CN107338409A - 可调控磁场电弧离子镀制备氮基硬质涂层的工艺方法 - Google Patents
可调控磁场电弧离子镀制备氮基硬质涂层的工艺方法 Download PDFInfo
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- CN107338409A CN107338409A CN201710615549.5A CN201710615549A CN107338409A CN 107338409 A CN107338409 A CN 107338409A CN 201710615549 A CN201710615549 A CN 201710615549A CN 107338409 A CN107338409 A CN 107338409A
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims abstract description 65
- 230000008569 process Effects 0.000 title claims abstract description 51
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 44
- 238000007733 ion plating Methods 0.000 title claims abstract description 25
- 238000000576 coating method Methods 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 73
- 239000011248 coating agent Substances 0.000 claims abstract description 61
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims abstract description 5
- 238000005530 etching Methods 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 8
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- 238000005422 blasting Methods 0.000 claims description 6
- 238000004062 sedimentation Methods 0.000 claims description 6
- 238000002604 ultrasonography Methods 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 239000012459 cleaning agent Substances 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 239000011247 coating layer Substances 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 12
- 229910010037 TiAlN Inorganic materials 0.000 description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 8
- 238000002389 environmental scanning electron microscopy Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 229910001311 M2 high speed steel Inorganic materials 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000002242 deionisation method Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 230000035772 mutation Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- 208000005374 Poisoning Diseases 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 230000003026 anti-oxygenic effect Effects 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000009498 subcoating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710615549.5A CN107338409B (zh) | 2017-07-26 | 2017-07-26 | 可调控磁场电弧离子镀制备氮基硬质涂层的工艺方法 |
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CN201710615549.5A CN107338409B (zh) | 2017-07-26 | 2017-07-26 | 可调控磁场电弧离子镀制备氮基硬质涂层的工艺方法 |
Publications (2)
Publication Number | Publication Date |
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CN107338409A true CN107338409A (zh) | 2017-11-10 |
CN107338409B CN107338409B (zh) | 2020-02-11 |
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CN201710615549.5A Active CN107338409B (zh) | 2017-07-26 | 2017-07-26 | 可调控磁场电弧离子镀制备氮基硬质涂层的工艺方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112048702A (zh) * | 2020-09-10 | 2020-12-08 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种航空发动机零部件涂层的制备方法 |
CN112144012A (zh) * | 2019-06-28 | 2020-12-29 | 陕西航天时代导航设备有限公司 | 一种GT35球碗零件内表面沉积TiN厚膜的工艺方法 |
CN113930823A (zh) * | 2020-07-13 | 2022-01-14 | 无锡连枝横科技有限公司 | 一种用于提高镁铝钛合金表面耐磨耐腐蚀的涂装工艺 |
CN115044873A (zh) * | 2022-06-28 | 2022-09-13 | 东莞市华升真空镀膜科技有限公司 | 涂层结构的制备方法 |
CN115125493A (zh) * | 2021-03-24 | 2022-09-30 | 宝山钢铁股份有限公司 | 一种碳钢表面金属耐蚀涂层及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001158958A (ja) * | 1999-11-30 | 2001-06-12 | Kobe Steel Ltd | アークイオンプレーティング装置 |
CN101289737A (zh) * | 2007-04-18 | 2008-10-22 | 王殿儒 | 一种圆形阴极表面弧斑受程控复合磁场控制的蒸发离化源 |
CN101698933A (zh) * | 2009-10-30 | 2010-04-28 | 华南理工大学 | 一种多元Ti-Al-N系纳米复合多层涂层及其制备方法 |
CN102676991A (zh) * | 2012-06-13 | 2012-09-19 | 东莞理工学院 | Pvd技术制备超硬纳米复合多层涂层的工艺 |
CN104911539A (zh) * | 2015-06-03 | 2015-09-16 | 陕西航天导航设备有限公司 | 氮化钛膜制备方法 |
-
2017
- 2017-07-26 CN CN201710615549.5A patent/CN107338409B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001158958A (ja) * | 1999-11-30 | 2001-06-12 | Kobe Steel Ltd | アークイオンプレーティング装置 |
CN101289737A (zh) * | 2007-04-18 | 2008-10-22 | 王殿儒 | 一种圆形阴极表面弧斑受程控复合磁场控制的蒸发离化源 |
CN101698933A (zh) * | 2009-10-30 | 2010-04-28 | 华南理工大学 | 一种多元Ti-Al-N系纳米复合多层涂层及其制备方法 |
CN102676991A (zh) * | 2012-06-13 | 2012-09-19 | 东莞理工学院 | Pvd技术制备超硬纳米复合多层涂层的工艺 |
CN104911539A (zh) * | 2015-06-03 | 2015-09-16 | 陕西航天导航设备有限公司 | 氮化钛膜制备方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112144012A (zh) * | 2019-06-28 | 2020-12-29 | 陕西航天时代导航设备有限公司 | 一种GT35球碗零件内表面沉积TiN厚膜的工艺方法 |
CN113930823A (zh) * | 2020-07-13 | 2022-01-14 | 无锡连枝横科技有限公司 | 一种用于提高镁铝钛合金表面耐磨耐腐蚀的涂装工艺 |
CN112048702A (zh) * | 2020-09-10 | 2020-12-08 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种航空发动机零部件涂层的制备方法 |
CN112048702B (zh) * | 2020-09-10 | 2022-07-01 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种航空发动机零部件涂层的制备方法 |
CN115125493A (zh) * | 2021-03-24 | 2022-09-30 | 宝山钢铁股份有限公司 | 一种碳钢表面金属耐蚀涂层及其制备方法 |
CN115125493B (zh) * | 2021-03-24 | 2023-10-13 | 宝山钢铁股份有限公司 | 一种碳钢表面金属耐蚀涂层及其制备方法 |
CN115044873A (zh) * | 2022-06-28 | 2022-09-13 | 东莞市华升真空镀膜科技有限公司 | 涂层结构的制备方法 |
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CN107338409B (zh) | 2020-02-11 |
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Effective date of registration: 20240605 Address after: Room 102, No. 63-71 Qixing Street, Shenbei New District, Shenyang City, Liaoning Province, 110135 Patentee after: SHENYANG LEBEI VACUUM TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: SHENYANG VLEAD VACUUM TECHNOLOGY Co.,Ltd. Address before: No.11, Wenhua Road, Sanxiang, Heping District, Shenyang City, Liaoning Province Patentee before: Northeastern University Country or region before: China Patentee before: SHENYANG VLEAD VACUUM TECHNOLOGY Co.,Ltd. |