CN107598758A - Plane lapping equipment - Google Patents
Plane lapping equipment Download PDFInfo
- Publication number
- CN107598758A CN107598758A CN201610541729.9A CN201610541729A CN107598758A CN 107598758 A CN107598758 A CN 107598758A CN 201610541729 A CN201610541729 A CN 201610541729A CN 107598758 A CN107598758 A CN 107598758A
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- China
- Prior art keywords
- emery wheel
- plummer
- dressing
- sensor
- plane lapping
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of plane lapping equipment, wherein, processing table top is arranged in table, and is provided with a plummer, and to the fixation support plate to be ground, plummer can move along a Y direction；Grinding unit includes Z-direction mobile foundation, spindle motor and emery wheel, and spindle motor is arranged on Z-direction mobile foundation, and emery wheel is connected with spindle motor, and Z-direction mobile foundation can move along an X-direction and a Z-direction；Touch knife dressing unit and include a dressing instrument, it is arranged in the scope of activities of emery wheel, and dressing instrument can be contacting to be repaired to emery wheel with emery wheel；Automatic measurement unit is arranged on grinding unit, and it includes drive device and sensor, and sensor is connected to drive device, and drive device can drive sensor to be moved along Z-direction, for measuring the height of plummer and support plate.Whereby, there can be the function of touching knife dressing and automatic measurement, high-precision grinding size can be reached.
Description
Technical field
The present invention relates to a kind of plane lapping equipment, more particularly to a kind of set to grind the plane lapping of support plate or workpiece
It is standby.
Background technology
Existing plane lapping equipment utilization emery wheel (such as ceramic brush wheel) carries out the grinding operation of support plate or workpiece, and it is removed
Ability is poor, and precision is bad.Further, existing plane lapping equipment has no the function of providing automatic measurement, grinding precision control
System is not easy, and is unable to reach accurately size Control, therefore is unable to reach high-precision grinding size.Further, existing plane is ground
The processing table top of mill, the situation that blocking is easily produced because sucking abrasive dust occur.
The content of the invention
The technical problems to be solved by the invention, it is to provide a kind of plane lapping equipment, removal ability is preferable, and has
The function of knife dressing and automatic measurement is touched, high-precision grinding size can be reached.
The technical problems to be solved by the invention, also reside in and a kind of plane lapping equipment is provided, abrasive dust can be reduced and be inhaled into
The situation processed table top and produce blocking occurs.
In order to solve above-mentioned technical problem, the present invention provides a kind of plane lapping equipment, including：One table；One processing
Table top, the processing table top are arranged in the table, and the processing table top is provided with a plummer, is ground to fixation is pending
The support plate of mill, the plummer can move along a Y direction；One grinding unit, the grinding unit are arranged at the processing
The top of table top, the grinding unit include a Z-direction mobile foundation, a spindle motor and an emery wheel, and the spindle motor is set
In on the Z-direction mobile foundation, the emery wheel and the spindle motor power connector, the spindle motor can be described to drive
Emery wheel rotates, and the Z-direction mobile foundation can move along an X-direction and a Z-direction, the emery wheel can to described plus
Support plate on the plummer of work table top is ground；One touches knife dressing unit, and the knife dressing unit that touches includes a dressing instrument,
The dressing instrument is arranged in the scope of activities of the emery wheel, and the dressing instrument can be contacting with to institute with the emery wheel
Emery wheel is stated to be repaired；And an automatic measurement unit, the automatic measurement unit is arranged on the grinding unit, comprising extremely
A few drive device and an at least sensor, an at least sensor are connected to an at least drive device, it is described at least
One drive device can drive an at least sensor to be moved along the Z-direction, and the automatic measurement unit is used to measure
The height of the plummer and the support plate.
Preferably, the plummer includes a base and a ceramic sucker, and the base is arranged in the table, described
Ceramic sucker is arranged on the base, and the top of the base forms an outer frame in the outside of the ceramic sucker, described
Outer frame is arranged with an at least vacuum channels close to the position of the ceramic sucker, and an at least vacuum channels are around described
The outside of ceramic sucker, for discharging cutting fluid and abrasive dust.
Preferably, an at least vacuum channels are two vacuum channels, described two vacuum channels intervals around
The outside of the ceramic sucker.
Preferably, the porous ceramics sucker that the ceramic sucker is formed in one, the ceramic sucker have a vacuum
Adsorption plane, the vacuum suction face and the outer frame of the base are located at same level.
Preferably, the ceramic sucker and an at least vacuum channels have the vacuum loop of independent control respectively.
Preferably, the plummer includes an electromagnetic disc forever.
Preferably, the knife dressing unit that touches also includes a position sensor, and the position sensor is arranged on described repair
The side of sharp instrument, and positioned at the emery wheel scope of activities in, the position sensor can to before the emery wheel dressing,
The position of the wheel face of the emery wheel is sensed afterwards, so as to sense the diameter of the emery wheel and abrasion loss.
Preferably, guide mechanism is provided between the sensor of the grinding unit and the automatic measurement unit, it is described
Guide mechanism includes a fixed seat and a lifting seat, and the fixed seat is fixed on the side of the grinding unit, the lifting seat
The fixed seat is slidingly arranged at, the sensor is fixed on the lifting seat, and the lifting seat can be in the fixed seat
On moved along the Z-direction.
Preferably, the grinding unit also includes an X to pedestal, and the plummer is driven with one first motor, institute
State plummer to be slidably matched with the first guide rail, can be moved along the Y direction；The X connects one second horse to pedestal
Reach, the X is slidably matched with one second guide rail to pedestal, and the Z-direction mobile foundation is slidably matched with the X to pedestal
On, the Z-direction mobile foundation is moved along the X-direction and the Z-direction.
Beneficial effects of the present invention：
The plummer of the present invention can move along Y direction, and Z-direction mobile foundation can move along X-axis and Z-direction, make
Emery wheel can be ground to the support plate on the plummer of processing table top.The plane lapping equipment of the present invention is in X-axis, Y-axis and Z axis side
To that can control movement, removal ability is preferable, and has preferable machining accuracy.
The present invention has the function of touching knife dressing, and emery wheel directly carries out dressing using dressing instrument after grinding, to reduce essence
The error of degree.The present invention also has the function of automatic measurement, drive device can be utilized to drive sensor lifting, system can be pre-
If reserved processing capacity, when being ground to predetermined amount, automatic measurement function enables, and it is true that meeting first measurement processing table position makees zero point
Recognize, then measure support plate height and position, carry out final refine action after confirming actual height error, therefore high accuracy can be reached
Grinding size.
The plummer of the present invention can be provided with vacuum channels, and vacuum channels are around the outside of ceramic sucker, available for discharging
Cutting fluid and abrasive dust, occurred with reducing abrasive dust by the situation that ceramic sucker sucks and produces porous material blocking.
For the enabled feature and technology contents for being further understood that the present invention, refer to below in connection with the present invention specifically
Bright and accompanying drawing, but accompanying drawing is only provided and used with reference to explanation, is not used for being any limitation as the present invention.
Brief description of the drawings
Fig. 1 is the stereogram of plane lapping equipment of the present invention.
Figure 1A is Fig. 1 part A detail drawing.
Fig. 2 is the front view of plane lapping equipment of the present invention.
Fig. 3 is the side view of plane lapping equipment of the present invention.
Fig. 4 is the top view of plane lapping equipment of the present invention.
Fig. 5 is the stereogram that the present invention touches knife dressing unit.
Fig. 6 is the stereogram of automatic measurement unit of the present invention.
Fig. 7 is the stereogram of plummer of the present invention.
Fig. 7 A are Fig. 7 part B detail drawing.
Fig. 8 is the top view of plummer of the present invention.
Embodiment
Illustrate the embodiment of plane lapping equipment of the present invention, person skilled in the art by specific instantiation below
Scholar can be understood the further advantage and effect of the present invention easily by content disclosed in the present specification.The present invention also can be by other
Different instantiations is implemented or applied, and the various details in this specification can also be based on different viewpoints and application, not
Deviating from the present invention spirit under carry out it is various modification and change.The schema of the present invention is only to briefly describe again, not according to actual chi
Very little description, that is, unreacted goes out the actual size of related composition, is explained in advance.Following embodiment is further specifically
Bright viewpoint of the invention, but be not anyways to limit scope.
[first embodiment]
Fig. 1 to Fig. 4 is referred to, the present invention provides a kind of plane lapping equipment, and to grind support plate or other workpiece, this is flat
Face milling apparatus includes a table 1, one processing table top 2, a grinding unit 3, one touches knife dressing unit 4 and an automatic measurement unit
5 (as shown in Figure 6).
The table 1 is a firm framework, can be positioned on ground, to support and connect processing table top 2, grinding unit
3rd, the devices such as knife dressing unit 4 and automatic measurement unit 5 are touched.
The processing table top 2 is arranged in table 1, and processing table top 2 is provided with a plummer 21, to be ground to fixation
Support plate 6, support plate 6 can be slim support plate or other workpiece such as glass substrate, IC support plates.The plummer 21 includes a ceramics and inhaled
Disk, in addition, the plummer 21 include one forever electromagnetic disc etc., its construction be not intended to limit, support plate 6 be transported to process table top 2 on after, can
To be fixed on plummer 21, such as fixed in a manner of vacuum suction or magnetic.
The plummer 21 can move along a Y direction, that is, plummer 21 can be along front and rear direction as shown in Figure 1
It is mobile.Specifically, the plummer 21 can be driven with one first motor 22, and the first motor 22 can utilize the transmission mechanisms such as screw rod
Connect plummer 21, and plummer 21 slide be matched with the first guide rail 23, therefore using the first motor 22 driving carrying
Platform 21 moves along Y direction, and when being ground to processing the support plate 6 on table top 2, plummer 21 can be past along Y direction
Multiple motion.The transmission mechanism of the plummer 21 and the construction of guide rail are not intended to limit, can be with existing various transmissions and guiding structure
Make and substituted.
The grinding unit 3 is arranged at the top of processing table top 2, and the grinding unit 3 is led comprising a Z-direction mobile foundation 31, one
The emery wheel 33 of axle motor 32 and one, spindle motor 32 are arranged on Z-direction mobile foundation 31, and emery wheel 33 connects with the power of spindle motor 32
Connect, in addition, emery wheel 33 can be connected by the grade transmission mechanism of belt pulley set 38 with spindle motor 32.The central shaft of emery wheel 33 parallel to
X-direction, emery wheel 33 can move with Z-direction mobile foundation 31, and spindle motor 32 can be driving emery wheel 33 to rotate.Main shaft
The outside of motor 32 and belt pulley set 38 can also cover a shell (figure omits), to protect spindle motor 32 and belt pulley set 38 etc.
Component.
The Z-direction mobile foundation 31 can move along an X-direction, that is, Z-direction mobile foundation 31 can be along as shown in Figure 1
Left and right direction movement.Specifically, the grinding unit 3 also include an X can be with one to pedestal 39, the Z-direction mobile foundation 31
Two motor 34 drives, and the second motor 34 can utilize the transmission mechanisms such as screw rod to connect the X and be slided to pedestal 39, X to pedestal 39
It is matched with the second guide rail 35 (such as Figure 1A shows), therefore can be moved using the second motor 34 driving X to pedestal 39 along X-direction
It is dynamic.When being ground to processing the support plate 6 on table top 2, X can drive Z-direction mobile foundation 31, spindle motor 32 to pedestal 39
And emery wheel 33 moves back and forth along X-direction, emery wheel 33 is fed along X-direction to support plate 6 and be ground.It is described
X is not intended to limit to the transmission mechanism of pedestal 39 and the construction of guide rail, can be substituted with existing various transmissions and guiding structure.
Spindle motor 32 can be along upper and lower as shown in Figure 1 to moving.Specifically, Z-direction mobile foundation 31 slides
X is matched with pedestal 39, Z-direction mobile foundation 31 can be in X to being slided along Z-direction on pedestal 39, therefore using the 3rd
Motor (figure omits) driving Z-direction mobile foundation 31 can move along Z-direction, and the 3rd motor can utilize the transmission mechanisms such as screw rod to connect
Connect Z-direction mobile foundation 31, what Z-direction mobile foundation 31 slided be matched with X is on pedestal 39, therefore using the 3rd motor driving Z
It can be moved to mobile foundation 31 and spindle motor 32 along Z-direction.It is main when being ground to processing the support plate 6 on table top 2
Axle motor 32 and emery wheel 33 can move back and forth along Z-direction, allow emery wheel 33 support plate 6 is fed along Z-direction and
It is ground.The transmission mechanism of the Z-direction mobile foundation 31 and the construction of guide rail are not intended to limit, can with it is existing it is various transmission and
Guiding structure is substituted.
In the operation of grinding, it can utilize the handling devices such as mechanical arm that support plate 6 is transported to the carrying of processing table top 2
On platform 21, and after the support plate 6 is fixed, you can drive grinding unit 3 to move down (along Z-direction) using the 3rd motor,
Emery wheel 33 is set then to proceed by the grinding on the surface of support plate 6, plummer 21 can be moved back and forth (along Y to predetermined altitude
Direction of principal axis), to carry out the grinding of the longitudinal direction of support plate 6 (along Y direction).Emery wheel 33 is also driven along X-axis with Z-direction mobile foundation 31
Direction is moved, to carry out the grinding of support plate 6 horizontal (along X-direction).After the completion of the support plate 6 grinding, you can utilize the 3rd
Motor drives emery wheel 33 to rise, and the support plate 6 for completing grinding is moved away from into processing table top 2 using handling devices such as mechanical arms, treated down
After one support plate 6 to be ground is moved to positioning, repeats and carry out above-mentioned grinding operation.
Referring to Fig. 5, the present invention's touches knife dressing unit 4 and can include a dressing instrument 41 and a position sensor 42, this
Dressing instrument 41 is preferred but is not limited to diamond pen, and dressing instrument 41 is arranged in the scope of activities of emery wheel 33, the dressing instrument
41 can be contacting to be repaired to the emery wheel 33 with emery wheel 33.The position sensor 42 is a kind of touch sensor, position
The side that sensor 42 is arranged on dressing instrument 41 is put, and in the scope of activities of emery wheel 33, the position sensor 42 can be used
With the dressing of emery wheel 33 it is forward and backward sense the emery wheel 33 wheel face position, so as to sense the diameter of the emery wheel 33, then felt
Measured value is transmitted to a control unit (non-schema), and the dressing amount of the emery wheel 33 is calculated by control unit.The position sensor
42 can be covered when being not used with a protection cap 43.
Referring to Fig. 6, the automatic measurement unit 5 of the present invention is arranged on grinding unit 3, such as it may be disposed at spindle motor
On the shell that 32 outsides are covered, the automatic measurement unit 5 includes an at least drive device 51 and an at least sensor 52, driving
Device 51 can be the devices such as cylinder or motor, and drive device 51 can be fixed on the outside of grinding unit 3, and sensor 52 can be to visit
Device, the sensors 52 such as rule are connected to drive device 51, and drive device 51 can drive sensor 52 to be moved along Z-direction, use
In the height of measurement plummer 21 and support plate 6.The elevation carrection of machine table face 2 can be first carried out before every support plate 6 is ground to confirm, ground
The elevation carrection for carrying out support plate 6 after pre- allowance again is milled to, then carries out final precision controlling grinding.The automatic measurement unit 5 is set
In the outside of grinding unit 3, when measuring, drive device 51 is operated and extended automatic measurement unit 5, and then changes sensor
52 Z-direction position so that grinding unit 3 is when Z axis moves down, the meeting of sensor 52 contact measured thing more first than emery wheel 33,
The determinand can be the support plate on plummer 21, or the outer frame 214 of plummer 21.
In the present embodiment, it is each provided between the sensor 52 of the corresponding automatic measurement unit 5 of the grinding unit 3
One guide mechanism 53, the guide mechanism 53 includes a fixed seat 531 and a lifting seat 532, fixed seat 531 are fixed on grinding unit
3 side, what lifting seat 532 slided is arranged at fixed seat 531, and sensor 52 is fixed on lifting seat 532, the energy of lifting seat 532
Moved in fixed seat 531 along Z-direction, to drive sensor 52 can be along the stable lifting moving of Z-direction.
[second embodiment]
Fig. 7 and Fig. 8 is referred to, in the present embodiment, the plummer 21 includes a base 211 and a ceramic sucker 212, bottom
Seat 211 is arranged in table 1, and ceramic sucker 212 is arranged on base 211, the porous that ceramic sucker 212 can be formed in one
Ceramics, ceramic sucker 212 have a vacuum suction face 213, and the top of base 211 is formed outside one in the outside of ceramic sucker 212
Frame portion 214, vacuum suction face 213 and the outer frame 214 of base 211 can be located at same level.Outer frame 214 is inhaled close to ceramics
The position of disk 212 is arranged with an at least vacuum channels 215 (as shown in Figure 7 A), and the present embodiment discloses vacuum channels 215 and is provided with
Two, the outside around ceramic sucker 212 that two vacuum channels 215 are spaced.It is appropriate that vacuum channels 215 may connect to
Vacuum extractor (air extractor), ceramic sucker 212 and vacuum channels 215 each have the vacuum loop of independent control respectively.
Vacuum channels 215, available for discharge cutting fluid and abrasive dust, are inhaled around the outside of ceramic sucker 212 with reducing abrasive dust by ceramics
Disk 212 sucks and produces the situation that porous material blocks and occur.
The plummer of the present invention can move along Y direction, and Z-direction mobile foundation can move along X-axis and Z-direction, make
Emery wheel can be ground to the support plate on the plummer of processing table top.The plane lapping equipment of the present invention is in X-axis, Y-axis and Z axis side
Xiang Jieneng control movements, removal ability is preferable, and has preferable machining accuracy.
Further, the present invention has the function of touching knife dressing, and emery wheel directly carries out dressing, dressing using dressing instrument after grinding
Afterwards emery wheel can touch location sensor confirm Z axis correct position, operation can be directly processed again, to reduce the mistake of precision
Difference.
The present invention also has the function of automatic measurement, drive device can be utilized to drive sensor lifting, system can be pre-
If reserved processing capacity, when being ground to predetermined amount, automatic measurement function enables, and it is true that meeting first measurement processing table position makees zero point
Recognize, then measure support plate height and position, carry out final refine action after confirming actual height error, therefore high accuracy can be reached
Grinding size.
The preferred embodiments of the present invention are the foregoing is only, are not intended to the scope of patent protection of the limitation present invention, therefore such as
With the equivalence changes carried out by description of the invention and accompanying drawing content, the scope of the present invention is similarly all contained in
Interior, Chen Ming is given in conjunction.
Claims (9)
1. a kind of plane lapping equipment, it is characterised in that the plane lapping equipment includes：
One table；
One processing table top, the processing table top are arranged in the table, and the processing table top is provided with a plummer, to solid
The support plate of fixed pending grinding, the plummer can move along a Y direction；
One grinding unit, the grinding unit are arranged at the top of the processing table top, and the grinding unit moves comprising a Z-direction
Pedestal, a spindle motor and an emery wheel, the spindle motor are arranged on the Z-direction mobile foundation, the emery wheel and the master
Axle motor power connects, and the spindle motor can be to drive the emery wheel to rotate, and the Z-direction mobile foundation can be along an X-axis
Direction and Z-direction movement, the emery wheel can be carried out to the support plate on the plummer to the processing table top
Grinding；
One touches knife dressing unit, and the knife dressing unit that touches includes a dressing instrument, and the dressing instrument is arranged on the emery wheel
Scope of activities in, the dressing instrument can be contacting to be repaired to the emery wheel with the emery wheel；And
One automatic measurement unit, the automatic measurement unit are arranged on the grinding unit, comprising an at least drive device and
An at least sensor, an at least sensor are connected to an at least drive device, and an at least drive device can drive
A dynamic at least sensor moves along the Z-direction, and the automatic measurement unit is used to measure the plummer and institute
State the height of support plate.
2. plane lapping equipment according to claim 1, it is characterised in that the plummer includes a base and a ceramics
Sucker, the base are arranged in the table, and the ceramic sucker is arranged on the base, and the top of the base is in institute
The outside for stating ceramic sucker forms an outer frame, and the outer frame is arranged with an at least vacuum close to the position of the ceramic sucker
Groove, an at least vacuum channels are around the outside of the ceramic sucker, for discharging cutting fluid and abrasive dust.
3. plane lapping equipment according to claim 2, it is characterised in that an at least vacuum channels are two vacuum
Groove, described two vacuum channels are intermittently around in the outside of the ceramic sucker.
4. plane lapping equipment according to claim 2, it is characterised in that the ceramic sucker is formed in one porous
Property ceramics sucker, the ceramic sucker has a vacuum suction face, the vacuum suction face and the outer frame of the base
Positioned at same level.
5. plane lapping equipment according to claim 2, it is characterised in that the ceramic sucker and an at least vacuum
Groove has the vacuum loop of independent control respectively.
6. plane lapping equipment according to claim 1, it is characterised in that the plummer includes an electromagnetic disc forever.
7. plane lapping equipment according to claim 1, it is characterised in that the knife dressing unit that touches also includes a position
Sensor, the position sensor are arranged on the side of the dressing instrument, and in the scope of activities of the emery wheel, it is described
Position sensor can be to sense the position of the wheel face of the emery wheel, so as to sense before the emery wheel dressing, after dressing
State the diameter and abrasion loss of emery wheel.
8. plane lapping equipment according to claim 1, it is characterised in that the grinding unit and the automatic measurement list
Guide mechanism is provided between the sensor of member, the guide mechanism includes a fixed seat and a lifting seat, the fixation
Seat is fixed on the side of the grinding unit, and the lifting seat is slidingly arranged in the fixed seat, and the sensor is fixed
In on the lifting seat, the lifting seat can move in the fixed seat along the Z-direction.
9. plane lapping equipment according to claim 1, it is characterised in that the grinding unit also includes an X to base
Seat, and the plummer is driven with one first motor, the plummer is slidably matched with the first guide rail, can be along the Y
Direction of principal axis moves；The X connects one second motor to pedestal, and the X is slidably matched with one second guide rail, the Z to pedestal
The X is slidably matched with to mobile foundation on pedestal, enables the Z-direction mobile foundation along the X-direction and the Z
Direction of principal axis moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610541729.9A CN107598758A (en) | 2016-07-11 | 2016-07-11 | Plane lapping equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610541729.9A CN107598758A (en) | 2016-07-11 | 2016-07-11 | Plane lapping equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107598758A true CN107598758A (en) | 2018-01-19 |
Family
ID=61054635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610541729.9A Pending CN107598758A (en) | 2016-07-11 | 2016-07-11 | Plane lapping equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107598758A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108481109A (en) * | 2018-06-20 | 2018-09-04 | 上海惠亚铝合金制品有限公司 | A kind of floor unit grinder |
| CN109465544A (en) * | 2018-12-29 | 2019-03-15 | 佛山市固高自动化技术有限公司 | A kind of welding robot flexible production line |
| CN109500725A (en) * | 2019-01-22 | 2019-03-22 | 福建北电新材料科技有限公司 | A kind of fixed fixture for substrate grinding |
| CN114274034A (en) * | 2021-11-24 | 2022-04-05 | 宁波华辰机械有限公司 | Automatic polishing machine |
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| JPH10315103A (en) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | Grinding/polishing method and device therefor |
| JP2002127006A (en) * | 2000-10-24 | 2002-05-08 | Okamoto Machine Tool Works Ltd | Surface grinding method for work |
| CN1978137A (en) * | 2005-12-08 | 2007-06-13 | 株式会社捷太格特 | Mounting structure for measuring device and grinding machine with the structure |
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| JPH04310369A (en) * | 1991-04-05 | 1992-11-02 | Amada Washino Co Ltd | Automatic sizing grinding method and automatic sizing grinding device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108481109A (en) * | 2018-06-20 | 2018-09-04 | 上海惠亚铝合金制品有限公司 | A kind of floor unit grinder |
| CN109465544A (en) * | 2018-12-29 | 2019-03-15 | 佛山市固高自动化技术有限公司 | A kind of welding robot flexible production line |
| CN109500725A (en) * | 2019-01-22 | 2019-03-22 | 福建北电新材料科技有限公司 | A kind of fixed fixture for substrate grinding |
| CN114274034A (en) * | 2021-11-24 | 2022-04-05 | 宁波华辰机械有限公司 | Automatic polishing machine |
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Application publication date: 20180119 |