The rotation magnetic fluid seal includes fixing seal
Seat, drive shaft and shaft gear；The fixing seal seat is mounted on outside in the middle part of the rear end of the vaccum case；The transmission
For shaft horizontal through the fixing seal seat central interior, tubular described in one end assembly connection rotates frame, the other end and institute
State rotating actuator connection；Tubular rotation frame includes rear flange plate, forward flange ring and is connected to the rear flange plate
Water cooling gusset between forward flange ring；Using hollow Rotating shaft strocture, i.e. axially inside perforation offers biography to the drive shaft
Turn axis inner hole: the other end axial end portion assembly connection of the drive shaft has rotating water head；
One end radially installed of the rotating water head has cooling water water inlet to connect mouth and one end axial end portion is equipped with cooling
Water water outlet connects mouth；The cooling water water inlet connects mouth and is connected to the drive shaft inner hole；The other end of the rotating water head with
The other end axial end portion assembly connection of the drive shaft；Axially inside also being equipped with for rotating water head is used for back
The center return pipe of water；One end of the center return pipe is protruded into inside the rotating water head and is connect with cooling water water outlet
Mouth matching connection；The other end of the center return pipe passes through the drive shaft and protrudes into the vaccum case inside and the cylinder
Shape rotates frame connection；
The water cooling gusset is equipped with sealing water channel and is fixedly provided in the one side on the inside of tubular rotation frame
Conductive and heat-conductive metal plate；Conductive and heat-conductive silicagel pad is installed on the inside of the conductive and heat-conductive metal plate；The adjacent water cooling gusset
Rear end between be also connected with inlet and outlet pipes；The inlet and outlet pipes will form Inlet and outlet water after the water route series connection on the water cooling gusset
Access；The water inlet end of the disengaging water passage is connected to drive shaft inner hole matching；The water outlet of the disengaging water passage
It is connected to the matching of the inner orifice of the center return pipe.
The extensible formula drum apparatus for vacuum coating, in which: offer circle in the middle part of the rear flange plate
Through-hole and the corresponding lateral surface of the circular through hole be installed with rotation frame connecting flange；The rotation frame connecting flange
Matching internal is provided with rotation frame flange intake tunnel separated from each other and rotation frame flange backwater channel；The rotating bezel
Frame flange intake tunnel is connected to drive shaft inner hole matching, and the rotation frame flange backwater channel and the center are returned
The inner orifice of water pipe matches connection；The water inlet end matching of the disengaging water passage is connected the rotation frame intake tunnel and is passed through
The rotation frame intake tunnel is connected to the drive shaft inner hole；Described in the water outlet matching of the disengaging water passage is connected
Rotate frame flange backwater channel and by the inner orifice of rotation the frame flange backwater channel and the center return pipe
With connection.
The extensible formula drum apparatus for vacuum coating, in which: one end axial end portion of the drive shaft is pacified
Connection is matched with the rotation frame connecting flange equipped with connecting flange in shaft and by connecting flange in the shaft；It is described
The other end axial end portion of drive shaft is equipped with the outer connecting flange of shaft；The other end radially outer periphery of the drive shaft matches
Shaft gear is installed；The other end axial end portion of the rotating water head is equipped with rotatable joint sealing flange and passes through
The joint sealing flange matches connection with the outer connecting flange of the shaft.
The extensible formula drum apparatus for vacuum coating, in which: the rotating actuator by motor, be mounted on
The speed reducer of the power output side of the motor and the transmission gear being mounted on the power output shaft of motor composition；It is described
The power output shaft of motor is engaged by the transmission gear with shaft gear matching.
The extensible formula drum apparatus for vacuum coating, in which: opened before being equipped with the front end of the vaccum case
Door, rear end is installed with back shroud；Support wheel there are two setting, two supports are matched below the leading inside of the vaccum case
Wheel, which is equipped with, realizes the insulation system being electrically insulated with the vaccum case.
The extensible formula drum apparatus for vacuum coating, in which: the rear flange plate is put down each other with forward flange ring
Row is positioned opposite, and the water cooling gusset is distributed along the even circumferential of the rear flange plate and forward flange ring；The forward flange ring by
It is mounted on two support wheel supports of side-lower in the vaccum case.
The extensible formula drum apparatus for vacuum coating, in which: the fixing seal seat is mounted on the rear cover
On the outside of the middle part of plate, felt pad is housed between outer wall in the middle part of the back shroud；The fixing seal seat passes through the insulation
Pad is electrically insulated with realizing between the vaccum case.
The extensible formula drum apparatus for vacuum coating, in which: the workpiece roller similar to ratchet-like structure,
Root diameter including the relatively described workpiece roller continues six blocks of long arc shape cylinder plates of smooth change, is connected to the adjacent length
Six pieces short cylinder plate between arc tube plate and the convex set of the cone for being connected to the long arc shape cylinder plate and short cylinder plate rear and front end
Pipe；During rotation, the extrados matching of the long arc shape cylinder plate is tight with the conductive and heat-conductive silicagel pad for the workpiece roller
Contiguity touching, and conducted heat on the water cooling gusset by the conductive and heat-conductive metal plate.
The extensible formula drum apparatus for vacuum coating, in which: the extensible formula drum apparatus further includes peace
The coated target source of inner or outer side loaded on the workpiece roller.
The utility model has the advantages that
Extensible formula drum apparatus structure design of the utility model for vacuum coating is simple, reasonable, in vacuum coating
It maintains persistently to horizontally rotate in the process, can persistently be subjected to cool to water and force contact cooling, the high-volume little Bao ruler of interior loading
Very little workpiece can continue to roll and stirring, can be used for high-volume little Bao dimension workpiece and constantly roll to stir and to constantly contact formula strong
Water cooling processed realizes the application of uniformly aluminizing or be coated with other metallic diaphragms of the full surface of workpiece under temperature control condition, solution
Little Bao dimension workpiece for a long time of having determined cannot in high volume be coated with the technical problem of high quality aluminium film, and it is prominent to achieve key history
It is broken.
The utility model is when the workpiece roller for being loaded with a large amount of little Bao dimension workpieces moves into vaccum case, rotary drive machine
Structure and workpiece roller can easily and conveniently establish transmission connection, while establish conductive connection and the thermally conductive connection of contact；?
In entire coating process, the rotation of workpiece roller and stir and to force contact cooling to be loaded a large amount of small at lasting rolling
Thin dimension workpiece is realized uniform vacuum plated film production of all full surfaces of little Bao dimension workpiece under the conditions of controlling temperature, is realized
High-quality metallic diaphragm；The extensible vaccum case of workpiece roller after the completion of being coated with, unloading are coated with a large amount of little Bao size works of completion
Part；After loading new workpiece to be plated again, workpiece roller is moved into vaccum case, and plated film produces next time for starting.
Meanwhile six pieces of water cooling gusset medial surfaces in the utility model on tubular rotation frame are respectively arranged with conductive and heat-conductive metal
Plate, conductive and heat-conductive metal plate inside are equipped with conductive and heat-conductive silicagel pad, and the design of this structure is convenient for a coating machine configuration mostly set
Workpiece roller or a set of workpiece roller use on more coating machines, and simplify and process and improve workpiece roller and tubular
The fitting tightness between frame is rotated, good electrical and thermal conductivity performance is realized；Conductive and heat-conductive metal plate can be by fine copper, copper
The electrical and thermal conductivity performances such as alloy, fine aluminium, aluminium alloy good metals makes；Conductive and heat-conductive silicagel pad energy used in this example
The heating and the intracorporal electric heating of vacuum shell in coating process are enough born, and it is few to deflate under vacuum conditions, and has centainly
Conductive and heating conduction.
Detailed description of the invention
Fig. 1 is general assembly structural schematic diagram of the utility model for the extensible formula drum apparatus of vacuum coating；
Fig. 2 is right view of the utility model for the vaccum case of the extensible formula drum apparatus of vacuum coating；
Fig. 3 is partial structural diagram of the utility model for the extensible formula drum apparatus of vacuum coating；
Fig. 4 is that tubular of the utility model for the extensible formula drum apparatus of vacuum coating rotates frame and workpiece roller
Assembling structure schematic diagram；
Fig. 5 is the structural representation that the utility model rotates frame for the tubular of the extensible formula drum apparatus of vacuum coating
Figure；
Fig. 6 is structural schematic diagram of the utility model for the workpiece roller of the extensible formula drum apparatus of vacuum coating；
Fig. 7 is the extensible formula drum apparatus that the utility model is used for vacuum coating when workpiece roller larger diameter cambered surface
Reach the status diagram of thermal conductivity when rotating contact therewith with tubular by silicagel pad；
Fig. 8 is that enlarged structure of the utility model for a-quadrant in Fig. 7 of the extensible formula drum apparatus of vacuum coating is shown
It is intended to；
Fig. 9 is the utility model for the workpiece roller of the extensible formula drum apparatus of vacuum coating and rotation framework upper
Status diagram after disengagement；
Figure 10 is structural schematic diagram of the utility model for the special spanner of the extensible formula drum apparatus of vacuum coating.
Specific embodiment
As shown in Fig. 1 to 10, extensible formula drum apparatus of the utility model for vacuum coating, including vaccum case 1,
Rotating actuator 2, rotation magnetic fluid seal 3, rotating water head 4, tubular rotation frame 5, workpiece roller 6 and coated target source
7。
The vaccum case 1 is tubular shell structure, and internal to have accommodating space, front end is opened before being equipped with by fastener
Door 11, rear end welding are installed with back shroud 12；11 center of button fly front edge is axially installed with coated target source 7；It should in the present embodiment
Coated target source 7 is cylindricality magnetic control target source, is installed on the center of the button fly front 11 by target source mounting base and is located at workpiece roller 6
Inside；The coated target source 7 may be additionally located at 6 outside of workpiece roller and paste the installation of 1 inner wall of vaccum case；The coated target source 7 is in workpiece
When 6 outside of roller, workpiece roller 6 must be wire mesh cage structures, allow plated body to pass through cylinder mould and be coated on workpiece；Coated target source 7 exists
When workpiece 6 inside of roller, workpiece roller 6 can be enclosed construction, and plated body is applied directly on workpiece, and plated body loss is small.
Support wheel 13 there are two setting is matched below the leading inside of the vaccum case 1, has insulation system on two support wheels 13
It is electrically insulated with the vaccum case 1.
2 Matching installation of rotating actuator by motor 21, is mounted in 12 outside of back shroud of the vaccum case 1
The speed reducer 22 of 21 power output side of motor and the transmission gear 23 being mounted on the power output shaft of motor 21 composition.
The rotation magnetic fluid seal 3 is installed on the 12 middle part outside of back shroud of the vaccum case 1 comprising fixing seal
Seat 31, drive shaft 32 and shaft gear 33.Wherein, which is mounted in the back shroud 12 of the vaccum case 1
On the outside of portion, felt pad 311 is housed between the fixing seal seat 31 and 12 middle part of back shroud and passes through felt pad 311 and vacuum shell
Electrical isolation is realized between body 1.Using hollow Rotating shaft strocture, i.e. axially inside perforation offers drive shaft to the drive shaft 32
Inner hole；For the drive shaft 32 horizontal through 31 center of fixing seal seat, one end shaft end is equipped with connecting flange 321 in shaft
And frame 5 is rotated by 321 assembly connection tubular of connecting flange in shaft, other end axial end portion is equipped with the outer connecting flange of shaft
322 with 4 assembly connection of rotating water head；Meanwhile the 32 other end radially outer periphery also Matching installation of drive shaft has shaft
Gear 33, which is engaged by shaft gear 33 with the matching of the transmission gear 23 of the rotating actuator 2, to realize
Workpiece roller 6 is driven persistently to rotate.
4 one end radially installed of rotating water head have cooling water water inlet connect mouth 40 and axial end portion be equipped with cooling water water outlet
Mouth 41 is connect, cooling water water inlet connects mouth 40 and is connected to the drive shaft inner hole of drive shaft 32；The other end of the rotating water head 4
Axial end portion is equipped with rotatable joint sealing flange 42 and by joint sealing flange 42 and 32 other end of drive shaft
Outer 322 assembly connection of connecting flange of shaft；Wherein, which is axially inside also equipped in return water
Heart return pipe 43,43 one end of center return pipe protrude into 4 inside of rotating water head and connect the matching of mouth 41 with cooling water water outlet and be connected to,
43 other end of center return pipe passes through the drive shaft 32 of the rotation magnetic fluid seal 3 and protrudes into the inside of vaccum case 1
It is connect with tubular rotation frame 5.
Tubular rotation frame 5 is installed on 1 inside of the vaccum case comprising rear flange plate 51, with 51 phase of rear flange plate
Pair and parallel arrangement forward flange ring 52 and six pieces of water cooling gussets 53 being connected between rear flange plate 51 and forward flange ring 52；
Six pieces of water cooling gussets 53 are distributed along rear flange plate 51 and 52 even circumferential of forward flange ring.It is designed on each water cooling gusset 53 close
It is installed with conductive and heat-conductive metal plate 531 in water shutoff road and the one side being located on the inside of tubular rotation frame 5, the conductive and heat-conductive metal plate
531 insides are installed with conductive and heat-conductive silicagel pad 532, and this structure design is convenient to cover workpiece roller 6 for a coating machine configuration,
Or a set of workpiece roller 6 uses on more coating machines, simplify process and improve workpiece roller 6 and tubular rotation frame 5 it
Between fitting tightness, realize good electrical and thermal conductivity performance；The conductive and heat-conductive metal plate 531 can by fine copper, copper alloy,
The electrical and thermal conductivity performances such as fine aluminium, aluminium alloy good metals makes；Conductive and heat-conductive silicagel pad 532 can used in this example
The electric heating in the heating and vaccum case 1 in coating process is born, and it is few to deflate under vacuum conditions, and there is certain lead
Electricity and heating conduction.
The middle part of the rear flange plate 51 offers circular through hole 511, and the rear flange plate 51 is equal along the periphery of circular through hole 511
It is even to offer multiple fan-shaped loss of weight through-holes 512；The rear flange plate 51 is installed with rotating bezel in the corresponding lateral surface of circular through hole 511
Frame connecting flange 513, it is logical that the matching internal of the rotation frame connecting flange 513 is equipped with rotation frame flange separated from each other water inlet
Road and rotation frame flange backwater channel (not shown), the transmission of the rotation frame flange intake tunnel and drive shaft 32 turn
The matching connection of axis inner hole, the rotation frame flange backwater channel are connected to the matching of the inner orifice of center return pipe 43；The rotating bezel
Frame connecting flange 513 and 321 company of matching of connecting flange in the shaft of 32 one end of drive shaft of the rotation magnetic fluid seal 3
It connects；Inlet and outlet pipes 54 are also connected between the rear end of adjacent water cooling gusset 53, the inlet and outlet pipes 54 are by the water on water cooling gusset 53
Disengaging water passage is formed after the series connection of road；Turning for the rotation frame connecting flange 513 is connected in the water inlet end matching of the disengaging water passage
Dynamic frame intake tunnel, and the biography of rotation the frame intake tunnel and drive shaft 32 by the rotation frame connecting flange 513
The connection of turn axis inner hole；The rotation framework method of the rotation frame connecting flange 513 is connected in the water outlet matching of the disengaging water passage
Blue backwater channel, and pass through the rotation frame flange backwater channel of the rotation frame connecting flange 513 and center return pipe 43
Inner orifice matching connection.Therefore, the sealing water channel on the water cooling gusset 53 is eventually by outside rotating water head 4 and vaccum case 1
Cooling water pipe be connected, guarantee tubular rotation frame 5 rotate under vacuum in persistently have flow of cooling water, by Forced water cooling；
The forward flange ring 52 of tubular rotation 5 front end of frame is supported by two support wheels 13 for being mounted on side-lower in vaccum case 1, is kept away
The drive shaft 32 for exempting to rotate magnetic fluid seal 3 bears excessive downward torque, also guarantees that tubular rotation frame 5 horizontally rotates
Steadily.
6 match activities of workpiece roller are installed on 5 inside of tubular rotation frame, and extensible immigration tubular rotates frame 6；
Wherein, the workpiece roller 6 is similar to ratchet-like structure comprising six blocks of long arc shape cylinder plates 61, be connected to adjacent arc tube plate 61 it
Between short cylinder plate 62 and be connected to the convex casing 63 of cone of long arc shape cylinder plate 61 and short 62 rear and front end of cylinder plate；It is this six pieces long
The root diameter of 61 opposite piece roller 6 of arc tube plate continues smooth change；The workpiece roller 6 during rotation, six pieces
The extrados of long arc shape cylinder plate 61 matches respectively to be in close contact with six conductive and heat-conductive silicagel pads 532, and passes through conductive and heat-conductive gold
Belong to plate 531 to conduct heat on six pieces of water cooling gussets 53 of tubular rotation frame 5.
When maximum gauge extrados and tubular the rotation frame 5 allowed on six blocks of long arc shape cylinder plates 61 of workpiece roller 6
When the conductive and heat-conductive silicagel pad 532 of 531 inside of conductive and heat-conductive metal plate all contacts on six pieces of water cooling gussets 53 (Fig. 7), the two
Contact area is maximum, realizes maximum conductive and heat-conducting effect, this is required when carrying out plated film；When workpiece roller 6
Conductive and heat-conductive metal on six pieces of water cooling gussets 53 of small diameter extrados and tubular the rotation frame 5 of six blocks of long arc shape cylinder plates 61
When the conductive and heat-conductive silicagel pad 532 of 531 inside of plate contacts (such as Fig. 9), workpiece roller 6 can fall on tubular rotating bezel because of gravity
The lower part of frame 5, workpiece roller 6 and tubular rotation 5 upper contact of frame disengage, and expose gap, at this moment workpiece roller 6 passes through another
Set workpiece loading and unloading easily can remove or move into tubular rotation frame 5；Between workpiece roller 6 and tubular rotation frame 5
Relative rotation mobile (retaining and release) can be realized by special spanner 9.
Working principle of the utility model is:
During vacuum coating, a large amount of workpiece rollers 6 for loading little Bao dimension workpiece rotate frame 5 and rotation by tubular
The drive shaft 32 for turning magnetic fluid seal 3, motor 21 and the driving rotation of speed reducer 22 by 1 outside of vaccum case, realizes institute
The uniform coated on the full surface of workpiece is realized in the overturning and stirring for having little Bao dimension workpiece lasting；Meanwhile a large amount of little Bao dimension workpieces
Also by the tubular rotation frame 5 of the water flowing directly contacted, the rotation magnetic fluid seal 3 and rotating water head 4 of center water flowing
It is directly connected to the cooling recirculation system outside vaccum case 1, the lasting pressure for being cooled water is cooling, realizes in coating process
Temperature control；In addition bias can also be established on a large amount of little Bao dimension workpieces, the metal by same paths is connected by bias plasma
Source provides, thus two below the tubular rotation frame 5 in the rotation magnetic fluid seal 3 and vaccum case 1 outside vaccum case 1
A support wheel 13 all employs insulating part and vaccum case 1 is electrically insulated；Finally, loading a large amount of little Bao dimension workpiece rollers 6 in machine
Tool cart can easy access vaccum case 1 under assisting, and facilitate and charge and discharge in daily plated film production.
The present embodiment is used for the aluminum plating process of high-volume small size neodymium iron boron part.
The design of the utility model structure is simple, reasonable, can maintain persistently to horizontally rotate during vacuum coating, can continue
Being subjected to cool to water forces the high-volume little Bao dimension workpiece that contact is cooling, and inside loads persistently to roll and stir, and facilitates large quantities of
Measure the daily handling of workpiece；It can be used for high-volume little Bao dimension workpiece and constantly roll stirring and to constantly contact formula forced water
It is cold, realize the application of uniformly aluminizing or be coated with other metallic diaphragms of the full surface of workpiece under temperature control condition.
Claims (9)
1. a kind of extensible formula drum apparatus for vacuum coating, including vaccum case, it is installed on the vaccum case rear end
The rotating actuator in outside and rotation magnetic fluid seal, the tubular rotation frame being installed on the inside of the vaccum case and
The workpiece roller being movably installed on the inside of the tubular rotation frame；The rotation magnetic fluid seal include fixing seal seat,
Drive shaft and shaft gear；The fixing seal seat is mounted on outside in the middle part of the rear end of the vaccum case；The transmission turns
For axis horizontal through the fixing seal seat central interior, tubular described in one end assembly connection rotates frame, the other end with it is described
Rotating actuator connection；Tubular rotation frame include rear flange plate, forward flange ring and be connected to the rear flange plate and
Water cooling gusset between forward flange ring；It is characterized by: the drive shaft is axially inside passed through using hollow Rotating shaft strocture
Open up and be equipped with drive shaft inner hole: the other end axial end portion assembly connection of the drive shaft has rotating water head；
One end radially installed of the rotating water head has cooling water water inlet to connect mouth and one end axial end portion is equipped with cooling water and goes out
Water connects mouth；The cooling water water inlet connects mouth and is connected to the drive shaft inner hole；The other end of the rotating water head with it is described
The other end axial end portion assembly connection of drive shaft；The rotating water head is axially inside also equipped with for return water
Center return pipe；One end of the center return pipe is protruded into inside the rotating water head and connects mouth with cooling water water outlet
With connection；The other end of the center return pipe passes through the drive shaft and protrudes on the inside of the vaccum case to be turned with the tubular
Dynamic frame connection；
The water cooling gusset is equipped with sealing water channel and is fixedly provided with conduction in the one side on the inside of tubular rotation frame
Thermal conductive metal plate；Conductive and heat-conductive silicagel pad is installed on the inside of the conductive and heat-conductive metal plate；After the adjacent water cooling gusset
Inlet and outlet pipes are also connected between end；The inlet and outlet pipes will form Inlet and outlet water after the water route series connection on the water cooling gusset and lead to
Road；The water inlet end of the disengaging water passage is connected to drive shaft inner hole matching；It is described disengaging water passage water outlet with
The inner orifice of the center return pipe matches connection.
2. being used for the extensible formula drum apparatus of vacuum coating as described in claim 1, it is characterised in that: the rear flange plate
Middle part offer circular through hole and the corresponding lateral surface of the circular through hole be installed with rotation frame connecting flange；Described turn
The matching internal of dynamic frame connecting flange is provided with rotation frame flange intake tunnel separated from each other and rotation frame flange returns
Aquaporin；The rotation frame flange intake tunnel is connected to drive shaft inner hole matching, and the rotation frame flange returns
Aquaporin is connected to the matching of the inner orifice of the center return pipe；
The water inlet end matching of the disengaging water passage connects the rotation frame intake tunnel and is intake by the rotation frame
Channel is connected to the drive shaft inner hole；The rotation frame flange return water is connected in the water outlet matching of the disengaging water passage
Channel is simultaneously connected to by the rotation frame flange backwater channel with the matching of the inner orifice of the center return pipe.
3. being used for the extensible formula drum apparatus of vacuum coating as claimed in claim 2, it is characterised in that: the drive shaft
One end axial end portion connecting flange in shaft is installed and is connect by connecting flange in the shaft with the rotation frame
Flange matching connection；
The other end axial end portion of the drive shaft is equipped with the outer connecting flange of shaft；The other end diameter of the drive shaft is outside
Circumference Matching installation has shaft gear；
The other end axial end portion of the rotating water head be equipped with rotatable joint sealing flange and by the connector it is close
Envelope flange matches connection with the outer connecting flange of the shaft.
4. being used for the extensible formula drum apparatus of vacuum coating as claimed in claim 3, it is characterised in that: the rotary drive
Mechanism by motor, the power output side for being mounted on the motor speed reducer and be mounted on the power output shaft of the motor
Transmission gear composition；The power output shaft of the motor is engaged by the transmission gear with shaft gear matching.
5. being used for the extensible formula drum apparatus of vacuum coating as described in claim 1, it is characterised in that: the vaccum case
Front end be equipped with button fly front, rear end is installed with back shroud；Branch there are two setting is matched below the leading inside of the vaccum case
Support wheel, two support wheels, which are equipped with, realizes the insulation system being electrically insulated with the vaccum case.
6. being used for the extensible formula drum apparatus of vacuum coating as claimed in claim 5, it is characterised in that: the rear flange plate
Parallel to each other positioned opposite with forward flange ring, the water cooling gusset is along the even circumferential of the rear flange plate and forward flange ring point
Cloth；The forward flange ring is supported by two that are mounted on side-lower in the vaccum case support wheels.
7. being used for the extensible formula drum apparatus of vacuum coating as claimed in claim 5, it is characterised in that: the fixing seal
Seat is mounted on the outside of the middle part of the back shroud, and felt pad is housed between outer wall in the middle part of the back shroud；The fixation is close
Envelope seat passes through realization between the felt pad and the vaccum case and is electrically insulated.
8. being used for the extensible formula drum apparatus of vacuum coating as described in claim 1, it is characterised in that: the workpiece roller
Similar ratchet-like structure comprising the root diameter of the relatively described workpiece roller continues six pieces of long arc shape cylinders of smooth change
Plate, the six pieces short cylinder plate being connected between the adjacent long arc shape cylinder plate and before being connected to the long arc shape cylinder plate and short cylinder plate
The convex casing of cone at both ends afterwards；During rotation, the extrados of the long arc shape cylinder plate matches and institute for the workpiece roller
The close contact of conductive and heat-conductive silicagel pad is stated, and is conducted heat on the water cooling gusset by the conductive and heat-conductive metal plate.
9. being used for the extensible formula drum apparatus of vacuum coating as described in claim 1, it is characterised in that: the extensible formula
Drum apparatus further includes the coated target source for being installed on the inner or outer side of the workpiece roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821452024.0U CN208685051U (en) | 2018-09-05 | 2018-09-05 | A kind of extensible formula drum apparatus for vacuum coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821452024.0U CN208685051U (en) | 2018-09-05 | 2018-09-05 | A kind of extensible formula drum apparatus for vacuum coating |
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| CN208685051U true CN208685051U (en) | 2019-04-02 |
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| CN201821452024.0U Active CN208685051U (en) | 2018-09-05 | 2018-09-05 | A kind of extensible formula drum apparatus for vacuum coating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108774730A (en) * | 2018-09-05 | 2018-11-09 | 北京丹鹏表面技术研究中心 | A kind of extensible formula drum apparatus for vacuum coating |
| CN111501002A (en) * | 2020-01-16 | 2020-08-07 | 浙江工业大学 | Portable temperature-changing sample stage device |
-
2018
- 2018-09-05 CN CN201821452024.0U patent/CN208685051U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108774730A (en) * | 2018-09-05 | 2018-11-09 | 北京丹鹏表面技术研究中心 | A kind of extensible formula drum apparatus for vacuum coating |
| CN108774730B (en) * | 2018-09-05 | 2024-03-15 | 北京丹普表面技术有限公司 | Removable roller device for vacuum coating |
| CN111501002A (en) * | 2020-01-16 | 2020-08-07 | 浙江工业大学 | Portable temperature-changing sample stage device |
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Effective date of registration: 20220722 Address after: 102200 b807, building 8, No. 97, Changping Road, Shahe Town, Changping District, Beijing (Changping Demonstration Park) Patentee after: Beijing Danpu Surface Technology Co.,Ltd. Address before: 504, block C, No. 97, Changping Road, Changping District, Beijing 102206 Patentee before: BEIJING DNP SURFACE TECHNOLOGY INSTITUTE |