CN107046081B - A kind of anti-light furnace that declines - Google Patents
A kind of anti-light furnace that declines Download PDFInfo
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- CN107046081B CN107046081B CN201710131975.1A CN201710131975A CN107046081B CN 107046081 B CN107046081 B CN 107046081B CN 201710131975 A CN201710131975 A CN 201710131975A CN 107046081 B CN107046081 B CN 107046081B
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 57
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 45
- 239000010703 silicon Substances 0.000 claims abstract description 45
- 238000001816 cooling Methods 0.000 claims abstract description 31
- 238000005286 illumination Methods 0.000 claims abstract description 26
- 230000000694 effects Effects 0.000 claims abstract description 13
- 239000000498 cooling water Substances 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 230000005611 electricity Effects 0.000 claims description 17
- 230000017525 heat dissipation Effects 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 239000000523 sample Substances 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000003990 capacitor Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 238000004021 metal welding Methods 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims description 3
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 10
- 239000001257 hydrogen Substances 0.000 abstract description 10
- 230000003760 hair shine Effects 0.000 abstract description 6
- 238000002161 passivation Methods 0.000 abstract description 5
- 206010037660 Pyrexia Diseases 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 18
- 239000012535 impurity Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 10
- 230000006872 improvement Effects 0.000 description 9
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 8
- 230000007547 defect Effects 0.000 description 7
- 235000010675 chips/crisps Nutrition 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000003750 conditioning effect Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 230000001012 protector Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- 241000720974 Protium Species 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XGCTUKUCGUNZDN-UHFFFAOYSA-N [B].O=O Chemical compound [B].O=O XGCTUKUCGUNZDN-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
The present invention discloses a kind of anti-light furnace that declines, including furnace cradle and multiple constant-current sources, furnace cradle is equipped with the conveying device of circulation conveying silicon wafer, furnace cradle is successively arranged preheating zone, area of illumination and cooling zone along the conveying device feeding end to discharge end, the surface of area of illumination is equipped with the LED lamplight that several groups are arranged side by side and shines mould group, every group of LED lamplight is made of according to mould group multiple LED light bars with water cooling effect, and each LED light bar is by a constant-current source independent control.One constant-current source independent control, one LED light bar while so that LED light bar is had superelevation intensity of illumination, and can control the temperature of its fever, LED light bar made to work under a stationary temperature.During silicon wafer enters this anti-light furnace that declines, by multiple groups LED lamplight according to the strong illumination of mould group, silicon wafer hydrogen passivation effect is obvious.
Description
Technical field
The present invention relates to photovoltaic cell hydrogen to be passivated field, in particular to a kind of anti-light furnace that declines.
Background technique
Solar energy generation technology is one of currently the most important ones renewable energy technologies.Instantly cost for solar power generation is still
Higher than traditional energy, its large-scale application is constrained.For this purpose, industrial circle and scientific circles have been devoted to improve solar battery
Photoelectric conversion efficiency, reduce solar battery manufacturing cost.
Solar power generation is the photovoltaic effect based on semiconductor material.P-type semiconductor and N-type semiconductor contact to form PN
Knot, generates powerful internal electric field.One hole of electronics that excitation generates when light irradiates semiconductor is separated by electric field separates
Electrons and holes are diffused into surface in semiconductor substrate and are collected by electrode, to externally provide electric energy.Therefore solar battery
Propose two most important requirements to the semiconductor material as matrix: high-purity and height is complete.It is high-purity to refer to semiconductor material
In impurity it is few；The high perfection of lattice for completely referring to semiconductor material is high.This is because the impurity and lattice in semiconductor lack
The sunken compound consume of electrons and holes that illumination can be made to generate causes the carrier quantity being collected decline to make solar battery
Photoelectric conversion efficiency reduce.
It is divided by semiconductor material, solar battery can be divided into crystal silicon solar energy battery, compound solar cell, have
Machine solar battery etc., wherein crystal silicon solar energy battery is the solar battery of current most mainstream.This is because silicon crystal
Caused by excellent characteristics, one of them critically important feature is exactly the two easy to accomplish high-purity and high complete requirements of silicon crystal,
Such as the silicon crystal purity for manufacturing solar battery is up to 69 or more；It is easy to prepare the silicon of monocrystal (although polycrystal
Silicon be also applied to manufacture solar battery).
Even so, minimal amount of impurity and defect still produce significant shadow to the performance of solar battery in silicon crystal
It rings, or even constrains further increasing for battery efficiency.Impurity in silicon crystal is in addition to one boron of dopant and phosphorus that deliberately mix
Except, it further include that (wherein boron and oxygen will form boron oxygen complex to the light-element impurities such as oxygen, carbon, nitrogen, it has one hole of electronics
High composite reactive) and the transition metal impurities such as iron, brill, nickel, chromium, copper.
The defects of silicon crystal includes the silicon suspension that crystal boundary, dislocation and plane of crystal are particularly related to outside intrinsic point defects
Key etc..These impurity and defect become " killer " in one hole of light induced electron, significantly reduce the service life of minority carrier to
Reduce the transfer efficiency of solar battery.
Protium in crystalline silicon is to solar battery important role.Hydrogen atom in silicon is lived with very strong reaction
Property, it can be with light-element impurities and its compound precursor reactant；With foreign atom boron, phosphorus reaction；It is reacted with transition metal impurity；With
Silicon dangling bonds combine, and are enriched in plane of crystal, crystal boundary, dislocation region；Even hydrogen molecule etc. is formed with other atomic reaction of hydrogen.Cause
This can use the reacting to be passivated the composite reactive in these complex centres of hydrogen atom and other impurities and defect, improve silicon crystal
The service life of middle minority carrier.
According to disclosed document report, the method that hydrogen atom is introduced in silicon crystal is for example following:
(1) plasma reinforced chemical vapour deposition method (PECVD) cvd nitride is utilized in solar battery manufacturing process
Silicon thin film.The hydrogen atom being rich in silicon nitride film is diffused into the interface of silicon crystal, the silicon dangling bonds being passivated on interface, significantly
Reduce the recombination-rate surface of silicon crystal.
(2) hydrogen plasma process.By being immersed in hydrogen plasma hydrogen atom can be introduced in the near surface of silicon crystal.
Either cvd nitride silicon thin film or hydrogen plasma process, but these methods the problem is that: can only be close in silicon crystal
Surface layer (usually less than several microns) introduces hydrogen, and can not introduce the hydrogen atom of high concentration in the base, so hydrogen atom is to the sun
The passivation of impurity and defect inside energy cell matrix is very faint.
How the hydrogen atom that solar battery matrix in introduces higher concentration is realized, maximumlly using it in matrix
The passivation of impurity and defect.Therefore the hydrogen of nonequilibrium carrier is passivated production method, for improving turning for solar battery
Efficiency is changed to be of great significance.
Had according to the production method of nonequilibrium carrier: photo-thermal method, electrical pumping method.
Therefore a kind of high-heat conductivity and large-power integrated LED lamp is developed, for the equipment of photo-thermal method, can effectively inhibits electricity
Pond piece light decay.Transfer efficiency for improving solar battery is of great significance.
Summary of the invention
The purpose of the present invention is in view of the above drawbacks of the prior art, provide a kind of anti-light furnace that declines.High-heat conductivity and large-power collection
Accepted way of doing sth LED light, it is effective that cell piece light decay is inhibited to be welded on heat dissipation metal water tank using the metallic circuit of high-powered LED lamp
The mode on surface takes away rapidly the thermal energy of heat dissipation metal water tank by the water in heat dissipation metal water tank, realizes LED rapid cooling,
To reach higher output power.
For the drawbacks described above for solving the prior art, present invention provide the technical scheme that a kind of anti-light furnace that declines, including furnace branch
Frame and multiple constant-current sources, the furnace cradle are equipped with the conveying device of circulation conveying silicon wafer, and the furnace cradle is filled along the conveying
It sets feeding end to discharge end and is successively arranged preheating zone, area of illumination and cooling zone, the surface of the area of illumination is equipped with several groups simultaneously
The LED lamplight of row's setting shines mould group, and LED lamplight described in every group is made of according to mould group multiple LED light bars with water cooling effect, often
A LED light bar is by a constant-current source independent control.
As a kind of improvement of the anti-light furnace that declines of the present invention, the position that the furnace cradle is located at the area of illumination is equipped with furnace chamber,
Multiple air holes are equipped at intervals on the cavity inner sidewall of the furnace chamber, the cavity of resorption of the furnace chamber is equipped with assisted heating device, the furnace
The surface of chamber and the LED lamplight are separated according to the partition between mould group using light transmission.
As a kind of improvement of the anti-light furnace that declines of the present invention, the conveying device includes that the rolling of furnace cradle left and right ends is arranged in
Cylinder, one of them described roller are driven by motor, and two rollers use metal net shaped conveying band connection, described metal net shaped
Conveyer belt drives silicon wafer successively by preheating zone, area of illumination and cooling zone, and preheating temperature when silicon wafer passes through the preheating zone exists
200 DEG C~500 DEG C, when silicon wafer passes through the area of illumination, the LED lamplight carries out lighting process, the furnace to silicon wafer according to mould group
When the temperature of chamber is reduced to a certain extent, the assisted heating device carries out auxiliary heating to furnace chamber.
As a kind of improvement of the anti-light furnace that declines of the present invention, the furnace cradle be equipped with global cycle water pipe into global cycle water pipe
Out, LED lamplight described in every group is made of according to mould group four LED light bars with water cooling effect, be equipped in four LED light bars into
The inlet and outlet of the mouth of a river and water outlet, four LED light bars are sequentially communicated, and the water inlet connection of a LED light bar always follows
Ring water pipe is into the water outlet connection global cycle water pipe of a LED light bar goes out.
As a kind of improvement of the anti-light furnace that declines of the present invention, the LED light bar includes LED light cooling water tank, LED light heat dissipation
The Current Voltage of LED light in water tank is adjusted by constant-current source and is controlled, and the front end of the LED light cooling water tank is equipped with for connecting
The positive electrode mounting hole of positive electrode holder is connect, the front other end of the LED light cooling water tank is equipped with for connecting negative electricity electrode seat
Negative electrode mounting hole, the positive electrode holder connect the positive electrode of the constant-current source, and the negative electricity electrode seat connects the constant-current source
The front of negative electrode, the LED light cooling water tank is connected with a metallic circuit, the gold by the way of liquid metal welding
The surface for belonging to circuit board is equipped with temperature probe, and the temperature probe is electrically connected with the constant-current source, the LED light cooling water tank
The back side is equipped with inlet and outlet, and the surface of the metallic circuit is equipped at intervals with several LED chips.
As a kind of improvement of the anti-light furnace that declines of the present invention, the LED light is corresponded in the cavity of the LED light cooling water tank and is dissipated
The reverse side of boiler is equipped at intervals with multi-disc radiating fin, length of the every radiating fin along the LED light cooling water tank
Degree side upwardly extends and identical as the cavity length of the LED light cooling water tank.
As a kind of improvement of the anti-light furnace that declines of the present invention, the height of the every radiating fin is identical, the radiating fin
Height be less than the LED light cooling water tank cavity height, the both ends of the LED light cooling water tank are respectively provided with company
The bracket connecting hole of L bracket is connect, the LED light cooling water tank is al member, and the metallic circuit is copper component.
Core circuit plate, preceding cowling panel, rear whole is equipped with as a kind of improvement of the anti-light furnace that declines of the present invention, in the constant-current source
Flowing plate, power panel, fan power supply plate, interface board, driving plate and control panel, the preceding cowling panel, rear cowling panel, power panel,
Fan power supply plate, interface board, driving plate and control panel are connect with the core circuit plate, and the power panel input 220V is handed over
Galvanic electricity pressure is rectified into 310V direct current and exports and exchanges to LC series-resonant inverting circuit conversion at 20KHZ by preceding cowling panel
Electricity is converted into direct current electricity output using inductance and electrolytic capacitor.
As a kind of improvement of the anti-light furnace that declines of the present invention, the control panel be equipped with temperature indicator, voltage display,
Current Display, power display, the voltage regulator for adjusting voltage and the current regulator for adjusting electric current, it is described
Power switch is additionally provided on control panel；
It is additionally provided with two aluminium radiator fins, three fans, transformer, inductance, two AC power sources in the constant-current source, three
Fan is all connected with fan power supply plate；The constant-current source shell side and front are equipped with heat dissipation mesh, the constant-current source shell
Positive both ends are respectively equipped with multiple U-shaped buckles and kidney-shaped mounting hole；
The core board is made of TMS320F28335, LC4064V core chips, passes through TMS320F28335 chip
SPWM function realizes the control of bridge-type Zero-voltage-switching PWM, SPWM function: being exactly that modulation pulse is changed on the basis of PWM
Mode, pulse width time duty ratio are arranged by sinusoidal rule, and such output waveform can accomplish sine by filtering appropriate
Wave output.
As a kind of improvement of the anti-light furnace that declines of the present invention, it is equipped at intervals on rear side of the furnace cradle multiple described for taking away
The furnace chamber cooling fan of furnace chamber heat, the upper end of the furnace cradle are equipped at intervals with multiple upper cooling fans；Before the furnace cradle
Side is equipped with control electronic box；
The preheating zone is equipped with upper preheating furnace and lower preheating furnace, is equipped at intervals on the upper preheating furnace and lower preheating furnace
Multiple heating fluorescent tubes, have a channel passed through for metal net shaped conveyer belt between the upper preheating furnace and lower preheating furnace, it is described on
At least one temperature-sensing probe is equipped on preheating furnace and the lower preheating furnace；
The blower fan apparatus of the multiple radiator fans dried downwards and downward air draught is equipped at intervals on the cooling zone.
Compared with prior art, the invention has the advantages that present invention employs high-heat conductivity and large-power integrated LED chip,
The effective light decay for inhibiting cell piece is welded on the side on heat dissipation metal water tank surface using the metallic circuit of high-powered LED lamp
Formula takes away rapidly the thermal energy of heat dissipation metal water tank by the water in heat dissipation metal water tank, LED rapid cooling is realized, to reach
Higher output power.Constant-current source is based on LC series resonance high-frequency inverter circuit.Alternating current 220V input, it is straight to be first rectified into 310V
Stream, then through LC series resonance high-frequency inverter circuit, it is converted into 20KHZ alternating current, it is converted using high-frequency inductor and electrolytic capacitor
At direct current output, maximum direct current output is 500V 10A, and voltage and current output is adjustable.One constant-current source independent control, one LED
Lamp bar while so that LED light bar is had superelevation intensity of illumination, and can control the temperature of its fever, make LED light bar in a perseverance
It works at a temperature of fixed.During silicon wafer enters this anti-light furnace that declines, by multiple groups LED lamplight according to the strong illumination of mould group, silicon
Piece hydrogen passivation effect is obvious.Every group of LED is in series by 88 LED.Colour temperature 5000K, 6W high light efficiency LED chip, 85 is Celsius
When spending, light efficiency is 156lm/W, and at 25 degrees Celsius, light efficiency is 170lm/W.
When water cooling works normally, water flow 7.2m3/h, the luminous energy of output reaches as high as 5.42W/ square centimeters,
That is the luminous energy of output reaches as high as 54.2 sunlights.Outlet pipe increases 4 degrees Celsius than water inlet pipe water temperature, LED light copper electricity
Road plate surface temperature increases 18 degrees Celsius.Cell piece light decay can effectively be inhibited.
Detailed description of the invention
Just the present invention and its beneficial technical effect are made with specific embodiment with reference to the accompanying drawings below further details of
Description, in which:
Fig. 1 is schematic diagram of front three-dimensional structure of the present invention.
Fig. 2 is rear view three-dimensional structure of the present invention.
Fig. 3 is multiple groups LED lamplight of the present invention according to mould group positive structure schematic.
Fig. 4 is multiple groups LED lamplight of the present invention according to mould group structure schematic diagram.
Fig. 5 is the single led lamp bar positive structure schematic of the present invention.
Fig. 6 is the single led lamp bar structure schematic diagram of the present invention.
Fig. 7 is LED light bar schematic diagram of internal structure of the present invention.
Fig. 8 is constant-current source structural schematic diagram of the present invention.
Appended drawing reference title: the 1- furnace cradle preheating zone the 2- constant-current source 3- conveying device 4- cooling zone 5- area of illumination 6-
7-LED light shines mould group 8-LED lamp bar 9- furnace chamber 10- air holes 11- assisted heating device 12- global cycle water pipe into 13-
It is aobvious that global cycle water pipe goes out cooling fan 16- control electronic box 21- control panel 22- temperature on 14- furnace chamber cooling fan 15-
Show device 23- voltage display 24- Current Display 25- power display 26- voltage regulator 27- current regulator
28- power switch 80- bracket connecting hole 81-LED lamp cooling water tank 82- positive electrode mounting hole 83- negative electrode mounting hole
84- metallic circuit 85- temperature probe 86- water inlet 87- water outlet 88-LED chip 89- radiating fin.
Specific embodiment
Just the invention will be further described with specific embodiment with reference to the accompanying drawings below, but embodiments of the present invention not office
It is limited to this.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7 and Fig. 8, a kind of anti-light furnace that declines, including furnace cradle 1 and multiple
Constant-current source 2, furnace cradle 1 are equipped with the conveying device 3 of circulation conveying silicon wafer, and furnace cradle 1 is along 3 feeding end of conveying device to discharge end
It is successively arranged preheating zone 4, area of illumination 5 and cooling zone 6, the surface of area of illumination 5 is equipped with the LED lamplight that several groups are arranged side by side and shines
Mould group 7, every group of LED lamplight are made of according to mould group 7 multiple LED light bars 8 with water cooling effect, and each LED light bar 8 is by one
2 independent control of constant-current source.Multiple constant-current sources 2 are erected on 2 bracket of constant-current source simultaneously.LED lamplight is big with three according to mould group 7
Group, every three big groups have 16 LED light bars 8 according to mould group 7 with LED lamplight, and each big group shines mould group by 4 group's LED lamplights
7, each group's LED lamplight has 4 LED light bars 8 according to mould group 7, shares 48 LED light bars 8 on an anti-light furnace that declines.
Preferably, the position that furnace cradle 1 is located at area of illumination is equipped with furnace chamber 9, is equipped at intervals on the cavity inner sidewall of furnace chamber 9 more
A air holes 10, the cavity of resorption of furnace chamber 9 are equipped with assisted heating device 11, and the surface of furnace chamber 9 and LED lamplight, which are shone between mould group 7, to be used
The partition of light transmission separates.The partition of light transmission is glass plate.The temperature of furnace chamber 9 and LED lamplight can be shone mould group 7 by the partition of light transmission
It separates, the temperature for making LED lamplight will not influence furnace chamber 9 according to the temperature of mould group 7 can realize intense light irradiation to silicon wafer again simultaneously.
Preferably, conveying device 3 includes that the rollers 31 of 1 left and right ends of furnace cradle is arranged in, and one of roller 31 is by electricity
Machine driving, two rollers 31 use metal net shaped conveying band connection, and metal net shaped conveyer belt drives silicon wafer successively by preheating zone
4, area of illumination 5 and cooling zone 6, for preheating temperature when silicon wafer is by preheating zone 4 at 200 DEG C~500 DEG C, silicon wafer passes through area of illumination 5
When, LED lamplight carries out lighting process to silicon wafer according to mould group 7, when the temperature of furnace chamber 9 is reduced to a certain extent, assisted heating device
11 pairs of furnace chambers 9 carry out auxiliary heating.
Preferably, furnace cradle 1 goes out 13 into 12 and global cycle water pipe equipped with global cycle water pipe, and every group of LED lamplight shines mould group 7
It is made of four LED light bars 8 with water cooling effect, inlet and outlet, four LED light is equipped in four LED light bars 8
The inlet and outlet of item 8 are sequentially communicated, and the water inlet of a LED light bar 8 is connected to global cycle water pipe into 12, LED light
The water outlet connection global cycle water pipe of item 8 goes out 13.
Preferably, LED light bar 8 includes LED light cooling water tank 81, the electric current electricity of the LED light in the LED light cooling water tank 81
Pressure is adjusted by constant-current source 2 and is controlled, and the front end of LED light cooling water tank 81 is equipped with the positive electrode for connecting positive electrode holder and installs
Hole 82, the front other end of LED light cooling water tank 81 are equipped with the negative electrode mounting hole 83 for connecting negative electricity electrode seat, positive electrode holder
The positive electrode of constant-current source 2 is connected, negative electricity electrode seat connects the negative electrode of constant-current source 2, and the front of LED light cooling water tank 81 uses liquid
The mode of metal welding is connected with a metallic circuit 84, and the surface of metallic circuit 84 visits 85 equipped with thermometric, temperature probe
85 are electrically connected with constant-current source 2, and the back side of LED light cooling water tank 81 is equipped with water inlet 86 and water outlet 87, metallic circuit 84
Surface is equipped at intervals with several LED chips 88.
Preferably, corresponded in the cavity of LED light cooling water tank 81 LED light cooling water tank 81 reverse side be equipped at intervals with it is more
Piece radiating fin 89, every radiating fin 89 extend along the length direction of LED light cooling water tank 81 and with LED light water of radiation
The cavity length of case 81 is identical.
Preferably, the height of every radiating fin 89 is identical, and the height of radiating fin 89 is less than LED light cooling water tank 81
The height of cavity, the both ends of LED light cooling water tank 81 are respectively provided with the bracket connecting hole 80 of connection L bracket, and LED light dissipates
Boiler 81 is al member, and metallic circuit 84 is copper component.
Preferably, it is equipped with core circuit plate in constant-current source 2, preceding cowling panel, rear cowling panel, power panel, fan power supply plate, connects
Oralia, driving plate and control panel 21, preceding cowling panel, rear cowling panel, power panel, fan power supply plate, interface board, driving plate and control
Panel processed is connect with core circuit plate, power panel input 220V AC voltage by preceding cowling panel be rectified into 310V direct current,
And export to LC series-resonant inverting circuit conversion into 20KHZ alternating current, direct current is converted into using inductance and electrolytic capacitor
Output.
Preferably, it is aobvious to be equipped with temperature indicator 22, voltage display 23, Current Display 24, power for control panel 21
Show device 25, the voltage regulator 26 for adjusting voltage and the current regulator 27 for adjusting electric current, is gone back on control panel 21
Equipped with power switch 28；
Two aluminium radiator fins, three fans, transformer, inductance, two AC power sources, three wind are additionally provided in constant-current source 2
Fan is all connected with fan power supply plate；2 shell side of constant-current source and front are equipped with heat dissipation mesh 29, the positive both ends of constant-current source shell
It is respectively equipped with multiple U-shaped buckles 20 and kidney-shaped mounting hole 201；
Core board is made of TMS320F28335, LC4064V core chips, passes through the SPWM function of TMS320F28335 chip
Can, it realizes the control of bridge-type Zero-voltage-switching PWM, SPWM function: being exactly to change modulation pulse mode on the basis of PWM,
Pulse width time duty ratio is arranged by sinusoidal rule, and such output waveform can accomplish that sine wave is defeated by filtering appropriate
Out.
Core board has the effect that
1) accurate Power MOSFET；
2) oscillation frequency adjustable is up to 2MHz；
3) PID constant voltage/constant current scheme control；
4) adjustable soft start controls；
5) tunable periodic peak value cut-off current controls；
6) internal overheat protector control；
7) instantaneous over-current protection control；
8) phase acquisition is analyzed；
9) ultra high speed A/D conversion, collection voltages electric current, reactance analysis；
10) LED light overheat protector；
11) LED light thermostatic control.
Interface board: mainly by CHVS-AS5 Hall voltage sensor, HA55 Hall current sensor, AD8226ARM,
The core chipss such as TLC2272IDR, AD8275ARMZ, SI8421AB, KAQY214S, LM311D, TL3116DR are constituted.With with
Lower circuit:
1) voltage and current acquires signal conditioning circuit；
2) LDO voltage regulator circuit；
3) temperature control circuit is crossed；
4) control relay circuit；
5) fan control circuitry；
6) RS485 communication interface circuit；
7) frequency pulse circuit；
8) bus crosses current circuit；
9) overvoltage crowbar；
10) current foldback circuit；
11) crash protection circuit；
12) output allows circuit；
13) input voltage conditioning circuit；
12) 4-20mA inputs conditioning circuit.
Driving plate: mainly suddenly by IGBT driving chip TX-KA962F, IGBT driving power QA01, IGBTK50T60, HA55
The core chipss such as your current sensor are constituted.It has the effect that
1) the soft switching time can be set；
2) the blind area time can be set；
It 3) can setting electric current protection threshold value；
4) restart the time after failure being set；
5) fault-signal output interface；
6) bus current conditioning circuit.
Preferably, the rear side of furnace cradle 1 is equipped at intervals with multiple for taking away the furnace chamber cooling fan 14 of furnace chamber heat, furnace branch
The upper end of frame 1 is equipped at intervals with multiple upper cooling fans 15；The front side of furnace cradle 1 is equipped with control electronic box 16；
Preheating zone 4 is equipped with upper preheating furnace 41 and lower preheating furnace 42, and interval is set on upper preheating furnace 41 and lower preheating furnace 42
There are multiple heating fluorescent tubes 43, there is the channel passed through for metal net shaped conveyer belt between upper preheating furnace 41 and lower preheating furnace 42, on
At least one temperature-sensing probe 44 is equipped on preheating furnace 41 and lower preheating furnace 42；
The blower fan apparatus 62 of multiple radiator fans 61 dried downwards and downward air draught is equipped at intervals on cooling zone 6.
The invention has the advantages that effectively inhibiting cell piece present invention employs high-heat conductivity and large-power integrated LED chip
Light decay be welded on the mode on heat dissipation metal water tank surface using the metallic circuit of high-powered LED lamp, pass through heat dissipation metal
Water in water tank takes away rapidly the thermal energy of heat dissipation metal water tank, LED rapid cooling is realized, to reach higher output power.
Constant-current source is based on LC series resonance high-frequency inverter circuit.Alternating current 220V input, is first rectified into 310V direct current, then through LC series resonance
High-frequency inverter circuit is converted into 20KHZ alternating current, is converted into direct current output using high-frequency inductor and electrolytic capacitor, maximum straight
Stream output is 500V 10A, and voltage and current output is adjustable.One constant-current source independent control, one LED light bar, has LED light bar
It while superelevation intensity of illumination, and can control the temperature of its fever, LED light bar made to work under a stationary temperature.
During silicon wafer enters this anti-light furnace that declines, by multiple groups LED lamplight according to the strong illumination of mould group, the passivation of silicon wafer hydrogen
Effect is obvious.Every group of LED is in series by 88 LED.Colour temperature 5000K, 6W high light efficiency LED chip, at 85 degrees Celsius, light efficiency
It is 156lm/W, at 25 degrees Celsius, light efficiency is 170lm/W.
When water cooling works normally, water flow 7.2m3/h, the luminous energy of output reaches as high as 5.42W/ square centimeters,
That is the luminous energy of output reaches as high as 54.2 sunlights.Outlet pipe increases 4 degrees Celsius than water inlet pipe water temperature, LED light copper electricity
Road plate surface temperature increases 18 degrees Celsius.Cell piece light decay can effectively be inhibited.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out in the case where not departing from the principle of the present invention and structure to these embodiments by understanding
And modification, the scope of the present invention are defined by the appended claims and their equivalents.
Claims (8)
1. a kind of anti-light furnace that declines, which is characterized in that including furnace cradle and multiple constant-current sources, the furnace cradle is equipped with circulation conveying
The conveying device of silicon wafer, the furnace cradle along the conveying device feeding end to discharge end be successively arranged preheating zone, area of illumination and
Cooling zone, the surface of the area of illumination are equipped with the LED lamplight that several groups are arranged side by side and shine mould group, and LED lamplight described in every group is shone
Mould group is made of multiple LED light bars with water cooling effect, and each LED light bar is independently controlled by a constant-current source
System；
Multiple constant-current sources are erected at simultaneously on a constant-current source bracket, and LED lamplight has several big groups according to mould group, and each big group is set
There are several group's LED lamplights according to mould group, each group's LED lamplight is equipped with several LED light bars according to mould group；
The furnace cradle is equipped with global cycle water pipe and goes out into global cycle water pipe, and LED lamplight described in every group is had according to mould group by four
It is made of the LED light bar that water cooling acts on, inlet and outlet, the water inlet of four LED light bars is equipped in four LED light bars
It is sequentially communicated with water outlet, the water inlet of a LED light bar is connected to global cycle water pipe into the water outlet connection of a LED light bar
Global cycle water pipe goes out；
The LED light bar includes LED light cooling water tank, and the Current Voltage of the LED light in the LED light cooling water tank is by constant-current source tune
Section control, the front end of the LED light cooling water tank are equipped with the positive electrode mounting hole for connecting positive electrode holder, the LED
The front other end of lamp cooling water tank is equipped with negative electrode mounting hole for connecting negative electricity electrode seat, described in the positive electrode holder connection
The positive electrode of constant-current source, the negative electricity electrode seat connect the negative electrode of the constant-current source, and the front of the LED light cooling water tank uses
The mode of liquid metal welding is connected with a metallic circuit, and the surface of the metallic circuit is equipped with temperature probe, the survey
Temperature probe is electrically connected with the constant-current source, and the back side of the LED light cooling water tank is equipped with inlet and outlet, the metal electricity
The surface of road plate is equipped at intervals with several LED chips.
2. the anti-light furnace that declines according to claim 1, which is characterized in that the position that the furnace cradle is located at the area of illumination is set
There is furnace chamber, multiple air holes are equipped at intervals on the cavity inner sidewall of the furnace chamber, the cavity of resorption of the furnace chamber is equipped with assisted heating device,
The surface of the furnace chamber and the LED lamplight are separated according to the partition between mould group using light transmission.
3. the anti-light furnace that declines according to claim 2, which is characterized in that the conveying device includes being arranged in furnace cradle or so
The roller at both ends, one of them described roller are driven by motor, and two rollers use metal net shaped conveying band connection, described
Metal net shaped conveyer belt drives silicon wafer successively by preheating zone, area of illumination and cooling zone, pre- when silicon wafer is by the preheating zone
Hot temperature is at 200 DEG C~500 DEG C, and when silicon wafer passes through the area of illumination, the LED lamplight carries out at illumination silicon wafer according to mould group
Reason, when the temperature of the furnace chamber is reduced to a certain extent, the assisted heating device carries out auxiliary heating to furnace chamber.
4. the anti-light furnace that declines according to claim 1, which is characterized in that correspond to institute in the cavity of the LED light cooling water tank
The reverse side for stating LED light cooling water tank is equipped at intervals with multi-disc radiating fin, and the every radiating fin radiates along the LED light
Extend on the length direction of water tank and identical as the cavity length of the LED light cooling water tank.
5. the anti-light furnace that declines according to claim 4, which is characterized in that the height of the every radiating fin is identical, described
The height of radiating fin is less than the height of the cavity of the LED light cooling water tank, and the both ends of the LED light cooling water tank are set respectively
There is the bracket connecting hole for connecting L bracket, the LED light cooling water tank is al member, and the metallic circuit is copper structure
Part.
6. the anti-light furnace that declines according to claim 1, which is characterized in that be equipped with core circuit plate, preceding whole in the constant-current source
Flowing plate, rear cowling panel, power panel, fan power supply plate, interface board, driving plate and control panel, the preceding cowling panel, rear rectification
Plate, power panel, fan power supply plate, interface board, driving plate and control panel are connect with the core circuit plate, the power panel
Input 220V AC voltage by preceding cowling panel be rectified into 310V direct current and export to LC series-resonant inverting circuit conversion at
20KHZ alternating current is converted into direct current electricity output using inductance and electrolytic capacitor.
7. the anti-light furnace that declines according to claim 6, which is characterized in that the control panel is equipped with temperature indicator, electricity
Press display, Current Display, power display, the voltage regulator for adjusting voltage and the electric current tune for adjusting electric current
Device is saved, is additionally provided with power switch on the control panel；It is additionally provided with two aluminium radiator fins in the constant-current source, three fans, becomes
Depressor, inductance, two AC power sources, three fans are all connected with fan power supply plate；The constant-current source shell side and front are all provided with
There is heat dissipation mesh, the positive both ends of the constant-current source shell are respectively equipped with multiple U-shaped buckles and kidney-shaped mounting hole；The core board
It is made of TMS320F28335, LC4064V core chips, by the SPWM function of TMS320F28335 chip, realizes bridge-type
Zero-voltage-switching PWM control, wherein SPWM function is that modulation pulse mode, pulse width time are changed on the basis of PWM
Duty ratio is arranged by sinusoidal rule, and output waveform is by filtering appropriate with sinewave output.
8. the anti-light furnace that declines according to claim 2, which is characterized in that be equipped at intervals with multiple be used on rear side of the furnace cradle
The furnace chamber cooling fan of the furnace chamber heat is taken away, the upper end of the furnace cradle is equipped at intervals with multiple upper cooling fans；The furnace
The front side of bracket is equipped with control electronic box；The preheating zone is equipped with upper preheating furnace and lower preheating furnace, the upper preheating furnace and lower pre-
It is equipped at intervals with multiple heating fluorescent tubes in hot stove, has between the upper preheating furnace and lower preheating furnace and supplies metal net shaped conveying band logical
At least one temperature-sensing probe is equipped on the channel crossed, the upper preheating furnace and the lower preheating furnace；It is spaced on the cooling zone
Blower fan apparatus equipped with the multiple radiator fans dried downwards and downward air draught.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710131975.1A CN107046081B (en) | 2017-03-07 | 2017-03-07 | A kind of anti-light furnace that declines |
| PCT/CN2017/118881 WO2018161692A1 (en) | 2017-03-07 | 2017-12-27 | Heating device for providing resistance to light induced degradation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710131975.1A CN107046081B (en) | 2017-03-07 | 2017-03-07 | A kind of anti-light furnace that declines |
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| CN107046081A CN107046081A (en) | 2017-08-15 |
| CN107046081B true CN107046081B (en) | 2019-06-14 |
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| WO (1) | WO2018161692A1 (en) |
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| CN107046081B (en) * | 2017-03-07 | 2019-06-14 | 东莞市科隆威自动化设备有限公司 | A kind of anti-light furnace that declines |
| CN107560442B (en) * | 2017-09-12 | 2023-07-14 | 广东科隆威智能装备股份有限公司 | LED anti-light-decay furnace cooling system |
| CN109065669B (en) * | 2018-08-06 | 2024-02-20 | 浙江晶科能源有限公司 | Double-sided battery light attenuation resisting equipment |
| CN110165021B (en) * | 2019-06-05 | 2021-02-12 | 江西展宇新能源股份有限公司 | Electric injection equipment |
| CN114566567A (en) * | 2022-02-25 | 2022-05-31 | 安徽华晟新能源科技有限公司 | Solar cell processing equipment |
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| CN100428404C (en) * | 2006-03-17 | 2008-10-22 | 中国电子科技集团公司第四十八研究所 | Enclosed infrared heating device for semiconductor chip |
| CN101478882B (en) * | 2006-06-26 | 2013-07-10 | Tp太阳能公司 | Rapid thermal firing ir conveyor furnace having high intensity heating section |
| AU2013266009B2 (en) * | 2012-05-21 | 2017-02-16 | Newsouth Innovations Pty Limited | Advanced hydrogenation of silicon solar cells |
| US9780252B2 (en) * | 2014-10-17 | 2017-10-03 | Tp Solar, Inc. | Method and apparatus for reduction of solar cell LID |
| CN104979431B (en) * | 2015-07-10 | 2017-04-05 | 东莞市科隆威自动化设备有限公司 | A kind of light decay stove |
| CN205881933U (en) * | 2016-08-17 | 2017-01-11 | 苏州阿特斯阳光电力科技有限公司 | Photic attenuating device of crystalline silicon solar cells piece |
| CN106384759A (en) * | 2016-10-13 | 2017-02-08 | 成都格瑞思文化传播有限公司 | Device of crystalline silicon solar cell light induced attenuation |
| CN206584944U (en) * | 2017-03-07 | 2017-10-24 | 东莞市科隆威自动化设备有限公司 | A kind of anti-light stove that declines |
| CN107046081B (en) * | 2017-03-07 | 2019-06-14 | 东莞市科隆威自动化设备有限公司 | A kind of anti-light furnace that declines |
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| WO2018161692A1 (en) | 2018-09-13 |
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Address after: 523000 Building 2, 11 Jinfu West Road, Tangchun, Liaobu Town, Dongguan City, Guangdong Province Patentee after: Guangdong kelongwei Intelligent Equipment Co.,Ltd. Address before: Shi Bu Cun Shi Da Lu, Liaobu Town, Dongguan City, Guangdong Province Patentee before: FOLUNGWIN AUTOMATIC EQUIPMENT Co.,Ltd. |
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Application publication date: 20170815 Assignee: Changzhou kelongwei Intelligent Technology Co.,Ltd. Assignor: Guangdong kelongwei Intelligent Equipment Co.,Ltd. Contract record no.: X2023980039738 Denomination of invention: A type of anti light decay furnace Granted publication date: 20190614 License type: Common License Record date: 20230815 |
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