CN107111324B - 低压力波动流动控制装置及方法 - Google Patents

低压力波动流动控制装置及方法 Download PDF

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Publication number
CN107111324B
CN107111324B CN201580064737.2A CN201580064737A CN107111324B CN 107111324 B CN107111324 B CN 107111324B CN 201580064737 A CN201580064737 A CN 201580064737A CN 107111324 B CN107111324 B CN 107111324B
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China
Prior art keywords
flow
liquid
pump
pressure
controller
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CN201580064737.2A
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English (en)
Chinese (zh)
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CN107111324A (zh
Inventor
B·P·拜尔
L·S·C·陈
F·K·厄赖费杰
D·V·罗伊鲍尔
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Versum Materials US LLC
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Versum Materials US LLC
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/29—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/49—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/50—Circulation mixers, e.g. wherein at least part of the mixture is discharged from and reintroduced into a receptacle
    • B01F25/53—Circulation mixers, e.g. wherein at least part of the mixture is discharged from and reintroduced into a receptacle in which the mixture is discharged from and reintroduced into a receptacle through a recirculation tube, into which an additional component is introduced
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/181—Preventing generation of dust or dirt; Sieves; Filters
    • B01F35/187—Preventing generation of dust or dirt; Sieves; Filters using filters in mixers, e.g. during venting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2111—Flow rate
    • B01F35/21112—Volumetric flow rate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2213—Pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0688—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by combined action on throttling means and flow sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Flow Control (AREA)
  • Accessories For Mixers (AREA)
CN201580064737.2A 2014-10-08 2015-10-08 低压力波动流动控制装置及方法 Active CN107111324B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462061538P 2014-10-08 2014-10-08
US62/061,538 2014-10-08
PCT/US2015/054698 WO2016057797A1 (en) 2014-10-08 2015-10-08 Low pressure fluctuation flow control apparatus and method

Publications (2)

Publication Number Publication Date
CN107111324A CN107111324A (zh) 2017-08-29
CN107111324B true CN107111324B (zh) 2021-09-24

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CN201580064737.2A Active CN107111324B (zh) 2014-10-08 2015-10-08 低压力波动流动控制装置及方法

Country Status (8)

Country Link
US (1) US11266959B2 (enExample)
EP (1) EP3204733B1 (enExample)
JP (1) JP6669737B2 (enExample)
KR (1) KR102013906B1 (enExample)
CN (1) CN107111324B (enExample)
SG (1) SG11201702586XA (enExample)
TW (1) TWI595339B (enExample)
WO (1) WO2016057797A1 (enExample)

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US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
CN107170501B (zh) * 2017-05-26 2018-02-23 中国核动力研究设计院 一种抑制汽液两相自然循环系统流动不稳定的方法
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
JP6849574B2 (ja) * 2017-11-07 2021-03-24 株式会社神戸製鋼所 混合装置
US10451461B2 (en) * 2018-01-12 2019-10-22 Price Industries Limited Venturi air flow sensor and control system
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US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
JP7544737B2 (ja) 2019-03-26 2024-09-03 バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー 脱気装置、脱気システム及びそれらを使用する方法
CN110238708B (zh) * 2019-06-20 2024-01-23 中国工程物理研究院激光聚变研究中心 一种磁流变抛光机床磁流变液循环系统
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JP7432923B2 (ja) 2020-08-21 2024-02-19 伸和コントロールズ株式会社 流量制御装置及び方法、並びに、流体供給システム
TWI809498B (zh) * 2020-09-18 2023-07-21 美商慧盛材料美國責任有限公司 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法
CN112808054A (zh) * 2020-12-30 2021-05-18 常州市深水城北污水处理有限公司 一种水流式搅拌器
KR102869665B1 (ko) * 2021-07-08 2025-10-16 주식회사 제우스 식각 장치 및 그 제어 방법
US20230381725A1 (en) * 2022-05-31 2023-11-30 Exel Industries Mixing plant with intermediate purge and associated control method
FR3138326A1 (fr) * 2022-08-01 2024-02-02 Exel Industries Installation de mélange à purge intermédiaire et procédé de commande associé
WO2024158784A1 (en) * 2023-01-23 2024-08-02 Equilibar, Llc Pumpless fluid delivery method and apparatus
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods

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Also Published As

Publication number Publication date
JP2017531265A (ja) 2017-10-19
KR102013906B1 (ko) 2019-08-23
US20170259226A1 (en) 2017-09-14
WO2016057797A1 (en) 2016-04-14
US11266959B2 (en) 2022-03-08
SG11201702586XA (en) 2017-04-27
KR20170069254A (ko) 2017-06-20
EP3204733A4 (en) 2018-07-25
CN107111324A (zh) 2017-08-29
EP3204733A1 (en) 2017-08-16
EP3204733B1 (en) 2022-05-11
TWI595339B (zh) 2017-08-11
TW201626126A (zh) 2016-07-16
JP6669737B2 (ja) 2020-03-18

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