CN107520725A - 一种多晶硅边皮头尾料微分打磨处理装置与方法 - Google Patents
一种多晶硅边皮头尾料微分打磨处理装置与方法 Download PDFInfo
- Publication number
- CN107520725A CN107520725A CN201710857634.2A CN201710857634A CN107520725A CN 107520725 A CN107520725 A CN 107520725A CN 201710857634 A CN201710857634 A CN 201710857634A CN 107520725 A CN107520725 A CN 107520725A
- Authority
- CN
- China
- Prior art keywords
- polysilicon
- flaw
- polishing
- differential
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710857634.2A CN107520725B (zh) | 2017-09-21 | 2017-09-21 | 一种多晶硅边皮头尾料微分打磨处理装置与方法 |
Applications Claiming Priority (1)
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CN201710857634.2A CN107520725B (zh) | 2017-09-21 | 2017-09-21 | 一种多晶硅边皮头尾料微分打磨处理装置与方法 |
Publications (2)
Publication Number | Publication Date |
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CN107520725A true CN107520725A (zh) | 2017-12-29 |
CN107520725B CN107520725B (zh) | 2022-09-30 |
Family
ID=60737083
Family Applications (1)
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CN201710857634.2A Active CN107520725B (zh) | 2017-09-21 | 2017-09-21 | 一种多晶硅边皮头尾料微分打磨处理装置与方法 |
Country Status (1)
Country | Link |
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CN (1) | CN107520725B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108516553A (zh) * | 2018-04-23 | 2018-09-11 | 亚洲硅业(青海)有限公司 | 一种去除多晶硅棒卡瓣的方法 |
CN110385620A (zh) * | 2019-08-13 | 2019-10-29 | 江苏众鑫磁电有限公司 | 多晶硅打磨处理装置 |
CN110509139A (zh) * | 2019-08-13 | 2019-11-29 | 江苏众鑫磁电有限公司 | 多晶硅打磨处理装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05277940A (ja) * | 1992-03-26 | 1993-10-26 | Mitsui High Tec Inc | 研削盤用電磁チャックの冷却構造 |
JP2002313761A (ja) * | 2002-02-28 | 2002-10-25 | Mitsubishi Materials Corp | ウェーハ研磨方法 |
CN201833267U (zh) * | 2010-09-10 | 2011-05-18 | 沈阳理工大学 | 一种平面自动抛光装置 |
CN103878667A (zh) * | 2014-03-23 | 2014-06-25 | 山西中电科新能源技术有限公司 | 多晶硅锭边料表面清理装置 |
CN203887666U (zh) * | 2014-05-12 | 2014-10-22 | 浙江华友电子有限公司 | 一种单晶或多晶硅料表面打磨装置 |
CN104942681A (zh) * | 2015-07-09 | 2015-09-30 | 江苏协鑫软控设备科技发展有限公司 | 打磨设备和打磨系统 |
CN206393384U (zh) * | 2016-12-30 | 2017-08-11 | 浙江晶鸿新能源科技有限公司 | 一种多晶硅锭边料表面清理装置 |
CN206445640U (zh) * | 2016-12-28 | 2017-08-29 | 江苏协鑫软控设备科技发展有限公司 | 打磨辊及打磨装置 |
-
2017
- 2017-09-21 CN CN201710857634.2A patent/CN107520725B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05277940A (ja) * | 1992-03-26 | 1993-10-26 | Mitsui High Tec Inc | 研削盤用電磁チャックの冷却構造 |
JP2002313761A (ja) * | 2002-02-28 | 2002-10-25 | Mitsubishi Materials Corp | ウェーハ研磨方法 |
CN201833267U (zh) * | 2010-09-10 | 2011-05-18 | 沈阳理工大学 | 一种平面自动抛光装置 |
CN103878667A (zh) * | 2014-03-23 | 2014-06-25 | 山西中电科新能源技术有限公司 | 多晶硅锭边料表面清理装置 |
CN203887666U (zh) * | 2014-05-12 | 2014-10-22 | 浙江华友电子有限公司 | 一种单晶或多晶硅料表面打磨装置 |
CN104942681A (zh) * | 2015-07-09 | 2015-09-30 | 江苏协鑫软控设备科技发展有限公司 | 打磨设备和打磨系统 |
CN206445640U (zh) * | 2016-12-28 | 2017-08-29 | 江苏协鑫软控设备科技发展有限公司 | 打磨辊及打磨装置 |
CN206393384U (zh) * | 2016-12-30 | 2017-08-11 | 浙江晶鸿新能源科技有限公司 | 一种多晶硅锭边料表面清理装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108516553A (zh) * | 2018-04-23 | 2018-09-11 | 亚洲硅业(青海)有限公司 | 一种去除多晶硅棒卡瓣的方法 |
CN108516553B (zh) * | 2018-04-23 | 2020-03-27 | 亚洲硅业(青海)股份有限公司 | 一种去除多晶硅棒卡瓣的方法 |
CN110385620A (zh) * | 2019-08-13 | 2019-10-29 | 江苏众鑫磁电有限公司 | 多晶硅打磨处理装置 |
CN110509139A (zh) * | 2019-08-13 | 2019-11-29 | 江苏众鑫磁电有限公司 | 多晶硅打磨处理装置 |
CN110385620B (zh) * | 2019-08-13 | 2024-05-28 | 江苏众鑫磁电有限公司 | 多晶硅打磨处理装置 |
CN110509139B (zh) * | 2019-08-13 | 2024-06-04 | 江苏众鑫磁电有限公司 | 多晶硅打磨处理装置 |
Also Published As
Publication number | Publication date |
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CN107520725B (zh) | 2022-09-30 |
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CB03 | Change of inventor or designer information |
Inventor after: Yin Changhao Inventor after: Chen Shirong Inventor before: Yin Changhao |
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Effective date of registration: 20230418 Address after: No. 28, West Industrial Park, Quyang Township, Donghai County, Lianyungang City, Jiangsu Province, 222000 Patentee after: Lianyungang Special Needs Intelligent Technology Co.,Ltd. Address before: 222300 Room 102, building 2, Qingyuan community, No. 104 Heping West Road, Donghai County, Lianyungang City, Jiangsu Province Patentee before: Yin Changhao |
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