CN204913586U - Parallel plane grinding device - Google Patents
Parallel plane grinding device Download PDFInfo
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- CN204913586U CN204913586U CN201520359407.3U CN201520359407U CN204913586U CN 204913586 U CN204913586 U CN 204913586U CN 201520359407 U CN201520359407 U CN 201520359407U CN 204913586 U CN204913586 U CN 204913586U
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- emery wheel
- support plate
- parallel plane
- grinding
- plummer
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Abstract
The utility model provides a parallel plane grinding device, its automation of having promoted grinding device, artifical expenditure significantly reduces. The utility model discloses a grinding device of parallel plane grinding device for having a plurality of grinding units side by side, it has integrated support plate automatic handling system, can transport the support plate that each processing mesa grinds and the processing mesa is moved away from to the automatic support plate that will grind the completion automatically. On the other hand, the utility model discloses a grinding device can be for the automatic dressing of emery wheel to the torn -up consume volume of automatic compensation emery wheel.
Description
Technical field
The utility model relates to a kind of milling apparatus, particularly the parallel plane lapping equipment of a kind of multiaxis grinding unit, multi-processing table top.
Background technology
Existing plane lapping equipment only has single processing table top, emery wheel or grinding head is utilized to carry out grinding operation to the support plate on this processing table top or workpiece, after the grinding completing a support plate, just can carry out the grinding operation of next support plate, working (machining) efficiency is quite low, and need to carry support plate manually to processing table top or manually being moved away from from processing table top by support plate, very high to the dependency degree of manpower.In general, in process of lapping, emery wheel can produce Grain Falling Off and consume gradually, emery wheel also can passivation gradually, after emery wheel operation a period of time, be required to be it in prior art carry out dressing, this is also dependent on manpower manual and carries out, moreover, dressing easily affects the smooth degree of machining production line manually, and overall processing efficiency cannot be promoted.
Summary of the invention
One of the utility model object is to provide a kind of parallel plane lapping equipment, to promote the automation of milling apparatus, reduces and manually pays, promote working (machining) efficiency simultaneously.
For reaching above-mentioned purpose, the utility model provides a kind of parallel plane lapping equipment, and it comprises: a table; Several process table top, be arranged in this table, each machine table face correspondence arranges a plummer, this plummer is in order to the fixing support plate that will carry out grinding, plummer corresponding to each machine table face can move in time grinding in this table, the movable passageway of each plummer is parallel to each other, this support plate when this plummer moves along with movement; And several grinding units, be arranged on the upside of these processing table tops, be configured on the track of the movable passageway of the plummer across these machine table face correspondences, to process table top mutually corresponding with these for these grinding units, each grinding unit moves on that track, its moving direction is perpendicular to the direction of the movable passageway of these plummers, and these grinding units are in order to grind the support plate on the plummer of these machine table face correspondences simultaneously.
The utility model provides a kind of parallel plane lapping equipment on the other hand, it comprises: several process table top, and each machine table face correspondence arranges a plummer, and this plummer is in order to the fixing support plate that will carry out grinding, each plummer can move when grinding, and its movable passageway is parallel to each other; Several grinding units, be arranged on the upside of these processing table tops, be configured on the track of the movable passageway of the plummer across these machine table face correspondences, each grinding unit moves on that track, wherein each grinding unit comprises: an emery wheel, in order to grind the support plate on this processing table top, wherein this emery wheel does elevating movement along the direction of the plane orthogonal of the movable passageway with these plummers, and moves horizontally along this track of the movable passageway across these plummers.
The parallel plane lapping equipment of the utility model has several grinding unit side by side and processing table tops each other, for multi-processing table top, multiunit milling apparatus, support plate on each processing table top carries out grinding operation by corresponding grinding unit, and can automatically support plate be carried out loading and be set out, carry out the attrition process of overloading plate simultaneously, promote working (machining) efficiency.In addition, the milling apparatus of the utility model incorporates support plate automatic handing system, automatically support plate can be transported to each processing table top carry out grinding and automatic support plate grind moved away from processing table top, need not with artificial loading and unloading (support plate), minimizing is manually paid.And, the milling apparatus of the utility model can automatically for emery wheel carries out dressing, through sensor induction emery wheel position after dressing completes, the consume abrasion loss of system-computed emery wheel, thus when grinding next time, the height and position of adjustment emery wheel, auto-compensation grinding wheel wear amount, thus increase production efficiency, reduce the artificial expenditure of manually carrying out emery wheel calibration.
Accompanying drawing explanation
Fig. 1 shows the schematic perspective view of the parallel plane lapping equipment of the utility model.
Fig. 2 shows the side elevation view of the parallel plane lapping equipment of the utility model.
Fig. 3 shows the front view of the parallel plane lapping equipment of the utility model.
Fig. 4 shows the configuration schematic diagram of the support plate automatic handing system of the parallel plane lapping equipment of the utility model.
Fig. 5 shows the side sectional view of the parallel plane lapping equipment of the utility model.
Fig. 6 shows the configuration schematic diagram of dressing instrument and position sensor in the utility model.
Fig. 7 shows the relative position figure of dressing instrument and position sensor and emery wheel in the utility model.
Fig. 8 shows the calculating schematic diagram of the abrasion loss of emery wheel in the utility model.
Detailed description of the invention
In the detailed description of following embodiment, see also the accompanying drawing as its part, it illustrates the utility model can in order to the specific embodiment realized.Be understandable that, also can adopt other embodiment, any modification, modifications and variations are carried out to its structure not departing under spirit of the present utility model.
The utility model provides a kind of parallel plane lapping equipment, and it enhances the automation of milling apparatus, greatly reduces artificial expenditure.The parallel plane lapping equipment of the present invention is the milling apparatus with multiple grinding unit side by side, it also incorporates support plate automatic handing system, automatically support plate can be transported to each processing table top and carry out grinding and automatic the support plate ground moved away from processing table top.On the other hand, the milling apparatus of the utility model can to the automatic dressing of emery wheel, and the losing quantity of the abrasion of auto-compensation emery wheel.
Refer to Fig. 1 to Fig. 3, Fig. 1 shows the schematic perspective view of the parallel plane lapping equipment of the utility model, Fig. 2 shows the side elevation view of the parallel plane lapping equipment of the utility model, and Fig. 3 shows the front view of the parallel plane lapping equipment of the utility model.It is noted that for knowing for purpose of brevity, Fig. 1 does not demonstrate the structure (being detailed later) of automatic transporting support plate.
The milling apparatus of the utility model is the parallel plane lapping equipment of multi-processing table top, many grinding units.As shown in Figure 1 to Figure 3, the milling apparatus of the utility model comprises several support plates processing table top 12, these processing table tops 12 are arranged in table 14, each processing table top 12 correspondence arranges a plummer 122, its concrete example is as being electromagnetic disc forever, support plate 120 is transported to after on processing table top 12, and be fixed on plummer 122, such as magnetic is fixed (also can Shenfu figure Fig. 5).Each support plate processing table top 12 can move independently in table 14, namely moves along the Y direction, and particularly, when grinding the support plate 120 on processing table top 12, plummer 122 can move back and forth along the Y direction.As shown in 1st ~ 3 figure, it comprises five support plates processing table tops 12, its correspondence is provided with the plummer 122 of five support plates 120 and corresponding movable passageway thereof, this only as an example, the utility model is not limited thereto.Correspondingly, the milling apparatus of the utility model is also configured with five grinding units 22, and each grinding unit 22 corresponding support plate processing table top 12 operates.That is, the support plate 120 on each processing table top 12 carries out grinding operation by corresponding grinding unit 22.
As previously mentioned, the plummer 122 of each processing table top 12 correspondence can move back and forth along the Y direction.As shown in FIG., the movable passageway of each plummer 122 correspondence configures in parallel to each other, and every bar movable passageway is parallel to each other and extends along the Y direction, and adjacent movable passageway separates with suitable preset distance.
In support plate processing table top 12, plummer 122 is used for carrying fixes a support plate that will be polished 120, and support plate 120 is fixed on plummer 122, and moves along with plummer 122 and move, and support plate 120 is such as the slim support plate such as glass substrate, IC support plate.
This milling apparatus has the gantry upright post 24 (number of gantry upright post 24 is not particularly limited, and can reach the object of firm support) of at least two or more support, and it is fixedly installed in table 14.These gantry upright post 24 arrange along the direction vertical with the movable passageway of processing table top 12 or plummer 122, namely along the X direction, between the movable passageway of every two processing table tops 12, arrange a gantry upright post 24.Up and down across being provided with two tracks 26 (number of track 26 is not particularly limited) between these gantry upright post 24, the bearing of trend of track 26 is perpendicular to the movable passageway direction processing table top 12, namely extend in X direction, namely grinding unit 22 moves on this track 26.
In an embodiment, track 26 can be one and crosses over the track of all movable passageways, and on this track, the moving range of each grinding unit 22 is by Systematical control, makes the mobile range of each grinding unit 22 correspond to movable passageway corresponding to it.In another embodiment, track 26 slitting is many sections of tracks, and these tracks separate with the distance piece of entity, and grinding unit 22 can only move on this section of track at its place in the scope of the movable passageway of correspondence.In other specific embodiments, it is continuous orbit that track 26 can be in the scope of the movable passageway of corresponding some, and other parts are segmented tracks.
Each grinding unit 22 comprises mobile chassis 222, Spindle Motor 224 and an emery wheel 226.A side surface coupling of mobile chassis 222 is on track 26, therefore mobile chassis 222 can move along the X direction on track 26.Another side of mobile chassis 222 engages with the packaging body of Spindle Motor 224, and Spindle Motor 224 can move up and down along this another side of mobile chassis 222, namely moves along Z axis in figure.Emery wheel 226 engages with the main shaft 228 of Spindle Motor 224, therefore emery wheel 226 can make lifting moving along with Spindle Motor 224, among emery wheel 226, centre axis parallel is in X-direction, and when through track 26, Spindle Motor 224 moves along the X direction, emery wheel 226 grinds support plate 120 along the X direction.
In process of lapping, carrying arm support plate 120 is transported to processing table top 12 and plummer 122 support plate 120 is fixing after, emery wheel 226 moves down (Z-direction) along with Spindle Motor 224, to fixed dimension, support plate 120 surface starts to grind, in this process, plummer 122 moves back and forth (Y-direction), thus the grinding carried out on the longitudinal direction (Y-direction) of support plate 120, then mobile chassis 222 moves along track 26, emery wheel 226 moves immediately in X direction, carries out the next one longitudinally grinding.After this support plate 120 has ground, emery wheel 226 has risen with Spindle Motor 224, and the support plate 120 completing grinding is moved away from processing table top 12 by carrying arm, after the support plate 120 that will be polished until the next one moves to location, carries out as above action.
Refer to Fig. 4 and Fig. 5, Fig. 4 shows the configuration schematic diagram of the support plate automatic handing system of the parallel plane lapping equipment of the utility model, and Fig. 5 shows the side sectional view of the parallel plane lapping equipment of the utility model.
As shown in Figure 4, the milling apparatus of the utility model also comprises support plate automatic handing system, and it comprises a guide rail bracket 34, several supports 32 and two support plate carrying arms 40.Support plate automatic handing system is arranged on each grinding unit 22 rear, crosses over the movable passageway (consult Fig. 1 in the lump, see Fig. 2 and Fig. 3) of all processing table tops 12.
Specifically, these supports 32 are preferably ㄇ font support, it is arranged between the movable passageway of processing table top 12 between two, supported by table 14, guide rail bracket 34 is placed in inside the framework of ㄇ font support 32, be fixed together with the upside crossbeam of ㄇ font support 32, guide rail bracket 34 extends along the direction (i.e. X-direction) of the movable passageway across processing table top 12, at least one side of guide rail bracket 34 is provided with guide rail 36, namely it also extend along the X direction, cross over all processing table tops 12, can move along this guide rail 36 with support plate carrying arm 40, support plate 120 be carried to the plummer 122 of processing table top 12 or support plate 120 moved away from processing table top 12.
As shown in Figure 5, these two support plate carrying arms 40 are respectively for being removed by support plate 120 to the carrying arm (arm as right side) of processing table top 12 and the carrying arm (arm as left side) for support plate 120 being moved away from processing table top 12.Each support plate carrying arm 40 comprises vacuum cup 42, and support plate 120 adsorbs or departs from through adjustment sucker air pressure by it.When for carrying out support plate grinding, the support plate 120 that its vacuum cup 42 adsorbs is placed into processing table top 12 and locates by the carrying arm 40 on right side, and sucker air pressure raises to depart from support plate 120.After completing the grinding of support plate support plate, the carrying arm 40 in left side moves to above processing table top 12, and after vacuum cup 42 contacts support plate 120, sucker air pressure reduces to adsorb support plate 120, then support plate 120 is moved away from processing table top 12.
The support plate carrying arm 40 of the utility model can carry support plate 120 at each processing table top 12 automatically, its carrying flow process is by system management and control, system can monitor the demand to support plate carrying on each processing table top 12, and the carrying flow process that is automatically ranked, control support plate carrying arm 40 accordingly.For example, system, after receiving the notice that grinding operation that a certain processing table top 12 carries out completes, is its be ranked blanking and material loading (i.e. support plate 120) flow process.In a simple example, support plate carrying arm 40 can be sequentially each each processing table top 12 and carry out loading and unloading.
Refer to Fig. 6 to Fig. 8, Fig. 6 shows the configuration schematic diagram of dressing instrument and position sensor in the utility model, Fig. 7 shows the relative position figure of dressing instrument and position sensor and emery wheel in the utility model, and Fig. 8 shows the calculating schematic diagram of the abrasion loss of emery wheel in the utility model.
In process of lapping, emery wheel 226 can produce Grain Falling Off and consume gradually, and emery wheel 226 also can passivation.The utility model can carry out automatic dressing to emery wheel 226, and auto-compensation emery wheel 226 grinds the abrasion loss of consume and dressing consume, thus compensates this error, maintains the precision of support plate 120 thickness.
Specifically, the milling apparatus of the utility model comprises a dressing instrument 52, it is fixedly installed on the downside of the scope of activities of emery wheel 226, and this dressing instrument 52 is such as a diamond pen, dressing instrument 52 in order to the surface contact with emery wheel 226 to repair emery wheel 226.In the utility model, when emery wheel 226 has completed the grinding of support plate 120 of a predetermined quantity, namely system has started emery wheel dressing program (or carrying out when having ground a slice support plate 120), to carry out the automatic dressing operation to emery wheel 226.
Moreover, the milling apparatus of the utility model also comprises a position sensor 54, it is arranged on the side of dressing instrument, be fixedly installed on the downside of the scope of activities of emery wheel 226 equally, position sensor 54, in order to after emery wheel 226 dressing, senses the position of the wheel face of emery wheel 226, thus calculates the diameter of emery wheel 226 and extrapolate its abrasion loss, system and and then compensate this abrasion loss, such as decline emery wheel 226 toward support plate 120 direction one section of distance that abrasion loss is corresponding or equal therewith.
Specifically, in an embodiment, position sensor 54 is a contact sensor, and when an object applies certain pressure and displacement to this contact sensor, this contact sensor sends an electric signal.See Fig. 8, before emery wheel 226 carries out dressing, emery wheel 226 drops to and position sensor 54 in a precalculated position, the signal that system sends through receiving position sensor 54 and stop the movement of emery wheel 226, and learns that now emery wheel 226 moves to the distance D1 of position sensor 54 from this precalculated position.After emery wheel 226 completes dressing, emery wheel 226 moves from this precalculated position to position sensor 54, again contact with position sensor 54, now emery wheel 226 moves to the distance D2 of position sensor 54 from this precalculated position, system is through D2 being deducted the abrasion loss that namely D1 draws emery wheel 226, when then grinding, system can auto-compensation this abrasion loss, by emery wheel 226 toward processing table top 12 or support plate 120 close.
The parallel plane lapping equipment of the utility model has several grinding unit side by side and processing table tops each other, for multi-processing table top, multiunit milling apparatus, support plate on each processing table top carries out grinding operation by corresponding grinding unit, and can automatically support plate be carried out loading and be set out, carry out the attrition process of overloading plate simultaneously, promote working (machining) efficiency.In addition, the milling apparatus of the utility model incorporates support plate automatic handing system, automatically support plate can be transported to each processing table top carry out grinding and automatic support plate grind moved away from processing table top, need not with artificial loading and unloading (support plate), minimizing is manually paid.And, the milling apparatus of the utility model can automatically for emery wheel carries out dressing, through sensor induction emery wheel position after dressing completes, the consume abrasion loss of system-computed emery wheel, thus when grinding next time, the height and position of adjustment emery wheel, auto-compensation grinding wheel wear amount, thus increase production efficiency, reduce the artificial expenditure of manually carrying out emery wheel calibration.
The utility model discloses as above with preferred embodiment; so itself and be not used to limit the utility model; have in the utility model art and usually know the knowledgeable; not departing from the spirit and scope of the utility model; when various changes and retouching can be done, therefore the utility model protection domain when depending on after the attached claim person of defining be as the criterion.
Claims (10)
1. a parallel plane lapping equipment, is characterized in that: described parallel plane lapping equipment comprises:
One table;
Several process table top, be arranged in this table, each machine table face correspondence arranges a plummer, this plummer is in order to the fixing support plate that will carry out grinding, plummer corresponding to each machine table face can move in time grinding in this table, the movable passageway of each plummer is parallel to each other, this support plate when this plummer moves along with movement; And
Several grinding units, be arranged on the upside of these processing table tops, be configured on the track of the movable passageway of the plummer across these machine table face correspondences, to process table top mutually corresponding with these for these grinding units, each grinding unit moves on that track, its moving direction is perpendicular to the direction of the movable passageway of these plummers, and these grinding units are in order to grind the support plate on the plummer of these machine table face correspondences simultaneously.
2. parallel plane lapping equipment according to claim 1, is characterized in that, described parallel plane lapping equipment more comprises:
At least one gantry upright post, it is fixedly installed in this table, and the track across the movable passageway of the plummer of these machine table face correspondences is arranged in this gantry upright post, perpendicular to this gantry upright post.
3. parallel plane lapping equipment according to claim 1, it is characterized in that, each grinding unit comprises:
One mobile chassis, an one side and this orbit coupling across the movable passageway of these plummers;
One Spindle Motor, another side surface coupling of its packaging body and this mobile chassis, this Spindle Motor moves up and down in a vertical direction along this another side of this mobile chassis; And
One emery wheel, engages with the main shaft of this Spindle Motor, and this emery wheel moves up and down along with this Spindle Motor, and this emery wheel and this Spindle Motor move along the direction that the direction of the movable passageway with these plummers is vertical along with the movement on that track of this mobile chassis.
4. parallel plane lapping equipment according to claim 3, it is characterized in that: this emery wheel moves down along with this Spindle Motor, so that start to grind against this support plate surface, now these plummers move back and forth, thus the grinding carried out on the longitudinal direction of this support plate, then this mobile chassis is along this rail moving, carries out the next one longitudinally grinding.
5. parallel plane lapping equipment according to claim 3, is characterized in that, described parallel plane lapping equipment more comprises:
One dressing instrument, it is fixedly installed on the downside of the scope of activities of this emery wheel, this dressing instrument in order to the surface contact with this emery wheel to repair this emery wheel, when this emery wheel has completed the grinding of the support plate of a predetermined quantity, namely emery wheel dressing program is automatically started, to carry out automatic dressing to this emery wheel.
6. parallel plane lapping equipment according to claim 5, is characterized in that, described parallel plane lapping equipment more comprises:
One position sensor, it is arranged on the side of this dressing instrument, and be fixedly installed on the downside of the scope of activities of this emery wheel, this position sensor is in order to before and after this emery wheel dressing, sense the position of the wheel face of this emery wheel, thus system senses diameter and the abrasion loss of this emery wheel, and and then compensate this abrasion loss.
7. parallel plane lapping equipment according to claim 1, is characterized in that, described parallel plane lapping equipment more comprises:
At least one support and a guide rail bracket, this guide rail bracket is placed on this support, and the direction along the movable passageway across these plummers extends, and this guide rail bracket has at least one guide rail on its bearing of trend; And
Two support plate carrying arms, it moves along this guide rail, carry out grinding in order to automatically this support plate to be transported to each processing table top and automatic support plate grind to be moved away from processing table top, these two support plates carrying arms be respectively for this support plate is removed to each processing table top carrying arm and be used for this support plate being moved away from the carrying arm that each processes table top.
8. a parallel plane lapping equipment, is characterized in that: described parallel plane lapping equipment comprises:
Several process table top, and each machine table face correspondence arranges a plummer, and this plummer is in order to the fixing support plate that will carry out grinding, and each plummer can move when grinding, and its movable passageway is parallel to each other;
Several grinding units, be arranged on the upside of these processing table tops, be configured on the track of the movable passageway of the plummer across these machine table face correspondences, each grinding unit moves on that track, and wherein each grinding unit comprises:
One emery wheel, in order to grind the support plate on this processing table top, wherein this emery wheel does elevating movement along the direction of the plane orthogonal of the movable passageway with these plummers, and moves horizontally along this track of the movable passageway across these plummers.
9. parallel plane lapping equipment according to claim 8, is characterized in that, described parallel plane lapping equipment more comprises:
One dressing instrument, it is fixedly installed on the downside of the scope of activities of this emery wheel, this dressing instrument in order to the surface contact with this emery wheel to repair this emery wheel, when this emery wheel has completed the grinding of the support plate of a predetermined quantity, namely emery wheel dressing program is automatically started, to carry out automatic dressing to this emery wheel.
10. parallel plane lapping equipment according to claim 9, is characterized in that, described parallel plane lapping equipment more comprises:
One position sensor, it is arranged on the side of this dressing instrument, and is fixedly installed on the downside of the scope of activities of this emery wheel, this position sensor is in order to after this emery wheel dressing, sense the position of the wheel face of this emery wheel, thus system senses the abrasion loss of this emery wheel, and and then compensate this abrasion loss.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520359407.3U CN204913586U (en) | 2015-05-29 | 2015-05-29 | Parallel plane grinding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520359407.3U CN204913586U (en) | 2015-05-29 | 2015-05-29 | Parallel plane grinding device |
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| CN204913586U true CN204913586U (en) | 2015-12-30 |
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| CN201520359407.3U Active CN204913586U (en) | 2015-05-29 | 2015-05-29 | Parallel plane grinding device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104759971A (en) * | 2015-04-21 | 2015-07-08 | 湖南大学 | Grinder for preparing skeleton samples through biomechanics |
| CN107350925A (en) * | 2017-07-04 | 2017-11-17 | 南京四象新能源科技有限公司 | A kind of automation battery pole piece grinding apparatus |
| CN107598758A (en) * | 2016-07-11 | 2018-01-19 | 均豪精密工业股份有限公司 | Plane lapping equipment |
-
2015
- 2015-05-29 CN CN201520359407.3U patent/CN204913586U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104759971A (en) * | 2015-04-21 | 2015-07-08 | 湖南大学 | Grinder for preparing skeleton samples through biomechanics |
| CN107598758A (en) * | 2016-07-11 | 2018-01-19 | 均豪精密工业股份有限公司 | Plane lapping equipment |
| CN107350925A (en) * | 2017-07-04 | 2017-11-17 | 南京四象新能源科技有限公司 | A kind of automation battery pole piece grinding apparatus |
| CN107350925B (en) * | 2017-07-04 | 2019-06-18 | 南京四象新能源科技有限公司 | A kind of automation battery pole piece grinding apparatus |
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