CN107641790A - 一种兼具高强度与高延展性金属薄膜的制备方法 - Google Patents
一种兼具高强度与高延展性金属薄膜的制备方法 Download PDFInfo
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- CN107641790A CN107641790A CN201710843032.1A CN201710843032A CN107641790A CN 107641790 A CN107641790 A CN 107641790A CN 201710843032 A CN201710843032 A CN 201710843032A CN 107641790 A CN107641790 A CN 107641790A
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- 239000002184 metal Substances 0.000 title claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000004544 sputter deposition Methods 0.000 claims abstract description 14
- 238000009826 distribution Methods 0.000 claims abstract description 13
- 238000000137 annealing Methods 0.000 claims abstract description 10
- 239000010410 layer Substances 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 239000002356 single layer Substances 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 3
- 238000004062 sedimentation Methods 0.000 claims description 3
- 238000005477 sputtering target Methods 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims description 3
- 238000004501 airglow Methods 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
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- 238000004506 ultrasonic cleaning Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 5
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- 238000010276 construction Methods 0.000 abstract 1
- 150000002736 metal compounds Chemical class 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
- 239000010408 film Substances 0.000 description 81
- 239000013078 crystal Substances 0.000 description 7
- 239000007769 metal material Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
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- 229910052786 argon Inorganic materials 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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- 239000002086 nanomaterial Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
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- 238000005482 strain hardening Methods 0.000 description 1
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- 238000002604 ultrasonography Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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CN201710843032.1A CN107641790A (zh) | 2017-09-18 | 2017-09-18 | 一种兼具高强度与高延展性金属薄膜的制备方法 |
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CN201710843032.1A CN107641790A (zh) | 2017-09-18 | 2017-09-18 | 一种兼具高强度与高延展性金属薄膜的制备方法 |
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CN201710843032.1A Withdrawn CN107641790A (zh) | 2017-09-18 | 2017-09-18 | 一种兼具高强度与高延展性金属薄膜的制备方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110648844A (zh) * | 2019-09-26 | 2020-01-03 | 浙江星隆电子材料有限公司 | 一种金属化薄膜的制备方法 |
CN113183562A (zh) * | 2021-05-27 | 2021-07-30 | 合肥工业大学 | 一种梯度异构钛钽层状复合材料、制备方法及其应用 |
-
2017
- 2017-09-18 CN CN201710843032.1A patent/CN107641790A/zh not_active Withdrawn
Non-Patent Citations (2)
Title |
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李玮 等: "Ti种子层对Cu薄膜的微观织构和表面形貌的影响", 《材料研究学报》 * |
胡坤: "基于柔性衬底的金属薄膜力学性能的尺寸效应", 《中国博士学位论文全文数据库 工程科技I辑》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110648844A (zh) * | 2019-09-26 | 2020-01-03 | 浙江星隆电子材料有限公司 | 一种金属化薄膜的制备方法 |
CN110648844B (zh) * | 2019-09-26 | 2021-07-23 | 浙江星隆电子材料有限公司 | 一种金属化薄膜的制备方法 |
CN113183562A (zh) * | 2021-05-27 | 2021-07-30 | 合肥工业大学 | 一种梯度异构钛钽层状复合材料、制备方法及其应用 |
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Inventor after: Cao Zhenhua Inventor after: Sun Chao Inventor after: Ma Yujie Inventor after: Hu Kun Inventor after: Meng Xiangkang Inventor before: Cao Zhenhua Inventor before: Hu Kun Inventor before: Ma Yujie Inventor before: Sun Chao Inventor before: Meng Xiangkang |
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