CN107728434B - 液浸构件及曝光装置 - Google Patents

液浸构件及曝光装置 Download PDF

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Publication number
CN107728434B
CN107728434B CN201711011972.0A CN201711011972A CN107728434B CN 107728434 B CN107728434 B CN 107728434B CN 201711011972 A CN201711011972 A CN 201711011972A CN 107728434 B CN107728434 B CN 107728434B
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liquid immersion
substrate
liquid
optical
disposed
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Chinese (zh)
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CN107728434A (zh
Inventor
柴崎祐一
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Nikon Corp
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Nikon Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
CN201711011972.0A 2012-04-10 2013-03-15 液浸构件及曝光装置 Active CN107728434B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261622235P 2012-04-10 2012-04-10
US61/622,235 2012-04-10
US13/793,667 US9323160B2 (en) 2012-04-10 2013-03-11 Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
US13/793,667 2013-03-11
CN201380029835.3A CN104350425B (zh) 2012-04-10 2013-03-15 液浸构件及曝光装置

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CN201380029835.3A Division CN104350425B (zh) 2012-04-10 2013-03-15 液浸构件及曝光装置

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CN107728434A CN107728434A (zh) 2018-02-23
CN107728434B true CN107728434B (zh) 2020-04-03

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CN201711011972.0A Active CN107728434B (zh) 2012-04-10 2013-03-15 液浸构件及曝光装置
CN201380029835.3A Active CN104350425B (zh) 2012-04-10 2013-03-15 液浸构件及曝光装置

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CN201380029835.3A Active CN104350425B (zh) 2012-04-10 2013-03-15 液浸构件及曝光装置

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US (4) US9323160B2 (enExample)
EP (1) EP2836875B1 (enExample)
JP (3) JP6245179B2 (enExample)
KR (1) KR102158968B1 (enExample)
CN (2) CN107728434B (enExample)
HK (2) HK1204682A1 (enExample)
TW (3) TWI658335B (enExample)
WO (1) WO2013153939A1 (enExample)

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JP6369472B2 (ja) 2013-10-08 2018-08-08 株式会社ニコン 液浸部材、露光装置及び露光方法、並びにデバイス製造方法
KR102206979B1 (ko) * 2016-09-12 2021-01-25 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치를 위한 유체 처리 구조물
CN110268334B (zh) 2017-02-03 2024-10-29 Asml荷兰有限公司 曝光设备
CN109856922B (zh) * 2017-11-30 2020-11-13 上海微电子装备（集团）股份有限公司 浸没流体控制装置、浸没式光刻系统与回收控制方法
CN111480118B (zh) 2017-12-15 2024-06-25 Asml荷兰有限公司 流体处置结构、光刻设备、以及使用流体处置结构的方法
JP6575629B2 (ja) * 2018-04-04 2019-09-18 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
CN112650028B (zh) * 2020-12-25 2024-02-09 浙江启尔机电技术有限公司 一种改善浸没流场压力特性的浸液供给回收装置

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US9494870B2 (en) 2012-10-12 2016-11-15 Nikon Corporation Exposure apparatus, exposing method, device manufacturing method, program, and recording medium
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Publication number Priority date Publication date Assignee Title
CN1612292A (zh) * 2003-10-31 2005-05-04 株式会社尼康 定盘、载物台装置及曝光装置以及曝光方法
EP1780786A1 (en) * 2004-06-07 2007-05-02 Nikon Corporation Stage apparatus, exposure apparatus, and exposure method
CN101171668A (zh) * 2005-03-31 2008-04-30 株式会社尼康 曝光装置、曝光方法及元件制造方法
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Also Published As

Publication number Publication date
JP2015515738A (ja) 2015-05-28
HK1204090A1 (en) 2015-11-06
JP2019191613A (ja) 2019-10-31
HK1204682A1 (en) 2015-11-27
US20180039186A1 (en) 2018-02-08
TW201804261A (zh) 2018-02-01
EP2836875B1 (en) 2020-11-18
US20190056672A1 (en) 2019-02-21
EP2836875A1 (en) 2015-02-18
HK1245901A1 (zh) 2018-08-31
US9810999B2 (en) 2017-11-07
TWI658335B (zh) 2019-05-01
TWI611270B (zh) 2018-01-11
JP6245179B2 (ja) 2017-12-13
WO2013153939A1 (en) 2013-10-17
KR102158968B1 (ko) 2020-09-23
US9323160B2 (en) 2016-04-26
TW201344376A (zh) 2013-11-01
CN107728434A (zh) 2018-02-23
JP6569717B2 (ja) 2019-09-04
TW201928530A (zh) 2019-07-16
US10139736B2 (en) 2018-11-27
KR20150005603A (ko) 2015-01-14
TWI698720B (zh) 2020-07-11
JP2018022198A (ja) 2018-02-08
CN104350425A (zh) 2015-02-11
US20130265555A1 (en) 2013-10-10
CN104350425B (zh) 2017-11-28
US20160223915A1 (en) 2016-08-04
US10520828B2 (en) 2019-12-31

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