CN107464835A - 一种半导体功率器件及其终端结构 - Google Patents
一种半导体功率器件及其终端结构 Download PDFInfo
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- CN107464835A CN107464835A CN201710530888.3A CN201710530888A CN107464835A CN 107464835 A CN107464835 A CN 107464835A CN 201710530888 A CN201710530888 A CN 201710530888A CN 107464835 A CN107464835 A CN 107464835A
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- semiconductor
- power device
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 181
- 210000005056 cell body Anatomy 0.000 claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 239000004020 conductor Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 14
- 230000005669 field effect Effects 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 abstract description 30
- 239000011248 coating agent Substances 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 abstract description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 29
- 230000005684 electric field Effects 0.000 description 17
- 238000009826 distribution Methods 0.000 description 12
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 7
- 239000004642 Polyimide Substances 0.000 description 6
- 230000003139 buffering effect Effects 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 238000005253 cladding Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000001727 in vivo Methods 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710530888.3A CN107464835A (zh) | 2017-07-03 | 2017-07-03 | 一种半导体功率器件及其终端结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710530888.3A CN107464835A (zh) | 2017-07-03 | 2017-07-03 | 一种半导体功率器件及其终端结构 |
Publications (1)
Publication Number | Publication Date |
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CN107464835A true CN107464835A (zh) | 2017-12-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201710530888.3A Pending CN107464835A (zh) | 2017-07-03 | 2017-07-03 | 一种半导体功率器件及其终端结构 |
Country Status (1)
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CN (1) | CN107464835A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116544268A (zh) * | 2023-07-06 | 2023-08-04 | 通威微电子有限公司 | 一种半导体器件结构及其制作方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040056310A1 (en) * | 2002-09-19 | 2004-03-25 | Dean Probst | Termination structure incorporating insulator in a trench |
CN102044559A (zh) * | 2009-10-13 | 2011-05-04 | 三菱电机株式会社 | 半导体装置以及半导体装置的制造方法 |
US7999343B2 (en) * | 2005-09-02 | 2011-08-16 | Infineon Technologies Ag | Semiconductor component with a space-saving edge termination, and method for production of such component |
US8093676B2 (en) * | 2007-07-02 | 2012-01-10 | Infineon Technologies Austria Ag | Semiconductor component including an edge termination having a trench and method for producing |
CN103715238A (zh) * | 2013-12-30 | 2014-04-09 | 电子科技大学 | 一种超低比导通电阻的横向高压器件 |
-
2017
- 2017-07-03 CN CN201710530888.3A patent/CN107464835A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040056310A1 (en) * | 2002-09-19 | 2004-03-25 | Dean Probst | Termination structure incorporating insulator in a trench |
US7999343B2 (en) * | 2005-09-02 | 2011-08-16 | Infineon Technologies Ag | Semiconductor component with a space-saving edge termination, and method for production of such component |
US8093676B2 (en) * | 2007-07-02 | 2012-01-10 | Infineon Technologies Austria Ag | Semiconductor component including an edge termination having a trench and method for producing |
CN102044559A (zh) * | 2009-10-13 | 2011-05-04 | 三菱电机株式会社 | 半导体装置以及半导体装置的制造方法 |
CN103715238A (zh) * | 2013-12-30 | 2014-04-09 | 电子科技大学 | 一种超低比导通电阻的横向高压器件 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116544268A (zh) * | 2023-07-06 | 2023-08-04 | 通威微电子有限公司 | 一种半导体器件结构及其制作方法 |
CN116544268B (zh) * | 2023-07-06 | 2023-09-26 | 通威微电子有限公司 | 一种半导体器件结构及其制作方法 |
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Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: 620500 Fifth Floor, Area A, Tianfu Jingrong Center, Chengdu Science City, Chengdu, Sichuan Province Applicant after: Chengdu Pyle Miers Semiconductor Co. Ltd. Applicant after: Global energy Internet Institute, Inc. Applicant after: State Grid Corporation of China Applicant after: Electric Power Research Institute of State Grid Shandong Electric Power Company Address before: 620500 Fifth Floor, Area A, Tianfu Jingrong Center, Chengdu Science City, Chengdu, Sichuan Province Applicant before: Chengdu Pyle Miers Semiconductor Co. Ltd. Applicant before: Global energy Internet Institute, Inc. Applicant before: State Grid Corporation of China Applicant before: Electric Power Research Institute of State Grid Shandong Electric Power Company |
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CB02 | Change of applicant information | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171212 |
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RJ01 | Rejection of invention patent application after publication |