CN107104362B - 半导体激光二极管及其制造方法 - Google Patents
半导体激光二极管及其制造方法 Download PDFInfo
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- CN107104362B CN107104362B CN201710223119.9A CN201710223119A CN107104362B CN 107104362 B CN107104362 B CN 107104362B CN 201710223119 A CN201710223119 A CN 201710223119A CN 107104362 B CN107104362 B CN 107104362B
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- 239000004065 semiconductor Substances 0.000 title claims description 15
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- 238000002310 reflectometry Methods 0.000 claims abstract description 13
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- 238000001039 wet etching Methods 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 125
- 238000000151 deposition Methods 0.000 claims description 23
- 239000011247 coating layer Substances 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 16
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000002161 passivation Methods 0.000 claims description 5
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims description 2
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- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/1203—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers over only a part of the length of the active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/125—Distributed Bragg reflector [DBR] lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34313—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
- H01S5/0287—Facet reflectivity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/1231—Grating growth or overgrowth details
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102016000018622 | 2016-02-23 | ||
ITUB2016A000994A ITUB20160994A1 (it) | 2016-02-23 | 2016-02-23 | Diodo laser a semiconduttore e procedimento per la sua realizzazione |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107104362A CN107104362A (zh) | 2017-08-29 |
CN107104362B true CN107104362B (zh) | 2021-01-12 |
Family
ID=56027051
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710223119.9A Active CN107104362B (zh) | 2016-02-23 | 2017-02-23 | 半导体激光二极管及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10305256B2 (zh) |
EP (1) | EP3211736B1 (zh) |
CN (1) | CN107104362B (zh) |
IT (1) | ITUB20160994A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022506323A (ja) * | 2018-11-05 | 2022-01-17 | 華為技術有限公司 | 外部反射戻り光耐性レーザ |
US11876343B2 (en) | 2021-05-18 | 2024-01-16 | Trumpf Photonics, Inc. | Laser diode packaging platforms |
US11557874B2 (en) | 2021-05-18 | 2023-01-17 | Trumpf Photonics, Inc. | Double-sided cooling of laser diodes |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101079532A (zh) * | 2006-05-25 | 2007-11-28 | 中国科学院半导体研究所 | 波长为852nm的分布反馈激光器的结构和制作方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000012954A (ja) * | 1998-06-19 | 2000-01-14 | Sony Corp | 半導体発光素子およびその製造方法 |
US6963597B2 (en) * | 2000-04-28 | 2005-11-08 | Photodigm, Inc. | Grating-outcoupled surface-emitting lasers |
US6636547B2 (en) * | 2000-04-28 | 2003-10-21 | Photodigm, Inc. | Multiple grating-outcoupled surface-emitting lasers |
JP2001320124A (ja) * | 2000-05-09 | 2001-11-16 | Nec Corp | 変調器集積化光源及び光通信用モジュール |
GB0027895D0 (en) * | 2000-11-15 | 2000-12-27 | Bristol University | High order deep-etch bragg reflectors for short wavelength lasers |
US20030063645A1 (en) * | 2001-09-28 | 2003-04-03 | The Furukawa Electric Co., Ltd. | Semiconductor laser device and method for suppressing fabry perot oscillations |
JP2003152274A (ja) * | 2001-11-13 | 2003-05-23 | Furukawa Electric Co Ltd:The | 半導体レーザ装置、半導体レーザモジュールおよびこれを用いたラマン増幅器 |
WO2005025017A2 (en) * | 2003-09-03 | 2005-03-17 | Binoptics Corporation | Single longitudinal mode laser diode |
JP3886972B2 (ja) * | 2004-02-18 | 2007-02-28 | アンリツ株式会社 | 半導体レーザ |
JP4652061B2 (ja) * | 2005-01-17 | 2011-03-16 | 富士通株式会社 | 半導体レーザ |
JP2008060472A (ja) * | 2006-09-01 | 2008-03-13 | Sumitomo Electric Ind Ltd | 半導体レーザ及びその製造方法 |
FR2917910B1 (fr) * | 2007-06-22 | 2010-06-11 | Thales Sa | Dispositif de lumiere optimisee par l'utilisation de materiaux artificiels et procede de fabrication associe |
US20100290489A1 (en) * | 2009-05-15 | 2010-11-18 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | electro-absorption modulated laser (eml) assembly having a 1/4 wavelength phase shift located in the forward portion of the distributed feedback (dfb) of the eml assembly, and a method |
EP2337168B1 (de) * | 2009-12-17 | 2019-12-25 | Forschungsverbund Berlin e.V. | Oberflächenemittierende Laserstrahlquelle mit zwei Kavitäten |
US8737446B2 (en) * | 2010-03-25 | 2014-05-27 | Sumitomo Electric Industries, Ltd. | Semiconductor laser |
US8908734B2 (en) * | 2012-05-17 | 2014-12-09 | Finisar Corporation | Directly modulated laser for PON applications |
CN103346477A (zh) * | 2013-06-28 | 2013-10-09 | 中国科学院半导体研究所 | 一种侧向耦合平面波导光栅外腔激光器 |
US9077144B2 (en) * | 2013-09-30 | 2015-07-07 | Jds Uniphase Corporation | MOPA laser source with wavelength control |
CN103715607B (zh) * | 2013-12-19 | 2016-06-01 | 中国科学院半导体研究所 | 一种可调谐衬底发射量子级联激光器阵列器件 |
US9209605B1 (en) | 2015-01-23 | 2015-12-08 | Lumentum Operations Llc | Laser diode subassembly and method of generating light |
-
2016
- 2016-02-23 IT ITUB2016A000994A patent/ITUB20160994A1/it unknown
-
2017
- 2017-02-22 EP EP17157316.5A patent/EP3211736B1/en active Active
- 2017-02-22 US US15/439,713 patent/US10305256B2/en active Active
- 2017-02-23 CN CN201710223119.9A patent/CN107104362B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101079532A (zh) * | 2006-05-25 | 2007-11-28 | 中国科学院半导体研究所 | 波长为852nm的分布反馈激光器的结构和制作方法 |
Non-Patent Citations (3)
Title |
---|
"高频CO2激光脉冲写入的新型长周期光纤光栅及其在光通信中的应用";饶云江;《通信学报》;20041025;全文 * |
Perera, C. S."Excitation of bound plasmons along nanoscale stripe waveguides: a comparison of end and grating coupling techniques".《OPTICS EXPRESS》.2015, * |
Yu, Nanfang."Designer spoof surface plasmon structures collimate terahertz laser beams".《NATURE MATERIALS 》.2010, * |
Also Published As
Publication number | Publication date |
---|---|
US10305256B2 (en) | 2019-05-28 |
EP3211736A1 (en) | 2017-08-30 |
US20170244221A1 (en) | 2017-08-24 |
ITUB20160994A1 (it) | 2017-08-23 |
CN107104362A (zh) | 2017-08-29 |
EP3211736B1 (en) | 2022-05-11 |
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Effective date of registration: 20230531 Address after: Torino Patentee after: Huiju Photonics Italy Co.,Ltd. Address before: Turin Patentee before: Prima Electro S.P.A. |
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Address after: Torino Patentee after: Guke Photonics Italy Ltd. Country or region after: Italy Address before: Torino Patentee before: Huiju Photonics Italy Co.,Ltd. Country or region before: Italy |