CN107727058A - A kind of frequency comb six degree of freedom measuring method and measuring system - Google Patents
A kind of frequency comb six degree of freedom measuring method and measuring system Download PDFInfo
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- G—PHYSICS
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The present invention relates to a kind of frequency comb six degree of freedom measuring method and measuring system, it is characterised in that including herein below：1) the first frequency comb and the second frequency comb with certain repetition rate difference be set, the spectral region of the first frequency comb and the second frequency comb have it is overlapping, to ensure that more difference interferences can occur for two frequency combs；2) the first frequency comb, which is divided into after two-beam pulse returns via the measurement grating pyramid for being arranged on measuring arm and the reference grating pyramid diffraction being arranged on reference arm respectively, synthesizes light beam；3) the transmission two-dimensional grating that the light pulse that the second frequency comb is sent is set through two parallel intervals successively, wherein, transmission two-dimensional grating is identical with measuring the grating parameter in grating pyramid；4) light beam of light combination interferes with the light pulse through transmiting two-dimensional grating outgoing, while the interference information for measuring two orthogonal directions obtains measuring the six-degree of freedom position and attitude information of grating pyramid.
Description
Technical field
The present invention relates to a kind of frequency comb six degree of freedom measuring method and measuring system, it is related to field of optical measuring technologies.
Background technology
Either high accuracy assembling, or Ultra-precision Turning, all it be unable to do without to the high-precision of position and the multiple frees degree of posture
Degree measurement.The multi-degree of freedom measurement, i.e., it is not timesharing measurement, nor different parameters is measured with multiple gauge heads simultaneously, and
It is with a gauge head while obtains multivariant information.Such measurement avoids environmental change and introduces error, saves measurement
Time, it is also convenient for adjustment and installation.This is assembled to the high accuracy under complex working condition, or the feedback control in Ultra-precision Turning, all
It is very important.
U.S. API (Automated Precision Inc) company is being proposed six degree of freedom synchronized measurement system in recent years
XD Laser laser interferometer, for surveying and drawing machine tool error figure and carrying out machine tool calibration.XD Laser laser interferometer is measuring
Measurement light is divided into three beams in target mirror, a branch of to be used for interfeerometry ranging, a branch of position sensor that is based on measures lateral attitude, Yi Shuyong
Auto-collimation principle angle measurement.It is functional concentrate in size 70mm × 94mm × 45mm gauge head, more ginsengs can be measured simultaneously
Number, simplifies set-up procedure, has saved adjustment time.XD Laser laser interferometer is by before with 2~3 days machines that could be completed
Bed error mapping, shortens to a few houres.Reinshaw company is also proposed index similar six degree of freedom measuring system XM-60 therewith
Multi-beam laser interferometer, it is same that six degree of freedom measurement is completed using a gauge head, transmission of wireless signals is employed, avoids survey
The dragging of cable during examination.Current this kind of about 200,000 dollars of measuring system market price.The gauge head of this quasi-instrument is mostly active
Design, antijamming capability is limited, and attitude measurement scope is also smaller, is mainly used in the Error Graph of offline mapping lathe, it is difficult to enter
The remote assembling of row is with docking measurement.
The content of the invention
In view of the above-mentioned problems, can solve the problem that in measurement process error crosstalk it is an object of the invention to provide one kind and cost compared with
Low frequency comb six degree of freedom measuring method and measuring system.
To achieve the above object, the present invention takes following technical scheme：A kind of frequency comb six degree of freedom measuring method, it is special
Sign is to include herein below：1) the first frequency comb and the second frequency comb with certain repetition rate difference, the first optical frequency are set
Comb and the second frequency comb spectral region have it is overlapping, with ensure two frequency combs more difference interferences can occur；2) the first frequency comb
It is divided into two-beam pulse respectively via the measurement grating pyramid and the reference grating angle being arranged on reference arm for being arranged on measuring arm
Cone diffraction synthesizes light beam after returning；3) light pulse that the second frequency comb is sent be sent in sequence to two parallel intervals set it is saturating
Two-dimensional grating is penetrated, wherein, transmission two-dimensional grating is identical with measuring the grating parameter in grating pyramid；4) light beam of light combination with through transmission
The light pulse of two-dimensional grating outgoing interferes, while the interference information for measuring two orthogonal directions obtains measuring grating pyramid
Six-degree of freedom position and attitude information；Wherein, six-degree of freedom position and posture include the angle of pitch, deflection angle, lateral displacement, axial direction
Displacement and roll angle.
Further, the angle of pitch and partially of measurement grating pyramid is obtained using spectrum phase-frequency characteristic entrained in interference light
Pivot angle, and amplitude versus frequency characte of the spectrum after slit is obtained to measure corresponding lateral displacement；Surveyed using 0 order diffraction light
The axial displacement of grating pyramid is measured, and the roll angle of measurement grating pyramid is obtained using diffraction light spot position, completes six degree of freedom
Position and the high-precision absolute measurement of posture.
Further, the angle of pitch or deflection angle are：
mR+S；
Wherein, m=[A/R]；
R=2 π F；
In formula, " [] " represents rounding operation, and A is bigness scale absolute value, and F is amplification factor, and S is more difference interference spectral regions
Interior single spectral line phase value carries out the low-angle in non-fuzzy angular range.
Further, lateral displacement Δ x Δs y is respectively：
In formula, λ2,(+1,0)And λ2,(-1,0)The centre wavelength that (± 1,0) order diffraction light is detected after slit is represented,
λ2,(0,+1)And λ2,(0,-1)The centre wavelength that (0, ± 1) order diffraction light is detected after slit is represented, D is grating to spacing, d
For screen periods, λ0The diffraction center wavelength of light also detected without spin without translation for grating pyramid initial position.
Further, axial displacement L is：
In formula, υgThe aerial group index of frequency comb pulse is represented, time delay Δ t passes through to interference signal IRWith
IMFourier transformation obtains spectrum phase Delay computing and obtained, Δ frep=frep2-frep1, frep1And frep2Respectively two optical frequencies
The repetition rate of comb.
To achieve the above object, the present invention also takes following technical scheme：A kind of frequency comb six degree of freedom measuring system, its
It is characterised by, the measuring system includes a pair of frequency combs with small repetition difference, and the first frequency comb is as signal pulse, and the
Two frequency combs are as local oscillator light pulse；The signal pulse enters a Michelson interference device, the signal pulse warp
It is divided into reference beam and measuring beam, the reference beam and measuring beam are respectively via the ginseng for being arranged on reference arm and measuring arm
Examine grating pyramid and measurement grating pyramid diffraction obtains 0, (0, ± 1) and (± 1,0) order diffraction light, through reference grating pyramid and survey
The diffraction light of amount grating pyramid returns and is transmitted into the first spectroscope after closing light again on spectroscope BS1；Local oscillator light pulse according to
The secondary transmission two-dimensional grating set by two parallel intervals so that the locus of local oscillator light pulse can be with measuring in light
Diffraction lights at different levels correspond and are transmitted into the second spectroscope, through transmit two-dimensional grating diffraction light with through first it is spectroscopical go out
Penetrate light to interfere in the second spectroscope, a part of interference light being emitted through the second spectroscope is transmitted into ccd detector, through second
Another part interference light of spectroscope outgoing is transmitted into the 3rd spectroscope, the 4th spectroscope and the first detector respectively, through the 3rd
For the light of dichroic mirror through a lens focus to the 3rd detector, the light through the transmission of the 3rd spectroscope is transmitted into the by a slit
Two detectors, the light through the 4th dichroic mirror are transmitted into the 5th detector through a lens, and the light through the transmission of the 4th spectroscope passes through
One slit is transmitted into the 4th detector.
Further, first detector detects 0 grade of optical interference signals for obtaining the measurement grating pyramid along Z axis
Mobile displacement；Second detector and the 4th detector are measured in (± 1,0) level interference light spectrum by slit respectively
The change of cardiac wave length, obtain measuring the change in location of grating pyramid in the X-axis direction by difference detecting, can similarly obtain
Measure the change in location of grating pyramid in the Y-axis direction；3rd detector and the 5th detector measurement (± 1,0) order diffraction
The phase-frequency characteristic curve of light spectrum, the absolute deflection angle rotated for obtaining measurement grating pyramid around Y-axis, the i.e. angle of pitch are similar
Ground can obtain measuring the absolute deflection angle that grating pyramid rotates around X-axis, i.e. deflection angle；The ccd detector class is used to monitor
Facula position moves, for obtaining measurement grating pyramid around optical axis corner, i.e. roll angle.
For the present invention due to taking above technical scheme, it has advantages below：1st, the present invention is by manipulation of the grating to spectrum,
The high-acruracy survey of spectrum is organically combined with frequency comb, will be entrained in optical grating diffraction light by spectrum multidimensional discrimination technology
Spectrum phase-frequency characteristic separated with amplitude versus frequency characte, realize with the diffraction lights of two orthogonal directions while measure the angle of pitch/deflection angle
And lateral displacement；Combine 0 grade of ligh-ranging and diffraction luminous point position measurement roll angle on this basis, complete six-degree of freedom position and
The high-precision absolute measurement of posture, the problem of error crosstalk in measurement process can be efficiently solved.2nd, of the invention six from
Grating pyramid is dexterously devised by degree measurement, the dichroism and the retro-reflective properties of prism of corner cube that two-dimensional grating will be transmitted
It is combined, completes passive target mirror design, there is simple for structure, easy to use and lower-cost feature.The present invention can be wide
The general six degree of freedom synchro measure applied to spatial attitude.
Brief description of the drawings
Fig. 1 is the frequency comb six degree of freedom measuring system structural representation of the present invention；
Fig. 2 is the two-dimensional grating spherical coordinate system schematic diagram of the present invention；
Fig. 3 is double light comb spectral measurement system schematic diagrams of the present invention；
Fig. 4 is the grating pyramid pitch angle measurement schematic diagram of the present invention；
Fig. 5 is the grating pyramid lateral attitude instrumentation plan of the present invention；
Fig. 6 be the present invention grating pyramid posture to (1,0) order diffraction light in space coordinates；
Fig. 7 is the ccd detector measurement roll angle schematic diagram of the present invention.
Embodiment
Come to carry out the present invention detailed description below in conjunction with accompanying drawing.It should be appreciated, however, that accompanying drawing has been provided only more
Understand the present invention well, they should not be interpreted as limitation of the present invention.In the description of the invention, it is to be understood that
Term " first ", " second " etc. are only used for the purpose of description, and it is not intended that instruction or hint relative importance.To retouch
Kinematic parameter is stated, the present invention establishes dimensional Cartesian coordinates system O-XYZ, and X-axis is parallel with reference arm light beam, Z axis and measuring arm light
Shu Pinghang.In order to which subsequent descriptions are convenient, angle of the grating pyramid around Y-axis is turned into the angle of pitch by the present invention, the angle rotated around X-axis
As deflection angle, the angle rotated about the z axis turns into roll angle.
Frequency comb six degree of freedom measuring method provided by the invention, including herein below：
1) setting has certain repetition rate difference Δ frep=frep2-frep1The first frequency comb and the second frequency comb, two light
Frequently the spectral region of comb has overlapping, to ensure that more difference interferences can occur for two frequency combs；
2) the first frequency comb be divided into two-beam pulse respectively via be arranged on measuring arm measurement grating pyramid and be arranged on
Reference grating pyramid diffraction on reference arm synthesizes light beam after returning；
3) the transmission two-dimensional grating that the light pulse that the second frequency comb is sent is set through two parallel intervals successively, wherein, thoroughly
It is identical with measuring the grating parameter in grating pyramid to penetrate two-dimensional grating；
4) light beam is synthesized to interfere with the light pulse through transmiting two-dimensional grating outgoing, while two orthogonal directions of use
Interference information measurement obtains measuring the six-degree of freedom position and attitude information of grating pyramid.Wherein, six-degree of freedom position and posture
Information includes the angle of pitch, deflection angle, lateral displacement, axial displacement (testing distance) and roll angle.Wherein, institute in interference light is obtained
The spectrum phase-frequency characteristic of carrying obtains the angle of pitch and deflection angle of measurement grating pyramid, and obtains width of the spectrum after slit
Frequency characteristic measures corresponding lateral displacement；The axial displacement of measurement grating pyramid is obtained using 0 order diffraction light, and utilizes diffraction
Light spot position obtains the roll angle of measurement grating pyramid, completes the high-precision absolute measurement of six-degree of freedom position and posture.
As shown in figure 1, frequency comb six degree of freedom measuring system provided by the invention, which includes a pair, has small repetition difference
Frequency comb, the first frequency comb 1 are used as signal pulse, and the second frequency comb 2 is used as local oscillator light pulse.
Signal pulse enters Michelson interference device, and the difference L of the distance of measuring arm and reference arm is testing distance.
Signal pulse is divided into reference beam and measuring beam through spectroscope BS1, and reference beam and measuring beam are respectively via being arranged on
Reference arm and the reference grating pyramid CR1 of measuring arm and measurement grating pyramid CR2 diffraction obtain 0, (0, ± 1) and (± 1,0) level
Diffraction light, the diffraction light through reference grating pyramid CR1 and measurement grating pyramid CR2 returns and the closing light again on spectroscope BS1
After be transmitted into spectroscope BS2；
Transmission the two-dimensional grating G1 and G2 that local oscillator light pulse is set by two parallel intervals successively so that local oscillator light pulse
Locus can correspond with the diffraction lights at different levels in measurement light and be transmitted into spectroscope BS2, go out through two-dimensional grating G2
The diffraction light penetrated is interfered with the synthesis light through spectroscope BS1 in spectroscope BS2, and the part being emitted through spectroscope BS2 is done
Relate to light and be transmitted into ccd detector, another part interference light being emitted through spectroscope BS2 is transmitted into spectroscope BS3, spectroscope respectively
BS4 and detector PD1, the light reflected through spectroscope BS3 focus on detector PD3 through lens L1, the light transmitted through spectroscope BS3
Detector PD2 is transmitted into by slit S1, the light reflected through spectroscope BS4 is transmitted into detector PD5 through lens L2, through spectroscope
The light of BS4 transmissions is transmitted into detector PD4 through slit S2.
Wherein, detector PD1 detects 0 grade of optical interference signals and is used for obtaining the position that measurement grating pyramid CR2 moves along Z axis
Move；Detector PD2, PD4 measure the change of (± 1,0) level interference light spectral centroid wavelength by slit S1, S2 respectively, pass through
Difference detecting obtains measuring the change in location of grating pyramid CR2 in the X-axis direction, can similarly obtain measuring grating pyramid
The change in location (being not drawn into figure) of CR2 in the Y-axis direction；Detector PD3 and PD5 measurement (± 1,0) order diffraction light spectrum
Phase-frequency characteristic, the absolute deflection angle rotated for obtaining measurement grating pyramid CR2 around Y-axis, the i.e. angle of pitch, can similarly be obtained
The absolute deflection angle (being not drawn into figure) that measurement grating pyramid CR2 rotates around X-axis, i.e. deflection angle；Ccd detector is similar to autocollimatic
The laser spot detection device of straight instrument, monitoring facula position movement, for obtaining measurement grating pyramid CR2 around optical axis corner, i.e. roll angle.
In a preferred embodiment, reference grating pyramid and measurement grating pyramidal structure are all identical, by an angle
Cone prism and one side transmission two-dimensional grating, transmit the exiting surface of two-dimensional grating and are fixedly connected with the bottom surface of prism of corner cube, in order to
Enough space angle postures and ray space change in location for accurately analyzing grating pyramid, raster coordinate is established in pyramid model
System and space coordinates.Space coordinates are dimensional Cartesian coordinates systems and fixed, raster coordinate system x, and y-axis is transmission two
The primary period direction of grating is tieed up, z-axis is grating normal direction.The effect of transmission two-dimensional grating is that spectrum is believed in regulation and control frequency comb
Breath, to be extracted with different modes.Because the present invention can aid in using transmission two-dimensional grating while be extracted both direction
Lateral attitude change and both direction attitude angle (angle of pitch and deflection angle).
Original coordinate system is O-xyz, it is assumed that initial time, space coordinates and raster coordinate system are completely superposed, and origin exists
The summit of grating pyramid.Afterwards, grating pyramid starts to rotate around its summit, is divided into following three step：
The first step：O-xyz is around z-axis rotation alphazIt is changed into O-x after angle1y1z1, then
Second step：O-x1y1z1Around y1Axle rotation alphayIt is changed into O-x after angle2y2z2, then
3rd step：O-x2y2z2Around x2Axle rotation alphaxIt is changed into O-x after angle3y3z3, then
Finally：O-x3y3z3Raster coordinate system after as rotating, and αx, αy, αzAll it is low-angle.
Assuming that it is M that three, which are pivoted coefficient matrix,x, My, Mz, then
Therefore M can be passed throughx、My、MzThe conversion of matrix obtains the parameter transformation of two coordinate systems.In the sky of given grating
Between after posture, the rotation order more than, i.e., first, further around new y-axis, finally rotated around z-axis around new x-axis, three angles
Value uniquely determine, but if rotation order it is different, the value of three angles can be inconsistent.In order to prevent obscuring, this
Invention definition from dimensional Cartesian coordinates system to the rotation of raster coordinate system order is followed successively by z-axis, y-axis and x-axis, below according to
This is sequentially analyzed.In incident ray coordinate system, the direction unit vector of incident ray is (0,0,1)T, substitute into formula (4)
In to obtain the direction unit vector of the incident ray in raster coordinate system be (sin αy,sinαxcosαy,cosαxcosαy)T.Cause
This wave vector in raster coordinate system is kinc=k (sin αy,sinαxcosαy,cosαxcosαy)T。
Assuming that (m, n) order diffraction light wave arrow is in raster coordinate system
(as shown in Figure 2), the grating constant transmitted in the both direction of two-dimensional grating is all d, then by two-dimensional grating equation：
Obtain：
By formula (7) and (8) can determine θ andWith αx, αyRelation.Light is again by light after a diffraction
Grid, (- m ,-n) order diffraction light and initial incident parallel light after second this grating.From light source into detector
Total optical path amount by θ andAnd raster size determines.
For the frequency comb six degree of freedom measuring system of the present invention, if only 0 grade of consideration detector PD1 detections
The spectral measurement of light, frequency comb six degree of freedom measuring system can be reduced to double light comb spectral measurement systems as shown in Figure 3, visit
The spectral measurement principle for surveying (±) 1 order diffraction light of device PD2~PD5 detections is similar.Two frequency combs have certain repeat
Frequency difference Δ frep=frep2-frep1, corresponding Tr1=1/frep1And Tr2=1/frep2Respectively flashlight and local oscillator photoperiod.First
The pulse that frequency comb 1 is sent is divided into two beams through spectroscope BS1 and the grating pyramid by being arranged on reference arm and measuring arm is reflected back
Come, form two pulses of the row with certain impulse time delay Δ τ.Reference pulse, respectively with local oscillator pulse interference, passes through with measurement pulse
Optical band pass filter BPF is crossed, it is Δ t=f to obtain time delayrep1/ΔfrepΔ τ reference interference signal IRWith measurement interference signal
IM, the process shows as linear Optical Sampling in time domain, more longitudinal mode difference interferences shown as on frequency domain.Take IROr IMCarry out in Fu
Leaf transformation, radio frequency domains frequency spectrum can be obtained, then through scale factor frep1/ΔfrepAmplification obtains corresponding spectral signal.It may be noted that
, the spectrum of acquisition not only comprising frequency, strength information, also contains phase information corresponding to frequency.
Measurement grating pyramid is obtained respectively the following detailed description of the frequency comb six degree of freedom measuring method using the present invention
Deflection angle, the angle of pitch, axial distance, the principle of lateral separation and roll angle.
1st, deflection angle and the angle of pitch are measured
Deflection angle and the angle of pitch are changed according to the spectrum phase detected to measure, and this is grating pyramid and frequency comb
Organically combine one of advantage brought.For easy analysis, grating pyramid is launched into two primary period direction difference by the present invention
Two-dimensional grating pair parallel to each other.In order to more intuitively illustrate measuring principle, the present invention is obtained using detector PD3 and detector PD5
It must measure exemplified by the angle of pitch of grating pyramid to illustrate.
As shown in figure 4, because phase is not limited the slope of wavelength by the scope of Fourier transformation phase, therefore pass through survey
Amount phase obtains institute's measuring angle (such as α to the slope of wavelengthy) bigness scale absolute value A, the α finally to be surveyedyExact value can represent
For non-fuzzy angular range R m times (m is integer) plus the low-angle S, i.e. α in non-fuzzy angular rangey=mR+S.
Low-angle S in non-fuzzy angular range can utilize single spectral line phase value and S linear relationship to be calculated.Above-mentioned bigness scale and
Bigness scale is similar with the method that accurate measurement combines during the method that accurate measurement is combined is long with interferometer survey, is specially：
1) carried out using single spectral line phase value in the more difference interference spectral regions of frequency comb in non-fuzzy angular range
Low-angle S is calculated：
Assuming that a length of λ of light wave corresponding to i-th spectral line in the more difference interference spectral regions of frequency combi, transmit two-dimensional grating
Grating constant in both direction is all d, then by two-dimensional grating equation：
By above-mentioned formula, grating pyramid spatial attitude angle (α can be establishedy,αx) and diffraction light azimuthPass
System, so as to realize the trace of all wavelengths light.Due to two-dimensional grating to vertical interval fix θ andChange can cause
Light path of the light wave on x directions and y directions is the change of phase of light wave, and obtain phase of light wave eventually through interferometric method is surveyed with facilitating
Spatial attitude angle (the α of heady,αx) measurement.Light is again by transmission two-dimensional grating after a diffraction, by transmission
(- m ,-n) order diffraction light and initial incident parallel light after two-dimensional grating.From light source to the total optical path for entering detector
Amount by θ andAnd transmission two-dimensional grating size determines.For easy analysis, the present invention only considers that the anglec of rotation around y-axis is
Angle of pitch αy, around the angle of deflection of x-axisxMeasuring principle and αyIt is identical, repeat no more.
Grating normal is from the horizontal by low-angle αy.Consider (± 1,0) the order diffraction light being distributed in x-axis, its grating side
Cheng Wei：
dsinαy± dsin θ=± λi
In formula, d is screen periods, and θ is the angle of emergence of order diffraction light.By taking diffraction light in scheming as an example, P is incidence point, and Q is
Exit point, in horizontal range L, the geometric distance that the wavelength light is passed by is divided into two parts, i.e., between grating pair with outside grating, because
The geometric distance that this light wave is passed by is：
In formula, D be grating to spacing, be a constant.Consideration and αyThe difference of geometric distance when=0, and it is converted into phase
Value, carry out approximation and obtain：
In summary, it can be seen that emergent light phase place change is a linear relationship with the low-angle rotated.Due to working as αy=0
When ± 1 order diffraction light situation it is identical, therefore can detect another grade outgoing optical signal phase changeWithSubtract each other
Eliminate αyFirst when=0 is worth to：
In formula, F is amplification factor, takes D=0.055m, d=3 μm, λiF is about 6.5 × 10 at=1.025 μm-5.If survey
Phase precision reaches 1 °, it is possible to obtains 1 μ rad angle measurement accuracy, the α now obtainedySmall angle as in non-fuzzy angular range
Spend S result of calculation.
2) bigness scale absolute value A calculating：
A series of a series of wavelength Xs corresponding to spectral lines in the present invention comprehensive utilization more difference interference spectral regions of frequency comb1,
λ2,…,λjPhase corresponding with itsRelation extend the measurement range of the anglec of rotation, it is assumed that frequency comb
Centre wavelength corresponding to more difference interference spectrum is λc, straight line plan is carried out to phase corresponding to each spectral line and corresponding wavelength value
Close, it is A to obtain straight slope, then：
3) the attitude angle α of grating pyramidy：
Due to by the phase value that the Fourier transformation of time-domain signal obtains in-π~π, more than the absolute phase of the scope
Value can not obtain, therefore surveyed rotation angle αyIn the presence of a limited non-fuzzy angular range R=2 π F.
M=[A/R], " [] " represent rounding operation
αy=mR+S. (12)
In summary, due to deflection angle α can be measured simultaneously using two-dimensional gratingxWith angle of pitch αy.When phase measurement resolution ratio
At 1 degree, the resolution ratio of corresponding attitude angle is 1 μ rad, can meet the requirement of many applications.In addition, the present invention passes through
Phase is measured to the slope of wavelength, can solve phase measurement more than the position phase fuzzy problem that 2 π are introduced, so as to expand measurement model
Enclose, accurate can must obtain low-angle corner αy, complete the measurement of the angle of pitch, angle of deflectionxMeasuring principle is identical, no longer superfluous herein
State.
2nd, lateral attitude is measured, and lateral attitude is changed according to the spectral component detected to measure.
As shown in figure 1, (± 1,0) order diffraction light of grating pyramid is received using slit S1, S2.Because in grating pyramid
Grating is two-dimensional grating, there is the diffraction light of (0, ± 1) level and (± 1,0) four direction, and do not interfere with each other can measure simultaneously x and
The displacement of y both directions.Two primary period direction difference two-dimensional gratings pair parallel to each other can be regarded after the expansion of grating pyramid as.
Same first to be analyzed from the situation of a dimension in order to more intuitively explain, Fig. 5 is the grating pyramid under x-z-plane projection.
If grating pyramid moves Δ x along x-axis positive direction, according to grating equation, be equivalent to (± 1,0) order diffraction light will bear to x-axis
2 Δ x are moved in direction, i.e., from P points to R points.The low-frequency component that now detector PD4 is detected will be reduced, and detector PD2 is detected
The low-frequency component arrived will increase, and vice versa., can with reference to above-mentioned double light comb spectral measurement methodses using the principle of difference detecting
Accurately to obtain the lateral attitude of grating pyramid.Analysis does not account for the corner of grating pyramid above, in fact, corner misses
Difference is often coupled with lateral attitude, and analysis in detail below when grating pyramid while has deflection angle or an angle of pitch
When, there are much influences on displacement measurement, whether both errors can separate.
Any attitudes vibration on grating pyramid is resolved into the process for first rotating around pyramid summit and translating again.If grating
For pyramid initial position without translating also without spin, the corresponding angle of diffraction is θ0Light can be received by a detector through slit, note now
The diffraction center wavelength of light detected is λ0, as shown in black dotted lines in Fig. 5.When grating pyramid is around y-axis rotation alphaySuch as ash after angle
Shown in color dotted line, the corresponding angle of diffraction is θ1Light can be received by a detector through slit, remember the central wavelength lambda detected1.Most
The wavelength for obtaining the corresponding angle of diffraction by translation Δ x and detecting is θ2And λ2(it is clear to show, it is equivalent that light is translated into 2 Δ x
For grating pyramid translation Δ x), as shown in light grey lines, because detector position is constant, spectrum is investigated in same position
Change, according to grating equation and ray tracing, can be obtained to (1,0) diffraction light：
Recycle (- 1,0) diffraction light displacement formula to carry out difference, α can be eliminatedyObtain：
Wherein, λ2,(+1,0)And λ2,(-1,0)Represent the centre wavelength that (± 1,0) order diffraction light is detected after slit.
Therefore the variable quantity of lateral attitude and centre wavelength is linear relationship, by double light comb measure spectrum center wavelength variations, can be obtained
To along x-axis displacement, can similarly obtain along y-axis displacement：
Prism of corner cube is only considered in said process the influence for becoming distribution to wavelength is rotated around y-axis, can actually deposited simultaneously
Around x-axis rotation alphaxInfluence.By taking (1,0) order diffraction light as an example, its distribution on the x-y plane is calculated with αxAnd αyBecome
Change as shown in Figure 6.The depth change of color represents Wavelength distribution, and the direction of longitudinal arrow represents α respectivelyxSpatial distribution during change
Moving direction, lateral arrows represent certain αxLower αyThe moving direction of spatial distribution during change.Take αyWhen=0, αxTake respectively
0mrad、±1mrad、±2mrad.It can be seen that αxChange cause Diffraction fringe distribution to be translated along y-axis and rotate certain small angle
Degree, but Wavelength distribution direction is almost unchanged.(1,0) order diffraction light is collected using along y-axis slit, works as αxDuring=5mrad, cause to spread out
Penetrate light and moved along the x-axis about 0.3 μm, about 1.7mrad is have rotated with x-axis angle.The influence that wherein diffraction light distribution rotates can be with
Ignore, can be by measuring α along the offset of x-axisxTo compensate.And αyChange spectrum is occurred in the x direction linearly
Mobile, as shown in formula (13), this influence of movement to the position measurement of x directions can be by investigating in ± 1 order diffraction light simultaneously
The change of cardiac wave length eliminates (difference detecting method), as shown in the formula (14).
Result such as Fig. 6 is when calculating the diffraction light second of (1,0) level first in raster coordinate system to pass through grating
With the intersecting point coordinate of grating, coordinate inversion is recycled to return in dimensional Cartesian coordinates, X-axis and Y-axis are space flute in figure
Karr coordinate system.Consider the symmetry of two-dimensional grating, also have similar result to the displacement y of another axle, therefore measure logical
Displacement along x-axis and y-axis can accurately be obtained by crossing the change of slit spectral centroid wavelength.Because there is reference in measuring system
Grating pyramid makees correlation ratio compared with can obtain measuring grating as absolute position benchmark, with the spectral component of reference grating pyramid
The horizontal absolute position of pyramid.
3rd, axial distance measures, and axial distance measurement is based on double light comb range measurement principles, by measuring reference pulse and survey
The relative spectral phase delay between pulse is measured to calculate.
Double light comb rangings have the advantages of measurement range is big, range accuracy is high and measuring speed is fast, in the present system, grating
0 grade of light of pyramid be used to measure axial distance, and tested distance L reflects measuring arm and the arm length difference of reference arm.Pass through resolving
With reference to interference signal IRWith measurement interference signal IMBetween time delay Δ t, can obtain testing distance is：
Wherein, υgThe aerial group index of frequency comb pulse is represented, L represents measured distance.Time delay Δ t
By to interference signal IRAnd IMFourier transformation obtains spectrum phase Delay computing and obtained.
4th, rolling angle measurement, roll angle are that grating pyramid will not cause spectrum around optical axis (z-axis) small angle rotation, roll angle
Phase place change, and for spectral component change caused by the relative grating pyramid lateral displacement of spectral component change caused by it,
It is that second order is a small amount of, therefore can not be obtained in the lump using above-mentioned Principle Method.The system measures different diffraction using ccd detector
The displacement of hot spot, analysis hot spot distribution (as shown in Figure 7), the roll angle for measuring grating pyramid can be calculated.This is based on biography
The geometric optical theory of system, e measurement technology comparative maturity.On this basis, the multispectral information of frequency comb, it helps improve
Measurement sensitivity.Assuming that ccd detector pixel dimension is 3 μm, and it is 0.1 pixel for single-spot centralized positioning precision, x (y)
The shaft length of a pair of hot spots is about 42mm on axle, then rolling angle measurement precision can reach 7 μ rad.Pass through two pairs of hot spots
Simultaneous solution, measurement accuracy can be improved to 5 μ rad.
In summary, although having detected the information of multiple frees degree simultaneously using grating pyramid, spectrum multidimensional is passed through
Identification technique, each error component can be separated.By transmiting two-dimensional grating, 0 grade can be investigated simultaneously, (- 1,
0), (1,0), the spectral characteristic of (0, -1) (0,1) five diffraction times.Axial distance information is extracted from 0 order diffraction light；From (-
1,0) lateral position information in pitching angle information and x directions, is extracted in (1,0) diffraction light, then by spectrum multidimensional identification technique,
The two error separates are opened from the phase-frequency characteristic and amplitude versus frequency characte of spectrum；Equally, can divide from (0, -1) (0,1) diffraction light
Separate out deflection angle and the lateral position information in y directions；Finally, rolling angle information is the spectrum by this 5 diffraction times in sky
Between change in location extract.So, by spectrum multidimensional identification technique, solving in six degree of freedom measurement process to deposit
Error cross-interference issue, realize the multivariant high-acruracy survey of single gauge head.
The various embodiments described above are merely to illustrate the present invention, wherein the structure of each part, connected mode and manufacture craft etc. are all
It can be varied from, every equivalents carried out on the basis of technical solution of the present invention and improvement, should not exclude
Outside protection scope of the present invention.
Claims (7)
1. a kind of frequency comb six degree of freedom measuring method, it is characterised in that including herein below：
1) first frequency comb and second frequency comb of the setting with certain repetition rate difference, the first frequency comb and the second frequency comb
Spectral region have it is overlapping, with ensure two frequency combs more difference interferences can occur；
2) the first frequency comb be divided into two-beam pulse respectively via be arranged on measuring arm measurement grating pyramid and be arranged on reference
Reference grating pyramid diffraction on arm synthesizes light beam after returning；
3) light pulse that the second frequency comb is sent is sent in sequence to the transmission two-dimensional grating that two parallel intervals are set, wherein, thoroughly
It is identical with measuring the grating parameter in grating pyramid to penetrate two-dimensional grating；
4) light beam of light combination interferes with the light pulse through transmiting two-dimensional grating outgoing, while measures the interference of two orthogonal directions
Information obtains measuring the six-degree of freedom position and attitude information of grating pyramid；Wherein, six-degree of freedom position and posture include pitching
Angle, deflection angle, lateral displacement, axial displacement and roll angle.
2. a kind of frequency comb six degree of freedom measuring method as claimed in claim 1, it is characterised in that using being taken in interference light
The spectrum phase-frequency characteristic of band obtains the angle of pitch and deflection angle of measurement grating pyramid, and obtains amplitude-frequency of the spectrum after slit
Characteristic measures corresponding lateral displacement；The axial displacement of measurement grating pyramid is obtained using 0 order diffraction light, and utilizes diffraction light
Point position obtains the roll angle of measurement grating pyramid, completes the high-precision absolute measurement of six-degree of freedom position and posture.
3. a kind of frequency comb six degree of freedom measuring method as claimed in claim 1, it is characterised in that the angle of pitch or deflection angle
For：
Wherein,
In formula, " [] " represents rounding operation, and A is bigness scale absolute value, and F is amplification factor, and S is single in more difference interference spectral regions
Individual spectral line phase value carries out the low-angle in non-fuzzy angular range.
A kind of 4. frequency comb six degree of freedom measuring method as claimed in claim 1, it is characterised in that y points of lateral displacement Δ x Δs
It is not：
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In formula, λ2,(+1,0)And λ2,(-1,0)Represent the centre wavelength that (± 1,0) order diffraction light is detected after slit, λ2,(0,+1)
And λ2,(0,-1)The centre wavelength that (0, ± 1) order diffraction light is detected after slit is represented, D is that grating is all for grating to spacing, d
Phase, λ0The diffraction center wavelength of light also detected without spin without translation for grating pyramid initial position.
5. a kind of frequency comb six degree of freedom measuring method as claimed in claim 1, it is characterised in that axial displacement L is：
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In formula, υgThe aerial group index of frequency comb pulse is represented, time delay Δ t passes through to interference signal IRAnd IMFu
In leaf transformation obtain spectrum phase Delay computing and obtain, Δ frep=frep2-frep1, frep1And frep2Respectively two frequency combs
Repetition rate.
6. a kind of frequency comb six degree of freedom measuring system, it is characterised in that the measuring system, which includes a pair, has small repetition poor
Frequency comb, the first frequency comb is as signal pulse, and the second frequency comb is as local oscillator light pulse；
The signal pulse enters a Michelson interference device, and the signal pulse is through being divided into reference beam and measurement light
Beam, the reference beam and measuring beam are respectively via the reference grating pyramid and measurement grating for being arranged on reference arm and measuring arm
Pyramid diffraction obtains 0, (0, ± 1) and (± 1,0) order diffraction light, and the diffraction light through reference grating pyramid and measurement grating pyramid returns
Return and be transmitted into the first spectroscope after closing light again on spectroscope BS1；
The transmission two-dimensional grating that local oscillator light pulse is set by two parallel intervals successively so that the locus of local oscillator light pulse
Can correspond with the diffraction lights at different levels in measurement light and be transmitted into the second spectroscope, through transmit two-dimensional grating diffraction light and
Interfered through first spectroscopical emergent light in the second spectroscope, a part of interference light being emitted through the second spectroscope is transmitted into
Ccd detector, another part interference light being emitted through the second spectroscope are transmitted into the 3rd spectroscope, the 4th spectroscope and the respectively
One detector, through a lens focus to the 3rd detector, the light through the transmission of the 3rd spectroscope passes through the light through the 3rd dichroic mirror
Cross a slit and be transmitted into the second detector, the light through the 4th dichroic mirror is transmitted into the 5th detector through a lens, through the 4th
The light of spectroscope transmission is transmitted into the 4th detector through a slit.
7. a kind of frequency comb six degree of freedom measuring system as claimed in claim 6, it is characterised in that first detector is visited
0 grade of optical interference signals is surveyed to be used for obtaining the displacement that the measurement grating pyramid moves along Z axis；Second detector and the 4th is visited
The change that device measures (± 1,0) level interference light spectral centroid wavelength by slit respectively is surveyed, is measured by difference detecting
The change in location of grating pyramid in the X-axis direction, it can similarly obtain measuring the position change of grating pyramid in the Y-axis direction
Change；The phase-frequency characteristic curve of 3rd detector and the 5th detector measurement (± 1,0) the order diffraction light spectrum, for being surveyed
The absolute deflection angle that amount grating pyramid rotates around Y-axis, the i.e. angle of pitch, it can similarly obtain measurement grating pyramid and be rotated around X-axis
Absolute deflection angle, i.e. deflection angle；The ccd detector class is used to monitor facula position movement, for obtaining measurement grating angle
Cone is around optical axis corner, i.e. roll angle.
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