CN207608623U - Transition metal boride-metal composite target and filming equipment - Google Patents
Transition metal boride-metal composite target and filming equipment Download PDFInfo
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- CN207608623U CN207608623U CN201721115049.7U CN201721115049U CN207608623U CN 207608623 U CN207608623 U CN 207608623U CN 201721115049 U CN201721115049 U CN 201721115049U CN 207608623 U CN207608623 U CN 207608623U
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Abstract
The utility model provides a kind of transition metal boride metal composite target and filming equipment, it is related to filming equipment technical field, the transition metal boride metal composite target includes transition metal boride matrix and the metalwork that is fixedly connected with the transition metal boride matrix, the working face of the transition metal boride matrix is total to surface with the working face of the metalwork, can alleviate the technical issues of tenor is not easy to accurately control when preparing composite coating using the transition metal boride metal composite target.
Description
Technical field
The utility model is related to filming equipment technical fields, more particularly, to a kind of transition metal boride-metal composite
Target and filming equipment.
Background technology
Boron is referred to as the vitamin of metal material, is primarily due to boron and has metal and nonmetallic chemical property, Ji Nengyu concurrently
Metal compound forms various borides, and can form various borides with nonmetallic chemical combination, therefore, in recent years, transition metal boron
Compound is favored by numerous researchers.
The composite coating of transition metal boride-metal have many excellent comprehensive performances, such as high hardness, just
Degree, wearability, conductivity and thermal conductivity etc., especially its characteristic with high rigidity, are known as the second class superhard material.It is based on
The composite coating of transition metal boride-metal has above-mentioned excellent physical and chemical performance, therefore transition metal boride-gold
The composite coating of category has very extensive application.The composite coating of transition metal boride-metal is typically to be splashed by magnetic control
The method penetrated deposits to obtain, needed in magnetron sputtering process respectively in filming equipment install transition metal boride target and
Metal targets, and need respectively to be powered to transition metal boride target and metal targets, the controllability of technique is poor.
And transition metal boride target brittleness is big, and it is frangible, when installation is to filming equipment, the individual difference due to operating personnel and behaviour
The difference for making qualification is easy to cause transition metal boride target embrittlement.Meanwhile preparing transition metal boride-gold
It is needed when the composite coating of category to transition metal boride target and the independent power control of metal targets, also, in deposition process
The content of metal is not easy to accurately control, to influence the content of processing technology and metal in composite coating after deposition.
Such as the method that wasp et al. (patent of Patent No. CN201110418928.8) uses magnetron sputtering, it is depositing
Chamber interior base vacuum is less than 9.5 × 10-4When temperature is 20-500 DEG C, TiB is arranged in Pa2Target intermediate frequency is 50-200KHz, work(
Rate is 100-500W, and duty ratio 60-90%, Ni metallic target dc power is 0-20W, and the pre-sputtering time is 8-15min, and sputtering is heavy
The product time is 30-200min, to prepare TiB2- Ni composite coatings, the hardness of coating have good up to 25GPa or more
Good electric conductivity, friction are also very excellent with corrosion resistance.But using individual Ni targets and TiB in this method2
Target so that the TiB being prepared2The content of Ni is not easy to accurately control in-Ni composite coatings, to affect the property of coating
Energy.
Utility model content
The first of the utility model is designed to provide a kind of transition metal boride-metal composite target, existing to alleviate
During having the composite coating for preparing transition metal boride-metal in technology, alleviates transition metal boride-metal composite and apply
The technical issues of tenor is not easy to accurately control in layer.
The second of the utility model is designed to provide a kind of filming equipment.
In order to realize that the above-mentioned purpose of the utility model, spy use following technical scheme：
A kind of transition metal boride-metal composite target, including transition metal boride matrix and with the transition gold
Belong to the metalwork that boride matrix is fixedly connected, the work of the working face and the metalwork of the transition metal boride matrix
Face is total to surface.
Further, the transition metal boride matrix is equipped with groove, and the metalwork is fixed in the groove.
Further, the metalwork is connected by welding or being threadedly coupled to fix with the transition metal boride matrix
It connects.
Further, the shape of the metalwork includes any one of cylinder, square or cuboid.
Further, the metalwork is fixed on the peripheral surface of the transition metal boride matrix.
Further, the metalwork is solid with the transition metal boride matrix by welding or being clamped or be threadedly coupled
Fixed connection.
Further, the metalwork includes any one of cylinder, square, cuboid or loop configuration.
Further, the transition metal boride matrix includes TiB2、ReB2Or RuB2Any one of.
Further, the metalwork includes any one of Ni, Cu, V or Al.
A kind of filming equipment, including above-mentioned transition metal boride-metal composite target.
Compared with the prior art, the utility model has the advantages that：
Metalwork in the utility model is fixed together with transition metal boride matrix, and the working face of the two is put down altogether
Face, this guarantees transition metal borides and metal to enter in composite coating simultaneously.According to metal in composite coating with
The area ratio of mass ratio the design metalwork and the working face of transition metal boride matrix of transition metal boride, to realize
The purpose for accurately controlling tenor in composite coating makes point of the metal in the composite coating of transition metal boride-metal
Cloth is evenly.
In addition, transition metal boride provided by the utility model-metal composite target is by transition metal boride base
Body is fixed together with metalwork, when needing to prepare the composite coating of transition metal boride-metal, need to only install primary
Target can be realized, and without installing transition metal boride target and metal targets respectively, save the set-up time.
Further, since transition metal boride matrix is structure as a whole with metalwork, therefore, carried out using same power supply
Control, therefore operability is strong, controllability is good, work efficiency is high and is easily industrialized production.
Description of the drawings
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific implementation mode or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, other drawings may also be obtained based on these drawings.
Fig. 1 is the structural schematic diagram for transition metal boride-metal composite target that the utility model embodiment 1 provides；
Fig. 2 is the schematic cross-sectional view at A-A in structure shown in Fig. 1；
Fig. 3 is the structural schematic diagram for transition metal boride-metal composite target that the utility model embodiment 2 provides；
Fig. 4 is the structural schematic diagram for transition metal boride-metal composite target that the utility model embodiment 4 provides；
Fig. 5 is the preparation process flow for transition metal boride-metal composite target that the utility model embodiment 6 provides
Figure.
Icon：10- transition metal boride matrixes；20- metalworks.
Specific implementation mode
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
The every other embodiment that field those of ordinary skill is obtained without making creative work, belongs to this practicality
Novel protected range.
It is in the description of the present invention, it should be noted that term "center", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
The utility model and simplifying describes for ease of description, do not indicate or imply the indicated device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " the
One ", " second ", " third " are used for description purposes only, and are not understood to indicate or imply relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be electrical connection；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on can understanding as the case may be
State the concrete meaning of term in the present invention.
Embodiment 1
As depicted in figs. 1 and 2, the present embodiment is a kind of transition metal boride-metal composite target, including transition metal
Boride matrix 10 and the metalwork 20 being fixedly connected with transition metal boride matrix 10, transition metal boride matrix 10
The working face of working face and metalwork 20 is total to surface.
Metalwork 20 in the utility model is fixed together with transition metal boride matrix 10, and the working face of the two
Coplanar, this guarantees transition metal borides and metal to enter in composite coating simultaneously.According to golden in composite coating
Belong to the area ratio with the mass ratio of transition metal boride design metalwork 20 and the working face of transition metal boride matrix 10,
So that the purpose for accurately controlling tenor in composite coating is realized, in the composite coating for making transition metal boride-metal
Metal is more evenly distributed.
In addition, transition metal boride provided by the utility model-metal composite target is by transition metal boride base
Body 10 is fixed together with metalwork 20, when needing to prepare transition metal boride-metal composite coating, need to only install primary
Target can be realized, and without installing transition metal boride target and metal targets respectively, save the set-up time.
Further, since transition metal boride matrix 10 is structure as a whole with metalwork 20, therefore, using same power supply
It is controlled, therefore operability is strong, controllability is good, work efficiency is high and is easily industrialized production.
Transition metal boride matrix 10 and metalwork 20 are fixed together to form a composite target material, and when use only needs
By the composite target material be mounted directly in equipment.It can be controlled using same power supply when use.In deposition transition metal
When the composite coating of boride-metal, metalwork 20 and transition metal can be designed according to the content of the metal in composite coating
The ratio of the face area of boride, so as to accurately control the content of metal.
Transition metal boride matrix 10 in the present embodiment is equipped with groove, and metalwork 20 is fixed in groove.By
This, the connection of transition metal boride matrix 10 and metalwork 20 is realized by the way that metalwork 20 to be embedded in above-mentioned groove
's.
Metalwork 20 is fixedly connected by welding or being threadedly coupled with transition metal boride matrix 10.It is golden in the present embodiment
Belong to part 20 with the type of attachment of transition metal boride matrix 10 using being brazed, is fitted closely with both guarantees, non-loosening is without position
It moves.
In above-mentioned mounting means, the overall dimension of transition metal boride matrix 10 is constant, only in transition metal
The position of installation metalwork 20 is provided among boride matrix 10, metalwork 20 is uniformly distributed in transition metal boride matrix
On 10, to realize being uniformly distributed for metal in composite coating.
The shape of metalwork 20 can be cylinder, or square either can also be cuboid or other
Shape.But it is the need to ensure that after installing that the working face of the working face of metalwork 20 and transition metal boride matrix 10 is located at same
In plane.Metalwork 20 in the present embodiment selects cylindrical structure, facilitates and also facilitates processing while installation.
Transition metal boride matrix 10 includes TiB2、ReB2Or RuB2Any one of or at least two combination.Metal
Part 20 includes any one of Ni, Cu, V or Al or at least two combination.
In the present embodiment, transition metal boride matrix selects hard phase TiB2, the selection Ni of metalwork 20 metalworks 20,
TiB is formed after the two combination2- Ni composite target materials.Wherein the atom content of Ni is 10at.%.
TiB in the present embodiment2- Ni composite target materials are set according to the size of corresponding target position installation site in filming equipment
Meter.Wherein TiB2The thread size a diameter of 86mm, screw pitch 1mm, depth of thread 8mm of-Ni composite target materials, screw thread are innermost
Escape size is 1.5mm, a diameter of 83mm at escape.TiB2- Ni composite target material height is 35mm, and maximum gauge φ is
100mm.TiB can be ensured in this way2The installation site of target coordinates well in-Ni composite target materials and filming equipment.Ni metals
20 structure of part is cylinder, and a diameter of 18mm is highly 25mm, quantity 3, with TiB2Matrix uses soldering connection.Wherein
Ni metalworks 20 are in TiB2Location dimension in matrix is 58mm, is uniformly distributed in TiB2In matrix, between Ni metalworks 20
Angle is 120 degree, as depicted in figs. 1 and 2.
Embodiment 2
As shown in figure 3, the present embodiment is a kind of transition metal boride-metal composite target, it is different from embodiment 1 it
It is in the metalwork 20 in the present embodiment is fixed on the peripheral surface of transition metal boride matrix 10.Remaining and 1 phase of embodiment
Together.Specifically, metalwork 20 is fixedly connected by welding or being clamped or be threadedly coupled with transition metal boride matrix 10.Its
In, metalwork 20 is loop configuration, is sheathed on the peripheral surface of transition metal boride matrix 10, the internal diameter size of metalwork 20
Match with the outer diameter of transition metal boride collective 10.
Embodiment 3
The present embodiment is a kind of transition metal boride-metal composite target.Difference from example 1 is that this
In embodiment, transition metal boride matrix 10 selects hard phase TiB2, metalwork 20 selects Cu metalworks 20, after the two combination
Form TiB2- Cu composite target materials.Wherein the atom content of Cu is 5at.%.
TiB in the present embodiment2- Cu composite target materials are set according to the size of corresponding target position installation site in filming equipment
Meter.Wherein TiB2The thread size a diameter of 86mm, screw pitch 1mm, depth of thread 8mm of-Cu composite target materials, screw thread are innermost
Escape size is 1.5mm, a diameter of 83mm at escape.TiB2- Cu composite target material height is 35mm, and maximum gauge φ is
100mm.TiB can be ensured in this way2The installation site of target coordinates well in-Cu composite target materials and filming equipment.Cu metals
20 structure of part is cylinder, and a diameter of 12mm is highly 25mm, quantity 3, with TiB2Matrix uses soldering connection.Wherein
Cu metalworks 20 are in TiB2Location dimension in matrix is 58mm, is uniformly distributed in TiB2In matrix, the angle between Cu metalworks 20
Degree is 120 degree.
Embodiment 4
As shown in figure 4, the present embodiment is a kind of transition metal boride-metal composite target, it is different from embodiment 1 it
It is in the transition metal boride matrix 10 in the present embodiment selects hard phase TiB2, the selection V of metalwork 20 metalworks 20,
TiB is formed after the two combination2- V composite target materials.Wherein the atom content of V is 15at.%.
TiB in the present embodiment2- V composite target materials are according to the size design of corresponding target position installation site in filming equipment.
Wherein TiB2The thread size a diameter of 86mm, screw pitch 1mm, depth of thread 8mm of-V composite target materials, the innermost withdrawing of screw thread
Slot size is 1.5mm, a diameter of 83mm at escape.TiB2- V composite target material height is 35mm, and maximum gauge φ is
100mm.TiB can be ensured in this way2The installation site of target coordinates well in-V composite target materials and filming equipment.V metalworks
20 structures are cylinder, and a diameter of 20mm is highly 25mm, and quantity is 4, with TiB2Matrix uses soldering connection.Wherein V
Metalwork 20 is in TiB2Location dimension in matrix is 58mm, is uniformly distributed in TiB2In matrix, the angle between V metalworks 20
It is 90 degree.
Embodiment 5
The present embodiment is a kind of transition metal boride-metal composite target, difference from example 1 is that, this
Transition metal boride matrix 10 in embodiment selects hard phase RuB2, the selection V of metalwork 20 metalworks 20, the two combination
After form RuB2- V composite target materials.Wherein the atom content of V is 15at.%.
RuB in the present embodiment2- V composite target materials are according to the size design of corresponding target position installation site in filming equipment.
Wherein RuB2The thread size a diameter of 86mm, screw pitch 1mm, depth of thread 8mm of-V composite target materials, the innermost withdrawing of screw thread
Slot size is 1.5mm, a diameter of 83mm at escape.RuB2- V composite target material height is 35mm, and maximum gauge φ is
100mm.RuB can be ensured in this way2The installation site of target coordinates well in-V composite target materials and filming equipment.V metalworks
20 structures are cylinder, and a diameter of 20mm is highly 25mm, and quantity is 4, with RuB2Matrix uses soldering connection.Wherein V
Metalwork 20 is in RuB2Location dimension in matrix is 58mm, is uniformly distributed in RuB2In matrix, the angle between V metalworks 20
It is 90 degree.
Embodiment 6
As shown in figure 5, the present embodiment is a kind of preparation method of transition metal boride-metal composite target, including with
Lower step：First by cold moudling after Ti powder and B powder in proportion mixing and ball milling, then sintering synthesis, broken rear heat ground later
It is molded to obtain TiB2Matrix；TiB is formed after being welded later with metalwork 202Metal composite target.
Embodiment 7
The present embodiment is a kind of TiB provided using embodiment 12- Ni composite target materials prepare TiB2The composite coating of-Ni
Method, base material selection hard alloy (but being not limited to hard alloy, can also be other base materials) to be plated, the wherein atom content of Ni
For 10at.%.The TiB2The preparation method of the composite coating of-Ni mainly includes the following steps：
Step a)：Preset target：By TiB2- Ni composite target materials are installed on the corresponding target position of filming equipment；
Step b)：Pretreatment：Base material to be plated is cleaned by ultrasonic 40min in deionized water, is then put into base material to be plated
It is cleaned by ultrasonic 45min in acetone soln, then base material to be plated is put into ethanol solution and is cleaned by ultrasonic 45min, is then made
Substrate surface to be plated is dried up with dry nitrogen, finally base material to be plated is transferred in air dry oven and toasts 2h in 120 DEG C；
Then the base material to be plated after drying is fitted into special fixture and on the pivoted frame that is fixed in filming equipment；It is then shut off vacuum chamber
Door opens water chiller and connects the water route of ion source, electric arc target, molecular pump, vacuum chamber, opens air compressor machine and is plated with electric arc target
Film device general supply then opens mechanical pump and auxiliary pumping valve and molecular pump, and molecular pump, which is shown, to climb；When molecular pump climb to
After full speed, auxiliary pumping valve is closed, roughing valve is opened, vacuum chamber system is slightly taken out；After vacuum chamber internal pressure is less than 10Pa by force, then open
Auxiliary pumping valve, further vacuumizes；After the pressure of vacuum chamber system is less than 3Pa, roughing valve is just closed, starts high threshold to vacuum chamber
System carries out smart pumping；When vacuum chamber internal system pressure is extracted into less than 5.0 × 10-3After Pa, heating power supply is opened, to vacuum chamber system
System and base material to be plated carry out heat pre-treatment, and heating temperature is 350 DEG C, need to open turret system during heating, make to wait for
Plating base material with pivoted frame can either revolve round the sun, also can rotation, ensure that base material hard alloy to be plated is heated evenly；If vacuum chamber system
Pressure be less than 3.0 × 10-3When Pa, aura cleaning operation process is subsequently entered；
Step c)：Aura cleans：If the pressure of vacuum chamber system is less than 3.0 × 10-3Pa can open argon bottle master
Valve opens pressure reducing valve, ion source valve, arc valve and target valve and mass flowmenter, argon gas, argon flow amount is passed through into vacuum chamber cavity
500sccm, background vacuum 1.0Pa, substrate bias are -800V, and 30min is cleaned to base material hard alloy to be plated；
Step d)：Ion source is cleaned：After aura cleans, ion source is opened, it is clear to carry out ion etching to base material to be plated
It washes, wherein ion source voltage is 65V, argon flow amount 300sccm, operating pressure 0.6Pa in stove, substrate bias is set as-
300V；Scavenging period 120min；
Step e)：TiB2- Ni composite target material coatings deposit：After ion source etch cleaner, adjusting argon flow amount is
200sccm then opens TiB until operating pressure is adjusted to 0.5Pa2- Ni composition targets carry out TiB2- Ni composite coatings sink
Product, wherein target bias are -100V, power 3.5kW；Sedimentation time is 30min, and coating layer thickness is 1 μm；
Step f)：Blow-on samples：TiB2After-Ni composite coatings deposit, TiB is closed2The compound target power supplies of-Ni and bias
Power supply is then switched off the gentle bottle main valve of gas mass flow gauge and pressure reducing valve；Cooling process is further set, it is low to wait for that temperature drops to
After 100 DEG C, vacuum pump group and extraction valve are closed, water chiller and equipment general supply are then shut off；Open vent valve, Zhi Daozhen
After pressure and outside pressure reach balance in empty room cavity, door for vacuum chamber is opened, so that it may take the hardmetal samples of deposition
Go out, plated film terminates.
The application method of the transition metal boride that embodiment 7 provides embodiment 1-metal composite target has been done further
Explanation.The preparation method that embodiment 7 provides is equally applicable to embodiment 2-5, unlike, when using different transition metal
The difference of the composite coating obtained when boride-metal composite target.
Finally it should be noted that：The above various embodiments is only to illustrate the technical solution of the utility model, rather than limits it
System；Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should
Understand：It still can be with technical scheme described in the above embodiments is modified, either to which part or whole
Technical characteristic carries out equivalent replacement；And these modifications or replacements, this practicality that it does not separate the essence of the corresponding technical solution are new
The range of each embodiment technical solution of type.
Claims (10)
1. a kind of transition metal boride-metal composite target, which is characterized in that including transition metal boride matrix and with institute
State the metalwork that transition metal boride matrix is fixedly connected, working face and the metal of the transition metal boride matrix
The working face of part is total to surface.
2. transition metal boride according to claim 1-metal composite target, which is characterized in that the transition metal
Boride matrix is equipped with groove, and the metalwork is fixed in the groove.
3. transition metal boride according to claim 2-metal composite target, which is characterized in that the metalwork is logical
It crosses welding or is threadedly coupled and be fixedly connected with the transition metal boride matrix.
4. transition metal boride according to claim 2 or 3-metal composite target, which is characterized in that the metalwork
Shape include any one of cylinder, square or cuboid.
5. transition metal boride according to claim 1-metal composite target, which is characterized in that the metalwork is solid
Due to the peripheral surface of the transition metal boride matrix.
6. transition metal boride according to claim 5-metal composite target, which is characterized in that the metalwork is logical
It crosses welding or clamping or is threadedly coupled and be fixedly connected with the transition metal boride matrix.
7. transition metal boride according to claim 5 or 6-metal composite target, which is characterized in that the metalwork
Including any one of cylinder, square, cuboid or loop configuration.
8. transition metal boride-metal composite target according to claim 1,2,3,5 or 6, which is characterized in that described
Transition metal boride matrix includes TiB2、ReB2Or RuB2Any one of.
9. transition metal boride-metal composite target according to claim 1,2,3,5 or 6, which is characterized in that described
Metalwork includes any one of Ni, Cu, V or Al.
10. a kind of filming equipment, which is characterized in that including claim 1-9 any one of them transition metal boride-metal
Composite target material.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107338418A (en) * | 2017-08-30 | 2017-11-10 | 深圳先进技术研究院 | Transition metal boride metal composite target, filming equipment and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107338418A (en) * | 2017-08-30 | 2017-11-10 | 深圳先进技术研究院 | Transition metal boride metal composite target, filming equipment and application thereof |
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