CN107210180B - 具有改善的rf返回的基板支撑件 - Google Patents

具有改善的rf返回的基板支撑件 Download PDF

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Publication number
CN107210180B
CN107210180B CN201680009239.2A CN201680009239A CN107210180B CN 107210180 B CN107210180 B CN 107210180B CN 201680009239 A CN201680009239 A CN 201680009239A CN 107210180 B CN107210180 B CN 107210180B
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China
Prior art keywords
substrate support
substrate
disposed
support
conductive element
Prior art date
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CN201680009239.2A
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English (en)
Chinese (zh)
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CN107210180A (zh
Inventor
阿拉维德·米亚尔·卡马斯
蔡振雄
贾勒帕里·拉维
松下智治
雨·常
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
CN201680009239.2A 2015-02-13 2016-02-11 具有改善的rf返回的基板支撑件 Active CN107210180B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562116218P 2015-02-13 2015-02-13
US62/116,218 2015-02-13
US15/019,573 US10134615B2 (en) 2015-02-13 2016-02-09 Substrate support with improved RF return
US15/019,573 2016-02-09
PCT/US2016/017452 WO2016130744A1 (en) 2015-02-13 2016-02-11 Substrate support with improved rf return

Publications (2)

Publication Number Publication Date
CN107210180A CN107210180A (zh) 2017-09-26
CN107210180B true CN107210180B (zh) 2019-12-13

Family

ID=56615690

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680009239.2A Active CN107210180B (zh) 2015-02-13 2016-02-11 具有改善的rf返回的基板支撑件

Country Status (7)

Country Link
US (1) US10134615B2 (enExample)
JP (1) JP6843752B2 (enExample)
KR (1) KR102537310B1 (enExample)
CN (1) CN107210180B (enExample)
SG (1) SG11201706020QA (enExample)
TW (1) TWI691014B (enExample)
WO (1) WO2016130744A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10325790B2 (en) * 2016-04-29 2019-06-18 Applied Materials, Inc. Methods and apparatus for correcting substrate deformity
JP6683575B2 (ja) * 2016-09-01 2020-04-22 東京エレクトロン株式会社 プラズマ処理装置
JP6762184B2 (ja) * 2016-09-26 2020-09-30 株式会社Ｓｃｒｅｅｎホールディングス 回収配管洗浄方法および基板処理装置
CN111326387B (zh) * 2018-12-17 2023-04-21 中微半导体设备(上海)股份有限公司 一种电容耦合等离子体刻蚀设备
CN111326389B (zh) * 2018-12-17 2023-06-16 中微半导体设备(上海)股份有限公司 一种电容耦合等离子体刻蚀设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101242702A (zh) * 2007-01-30 2008-08-13 应用材料股份有限公司 具有采用vhf源的离子分布均匀性控制器的等离子体反应器
CN102484063A (zh) * 2009-08-31 2012-05-30 朗姆研究公司 射频(rf)接地返回装置
CN103650110A (zh) * 2011-06-30 2014-03-19 应用材料公司 具有基板加热器及对称rf回路的基板支撑件
CN103999193A (zh) * 2011-10-17 2014-08-20 诺发系统公司 在衬底处理室中寄生等离子体的机械抑制
CN104205319A (zh) * 2012-03-30 2014-12-10 应用材料公司 具有射频(rf)回程路径的基板支撑件

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020022403A1 (en) * 1999-08-06 2002-02-21 Wing L. Cheng Connectors for an eletrostatic chuck
JP3718093B2 (ja) * 2000-01-20 2005-11-16 ローム株式会社 半導体製造装置
US7534301B2 (en) * 2004-09-21 2009-05-19 Applied Materials, Inc. RF grounding of cathode in process chamber
US7354288B2 (en) * 2005-06-03 2008-04-08 Applied Materials, Inc. Substrate support with clamping electrical connector
KR101006848B1 (ko) * 2008-05-28 2011-01-14 주식회사 코미코 기판 지지 장치 및 이를 포함하는 기판 처리 장치
KR20100004857A (ko) * 2008-07-03 2010-01-13 주성엔지니어링(주) 건식 에칭 장치
US20100000684A1 (en) 2008-07-03 2010-01-07 Jong Yong Choi Dry etching apparatus
SG192967A1 (en) 2011-03-04 2013-09-30 Novellus Systems Inc Hybrid ceramic showerhead
JP2012234951A (ja) * 2011-04-28 2012-11-29 Mitsubishi Heavy Ind Ltd 真空処理装置およびその電極面間隔調整方法
US9404176B2 (en) 2012-06-05 2016-08-02 Applied Materials, Inc. Substrate support with radio frequency (RF) return path

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101242702A (zh) * 2007-01-30 2008-08-13 应用材料股份有限公司 具有采用vhf源的离子分布均匀性控制器的等离子体反应器
CN101242704A (zh) * 2007-01-30 2008-08-13 应用材料股份有限公司 具有可变高度接地回路的等离子体反应器中处理工件方法
CN102484063A (zh) * 2009-08-31 2012-05-30 朗姆研究公司 射频(rf)接地返回装置
CN103650110A (zh) * 2011-06-30 2014-03-19 应用材料公司 具有基板加热器及对称rf回路的基板支撑件
CN103999193A (zh) * 2011-10-17 2014-08-20 诺发系统公司 在衬底处理室中寄生等离子体的机械抑制
CN104205319A (zh) * 2012-03-30 2014-12-10 应用材料公司 具有射频(rf)回程路径的基板支撑件

Also Published As

Publication number Publication date
KR102537310B1 (ko) 2023-05-25
SG11201706020QA (en) 2017-09-28
WO2016130744A1 (en) 2016-08-18
TWI691014B (zh) 2020-04-11
US20160240426A1 (en) 2016-08-18
TW201703182A (zh) 2017-01-16
US10134615B2 (en) 2018-11-20
CN107210180A (zh) 2017-09-26
JP2018508994A (ja) 2018-03-29
KR20170117510A (ko) 2017-10-23
JP6843752B2 (ja) 2021-03-17

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