CN107575731B - 一种用于高纯六氟化钨生产的自动灌装系统及其使用方法 - Google Patents
一种用于高纯六氟化钨生产的自动灌装系统及其使用方法 Download PDFInfo
- Publication number
- CN107575731B CN107575731B CN201710933574.8A CN201710933574A CN107575731B CN 107575731 B CN107575731 B CN 107575731B CN 201710933574 A CN201710933574 A CN 201710933574A CN 107575731 B CN107575731 B CN 107575731B
- Authority
- CN
- China
- Prior art keywords
- filling
- finished product
- storage tank
- product storage
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
项目 | <![CDATA[O<sub>2</sub>]]> | <![CDATA[N<sub>2</sub>]]> | CO | <![CDATA[CF<sub>4</sub>]]> | <![CDATA[CO<sub>2</sub>]]> | <![CDATA[SF<sub>6</sub>]]> | <![CDATA[SiF<sub>4</sub>]]> | HF | 总金属杂质(ppbm) |
指标/ppmv | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 | ≤0.5 | ≤1.0 | ≤100 |
WF-1 | 0.1 | 0.1 | 0.1 | 0.2 | 0.2 | <0.05 | <0.05 | 0.5 | 17 |
WF-2 | 0.1 | 0.1 | <0.05 | <0.05 | <0.05 | <0.05 | <0.05 | 0.6 | 16 |
WF-3 | 0.2 | 0.4 | <0.05 | <0.05 | <0.05 | <0.05 | <0.05 | 0.3 | 18 |
WF-4 | 0.1 | 0.2 | 0.3 | <0.05 | <0.05 | <0.05 | <0.05 | 0.4 | 15 |
WF-5 | 0.1 | 0.1 | <0.05 | <0.05 | 0.2 | <0.05 | <0.05 | 0.6 | 16 |
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710933574.8A CN107575731B (zh) | 2017-09-26 | 2017-09-26 | 一种用于高纯六氟化钨生产的自动灌装系统及其使用方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710933574.8A CN107575731B (zh) | 2017-09-26 | 2017-09-26 | 一种用于高纯六氟化钨生产的自动灌装系统及其使用方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107575731A CN107575731A (zh) | 2018-01-12 |
CN107575731B true CN107575731B (zh) | 2023-05-05 |
Family
ID=61040428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710933574.8A Active CN107575731B (zh) | 2017-09-26 | 2017-09-26 | 一种用于高纯六氟化钨生产的自动灌装系统及其使用方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN107575731B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109607453A (zh) * | 2018-12-21 | 2019-04-12 | 湖南省鎏源新能源有限责任公司 | 灌装抽吸装置及灌装抽吸方法 |
CN111734609B (zh) * | 2020-05-21 | 2021-09-28 | 中国原子能科学研究院 | 一种节约型He-3气体灌充系统及方法 |
CN114803998B (zh) * | 2022-03-25 | 2023-09-12 | 江铃汽车股份有限公司 | 一种防冻液加注真空平衡方法、系统及加注设备 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101470020B (zh) * | 2007-12-25 | 2011-06-29 | 清华大学 | 稳态氢气消耗量检测系统及检测方法 |
JP5498188B2 (ja) * | 2010-02-08 | 2014-05-21 | 株式会社神戸製鋼所 | 水素分離精製用容器 |
KR101376827B1 (ko) * | 2013-01-24 | 2014-03-20 | 최병구 | 육불화텅스텐의 제조방법 |
CN104016412B (zh) * | 2014-05-14 | 2016-01-20 | 黎明化工研究设计院有限责任公司 | 一种六氟化钨冷冻捕集器及其使用方法 |
CN104973629B (zh) * | 2015-06-25 | 2017-03-01 | 厦门钨业股份有限公司 | 一种六氟化钨气体的提纯方法 |
CN105417583B (zh) * | 2015-12-31 | 2017-08-11 | 中国船舶重工集团公司第七一八研究所 | 一种六氟化钨气体的纯化装置及方法 |
CN207349787U (zh) * | 2017-09-26 | 2018-05-11 | 黎明化工研究设计院有限责任公司 | 一种用于高纯六氟化钨生产的自动灌装系统 |
-
2017
- 2017-09-26 CN CN201710933574.8A patent/CN107575731B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN107575731A (zh) | 2018-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107575731B (zh) | 一种用于高纯六氟化钨生产的自动灌装系统及其使用方法 | |
CN110410662B (zh) | 一种超高纯气体的钢瓶处理系统及方法 | |
US5894742A (en) | Methods and systems for delivering an ultra-pure gas to a point of use | |
CN102173392A (zh) | 六氟化硫气体分离净化装置及其六氟化硫净化方法 | |
US6071349A (en) | Gas supplying apparatus and vapor-phase growth plant | |
CN207349787U (zh) | 一种用于高纯六氟化钨生产的自动灌装系统 | |
CN210764317U (zh) | 一种电子级溴化氢提纯装置 | |
CN210979331U (zh) | 低温液化气体槽车卸车系统 | |
CN201237081Y (zh) | 带氙气回收的配气装置 | |
JPH11272337A (ja) | 高純度ガスを超高圧に昇圧させる方法及び装置 | |
CN110805831A (zh) | 一种液相乙烷管道放空液的回收工艺及装置 | |
KR102003230B1 (ko) | 고순도산소를 추가 생산하기 위한 방법 및 장치 | |
CN208703560U (zh) | 一种回收bog气体的lng快速卸车系统 | |
CN211998831U (zh) | 一种电解nf3连续预纯化装置 | |
JP2646455B2 (ja) | 窒素ガス分離方法 | |
US11448459B1 (en) | Cryogenic gas separator | |
CN112815227B (zh) | 用于两相流体回路系统的星上在线超纯氨工质充装系统 | |
CN204437683U (zh) | 硅烷纯化装置与灌装系统 | |
CN210266695U (zh) | 一种超高纯气体的钢瓶处理系统 | |
CN109231238B (zh) | 一种高纯氨连续生产系统及其生产工艺 | |
CN107120525A (zh) | 一种液氩挥发冷凝回收装置及其氩气冷凝回收方法 | |
CN219804413U (zh) | 一种利用工业氮制取纯氮的纯化装置 | |
CN208566173U (zh) | 冷媒回收和利用系统 | |
CN111056540B (zh) | 一种电解nf3连续预纯化装置及连续预纯化方法 | |
JP6588265B2 (ja) | 二酸化炭素の分離回収方法および分離回収システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Li Liyuan Inventor after: Huang Xiaolei Inventor after: Zhang Jinbiao Inventor after: Li Jinyong Inventor after: Xu Fusheng Inventor after: Li Xianwu Inventor after: Wu Xufei Inventor before: Li Liyuan Inventor before: Huang Xiaolei Inventor before: Zhang Jinbiao Inventor before: Li Xianwu Inventor before: Xu Fusheng Inventor before: Li Jinyong Inventor before: Wu Xufei |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210519 Address after: 471012 No.12 Daonan Road, Jili District, Luoyang City, Henan Province Applicant after: Haohua Gas Co.,Ltd. Address before: 471000 69 Wangcheng Avenue, Xigong District, Luoyang City, Henan Province Applicant before: LIMING Research Institute OF CHEMICAL INDUSTRY |
|
GR01 | Patent grant | ||
GR01 | Patent grant |