CN113594294B - Device for cooling solar thin film battery - Google Patents
Device for cooling solar thin film battery Download PDFInfo
- Publication number
- CN113594294B CN113594294B CN202110829178.7A CN202110829178A CN113594294B CN 113594294 B CN113594294 B CN 113594294B CN 202110829178 A CN202110829178 A CN 202110829178A CN 113594294 B CN113594294 B CN 113594294B
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- Prior art keywords
- cooling
- thin film
- solar thin
- film battery
- conveying track
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- 238000001816 cooling Methods 0.000 title claims abstract description 211
- 239000010409 thin film Substances 0.000 title claims abstract description 80
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 29
- 239000012634 fragment Substances 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000010992 reflux Methods 0.000 claims description 5
- 238000003491 array Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- 229910004613 CdTe Inorganic materials 0.000 description 17
- 239000010408 film Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
- H01L31/1836—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe comprising a growth substrate not being an AIIBVI compound
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The present invention relates to a device for cooling a solar thin film battery, in which a plurality of cooling fans are provided above a conveying rail for conveying solar thin film battery panels, and cooling air outlets of the cooling fans face downward toward different areas of the conveying rail. Therefore, the cooling effect of different areas can be controlled by controlling the cooling air quantity or the air speed of each cooling fan, so that the cooling of the solar thin film battery panel can be conveniently controlled according to the manufacturing process requirement, and the solar thin film battery panel is cooled according to the cooling process requirement.
Description
Technical Field
The invention relates to a device for cooling a solar thin film battery, and relates to the field of solar thin film battery production.
Background
The theoretical conversion efficiency of the CdTe solar cell reaches 28%, but the current mass production cell assembly is difficult to reach the value, so that the minority carrier lifetime of the CdTe solar cell is prolonged, the recombination rate of each interface is reduced, and the problems of good low-resistance ohmic contact and the like are key to improving the efficiency; in order to solve the problems, the CdTe solar cell needs to be subjected to heat treatment in the production process, the CdTe solar cell needs to be cooled after the heat treatment, the temperature of the heated CdTe solar cell can reach hundreds of degrees, and the CdTe solar cell (the thin film cell is plate-shaped and also called as a solar thin film cell plate) needs to be cooled according to a certain cooling rate after the heating; the cooling strength and the cooling uniformity have great influence on the performance of the CdTe thin film battery and the glass substrate, the excessive cooling can cause the breakage of the glass substrate, the uneven cooling can also cause the breakage of the glass substrate, and the cooling process determines the yield of the CdTe thin film battery to a great extent; once the cooling process causes the glass substrate to be broken, the harmful substances of CdTe particles of the CdTe film layer can be released into cooling equipment, and if the harmful substances are improperly treated, the harmful substances can leak to a production workshop, so that great potential safety hazards are brought to production staff.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a device for cooling a solar thin film battery, which can make the cooling strength of the solar thin film battery adjustable and controllable, so as to meet the cooling requirement.
In order to achieve the above object, the present invention provides a device for cooling a solar thin film battery, which adopts the following technical scheme: the device for cooling the solar thin film battery comprises a cooling box body, wherein an input port and an output port are arranged on the cooling box body, and a conveying track is arranged in the cooling box body and is used for receiving the solar thin film battery panel conveyed from the input port to the upstream and conveying the solar thin film battery panel to the downstream through the output port;
a plurality of cooling fans are arranged above the conveying track and are arranged in the cooling box body, and cooling air outlets of the cooling fans face downwards to different areas of the conveying track.
Preferably, a cooler is further arranged between the cooling air outlet and the conveying track, and the air flow flowing out of the cooling air outlet flows to the conveying track after being cooled by the cooler.
More preferably, the cooler is a cooling circulating water pipe, and the cooling circulating water pipe is connected with a water cooling circulating device arranged outside the cooling box body.
Preferably, the water cooling circulation device comprises an inner circulating water pump connected with the cooling circulation water pipe and an outer cooling device connected with the cooling circulation water pipe.
Preferably, a deflector is arranged at the lower end of the cooling air outlet, and the deflector guides the air flow flowing out of the cooling air outlet to the conveying track.
Further, the upper end of the cooling fan is provided with an air suction port; and a reflux channel is formed between the outer side surfaces of two adjacent guide plates or between the outer side surfaces of the guide plates and the inner side wall of the cooling box body, and the air flow flowing out of the cooling air outlet bypasses the lower edge of the guide plates and flows into the air suction port from the reflux channel.
Further, the lower edge of the guide plate is inclined outwards.
Preferably, the plurality of cooling fan arrays are uniformly distributed above the conveying track, and each cooling fan is independently controlled by the control device.
Preferably, a slide plate which is arranged obliquely is also arranged below the conveying track and is used for receiving the solar film panel fragments which are broken accidentally.
More preferably, the lower end of the sliding plate is provided with a section of horizontal extension plate.
As described above, the apparatus for cooling a solar thin film battery according to the present invention has the following advantageous effects: in the device for cooling the solar thin film battery, a plurality of cooling fans are arranged above a conveying track for conveying the solar thin film battery plates, and cooling air outlets of the cooling fans face downwards to different areas of the conveying track. Therefore, the cooling effect of different areas can be controlled by controlling the cooling air quantity or the air speed of each cooling fan, so that the cooling of the solar thin film battery panel can be conveniently controlled according to the manufacturing process requirement, and the solar thin film battery panel is cooled according to the cooling process requirement.
Drawings
Fig. 1 shows a front view of an apparatus for cooling a solar thin film battery according to the present invention.
Fig. 2 shows a left side view of an apparatus for cooling a solar thin film battery according to the present invention.
Fig. 3 shows a top view of an apparatus for cooling a solar thin film battery according to the present invention.
FIG. 4 is a schematic diagram showing the connection of the cooling circulation water pipe and the water cooling circulation device.
Description of element reference numerals
1. Cooling box
2. Skateboard
3. Horizontal extension plate
4. Conveying track
5. Cooling fan
6. Solar thin film battery plate
7. Cooling air outlet
8. Cooling circulating water pipe
9. Water cooling circulation device
10. Internal circulation water pump
11. External cooling device
12. Deflector plate
13. Suction port
14. Reflux passage
15. Heating furnace
16. Downstream roller way
Detailed Description
Further advantages and effects of the present invention will become apparent to those skilled in the art from the disclosure of the present invention, which is described by the following specific examples.
It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the invention to the extent that it can be practiced, since modifications, changes in the proportions, or otherwise, used in the practice of the invention, are not intended to be critical to the essential characteristics of the invention, but are intended to fall within the spirit and scope of the invention. Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the invention, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the invention may be practiced.
As shown in fig. 1, the present invention provides an apparatus for cooling a solar thin film battery, comprising a cooling box 1, wherein an input port (not shown) and an output port (not shown) are provided on the cooling box 1, and a conveying rail 4 is provided in the cooling box 1, and the conveying rail 4 is used for receiving an upstream conveyed solar thin film battery panel 6 from the input port and conveying the solar thin film battery panel 6 downstream through the output port; a plurality of cooling fans 5 are arranged above the conveying track 4, the cooling fans 5 are arranged in the cooling box body 1, and cooling air outlets 7 of the cooling fans 5 face downwards to different areas of the conveying track 4.
In an apparatus for cooling solar thin film batteries of the present invention, since a plurality of cooling fans 5 are provided above a transfer rail 4 for transporting solar thin film batteries 6, cooling air outlets 7 of the cooling fans 5 face downward toward different areas of the transfer rail 4. In this way, the cooling effect of different areas can be controlled by controlling the cooling air quantity or the air speed of each cooling fan 5, so that the cooling of the solar thin film battery panel 6 can be conveniently controlled according to the manufacturing process requirement, and the solar thin film battery panel 6 can be cooled according to the cooling process requirement.
The device for cooling the solar film battery of the invention cools the solar film battery panel 6 conveyed from the upstream heating furnace 15 and then conveys the solar film battery panel 6 to the downstream station, a roller way is arranged in the heating furnace 15 to output the solar film battery panel 6, the solar film battery panel 6 coming out of the heating furnace 15 is conveyed from an input port (not shown in the figure) on the cooling box body 1 to the conveying track 4, and the solar film battery panel 6 is conveyed from an output port (not shown in the figure) to the downstream roller way 16 after being cooled.
In order to make the cooling effect better, as shown in fig. 1 and 2, a cooler is further disposed between the cooling air outlet 7 and the conveying track 4, and the air flow flowing out from the cooling air outlet 7 flows to the conveying track 4 after being cooled by the cooler. In this way, the cooling air flow from the cooling fan 5 is cooled by the cooler and then flows to the surface of the solar thin film battery panel 6, so that the solar thin film battery panel 6 is cooled.
In order to make the cooling air flow blown out by the cooling fan 5 intensively flow to the solar film panel 6, so that the cooling efficiency is better, as shown in fig. 1, a deflector 12 is arranged at the lower end of the cooling air outlet 7, and the deflector 12 guides the air flow flowing out from the cooling air outlet 7 to the conveying track 4. Therefore, the cooling air flows are not easy to flow laterally, and the cooling air flows generated by the adjacent cooling fans 5 are not easy to flow laterally to mix, so that parameters such as the air output and the air speed of the cooling fans 5 and the cooling power of the cooler are accurately controlled according to the cooling requirements of different areas, the solar thin film battery panel 6 is uniformly cooled according to a certain cooling curve temperature, and the solar thin film battery panel 6 is prevented from being broken.
In the device for cooling the solar thin film battery of the present invention, the cooling fan 5 is disposed in the cooling box 1, the cooling air flow generated by the cooling fan 5 flows in the cooling box 1, and in order to enable the cooling air flow to be recycled, as shown in fig. 1 and 2, the upper end of the cooling fan 5 is provided with the air suction port 13; a backflow channel 14 is formed between the outer side surfaces of two adjacent guide plates 12 or between the outer side surfaces of the guide plates 12 and the inner side wall of the cooling box body 1, and air flow flowing out of the cooling air outlet 7 bypasses the lower edge of the guide plates 12 and flows into the air suction port 13 from the backflow channel 14. Therefore, the cooling air flows through the surface of the solar thin film panel 6 to cool the solar thin film panel 6 and then returns to the cooling fan 5 through the return channel 14 to be recycled, so that the waste of cooling power consumption is reduced. In order to enable the cooling air flow to smoothly flow back into the backflow channel 14, as shown in fig. 1, the lower edge of the deflector 12 is inclined outwards, so that the air flow flowing out from the lower end of the deflector 12 is easy to diffuse around along the surface of the solar thin film panel 6, so that the cooling is more uniform, and the surface of the solar thin film panel 6 between two adjacent cooling areas can be well cooled. As shown in fig. 3, in order to make the cooling effect of the solar thin film battery panel 6 more uniform and more in line with the cooling curve requirement, the plurality of cooling fans 5 are uniformly distributed above the conveying track 4, and each cooling fan 5 is independently controlled by the control device, so that the cooling fans 5 in different areas can be controlled according to the cooling curve requirement, and each area is in line with the cooling requirement, and the screw and arrangement mode of the cooling fans 5 can be determined according to specific requirements. Referring to fig. 1, in general, the cooling fans 5 may be arranged in groups along the conveying direction, the upstream area of the solar thin film panel 6 may have a higher temperature and may require a stronger cooling, the downstream area may have a lower temperature after being cooled upstream, and may require a weaker cooling, each cooling fan 5 and each cooler are independently controlled by a control device, and the control device controls parameters such as the air output and the air speed of each cooling fan 5 according to the requirements, and simultaneously controls parameters such as the cooling temperature of each cooler, thereby controlling the air flow temperature flowing to the surface of the solar thin film panel 6.
As shown in fig. 1, as a preferred embodiment, the cooler is a cooling circulation water pipe 8, and the cooling circulation water pipe 8 is connected to a water cooling circulation device 9 provided outside the cooling box 1. Thus, the circulating cooling water in the pipeline is cooled by the external water cooling circulation device 9, so that the constant-temperature cooling control of the cooler is realized, and the stability of the cooling air temperature is ensured. As shown in fig. 4, the water cooling circulation device includes an inner circulation water pump 10 connected to the cooling circulation water pipe 8, and an outer cooling device 11 connected to the cooling circulation water pipe 8. The cooler is mainly used for cooling circulating cooling air in the cooling box body 1, so that the stability of the temperature of the internal cooling air is ensured, the internal circulating water pump 10 is mainly used for realizing the internal circulating function of cooling water in the cooler, and the water flow rate is controlled by the rotating speed of the internal circulating water pump 10 so as to realize the control of the cooling capacity of the cooler; the external cooling device 11 is mainly used for cooling the cooling water of the cooler, so that the temperature stability of the cooling water of the cooler is ensured, and the stability of the temperature of cooling air is realized.
The CdTe thin film layer in the solar thin film panel 6 contains CdTe particles, in order to avoid that the harmful substances of CdTe particles in the CdTe thin film layer leak to a production workshop after the solar thin film panel 6 is broken accidentally, and brings great potential safety hazards to production personnel, as shown in fig. 2, a slide plate 2 arranged obliquely is further arranged below the conveying track 4, and the slide plate 2 is used for receiving fragments of the solar thin film panel 6 broken accidentally. In order to facilitate the storage of fragments of the solar thin film battery panel 6, the lower end of the sliding plate 2 is provided with a section of horizontal extension plate 3, so that after the solar thin film battery panel 6 is accidentally broken, the broken fragments automatically slide on the sliding plate 2 to the horizontal extension plate 3 for storage, and the fragments are conveniently cleaned periodically at a later stage; in addition, when the equipment needs to be overhauled and maintained, the sliding plate 2 can be used as a maintenance overhauling channel.
In the device for cooling the solar thin film battery, the cooling box body 1 of the cooling device mainly comprises an equipment frame (not shown in the figure) and a peripheral sealing cover plate (not shown in the figure), wherein the equipment frame is mainly used for supporting related accessories such as a cooling fan 5, a cooler, a conveying track 4 and the like on equipment, and the stability of the installation and the position of each accessory is ensured; the sealing property of the inner cavity of the cooling device is ensured by the peripheral sealing cover plate, and the harmful substances of CdTe particles in the inner cavity are prevented from leaking. The axial flow fans can be selected as the cooling fans 5, each axial flow fan can be independently controlled, multi-region and regional controllability can be realized, and the uniformity of cooling intensity during cooling is ensured. The conveying track 4 is mainly used for conveying the solar thin film battery plate 6, the conveying track 4 is a roller type conveying track formed by a plurality of conveying rollers which are arranged in parallel, the conveying rollers synchronously rotate under the drive of a whole synchronous belt, and the transmission of the whole synchronous belt ensures the stability of transmission. If the solar thin film panel 6 breaks accidentally, the debris automatically falls from the gap between the conveyor rolls onto the underlying slide plate 2.
Based on the technical scheme, the device for cooling the solar thin film battery can realize cooling of the solar thin film battery panel 6 in a zoned manner, so that the solar thin film battery panel 6 is uniformly cooled according to a certain cooling curve temperature, the solar thin film battery panel 6 is ensured not to be broken, and in case of breaking, harmful substances of CdTe particles in the solar thin film battery panel 6 can not leak into a workshop environment. The device for cooling the solar thin film battery adopts wind as a cooling medium to cool the solar thin film battery panel 6, a plurality of cooling fans 5 are arranged at the upper end of the solar thin film battery panel 6 in a row, a cooler is arranged at the outlet of each cooling fan 5, and the wind from the fan acts on the surface of the solar thin film battery panel 6 after being cooled by the cooler, so that the solar thin film battery panel 6 is cooled. Therefore, the device for cooling the solar thin film battery can realize cooling of the solar thin film battery panel 6 according to a cooling process curve; the cooling intensity of the multiple areas is adjustable and controllable, so that the cooling uniformity is ensured; the constant temperature control of cooling air is ensured through the inner cooling system and the outer cooling system; the sealed cooling device ensures that harmful substances of CdTe particles do not leak, and ensures the safety of the working environment during production.
In summary, the present invention effectively overcomes the disadvantages of the prior art and has high industrial utility value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (7)
1. The device for cooling the solar thin film battery is characterized by comprising a cooling box body, wherein an input port and an output port are arranged on the cooling box body, and a conveying track is arranged in the cooling box body and is used for receiving the solar thin film battery plate conveyed from the input port to the upstream and conveying the solar thin film battery plate to the downstream through the output port;
a plurality of cooling fans are arranged above the conveying track, and are arranged in the cooling box body, and cooling air outlets of the cooling fans face downwards to different areas of the conveying track;
the lower end of the cooling air outlet is provided with a guide plate, the guide plate guides the air flow flowing out of the cooling air outlet to the conveying track, and the lower edge of the guide plate is outwards inclined and folded; the upper end of the cooling fan is provided with an air suction port; a reflux channel is formed between the outer side surfaces of two adjacent guide plates or between the outer side surfaces of the guide plates and the inner side wall of the cooling box body, and air flow flowing out from the cooling air outlet bypasses the lower edge of the guide plates and flows into the air suction port from the reflux channel; the cooling air flows through the surface of the solar thin film panel to cool the solar thin film panel, and then returns to the cooling fan through the return channel to be recycled.
2. The apparatus for cooling a solar thin film battery according to claim 1, wherein: and a cooler is further arranged between the cooling air outlet and the conveying track, and air flow flowing out of the cooling air outlet flows to the conveying track after being cooled by the cooler.
3. The apparatus for cooling a solar thin film battery according to claim 2, wherein: the cooler is a cooling circulating water pipe which is connected with a water cooling circulating device arranged on the outer side of the cooling box body.
4. The apparatus for cooling a solar thin film battery according to claim 3, wherein: the water cooling circulation device comprises an inner circulating water pump connected with the cooling circulation water pipe and an outer cooling device connected with the cooling circulation water pipe.
5. The apparatus for cooling a solar thin film battery according to claim 1, wherein: the plurality of cooling fan arrays are uniformly distributed above the conveying track, and each cooling fan is independently controlled by the control device.
6. The apparatus for cooling a solar thin film battery according to claim 1, wherein: and a slide plate which is obliquely arranged is further arranged below the conveying track and is used for receiving solar thin film cell panel fragments which are broken accidentally.
7. The apparatus for cooling a solar thin film battery according to claim 6, wherein: the lower end of the sliding plate is provided with a section of horizontal extension plate.
Priority Applications (1)
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CN202110829178.7A CN113594294B (en) | 2021-07-22 | 2021-07-22 | Device for cooling solar thin film battery |
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CN202110829178.7A CN113594294B (en) | 2021-07-22 | 2021-07-22 | Device for cooling solar thin film battery |
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CN113594294A CN113594294A (en) | 2021-11-02 |
CN113594294B true CN113594294B (en) | 2023-12-29 |
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CN110594739A (en) * | 2019-08-02 | 2019-12-20 | 华中科技大学 | Flameless combustor without preheating switching |
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JP2001077384A (en) * | 1999-09-02 | 2001-03-23 | Fuji Electric Co Ltd | Method for manufacturing thin film solar cell and processing device used for the same |
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