CN107342336B - 一种均一型多晶硅绒面的制备方法 - Google Patents
一种均一型多晶硅绒面的制备方法 Download PDFInfo
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- CN107342336B CN107342336B CN201710510322.4A CN201710510322A CN107342336B CN 107342336 B CN107342336 B CN 107342336B CN 201710510322 A CN201710510322 A CN 201710510322A CN 107342336 B CN107342336 B CN 107342336B
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- silicon wafer
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 40
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 68
- 239000010703 silicon Substances 0.000 claims abstract description 68
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 67
- 238000005260 corrosion Methods 0.000 claims abstract description 16
- 230000007797 corrosion Effects 0.000 claims abstract description 16
- 239000007788 liquid Substances 0.000 claims description 50
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 24
- 238000005406 washing Methods 0.000 claims description 22
- 238000002425 crystallisation Methods 0.000 claims description 19
- 230000008025 crystallization Effects 0.000 claims description 19
- 239000012528 membrane Substances 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 239000008367 deionised water Substances 0.000 claims description 17
- 229910021641 deionized water Inorganic materials 0.000 claims description 17
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 16
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 16
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 16
- 229920005591 polysilicon Polymers 0.000 claims description 16
- 238000005253 cladding Methods 0.000 claims description 15
- 239000006185 dispersion Substances 0.000 claims description 15
- 239000000243 solution Substances 0.000 claims description 13
- 238000010790 dilution Methods 0.000 claims description 12
- 239000012895 dilution Substances 0.000 claims description 12
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 10
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 8
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 claims description 8
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- 239000005457 ice water Substances 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 6
- -1 obtains mixed liquor Chemical compound 0.000 claims description 6
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 claims description 6
- 238000003756 stirring Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 238000004321 preservation Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 14
- 239000002253 acid Substances 0.000 abstract description 11
- 239000013078 crystal Substances 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000005530 etching Methods 0.000 abstract description 4
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical group [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 abstract description 2
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 229960002050 hydrofluoric acid Drugs 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000001291 vacuum drying Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910021426 porous silicon Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710510322.4A CN107342336B (zh) | 2017-06-28 | 2017-06-28 | 一种均一型多晶硅绒面的制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710510322.4A CN107342336B (zh) | 2017-06-28 | 2017-06-28 | 一种均一型多晶硅绒面的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN107342336A CN107342336A (zh) | 2017-11-10 |
CN107342336B true CN107342336B (zh) | 2018-12-07 |
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CN201710510322.4A Active CN107342336B (zh) | 2017-06-28 | 2017-06-28 | 一种均一型多晶硅绒面的制备方法 |
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CN (1) | CN107342336B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109192818A (zh) * | 2018-09-08 | 2019-01-11 | 佛山皖和新能源科技有限公司 | 一种均匀化学腐蚀制备多晶硅绒面的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104051573A (zh) * | 2014-06-17 | 2014-09-17 | 徐州工业职业技术学院 | 一种硅片掩膜制绒工艺 |
JP2015038244A (ja) * | 2013-08-19 | 2015-02-26 | コリア アトミック エナジー リサーチ インスティチュート | 電気化学的なシリコン膜の製造方法 |
US9441119B2 (en) * | 2011-03-28 | 2016-09-13 | Intermolecular, Inc. | Sol-gel transition control of coatings by addition of solidifiers for conformal coatings on textured glass |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2495771A1 (en) * | 2009-10-28 | 2012-09-05 | Hitachi Chemical Company, Ltd. | Solar cell |
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2017
- 2017-06-28 CN CN201710510322.4A patent/CN107342336B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9441119B2 (en) * | 2011-03-28 | 2016-09-13 | Intermolecular, Inc. | Sol-gel transition control of coatings by addition of solidifiers for conformal coatings on textured glass |
JP2015038244A (ja) * | 2013-08-19 | 2015-02-26 | コリア アトミック エナジー リサーチ インスティチュート | 電気化学的なシリコン膜の製造方法 |
CN104051573A (zh) * | 2014-06-17 | 2014-09-17 | 徐州工业职业技术学院 | 一种硅片掩膜制绒工艺 |
Non-Patent Citations (1)
Title |
---|
29Si NMR Relaxation of Silicated Nanoparticles in Tetraethoxysilane-Tetrapropylammonium Hydroxide-Water System (TEOS-TPAOH-H2O);Mohamed Haouas et al;《The Journal of physical chemistry C》;20090529;全文 * |
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Publication number | Publication date |
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CN107342336A (zh) | 2017-11-10 |
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Effective date of registration: 20181026 Address after: 362000 No. 1 building, hillside Street Industrial Zone, Quangang District, Quanzhou, Fujian 1 Applicant after: Quanzhou spring a science and Technology Co., Ltd. Address before: 213102 216-503, green fruit lane, Zhong Lou District, Changzhou, Jiangsu Applicant before: Changzhou Xin Bin Textile Co., Ltd. |
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Effective date of registration: 20210326 Address after: 226600 Jiqing industrial concentration area, Duntou Town, Hai'an City, Nantong City, Jiangsu Province Patentee after: NANTONG MEIMING CHINLON Co.,Ltd. Address before: 362000 No. 1 building, hillside Street Industrial Zone, Quangang District, Quanzhou, Fujian 1 Patentee before: One Science and Technology Ltd. of Quanzhou spring |
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