CN114566567A - Solar cell processing equipment - Google Patents
Solar cell processing equipment Download PDFInfo
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- CN114566567A CN114566567A CN202210188976.0A CN202210188976A CN114566567A CN 114566567 A CN114566567 A CN 114566567A CN 202210188976 A CN202210188976 A CN 202210188976A CN 114566567 A CN114566567 A CN 114566567A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to the technical field of solar cells, and provides a solar cell processing device, which at least comprises: the process chamber is internally provided with a conveying mechanism and is divided into a drying area and a light attenuation area which are adjacent to each other and communicated in a penetrating way; the drying mechanism is positioned in the drying area and is suitable for drying the solar cell; the illumination mechanism is positioned in the light attenuation area and is suitable for performing light attenuation treatment on the dried solar cell. According to the processing equipment, after the solar cell is irradiated, a built-in electric field inside the solar cell can be enhanced, atomic hydrogen is provided for interface defects, a passivation repairing effect is achieved, open-circuit voltage is improved, and therefore efficiency of the solar cell is improved. And before the solar cell is irradiated, the solar cell is dried and preheated by the drying mechanism in the process cavity, so that the solar cell has a buffering process before high-intensity irradiation, and the solar cell is prevented from being damaged after the high-intensity irradiation is directly carried out.
Description
Technical Field
The invention relates to the technical field of solar cells, in particular to solar cell processing equipment.
Background
In order to ensure the quality of the solar cell, the light decay rate is an important sampling inspection index, and the surface passivation technology is an important technology for improving the light decay rate in the silicon-based solar cell. In addition, the interface of the solar cell is often rich in a plurality of defects, carriers can be captured and compounded, the electrical property of the device is damaged, and the conversion efficiency of solar energy can be effectively improved when the surface passivation is applied to the silicon-based solar cell.
The industry has made a lot of progress in repairing the interface defects, for example, in AM1.5, annealing for a long time under the light intensity of one standard sunlight can help to reduce the interface defect density of the silicon-based solar device, and when the interface defects of the silicon-based solar device are partially repaired under the long-time illumination of the light intensity of dozens of standard sunlight.
At present, the method for attenuating light of a solar cell basically comprises the step of exposing the solar cell for at least three days under sunlight to enable an interface to reach a stable state, and the state cannot return to a high recombination state due to illumination to influence the efficiency of the cell. However, the treatment method is greatly influenced by weather, and the light intensity of sunlight or natural light is too weak, so that the effect is limited; moreover, the treatment time is too long, which is not favorable for improving the production efficiency.
Disclosure of Invention
Therefore, the present invention is made in view of the above technical problems, and provides a solar cell processing apparatus capable of processing solar cells in a short time and improving efficiency of solar cells at a high production efficiency.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a solar cell piece processing device is provided with a process chamber for accommodating solar cell pieces, and at least comprises: the solar cell processing device comprises a process cavity, a drying area, a light attenuation area and a solar cell, wherein the process cavity is internally provided with a conveying mechanism, and is divided into the drying area and the light attenuation area which are adjacent to each other, penetrate and communicate with each other along the direction of conveying the solar cell by the conveying mechanism; the drying mechanism is positioned in the drying area and is suitable for drying the solar cell; and the illumination mechanism is positioned in the light attenuation area and is suitable for performing light attenuation treatment on the dried solar cell.
Furthermore, the drying mechanism comprises heating pipes which are arranged on the cavity walls of the process cavities on the two sides of the conveying mechanism and are respectively arranged above and below the conveying mechanism in position.
Furthermore, the heating pipe which is positioned above the conveying mechanism in an inclined mode is an infrared heating pipe or a halogen lamp heating pipe, and the infrared heating pipes or the halogen lamp heating pipes are arranged at intervals along the direction of conveying the solar cell; the heating pipes which are positioned at the oblique lower part of the conveying mechanism are metal heating pipes, and the metal heating pipes are arranged at intervals along the direction of conveying the solar cell.
Further, a plurality of first partition plates are respectively and oppositely arranged above the upper inner wall of the process chamber and the conveying mechanism and below the lower inner wall of the process chamber and the conveying mechanism, the arrangement direction of the first partition plates is vertical to the conveying direction of the conveying mechanism, and each pair of the first partition plates which are opposite divides the drying area into different sub-areas along the conveying direction of the conveying mechanism; the first partition plate and the conveying mechanism are arranged in a separated mode, and a separated gap is suitable for the solar cell to pass through; and each sub-area is provided with a temperature sensor, and the temperature sensor is used for testing the temperature of each sub-area corresponding to the process cavity.
Further, stoving mechanism still includes the air exhauster, the air intake of air exhauster is located the bottom of process chamber, and with the stoving district is linked together, the air outlet of air exhauster is suitable for the exhaust duct who communicates tail gas treatment system, is suitable for the organic matter of discharging because of high temperature toasts the production.
Further, the illumination mechanism comprises a light box, a mounting plate and a light source; the light box is of an open structure, and the opening of the light box faces the conveying mechanism; the mounting panel sets up the lower part of light box, the light source sets up the below of mounting panel, the light source orientation transport mechanism sets up.
Furthermore, the illumination mechanism also comprises a transparent glass plate and a filtering module; the transparent glass plate is arranged at the opening of the light box, and the light filtering module is arranged above the plate surface of the transparent glass plate and below the light source; the filtering module comprises a plurality of condensing lenses corresponding to the light source, and each condensing lens is a concave mirror.
Furthermore, the illumination mechanism further comprises a cooling component, the cooling component comprises a second partition plate, the second partition plate is arranged in parallel with the mounting plate and is positioned on one surface of the mounting plate, which faces away from the light source, a cooling channel is formed in an area between the second partition plate and the mounting plate, and the cooling channel is suitable for forming a circulating cooling loop with an external cooling source; and/or a heat dissipation cavity is formed in the area between the second partition plate and the inner wall of the light box, and a plurality of heat dissipation fins are arranged in the heat dissipation cavity at intervals in parallel; the light attenuation area is provided with a heat radiation fan set which is suitable for accelerating the heat radiation in the light attenuation area.
Further, the illumination mechanism further includes: and the control power supplies are in one-to-one matching connection with the light sources and are arranged on the outer side of the process chamber, and the control power supplies are suitable for adjusting the light intensity of the light sources in matching connection with the control power supplies.
Further, the process chamber comprises an upper chamber and a lower chamber, and the upper chamber and the lower chamber are mutually buckled and connected; the treatment equipment further comprises a lifting part, and the lifting part of the lifting part is connected with the upper cavity and is suitable for lifting the upper cavity away from the lower cavity; the conveying mechanism is a magnetic conveying roller way, the conveying roller way is a ceramic roller way, and a plurality of magnetic lantern rings are arranged at intervals at the end part of the conveying roller way along the axial direction of the conveying roller way.
The technical scheme of the invention has the following advantages:
according to the solar cell processing equipment provided by the invention, the solar cell is subjected to light attenuation processing through the illumination mechanism arranged in the light attenuation area. After the solar cell is irradiated, the built-in electric field in the solar cell can be enhanced, so that more energy obtained by hydrogen bonds in the passivation layer is converted into atomic hydrogen to be collected on the interface, the passivation film with a looser device interface of the solar cell becomes compact and smooth, part of the atomic hydrogen is sealed to form an atomic hydrogen reservoir, the atomic hydrogen is provided for the defects of the interface, the passivation repairing effect is achieved, the open-circuit voltage is improved, and the efficiency of the solar cell is improved. Before the solar cell is irradiated, the solar cell is dried and preheated by a drying mechanism arranged in the drying area, so that the solar cell has a buffering process before high-intensity illumination is performed, and the solar cell is prevented from being damaged after the high-intensity illumination is directly performed; and the drying area and the light attenuation area are arranged in the same process chamber and are mutually adjacent and communicated in a penetrating way, the dried solar cell can directly enter the light attenuation area for processing, and the solar cell cannot be in contact with the outside in the process chamber, so that the quality problem of the solar cell caused by exposure in a cold and hot environment is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic overall structure diagram of a solar cell processing apparatus according to an embodiment of the present invention;
FIG. 2 is a front view of the solar cell processing apparatus of FIG. 1;
FIG. 3 is a cross-sectional view of the solar cell processing apparatus of FIG. 1;
FIG. 4 is a schematic diagram illustrating an overall structure of a light box in the solar cell processing apparatus according to the embodiment of the present invention;
FIG. 5 is a cross-sectional view of the light box of FIG. 4;
fig. 6 is a schematic conveying diagram of the conveying roller way.
Description of reference numerals:
1. a body; 2. An upper cavity; 3. A lower cavity;
4. a conveying roller way; 5. A light box; 6. A lifting member;
7. an exhaust fan; 8. A heat radiation fan; 9. Controlling a power supply;
10. a drying zone; 11. A light attenuation region; 12. An infrared heating pipe;
13. a metal heating tube; 14. An opening/closing detection element; 15. A first separator;
16. a heat dissipation cavity; 17. Mounting a plate; 18. A second separator;
19. a cooling channel; 20. A light source; 21. A condenser lens;
22. a transparent glass plate; 23. A coolant inlet; 24. A coolant outlet;
25. a wind screen; 26. A top surface; 27. A left side surface;
28. a front side; 29. A blocking cap; 30. A driven wheel;
31. a driving wheel; 32. A magnetic collar.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Fig. 1 is a schematic overall structure diagram of a solar cell processing apparatus according to an embodiment of the present invention; as shown in fig. 1, the present embodiment provides a solar cell processing apparatus, including: the body 1, for example, the body 1 is a frame formed by connecting rods arranged in the transverse direction and the longitudinal direction; the middle part of the body 1 is provided with a process cavity for accommodating the solar cell, the process cavity is of a semi-closed structure, for example, the process cavity comprises an upper cavity 2 and a lower cavity 3, the upper cavity 2 and the lower cavity 3 are mutually buckled and connected, an inlet and an outlet of the process cavity are respectively arranged on two opposite left side surfaces 27 and right side surfaces, when in use, the inlet is arranged corresponding to the previous process equipment, and the outlet is arranged corresponding to the next process equipment.
Wherein, be provided with transport mechanism in the process chamber, transport mechanism can be for conveyer belt or transfer table 4, explains for the example when transport mechanism is transfer table 4, and solar wafer gets into from the entry, carries to the export through transfer table 4. Along the direction of conveying the solar cell by the conveying roller way 4, the process chamber is divided into a drying area 10 and a light attenuation area 11 which are communicated with each other, and the solar cell sequentially passes through the drying area 10 and the light attenuation area 11 under the conveying of the conveying roller way 4. Wherein, the inlet of the drying zone 10 is the inlet of the process chamber and is arranged corresponding to the outlet of the previous process equipment. The exit of the light attenuating region 11 is the process chamber exit and corresponds to the entrance of the next process tool.
Fig. 3 is a cross-sectional view of the solar cell processing apparatus shown in fig. 1, and as shown in fig. 3, the drying mechanism may be a heat pipe or a blower. The light source 20 of the illumination mechanism may be an LED white light source 20, or an infrared light source 20.
In the solar cell processing apparatus provided in this embodiment, the solar cell is subjected to light attenuation processing by the illumination mechanism provided in the light attenuation region 11. After the solar cell is irradiated by light attenuation treatment, a built-in electric field in the solar cell can be enhanced, so that more energy obtained by hydrogen bonds in a passivation layer is converted into atomic hydrogen to be collected on an interface, a passivation film with a loose solar cell interface is compact and smooth, and part of atomic hydrogen is sealed to form an atomic hydrogen library, so that the atomic hydrogen is provided for defects of the interface, a passivation repairing effect is achieved, open-circuit voltage is improved, and efficiency of the solar cell is improved. Before the solar cell is irradiated, the solar cell is dried and preheated by a drying mechanism arranged in the drying area, so that the solar cell has a buffering process before high-intensity illumination is performed, and the solar cell is prevented from being damaged after the high-intensity illumination is directly performed; and the drying area and the light attenuation area are arranged in the same process chamber and are mutually adjacent and communicated in a penetrating way, the dried solar cell can directly enter the light attenuation area for processing, and the solar cell cannot be in contact with the outside in the process chamber, so that the quality problem caused by exposure of the solar cell in a cold and hot environment due to multiple times of entering and exiting of the chamber is avoided.
As shown in fig. 3, in this embodiment, the drying mechanism includes heating pipes, the heating pipes are straight tubular heating pipes, the heating pipes are disposed above and below the conveying roller table 4, wherein the heating pipes located above the conveying roller table 4 may be infrared heating pipes 12 or halogen lamp heating pipes, and the infrared heating pipes 12 and the halogen lamp heating pipes may be disposed at intervals along the conveying direction of the solar cell. The height difference between the infrared heating tube 12 or the halogen lamp heating tube and the conveying roller way 4 can be 180 mm-360 mm, and the solar cell is not hindered from being conveyed on the conveying roller way 4. The interval between the adjacent two infrared heating tubes 12 or halogen lamp heating tubes may be 200mm to 400 mm.
Similarly, the heating pipe located obliquely below the conveying roller table 4 may be a metal heating pipe 13, and the metal heating pipe 13 may be disposed at intervals along the conveying direction of the solar cell. The height difference between the metal heating pipe 13 and the conveying roller way 4 can be 180 mm-360 mm, and the solar cell is not hindered from being conveyed on the conveying roller way 4. The interval between two adjacent metal heating pipes 13 can be 200 mm-400 mm.
Mounting holes can be formed in the front side surface 28 and the rear side surface of the process chamber at corresponding positions, one end of the heating pipe is inserted into the mounting hole in the front side surface 28 of the process chamber, the other end of the heating pipe is inserted into the mounting hole in the rear side surface of the process chamber, and a gap between the mounting hole and the heating pipe can be sealed through a sealing ring. At this time, the longitudinal direction of each heating tube is aligned with the longitudinal direction of each roller of the conveyance roller table 4.
Furthermore, the heating tube may also be a U-shaped heating tube, which may be mounted on the front side 28 and the rear side of the process chamber, wherein the openings of the U-shaped heating tube on the front side 28 and the rear side face are arranged opposite to each other. Wherein, on the front side 28 and the back side of the process chamber, a plurality of U-shaped heating pipes can be arranged along the conveying direction of the solar cell. Furthermore, a plurality of rows of U-shaped heating tubes may be arranged in the height direction of the process chamber. So set up, this U type heating pipe can heat the region that is close to the chamber wall of process chamber in the drying zone 10, guarantees that the temperature of whole drying zone 10 is more even, is favorable to improving the stoving effect to solar wafer.
In this embodiment, stoving mechanism still includes air exhauster 7, for example, air exhauster 7's fuselage and fixing base all can install the top surface 26 at last cavity 2, can set up a plurality of ventilation holes in the bottom surface of cavity 3 down, for example, the direction of the width of cavity can set up a plurality of ventilation holes at the interval down, through the pipeline with each ventilation hole and air intake intercommunication of air exhauster 7. By the arrangement, organic matters in the solar cell are emitted out in the drying process and are timely drawn away, so that the organic matters in the drying area 10 can be prevented from being condensed into liquid at the air inlet of the exhaust fan 7 and then dripping on the solar cell, and the cleaning of the solar cell is favorably kept.
Wherein, can set up the supporting part to the position that corresponds the ventilation hole on the cavity 3 down, the supporting part can be tubular structure, and welding or integrated into one piece are in the bottom of cavity down, and the supporting part extends to the direction that is close to transfer table 4, and the bottom of supporting part is linked together through the pipeline with the air intake of air exhauster 7. An umbrella-shaped blocking cap 29 can be welded at the top of the supporting part, the tip of the blocking cap 29 is arranged towards the conveying roller way 4, small holes can be formed in the side wall of the supporting part, and when air is pumped, air in the lower cavity enters the exhaust fan 7 from the small holes in the side wall of the supporting part. So set up, can be used for the air current in the dispersion cavity down, make the air current disturbance more even, can effectively avoid because of bleeding the defect that probably brings solar cell, avoid solar cell still cause badly and drag the result of low preorder technology at the last step of battery technology, but also can prevent that the foreign matter from dropping to in the pipeline of below.
In order to prevent the pipeline from shaking, a clamp can be arranged on the lower cavity 3 to fix the pipeline. The air outlet of the exhaust fan 7 is suitable for being communicated with an exhaust pipeline of an external tail gas treatment system. For example, one or more exhaust fans 7 may be provided as necessary. Wherein the air quantity of the exhaust fan 7 can be 200m3/h－500m3The air quantity is controlled by the frequency converter, and when the air extractor is used, the exhaust fan 7 can extract the gas in the drying area 10 to keep the drying of the drying area 10, and organic matters volatilized in the gas due to drying preheating can be extracted along with the gas, and are discharged after being purified by a tail gas treatment system of a factory, so that the air extractor is beneficial to green environmental protection.
Preferably, the exhaust fan 7 can be arranged in the light attenuation area 11 in the same way as the exhaust fan 7 of the drying area 10, which is not described again. In general, the solar cell does not emit organic matter in the light attenuation region 11, but the exhaust fan 7 in the light attenuation region 11 can increase practicality and controllability, thereby facilitating adjustment of the wind speed in the drying region 10.
As shown in fig. 3, in this embodiment, after the solar cell is taken out from the front-end process, in order to enable the temperature of the solar cell to rise moderately, so as to improve the smoothness and compactness of the passive film interface and increase the stability of the interface repairing effect, a first partition plate 15 may be disposed on the inner wall of the process chamber, the first partition plate 15 is disposed along the vertical direction, the plate surface of the first partition plate 15 is disposed parallel to the left side 27 of the process chamber, the conveying roller table 4 is disposed along the horizontal direction, and at this time, the plate surface of the first partition plate 15 is perpendicular to the conveying direction of the solar cell. The first partition plate 15 can be welded on the inner wall of the top of the upper cavity 2, correspondingly, the first partition plate 15 is also welded on the bottom wall of the lower cavity 3, so as to divide the drying zone 10 into different sub-zones; for example, the drying zone 10 can be divided into two sub-zones in the conveying direction of the conveyor table 4. The temperature in the sub-area close to the inlet is lower than that in the sub-area far away from the inlet, so that the temperature of the solar cell is gradually increased. Wherein, the one end of first baffle 15 towards transfer table 4 sets up with separating from each other between transfer table 4, and the size in clearance that separates from each other can be according to the size design of solar wafer, does not hinder solar wafer normal transportation on transfer table 4. Wherein, heating pipes and exhaust fans 7 can be correspondingly arranged in each subarea.
In the present embodiment, a temperature sensor may be provided in each sub-area. The temperature sensor can acquire temperature value information in each sub-area in real time and then feed back the temperature value information to the control system, and the control system adjusts the power of the heating pipe and the exhaust fan 7 in real time according to the received temperature value information, so that the temperature in each sub-area is kept appropriate. Wherein, the temperature of the drying zone 10 is set between 100 ℃ and 400 ℃ according to the process requirement, the temperature fluctuation is within 5 ℃, and the temperature uniformity of the temperature zone is ensured.
Fig. 4 is a schematic diagram illustrating an overall structure of a light box in a solar cell processing apparatus according to an embodiment of the present invention, and fig. 5 is a cross-sectional view of the light box in fig. 4, as shown in fig. 4 and 5, in this embodiment, an illumination mechanism includes the light box 5, a mounting plate 17, and a light source 20; the light box 5 may be an open structure, for example, mayA hole is reserved in the top surface 26 of the process chamber from which the light box 5 is embedded in the light attenuation region 11. At this time, the light box 5 is located above the conveying roller table 4, and the opening of the light box 5 is arranged toward the conveying roller table 4 below. The mounting panel 17 is located the lower part of light box 5, and the mounting panel 17 sets up along the horizontal direction, and at this moment, the solar wafer that mounting panel 17 and be located transfer table 4 is parallel to each other, and light source 20 can be a plurality of, and a plurality of light source 20 can array setting on mounting panel 17, and light source 20 is located the below of mounting panel 17, sets up towards transfer table 4. The light sources 20 on the mounting plate 17 may be in a concentric circular array or a rectangular array. Wherein, the light source 20 can adopt LED lamp beads, and the white light intensity is 30kw/m2－220kw/m2The irradiation time is in the range of 1 s-500 s. By the arrangement, the Fermi level change of the solar cell can be adjusted, the total amount and valence state of H are controlled, the hydrogen passivation and defect repair efficiency is improved, and the effects of improving the conversion efficiency of the N-type solar cell or reducing the attenuation effect of the P-type solar cell are achieved. The types of the solar cell pieces which can be repaired comprise N-heterojunction, N-topcon, N-peal or N-pert solar cell pieces and P-type solar cell pieces.
Compared with the irradiation of a halogen lamp and a xenon lamp, the light source 20 in the embodiment has a longer spectrum and more concentrated light, the effective light irradiated on the surface of the solar cell is higher in occupied ratio, and the energy consumption is lower. The service life of the halogen lamp and xenon lamp light source 20 is generally about three months, the lamp tube needs to be replaced frequently, and the maintenance cost is high. The light source 20 in this embodiment has a service life longer than 2.5 ten thousand hours, and the lamp tube does not need to be replaced frequently, so that the maintenance cost is lower.
In this embodiment, a second partition 18 is disposed in the light box 5, the second partition 18 is located on a surface of the mounting plate 17 facing away from the light source 20, that is, the second partition 18 is located above the light source 20, a cooling channel 19 is formed in a region between the second partition 18 and the mounting plate 17, and the cooling channel 19 is adapted to form a circulating cooling loop with an external cooling source. For example, the second partition 18 is disposed in a horizontal direction, and the second partition 18 is disposed in parallel spaced relation to the mounting, and the region therebetween may form the cooling passage 19. For example, cooling channels 19The left side of the cooling channel is a cooling liquid inlet 23, the right side of the cooling channel 19 is a cooling liquid outlet 24, and a cooling system of a plant is connected with the cooling liquid inlet 23 and the cooling liquid outlet 24 of the cooling channel 19 through pipelines to form a cooling loop capable of circulating. Because the cooling channel 19 is in contact with the mounting plate 17, the heat generated by the light source 20 can be transferred to the cooling liquid in the cooling channel 19 through the mounting plate 17, so as to cool the light source 20. Wherein the water flow in the cooling channel 19 is more than 6.5m3The water temperature range is controlled between 18 ℃ and 22 ℃, and the temperature rise of the backwater is not more than 5 ℃.
In this embodiment, the area between the second partition 18 and the inner wall of the light box 5 forms the heat dissipation cavity 16, the heat dissipation cavity 16 is located above the cooling channel 19, and a plurality of heat dissipation fins are arranged in the heat dissipation cavity 16 at intervals in parallel, so that the heat dissipation effect can be further improved, heat accumulation can be prevented, and damage to the light source 20 can be avoided.
In this embodiment, since the solar cells generate heat by light irradiation, the solar cells need to be cooled during discharging, and therefore, a heat dissipation fan unit may be disposed in the light attenuation region 11, for example, three heat dissipation fan units may be disposed, one of the heat dissipation fan units is disposed on the upper cavity 2 and supplies air to the light attenuation region 11 from top to bottom, and the other two heat dissipation fan units are disposed on the lower cavity 3 and supply air to the light attenuation region 11 from bottom to top, so as to accelerate heat dissipation in the light attenuation region 11. Wherein, two cooling fan units on the lower cavity 3 can also exhaust air outwards. Wherein, every radiator fan unit can include a plurality of radiator fan 8 that set up side by side, and wherein, radiator fan 8 can adjust the volume of airing exhaust through the converter of self, and the volume scope of airing exhaust can be 200m3/h－500m3H is used as the reference value. When the heat dissipation fan 8 sucks or blows air into the lower cavity 3, the design of the support part and the blocking cap in the above embodiment can also be adopted.
In this embodiment, a transparent glass plate 22 is disposed at the opening of the light box 5, a filter film may be sputtered or deposited on the surface of the transparent glass plate 22, and the light source 20 is located between the mounting plate 17 and the transparent glass plate 22. The transparent glass plate 22 may be a highly transparent glass, which can reduce light reflection and increase light transmission; the filter may filter out clutter and retain light in the target wavelength range. Wherein, a fixing screw seat can be arranged on the mounting plate 17, and the transparent glass plate 22 is fixed on the fixing screw seat through a bolt. The transparent glass plate 22 is adopted to seal the opening of the light box 5, and all parts in the light box 5 and the solar cell on the conveying roller way 4 are isolated from each other, so that the cleanness of the environment in the process chamber can be ensured.
In this embodiment, it is preferable that a plurality of condensing lenses 21 are bonded to the surface of the transparent glass plate 22, and the condensing lenses 21 are concave mirrors for condensing light and increasing the light intensity. Wherein, if the light source 20 is an LED lamp bead, each LED lamp bead can be correspondingly provided with one condensing lens 21. When the light source 20 is an infrared light source, the condenser lens 21 may not be provided.
In this embodiment, the illumination mechanism further includes a control power supply 9, the control power supply 9 may be installed on the body 1 and located outside the process chamber, the control power supply 9 is electrically connected to the light source 20 through a wire, and the control power supply 9 is a high-precision power supply and can output a constant current power according to process requirements, so that the solar cell is well passivated.
Fig. 2 is a front view of the solar cell processing apparatus in fig. 1, and as shown in fig. 2, in this embodiment, the solar cell processing apparatus further includes a lifting member 6, where the lifting member 6 may be a hydraulic cylinder, an electric cylinder, or an air cylinder, a base of the lifting member 6 may be mounted on the body 1, and a telescopic head of the lifting member 6 may be connected to an outer sidewall of the upper cavity 2. For example, four lifting members 6 can be disposed at positions close to four corners of the upper chamber 2, and when the equipment in the process chamber needs to be repaired or cleaned, the lifting members 6 control the telescopic head to retract and drive the upper chamber 2 to be separated from the lower chamber 3. Wherein, can set up the detecting element 14 that opens and shuts on last cavity 2, judge that the feedback goes up cavity 2 and opens and shut the condition that targets in place, for example, the detecting element 14 that opens and shuts can be the shaft-like thing of welding on body 1, and when the top surface 26 of last cavity 2 touched this detecting element 14 that opens and shuts, the piece 6 that goes up and down stops the work of going up and down.
In this embodiment, in order to reduce the influence of the outside cold air entering the process chamber on the process environment in the process chamber, wind-blocking curtains 25 are disposed at the inlet and the outlet of the process chamber. The wind-blocking curtain 25 may be a stainless steel sheet, for example, a hook may be disposed on the upper chamber 2, and a mounting hole is drilled in a corresponding position on the wind-blocking curtain 25, so that the wind-blocking curtain 25 is detachably mounted at the inlet and the outlet of the process chamber. The wind screen 25 may be formed by splicing a plurality of small pieces, and may be arranged like a blind, so as to control the wind passing amount.
In this embodiment, the main rod of the conveying roller table 4 spans the chamber, and the main rod may be a solid or hollow structure. The specific material of the conveying roller way 4 can be a ceramic roller way, and the driving mode can be a magnetic conveying roller way or a bevel gear conveying roller way. Taking the magnetic driving wheels at the end of the conveying roller way 4 as an example, as shown in fig. 6, a magnetic collar 32 is disposed at the periphery of the end of each conveying roller way 4 along the axial direction of the conveying roller way 4, and the magnetic collar 32 includes a plurality of pairs of adjacent magnetically-repelling multi-polar arc rings disposed at intervals. The magnetic collar 32 may be a closed ring structure in which multiple arc-shaped poles N, S, N, and S … … are sequentially connected in the circumferential direction, for example. The magnetic lantern ring arranged at the end of the conveying roller way 4 forms a driven wheel 31, a driving wheel 30 is arranged in the direction vertical to the axial direction of the driven wheel 31, and the periphery of the driving wheel 30 is also a closed annular structure formed by sequentially connecting a plurality of sections of arc-shaped N magnetic poles, S magnetic poles, N magnetic poles and S magnetic poles … … along the circumferential direction. The driven wheel 31 is driven to rotate by the driving wheel 30, so as to drive the conveying roller way 4 to rotate. According to the modulus (namely the magnetic pole pair number) of the load matching magnetic lantern ring 32, the plurality of conveying roller ways 4 realize the conveying of the solar cells through the attraction and repulsion acting force of the magnetic lines of the plurality of groups of magnetic poles NSNS … …. Wherein, the magnetic poles of the magnetic lantern ring 32 appear in pairs, the more the magnetic poles are, the more the running is stable, and the torque is relatively small; the less the magnetic poles, the bigger the running pulsation and the relatively larger torque, and the model selection can be made according to the load in production application.
In addition, the conveying roller way 4 has a speed measurement feedback function, the encoder is used for feeding back the transmission speed in real time, so that the conveying roller way 4 can stably run, and different speeds can be set according to process requirements in the transmission process. And moreover, the non-contact magnetic ceramic roller way can be used for avoiding the generation of impurities such as scrap oil and grease in the process cavity, keeping the environment in the process cavity clean and being beneficial to improving the quality of the solar cell. In addition, the magnetic lantern ring is sleeved on the conveying roller way 4, so that the contact area between the solar cell and the conveying roller way 4 in the conveying process can be reduced, the surface of the solar cell is prevented from being abraded and scratched, and the improvement of the quality of the solar cell is also facilitated.
In conclusion, the solar cell processing equipment integrates the functions of drying, preheating, heat preservation, strong light irradiation, cooling and the like, so that the equipment at the front stage can be saved, the space utilization rate is higher, the layout is more compact, the integration level of an equipment production line is improved, the equipment volume is saved, and the plant land is saved; the solar cell can be continuously annealed, the stability can be kept in the treatment process, the temperature change is reduced, the higher passivation performance can be obtained, the open-circuit voltage reaches and exceeds 750mV, and the efficiency of the solar cell is improved; in addition, it also has the effects of improving production line efficiency and saving energy, for example, full-band spectrum or specific spectrum band, for example, infrared light with wavelength of 840nm, etc. can be used, and when different lamps are switched, such as red light and white light, energy of about 1/3 can be saved.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications derived therefrom are intended to be within the scope of the invention.
Claims (10)
1. A solar cell processing apparatus having a process chamber for receiving a solar cell, comprising at least:
the solar cell processing device comprises a process cavity, a drying area, a light attenuation area and a solar cell, wherein the process cavity is internally provided with a conveying mechanism, and is divided into the drying area and the light attenuation area which are adjacent to each other, penetrate and communicate with each other along the direction of conveying the solar cell by the conveying mechanism;
the drying mechanism is positioned in the drying area and is suitable for drying the solar cell;
and the illumination mechanism is positioned in the light attenuation area and is suitable for performing light attenuation treatment on the dried solar cell.
2. The solar cell processing apparatus according to claim 1,
the drying mechanism comprises heating pipes, and the heating pipes are arranged on the cavity walls of the process cavities on the two sides of the conveying mechanism and are respectively arranged above and below the conveying mechanism in positions.
3. The solar cell processing apparatus according to claim 2,
the heating pipes which are positioned above the conveying mechanism in an inclined mode are infrared heating pipes or halogen lamp heating pipes, and the infrared heating pipes or the halogen lamp heating pipes are arranged at intervals along the direction of conveying the solar cell;
the heating pipes which are positioned at the oblique lower part of the conveying mechanism are metal heating pipes, and the metal heating pipes are arranged at intervals along the direction of conveying the solar cell.
4. The solar cell processing apparatus according to claim 1,
a plurality of first partition plates are respectively and oppositely arranged above the upper inner wall of the process cavity and the conveying mechanism and below the lower inner wall of the process cavity and the conveying mechanism, the arrangement direction of the first partition plates is vertical to the conveying direction of the conveying mechanism, and each pair of the first partition plates opposite to each other in the conveying direction of the conveying mechanism divides the drying area into different sub-areas;
the first partition plate and the conveying mechanism are arranged in a separated mode, and a separated gap is suitable for the solar cell to pass through;
and each sub-area is provided with a temperature sensor, and the temperature sensors are used for testing the temperature of each sub-area corresponding to the process cavity.
5. The solar cell processing apparatus according to claim 1,
the drying mechanism further comprises an exhaust fan, an air inlet of the exhaust fan is located at the bottom of the process cavity and communicated with the drying area, and an air outlet of the exhaust fan is suitable for being communicated with an exhaust pipeline of the tail gas treatment system and discharging organic matters generated by high-temperature baking.
6. The solar cell processing apparatus according to claim 1,
the illumination mechanism comprises a light box, a mounting plate and a light source;
the light box is of an open structure, and the opening of the light box faces the conveying mechanism;
the mounting panel sets up the lower part of light box, the light source sets up the below of mounting panel, the light source orientation transport mechanism sets up.
7. The solar cell processing apparatus according to claim 6,
the illumination mechanism also comprises a transparent glass plate and a filtering module;
the transparent glass plate is arranged at the opening of the light box, and the light filtering module is arranged above the plate surface of the transparent glass plate and below the light source;
the filtering module comprises a plurality of condensing lenses corresponding to the light sources, and each condensing lens is a concave mirror.
8. The solar cell processing apparatus according to claim 7,
the illumination mechanism further comprises a cooling component, the cooling component comprises a second partition plate, the second partition plate is arranged in parallel with the mounting plate and is positioned on one surface of the mounting plate, which faces away from the light source, a cooling channel is formed in an area between the second partition plate and the mounting plate, and the cooling channel is suitable for forming a circulating cooling loop with an external cooling source;
and/or a heat dissipation cavity is formed in the area between the second partition plate and the inner wall of the light box, and a plurality of heat dissipation fins are arranged in the heat dissipation cavity at intervals in parallel;
the light attenuation area is provided with a heat dissipation fan unit which is suitable for accelerating heat dissipation in the light attenuation area.
9. The solar cell processing apparatus according to claim 6,
the illumination mechanism further includes: and the control power supplies are in one-to-one matching connection with the light sources and are arranged on the outer side of the process chamber, and the control power supplies are suitable for adjusting the light intensity of the light sources in matching connection with the control power supplies.
10. Solar cell processing apparatus according to any one of claims 1 to 9,
the process cavity comprises an upper cavity and a lower cavity, and the upper cavity and the lower cavity are buckled and connected with each other;
the treatment equipment further comprises a lifting part, and the lifting part of the lifting part is connected with the upper cavity and is suitable for lifting the upper cavity away from the lower cavity;
the conveying mechanism is a magnetic conveying roller way which is a ceramic roller way, and a plurality of magnetic lantern rings are arranged at intervals at the end part of the conveying roller way along the axial direction of the conveying roller way.
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