CN107464862A - 一种N型AlGaN的生长方法 - Google Patents
一种N型AlGaN的生长方法 Download PDFInfo
- Publication number
- CN107464862A CN107464862A CN201710688681.9A CN201710688681A CN107464862A CN 107464862 A CN107464862 A CN 107464862A CN 201710688681 A CN201710688681 A CN 201710688681A CN 107464862 A CN107464862 A CN 107464862A
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- layers
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- type algan
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- 229910002704 AlGaN Inorganic materials 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000010410 layer Substances 0.000 claims abstract description 147
- 230000012010 growth Effects 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000002344 surface layer Substances 0.000 claims abstract description 27
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 22
- 239000010980 sapphire Substances 0.000 claims abstract description 22
- 238000001816 cooling Methods 0.000 claims abstract description 14
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 238000005336 cracking Methods 0.000 abstract description 4
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 abstract description 4
- 238000005546 reactive sputtering Methods 0.000 abstract description 4
- 230000000903 blocking effect Effects 0.000 abstract description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 90
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 36
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 9
- 229910021529 ammonia Inorganic materials 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 238000010792 warming Methods 0.000 description 8
- 230000031068 symbiosis, encompassing mutualism through parasitism Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 206010011376 Crepitations Diseases 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710688681.9A CN107464862B (zh) | 2017-08-13 | 2017-08-13 | 一种N型AlGaN的生长方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710688681.9A CN107464862B (zh) | 2017-08-13 | 2017-08-13 | 一种N型AlGaN的生长方法 |
Publications (2)
Publication Number | Publication Date |
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CN107464862A true CN107464862A (zh) | 2017-12-12 |
CN107464862B CN107464862B (zh) | 2018-12-28 |
Family
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Family Applications (1)
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CN201710688681.9A Expired - Fee Related CN107464862B (zh) | 2017-08-13 | 2017-08-13 | 一种N型AlGaN的生长方法 |
Country Status (1)
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CN (1) | CN107464862B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108922946A (zh) * | 2018-07-16 | 2018-11-30 | 厦门乾照光电股份有限公司 | 一种led结构及其制作方法 |
CN109244203A (zh) * | 2018-09-12 | 2019-01-18 | 华灿光电(苏州)有限公司 | 一种发光二极管的外延片及其制备方法 |
CN111029445A (zh) * | 2019-12-26 | 2020-04-17 | 福建兆元光电有限公司 | 一种提升倒装芯片亮度的外延片制备方法 |
CN113539786A (zh) * | 2020-04-17 | 2021-10-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | 硅基氮化镓外延结构及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005235911A (ja) * | 2004-02-18 | 2005-09-02 | Osaka Gas Co Ltd | GaN系化合物半導体受光素子 |
CN103165777A (zh) * | 2013-03-26 | 2013-06-19 | 合肥彩虹蓝光科技有限公司 | 具有梯形结构的n型插入层的led外延片及其生长方法 |
CN106783533A (zh) * | 2016-11-11 | 2017-05-31 | 上海芯元基半导体科技有限公司 | 含Al氮化物半导体结构及其外延生长方法 |
-
2017
- 2017-08-13 CN CN201710688681.9A patent/CN107464862B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005235911A (ja) * | 2004-02-18 | 2005-09-02 | Osaka Gas Co Ltd | GaN系化合物半導体受光素子 |
CN103165777A (zh) * | 2013-03-26 | 2013-06-19 | 合肥彩虹蓝光科技有限公司 | 具有梯形结构的n型插入层的led外延片及其生长方法 |
CN106783533A (zh) * | 2016-11-11 | 2017-05-31 | 上海芯元基半导体科技有限公司 | 含Al氮化物半导体结构及其外延生长方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108922946A (zh) * | 2018-07-16 | 2018-11-30 | 厦门乾照光电股份有限公司 | 一种led结构及其制作方法 |
CN109244203A (zh) * | 2018-09-12 | 2019-01-18 | 华灿光电(苏州)有限公司 | 一种发光二极管的外延片及其制备方法 |
CN111029445A (zh) * | 2019-12-26 | 2020-04-17 | 福建兆元光电有限公司 | 一种提升倒装芯片亮度的外延片制备方法 |
CN113539786A (zh) * | 2020-04-17 | 2021-10-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | 硅基氮化镓外延结构及其制备方法 |
CN113539786B (zh) * | 2020-04-17 | 2024-05-28 | 中国科学院苏州纳米技术与纳米仿生研究所 | 硅基氮化镓外延结构及其制备方法 |
Also Published As
Publication number | Publication date |
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CN107464862B (zh) | 2018-12-28 |
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Address after: 510651 No. 363, Changxin Road, Guangzhou, Guangdong, Tianhe District Patentee after: Institute of semiconductors, Guangdong Academy of Sciences Address before: 510651 No. 363, Changxin Road, Guangzhou, Guangdong, Tianhe District Patentee before: GUANGDONG INSTITUTE OF SEMICONDUCTOR INDUSTRIAL TECHNOLOGY |
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CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210909 Address after: 518000 room 1104, building 5, huameinian Plaza, Nanhai Avenue, Shenzhen, Guangdong Patentee after: SHENZHEN XIUYUAN ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 510651 No. 363, Changxin Road, Guangzhou, Guangdong, Tianhe District Patentee before: Institute of semiconductors, Guangdong Academy of Sciences |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181228 |
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CF01 | Termination of patent right due to non-payment of annual fee |