CN107615476A - Ripple monofilament shaped steel wire is used in cutting - Google Patents
Ripple monofilament shaped steel wire is used in cutting Download PDFInfo
- Publication number
- CN107615476A CN107615476A CN201680000082.7A CN201680000082A CN107615476A CN 107615476 A CN107615476 A CN 107615476A CN 201680000082 A CN201680000082 A CN 201680000082A CN 107615476 A CN107615476 A CN 107615476A
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- China
- Prior art keywords
- ripple
- steel wire
- shaped steel
- cutting
- monofilament
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- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 115
- 239000010959 steel Substances 0.000 title claims abstract description 115
- 238000005520 cutting process Methods 0.000 title claims abstract description 109
- 239000000463 material Substances 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 230000000737 periodic effect Effects 0.000 claims description 19
- 239000003795 chemical substances by application Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 229910001369 Brass Inorganic materials 0.000 claims description 7
- 239000010951 brass Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 239000011135 tin Substances 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- 238000009713 electroplating Methods 0.000 claims 3
- 229910000975 Carbon steel Inorganic materials 0.000 claims 1
- 239000010962 carbon steel Substances 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000004575 stone Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 230000002950 deficient Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000005491 wire drawing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000002173 cutting fluid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The present invention relates to a kind of cutting ripple monofilament shaped steel wire, and for cutting hard material, such as hard glass, semiconductor and hard metal etc., it has improved grinding grade.The present invention has improved grinding grade and the anti-wear performance of improvement so as to improve cutting machinability and cutting surfaces quality.
Description
Technical field
The present invention is generally related to a kind of cutting ripple monofilament shaped steel wire, it is more particularly related to a kind of
For the ripple monofilament shaped steel wire of cutting semiconductor crystal ingot (ingot), ceramics, glass or similar hard material, it has institute
Desired wearability, and the surface quality of cutting workpiece can be improved.
Background technology
By silicon (being used for solar cell substrate etc.), quartz (being used for the various industrial circles for including automotive field) or arsenic
Wafer made of gallium (being used for high-frequency electronic product) etc. is formed after the crystal ingot of cylindrical conformation is cut into thin disk (wafer) form.
It is required that the cutting surfaces of workpiece are flat.In order to improve the accuracy of the cutting surfaces of cutting workpiece, cutting
During workpiece, including the cutting fluid of lubricant is directed onto in the contact portion between workpiece and steel wire used for cutting.
When cutting workpiece, abrasive particles are sprayed on thereon, and steel wire used for cutting is worn in itself, and are therefore being cut
Depression and projection are formed with the surface of steel wire.The accuracy of these depressions and the raised cutting surfaces for reducing cutting workpiece, and
Steel wire used for cutting is caused to be cut off.Furthermore, it is contemplated that strong tensile stress can be produced in cutting process, the result brought be
The surface of steel wire is easily worn, and therefore steel wire used for cutting needs often to change.Accordingly, occur manufacturing cost increase and
The problem of manufacture efficiency reduces.
Korean Patent No. 888026 discloses a diameter of 0.08~0.30mm of a kind of sawline, wherein sawline, and it is at certain
Residual stress of one region in longitudinal direction be 400~1,000MPa, wherein from the depth on sawline surface be 5~10 μm.The patent is public
A kind of linear line of the residual stress with particular range has been opened, linearity configuration has been changed into small bellows-shaped, it is therefore an objective to use
The cutting performance reduction caused by the reduction of the diameter of line in cutting process in compensation.However, due to being difficult accurately to control
The residual stress of producing linear line, therefore the problem of surface quality reduction of cutting workpiece be present in the linear line.
A kind of No. 2012-121101 abrasive particles line for disclosing fixation of Japanese Unexamined Patent Application Publication, wherein
Grinding agent is fixed on the surface of line.The abrasive particles line of the fixation is wave-like line, wherein, it is vertical along it based on the diameter of line
Multiple wavy bent portions are set gradually in each of which spacing.The fixed abrasive particle line of the disclosure is characterised by, wavy
Bent portion has the three-dimensional ripple of spiral sigmoid.The problem of abrasive particles line of the fixation is present is, during cutting
It is difficult to the shape of ripple is kept, and therefore the efficiency of cutting technique reduces, and because the uneven gauge for cutting workpiece causes
Cutting the surface flatness of workpiece reduces.
The content of the invention
The exemplary embodiment of the present invention provides a kind of cutting ripple monofilament shaped steel wire, and it is wear-resisting that it can improve its
Property, so as to minimize during cutting difference in thickness of the cutting crystal wafer in respective position, and a kind of manufacture cutting is provided and used
The method of ripple monofilament shaped steel wire.
The exemplary embodiment of the present invention provides a kind of cutting ripple monofilament shaped steel wire, and it has required grinding
Agent carrier performance and required crystal ingot cutting performance, so as to improve the cutting speed of crystal ingot and cut the surface matter of workpiece
Amount, and provide a kind of method for manufacturing cutting ripple monofilament shaped steel wire.
A kind of according to an aspect of the invention, there is provided cutting including single metal wire ripple monofilament shaped steel
Silk, wherein, the metal wire is construed as including with predetermined period, and edge is formed in a longitudinal in the ripple of two or more planes
Line, wherein each ripple is included in the straight line portion of its crest, and wherein, when the length of the straight line portion is S, corrugated periodic
For P when, the straight line portion length S and corrugated periodic P ratio S/P are 5~45%.
Ripple monofilament shaped steel wire is configured to, along on ripply three-dimensional (3D) coordinate system is formed except formed with
Independent axle rotation beyond the axle of two dimension (2D) plane of ripple, so as to than being actually formed the more planes of ripply plane
Upper imparting ripple.
According to another aspect of the present invention, there is provided a kind of manufacture method cut with ripple monofilament shaped steel wire, including：It is logical
Cross the first ripple imparting device and assign ripple on the monofilament shaped steel wire supplied by feed unit, first ripple assigns device
Including a pair of gears, this is configured to have bellows-shaped depression and projection in its surface to gear and revolved in opposite direction
Turn, each bellows-shaped depression and the raised straight line portion being included at the crest of its ripple；By being assigned around the first ripple
Device winds monofilament shaped steel wire 0.5~3 time and assigns device tax by the first ripple so as to reverse clockwise or counterclockwise
The monofilament shaped steel wire of ripple is given, then monofilament shaped steel wire is supplied to the second ripple and assigns device；Assigned and filled by the second ripple
Put and assign ripple on the monofilament shaped steel wire ripple for imparting ripple by the first ripple imparting device, second ripple assigns dress
Put and be kept with assigning the angle of 45~135 ° of device relative to the first ripple；And twined by assigning device around the second ripple
Ripple is imparted by the second ripple imparting device so as to reverse clockwise or counterclockwise around monofilament shaped steel wire 0.5~3 time
The monofilament shaped steel wire of line；Wherein, when the first and second ripples assign the bellows-shaped depression of device and raised straight line portion
Length is S ', and when corrugated periodic is P ', straight line portion length S ' and corrugated periodic P ' ratio S '/P ' is 5~45%.
Brief description of the drawings
The above and other purpose of the present invention, feature and advantage combination accompanying drawing clear geography from following detailed description
Solution, wherein：
Fig. 1 is the schematic perspective view of existing sawline；
Fig. 2 is the schematic side elevational according to the cutting ripple monofilament shaped steel wire of the one exemplary embodiment of the present invention
Figure；
Fig. 3 is according to the one exemplary embodiment of the present invention, is seen when from cutting with the central shaft of ripple monofilament shaped steel wire
The schematic diagram of ripple struction when examining；And
Fig. 4 is according to the one exemplary embodiment of the present invention, for manufacturing the ripple of cutting ripple monofilament shaped steel wire
Assign the schematic diagram of device；
Embodiment
The one exemplary embodiment that the invention will now be described in detail with reference to the accompanying drawings.Before explaining the present invention, it is if it is considered to public
The purport of the present invention may optionally be obscured by knowing the related description of structure or function, by description is omitted.
According to a kind of cutting ripple monofilament shaped steel wire of the one exemplary embodiment of the present invention, including single metal
Line.In cutting with ripple monofilament shaped steel wire, metal wire is construed as including with predetermined period, and edge is formed in a longitudinal in two
Or more plane ripple, each ripple includes the straight line portion in its crest, also, when the length of straight line portion is S,
When corrugated periodic is P, straight line portion length S and corrugated periodic P ratio S/P is 5~45%.
Fig. 2 is the schematic side elevational according to the cutting ripple monofilament shaped steel wire 10 of the one exemplary embodiment of the present invention
Figure, and Fig. 3 are according to the one exemplary embodiment of the present invention, are seen when from cutting with the central shaft of ripple monofilament shaped steel wire 10
The schematic diagram of ripple struction when examining.As shown in Figures 2 and 3, according to the cutting of this one exemplary embodiment ripple monofilament shaped steel
Silk is configured to, and two or more ripples for being formed at different planes are distributed radially around central shaft.It is exemplary at this
In embodiment, the shape of ripple is not limited to specific shape, but can have zigzag shape or sine wave shape as an example.
Because ripple monofilament shaped steel wire is configured to, along on ripply three-dimensional (3D) coordinate system is formed except shape
Independent axle rotation into beyond the axle of ripply two-dimentional (2D) plane, so as to realize than being actually formed ripply plane more
The effect of ripple is assigned in more planes.
According to the cutting of this one exemplary embodiment ripple monofilament shaped steel wire, H/P values be (wave height H and corrugated periodic P's
Ratio, the carrier property for grinding agent during improving cutting) it is 3~12%, preferably 3~11%.In the case, H/P is worked as
When value is less than 3%, the carrier property of grinding agent is insufficient, and therefore produces kerf.On the contrary, when H/P values are more than 12%, grinding
The carrier property of agent is too high, and difference is therefore produced in wafer thickness.
In addition, when from the central shaft of ripple monofilament shaped steel wire, each plane includes an axle, and these axles are with 45
~135 ° of angle mutually staggers.When the angle is less than 45 °, non-homogeneous residual stress remaines in the material of monofilament shaped steel wire in itself
In material, and therefore the linearity reduces, so as to reduce cutting performance.On the contrary, when the angle is more than 135 °, it is remaining after cutting to answer
Power reduces, and therefore the stability of the shape of ripple reduces, so as to cause the problem of cutting performance accelerates to reduce over time.
Following structure is typically had with ripple monofilament shaped steel wire 10 according to the cutting of this one exemplary embodiment：Wherein metal
The surface of line is plated in by made of metal (such as copper or brass) on the coat of metal by the steel including high-carbon steel, tungsten and copper, to change
The adherence of kind grinding agent.
Monofilament shaped steel wire is 2.0~3.5% in 10~40N breakaway poing elongation percentage.In this one exemplary embodiment, work as ripple
When the breakaway poing elongation percentage of line monofilament shaped steel wire is less than 2.0%, it is impossible to ensure the minimum needed for cutting ripple monofilament shaped steel wire
Retractility, and therefore reduce processing efficiency.On the contrary, when the breakaway poing elongation percentage of ripple monofilament shaped steel wire is higher than 3.5%, grinding
The carrier property of agent will be insufficient, and therefore the surface quality of cutting workpiece and processing efficiency will reduce.
According to the cutting of this one exemplary embodiment ripple monofilament shaped steel wire, monofilament-type gauge of wire d is preferably
0.03~0.5mm.When monofilament-type gauge of wire d is less than 0.03mm, the intensity needed for as cutting line can not be obtained.
On the contrary, when the monofilament-type gauge of wire d is more than 0.5mm, cutting damage (kerfloss) will increase.Utilize cutting wire cutting work
The factor that its yield is influenceed during part is to cut damage, cuts cutting of occurring when damage is the workpiece of cutting line incision silicon ingot etc
Groove width.Damage is cut to be inversely proportional with yield.In order to reduce the above-mentioned diameter cut damage and need reduction cutting line as far as possible, so as to
Need cutting line graph thinning or superfine wire.It is desirable for this purpose that with high cutting intensity and show the super of high tenacity
High intensity monofilament shaped steel wire.In this one exemplary embodiment, in order to reduce the loss of workpiece in cutting and improve cutting speed
And provide a diameter of below 0.5mm fine line diameter cutting wave molding.
In the cutting according to this one exemplary embodiment with ripple monofilament shaped steel wire, monofilament-type gauge of wire d, ripple
Height H, and the cycle P of ripple meet following conditions：
P=1~10mm, d=0.03~0.5mm, and
1.2×d≤H≤3.0×d
In this one exemplary embodiment, when the height H of ripple is too less than monofilament-type gauge of wire d, it is impossible to fully
Ensure the distance between workpiece to be cut and grinding agent, and therefore the carrier property of grinding agent will reduce.On the contrary, when the height of ripple
When degree H is excessively higher than monofilament-type gauge of wire d, it is difficult to and assigns the single surface for being endowed ripple to ripple, and therefore
The problem of accuracy for finished surface occur may reduce.
Carbon content according to the cutting ripple monofilament shaped steel wire 10 of this one exemplary embodiment is 0.7~1.2wt%.Brass
The preferred copper content of coating is 60~80%.If it is necessary, zinc, tin, nickel, cobalt, chromium or its alloy, (i.e. third element) can be with 0.1
~6.0% is added to brass coating.This alloy layer can improve decay resistance and intensity.
It can also be included by from diamond, carbon according to the coating of the cutting ripple monofilament shaped steel wire of this one exemplary embodiment
Abrasive particles made of a kind of material selected in the group that SiClx, tungsten carbide and its mixture are formed.
Tensile strength according to the cutting ripple monofilament shaped steel wire 10 of this one exemplary embodiment is 300~600kg/mm2。
Cutting according to this one exemplary embodiment is defined to 300~600kg/mm with the tensile strength of ripple monofilament shaped steel wire2Original
Because being, it is ensured that realize the cutting force needed for intrinsic (intrinsic) purpose of cutting ripple monofilament shaped steel wire, i.e. to hard
The cutting and section of material (such as semiconductor, ceramics or hard metal).In addition, in order to obtain the ultra-fine ripple monofilament shaped steel of cutting
Intensity needed for silk, the method for carrying out drawing process in the high level of processing equal to or higher than 90% can be used, and needed
When wanting, by the way that alloying element (such as chromium or vanadium) is added in original material to increase intensity.
Workpiece is cut according to the cutting of this one exemplary embodiment as follows with ripple monofilament shaped steel wire：When with suitable
Moved when pressure contacts with workpiece, the cutting fluid mixed with grinding agent and lubricant (such as oil or the like).
Hard alloy (such as workpiece to be cut) is cut with ripple monofilament shaped steel wire form crystalline substance using the cutting of this one exemplary embodiment
Round method is described below.A series of multirow ripple monofilament shaped steel wires around multiple rollers wind, the roller with
Preset space length has multiple grooves, and then a series of multirow ripple monofilament shaped steel wires are moved.With predetermined force by work to be cut
Part is pressed against on a series of multirow ripple monofilament shaped steel wires.Meanwhile cutting fluid is directed to the multirow ripple monofilament
Between shaped steel wire and workpiece to be cut.Thus, workpiece is cut by using the shear action of abrasive particles and forms wafer.
Another aspect of the present invention is to provide a kind of manufacture method of cutting ripple monofilament shaped steel wire.In the cutting ripple
In the manufacture method of line monofilament shaped steel wire, device is assigned on the monofilament shaped steel wire supplied by feed unit by the first ripple
Ripple is assigned, first ripple, which assigns device, includes a pair of gears, and this is configured in its surface to gear with corrugated
Shape depression and projection simultaneously rotate in mutually opposite directions, and each bellows-shaped depression and projection are included in the straight line at the crest of its ripple
Part；Monofilament shaped steel wire is wound 0.5~3 time so as to turn round clockwise or counterclockwise by assigning device around the first ripple
Turn the monofilament shaped steel wire for assigning device by the first ripple and assigning ripple, then monofilament shaped steel wire is supplied to the second ripple and assigned
Device；Assigned by the second ripple imparting device on the monofilament shaped steel wire ripple for imparting ripple by the first ripple imparting device
Ripple is given, second ripple assigns device and is kept to assign the angle of 45~135 ° of device relative to the first ripple；It is and logical
Cross and assign device winding monofilament shaped steel wire 0.5~3 time around the second ripple so as to which torsion passes through clockwise or counterclockwise
Second ripple assigns the monofilament shaped steel wire that device imparts ripple.Device is assigned in obtained cutting ripple monofilament by ripple
Formed with predetermined straight line portion at the crest of each ripple of shaped steel wire, wherein, when the first and second ripples assign device
Bellows-shaped is recessed and the length of raised straight line portion is S ', and when corrugated periodic is P ', straight line portion length S ' and ripple
Cycle P ' ratio S '/P ' is 5~45%.
As shown in figure 4, each of the first ripple imparting device and the second ripple imparting device 20,30 can be constructed
For, it may for example comprise two gears, by plasticity to have the depression and projection of bellows-shaped on its surface, each includes being in
The straight line portion of the crest of its ripple, and two gears are intermeshed with preset space length.First ripple assigns device 20 and the
Two ripples assign the size of the tooth of device 30 and spacing can be uniform or arbitrary, but not limited to this.First ripple assigns
The spacing that the ripple of device 20 and second assigns the gear of device 30 can be with mutually different, and the first ripple assigns device 20 and the
The spacing of two ripples imparting device 30 may be constructed such that the twist torque less than steel wire.
Monofilament shaped steel wire 10 can be endowed the ripple with preset space length as follows：By the straight monofilament of wire drawing
Shaped steel wire assigns device by ripple.Assigned that is, monofilament shaped steel wire 10 is inserted into two ripples in device 20,30,
And assign device 20,30 by two ripples when assigning device 20,30 by two ripples to press, so as to obtain predetermined ripple
Line.In the case, the gear of each that two ripples assign device 20,30 can be configured to mutually nibble with predetermined gap
Close so as to be pressed while monofilament shaped steel wire 10 assigns device 20,30 by two ripples by them.
By adjusting the anglec of rotation of the first and second ripples imparting device 20,30 the first ripple can be made to assign device
Corrugated surface angle be different from the second ripple assign device corrugated surface angle.
Have to alleviate with ripple monofilament shaped steel wire according to the cutting of this one exemplary embodiment and using cutting ripple monofilament
During shaped steel wire due to monofilament shaped steel wire abrasion and caused by grinding agent carrier property reduction and wafer difference in thickness work
With so as to significantly improve the processing efficiency of cutting process and cut the surface quality of workpiece.Thus, according to this exemplary reality
The cutting ripple monofilament shaped steel wire for applying example can be used for the workpiece that cutting needs superelevation accuracy surface.
The present invention is described in detail with reference to embodiment, but following embodiments are simply to illustrate that the present invention, therefore must not be
The limitation present invention.
Embodiment
Embodiment 1~12
It is laggard that 2 wire-drawing process are carried out to the wire rod (wire rod) that carbon content is 0.70~1.05%, a diameter of 5.5mm
Row heat treatment and brass plating, final wire drawing to diameter 0.115mm, so as to be prepared for monofilament shaped steel wire.Then, it is linear by wire drawing
Steel wire without ripple assigns device by the first ripple, is wound by assigning monofilament shaped steel wire to device around the first ripple
0.5 time and reverse to the second ripple assign device entrance side, after ripple is assigned, by the way that monofilament shaped steel wire is surrounded into the second ripple
Line assigns device and winds 0.5 time and reverse to the second ripple and assign the outlet side of device, so as to be assigned in two different planes
Ripple.Silicon ingot (width 156mm x height 156mm x length 1,900mm) is cut, when the line part of the ripple of monofilament shaped steel wire
Length S, corrugated periodic P, and the straight line portion length S divided is different as described in Table 1 from corrugated periodic P ratio S/P
, monofilament-type gauge of wire and wear rate used are measured, measurement result is shown in table 1 below and table 2.
Comparing embodiment 1~4
Except the length S of the straight line portion of the ripple of monofilament shaped steel wire, corrugated periodic P, and S/P values such as table 1 below and
Outside being different shown in table 2, cutting ripple monofilament shaped steel wire has been manufactured according to the same manner as in Example 1.It is each to its
Kind physical property is evaluated, and evaluation result is shown in table 1 below and table 2.
Table 1
Table 2
Embodiment 13~17
Cutting semiconductor chip ingot (the width 156mm x height 156mm x length 800mm) in HCT-B5 equipment, and
Corrugated periodic P and wave height H is different on linear steel wire with 0.115mm steel wire diameters, as described in Table 3, right
Defect-free surface ratio defective product is evaluated, and evaluation result is shown in Table 3 below.
Comparing embodiment 5 and 6
In addition to corrugated periodic P, wave height H and H/P value are different as described in Table 3, according to implementation
The identical mode of example 1 has manufactured cutting ripple monofilament shaped steel wire.Its various physical property is evaluated, evaluation result is shown in
In Table 3 below.For defect-free surface ratio defective product, damage, indentation to wafer, color distortion, difference in thickness are detected,
And changed without damage, without indentation, without color distortion, without difference in thickness and with 18% or higher optical-electronic
The wafer of efficiency is be evaluated as defect-free surface product.2,000 wafer is have detected altogether, passes through the percentages of no defective product
Calculate defect-free surface ratio defective product.
Table 3
It can see from the result of 1~table of table 3, pass through the resistance to of the wafer according to ripple monofilament shaped steel wire cutting of the invention
Mill rate and defect-free surface ratio defective product are apparently higher than comparing embodiment.In addition, the cutting speed in embodiments of the invention is higher than
Cutting speed in comparing embodiment, the and therefore processing efficiency in the unit interval is improved, so as to help to reduce into
This.
Its anti-wear performance during cutting can be improved according to the cutting ripple monofilament shaped steel wire of the present invention, so as to slow
Solution during work piece cut respective position cutting crystal wafer difference in thickness, there is provided required grinding agent carrier property, and
And also improve cutting speed and the efficiency of cutting technique.
In addition, with the enhancing of grinding agent carrier property, cutting is reduced with the abrasion of ripple monofilament shaped steel wire, so as to basis
The cutting of the present invention shows the life performance of raising with ripple monofilament shaped steel wire, is surrounded so as to be imparted to the ripple of multiple planes
Central shaft is radially distributed, and the improvement hence for the surface quality of cut-out portion is highly effective.Thus, according to the cutting of the present invention
It is suitable to cutting hard material, such as the crystal ingot for semiconductor, ceramics and hard alloy with ripple monofilament shaped steel wire, also, it is special
Not, can be advantageously used in cutting needs the hard material of pinpoint accuracy surface, because the surface matter of cutting workpiece
Amount is required.
Although the present invention is described in detail according to an exemplary embodiment of the invention, in the essence without departing from the present invention
God and various modifications and modification can occur in the case of category, this be to those skilled in the art very it will be evident that
Therefore these various modifications and modification are regarded as being included in protection scope of the present invention.
Claims (9)
1. ripple monofilament shaped steel wire, including single metal wire are used in one kind cutting, it is characterised in that
The individually metal wire is construed as including with predetermined period, and edge is formed in a longitudinal in two or more planes
Ripple；
Each ripple includes the straight line portion in its crest；And
When the length of straight line portion is S, when corrugated periodic is P, the length S and corrugated periodic P of straight line portion ratio S/P values are
5~45%.
2. ripple monofilament shaped steel wire according to claim 1, it is characterised in that
Two or more ripples that above-mentioned cutting is configured to form in Different Plane with ripple monofilament shaped steel wire radially enclose
It is distributed around central shaft.
3. ripple monofilament shaped steel wire according to claim 1, it is characterised in that wave height H and corrugated periodic P ratio
H/P is 3~12%.
4. ripple monofilament shaped steel wire according to claim 1, it is characterised in that above-mentioned cutting ripple monofilament shaped steel wire quilt
It is configured to wave height H, corrugated periodic P and cutting ripple monofilament-type gauge of wire d meets following conditions：
P=1~10mm, d=0.03~0.5mm, and
1.2×d≤H≤3.0×d。
5. ripple monofilament shaped steel wire according to claim 1, it is characterised in that above-mentioned cutting ripple monofilament shaped steel wire
Breakaway poing elongation percentage is 2.0~3.5%.
6. ripple monofilament shaped steel wire according to claim 1, it is characterised in that above-mentioned cutting is with ripple monofilament shaped steel wire
By monofilament shaped steel wire of the brass electroplating carbon steel to form brass electroplating layer and be formed, the carbon content of above-mentioned monofilament shaped steel wire is 0.7
~1.2wt%, copper component is 60~80% in brass electroplating layer.
7. ripple monofilament shaped steel wire according to claim 1, it is characterised in that above-mentioned cutting ripple monofilament shaped steel wire
Surface is coated with the one or more materials selected from the group being made up of copper, zinc, tin, nickel, cobalt, chromium and its alloy.
8. ripple monofilament shaped steel wire according to claim 7, it is characterised in that above-mentioned coating material also includes Buddha's warrior attendant
A kind of material in stone, carborundum grinding agent and its mixture.
9. a kind of manufacture method cut with ripple monofilament shaped steel wire, including：
Device is assigned by the first ripple and assigns ripple on the monofilament shaped steel wire supplied by feed unit, and first ripple is assigned
Device is given to include a pair of gears, this is configured to have in its surface bellows-shaped depression and raised and along phase negative side to gear
To rotation, each bellows-shaped depression and the raised straight line portion being included at the crest of its ripple；
Monofilament shaped steel wire is wound 0.5~3 time so as to turn round clockwise or counterclockwise by assigning device around the first ripple
Turn the monofilament shaped steel wire for assigning device by the first ripple and assigning ripple, then monofilament shaped steel wire is supplied to the second ripple and assigned
Device；
Assigned by the second ripple imparting device on the monofilament shaped steel wire ripple for imparting ripple by the first ripple imparting device
Ripple is given, second ripple assigns device and is kept to assign the angle of 45~135 ° of device relative to the first ripple；And
Monofilament shaped steel wire is wound 0.5~3 time so as to turn round clockwise or counterclockwise by assigning device around the second ripple
Turn the monofilament shaped steel wire for assigning device by the second ripple and imparting ripple；
Characterized in that, the length that the bellows-shaped depression of device and the straight line portion of projection are assigned when the first and second ripples is
When S ', corrugated periodic P ', straight line portion length S ' and corrugated periodic P ' ratio S '/P ' is 5~45%.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2016-0011696 | 2016-01-29 | ||
| KR1020160011696A KR101736657B1 (en) | 2016-01-29 | 2016-01-29 | Corrugated monowire for cutting |
| PCT/KR2016/001338 WO2017131274A1 (en) | 2016-01-29 | 2016-02-05 | Wavy monowire for cutting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107615476A true CN107615476A (en) | 2018-01-19 |
| CN107615476B CN107615476B (en) | 2018-09-28 |
Family
ID=59035352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680000082.7A Expired - Fee Related CN107615476B (en) | 2016-01-29 | 2016-02-05 | Cutting ripple monofilament shaped steel wire |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR101736657B1 (en) |
| CN (1) | CN107615476B (en) |
| TW (1) | TWI610757B (en) |
| WO (1) | WO2017131274A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6514821B1 (en) * | 2018-11-15 | 2019-05-15 | トクセン工業株式会社 | Saw wire |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004243492A (en) * | 2003-02-14 | 2004-09-02 | Kanai Hiroaki | Saw wire for single wire saw |
| JP2008114318A (en) * | 2006-11-02 | 2008-05-22 | Eiko Yamada | Saw wire and wire saw |
| CN103660053A (en) * | 2012-09-07 | 2014-03-26 | 贝卡尔特公司 | Forming saw wire capable of stretching downward-pulling residual stress on surface |
| CN104108141A (en) * | 2014-04-29 | 2014-10-22 | 株式会社晓星 | Wavy-patterned monowire for cutting |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| LU91126B1 (en) * | 2004-12-23 | 2006-06-26 | Trefilarbed Bettembourg S A | Monofilament metal saw wire |
| JP2012121101A (en) | 2010-12-08 | 2012-06-28 | Japan Fine Steel Co Ltd | Fixed abrasive grain wire |
| KR20120077801A (en) * | 2010-12-31 | 2012-07-10 | 주식회사 효성 | Heteropreform high shrinkage monowire |
| FR2988023A1 (en) | 2012-03-16 | 2013-09-20 | Sodetal Sas | SAW WIRE, METHOD FOR MANUFACTURING SUCH WIRE, AND USE |
| WO2014036714A1 (en) * | 2012-09-07 | 2014-03-13 | Nv Bekaert Sa | A shaped sawing wire with subsurface tensile residual stresses |
| CN203579917U (en) * | 2013-10-31 | 2014-05-07 | 苏闽(张家港)新型金属材料科技有限公司 | Cutting steel wire capable of improving cutting efficiency and production equipment thereof |
-
2016
- 2016-01-29 KR KR1020160011696A patent/KR101736657B1/en active IP Right Grant
- 2016-02-05 CN CN201680000082.7A patent/CN107615476B/en not_active Expired - Fee Related
- 2016-02-05 WO PCT/KR2016/001338 patent/WO2017131274A1/en active Application Filing
- 2016-03-09 TW TW105107142A patent/TWI610757B/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004243492A (en) * | 2003-02-14 | 2004-09-02 | Kanai Hiroaki | Saw wire for single wire saw |
| JP2008114318A (en) * | 2006-11-02 | 2008-05-22 | Eiko Yamada | Saw wire and wire saw |
| CN103660053A (en) * | 2012-09-07 | 2014-03-26 | 贝卡尔特公司 | Forming saw wire capable of stretching downward-pulling residual stress on surface |
| CN104108141A (en) * | 2014-04-29 | 2014-10-22 | 株式会社晓星 | Wavy-patterned monowire for cutting |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI610757B (en) | 2018-01-11 |
| KR101736657B1 (en) | 2017-05-16 |
| CN107615476B (en) | 2018-09-28 |
| TW201726306A (en) | 2017-08-01 |
| WO2017131274A1 (en) | 2017-08-03 |
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