CN201180089Y - Water cooling double-layer glass viewing mirror of novel polysilicon reduction furnace - Google Patents
Water cooling double-layer glass viewing mirror of novel polysilicon reduction furnace Download PDFInfo
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- CN201180089Y CN201180089Y CNU2008200320495U CN200820032049U CN201180089Y CN 201180089 Y CN201180089 Y CN 201180089Y CN U2008200320495 U CNU2008200320495 U CN U2008200320495U CN 200820032049 U CN200820032049 U CN 200820032049U CN 201180089 Y CN201180089 Y CN 201180089Y
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Abstract
The utility model relates to a novel water-cooling double glass viewing mirror for a polysilicon reducing furnace, comprising an inner cylinder (12), an outer cylinder (13), a flange III (10), a flange II (8), a flange I (7), inner glass (6), outer glass (5), a cooling water inlet I (2), a cooling water inlet II (1), a cooling water outlet II (9) and a cooling water outlet I (11), wherein the inner cylinder (12) is inserted in an inner hole of the flange III (10); the outer cylinder (13) is arranged on the inner end of the flange III (10); the flange II (8) and the flange I (7) are laminated outside the flange III (10) in sequence; the inner glass (6) is arranged between the flange III (10) and the flange II (8); the outer glass (5) is arranged between the flange II (8) and the flange I (7); a closed chamber is formed among the inner glass (6), the outer glass (5) and the flange II (8); the flange II (8) is provided with the cooling water inlet II (2) and the cooling water outlet II (9); and the outer cylinder (12) is provided with the cooling water inlet I (1) and the cooling water outlet I (11). Cooling water cools the outer glass, the inner glass, the inner cylinder and the outer cylinder. The novel water-cooling double glass viewing mirror has excellent cooling effect.
Description
Technical field
The utility model relates to a kind of reduction furnace of producing polysilicon, especially relates to a kind of water-cooling double glass viewing mirror of New Polycrystalline Si reduction stove.Belong to the polysilicon preparing technical field.
Background technology
Polysilicon is the direct material of manufacture order crystal silicon.High-purity polycrystalline silicon is the base mateiral of semiconducter device such as opto-electronic conversion battery, unicircuit.Along with the fast development of world semiconductor industry, the extensive application of very large scale integrated circuit, the heavy demand of photovoltaic cell, All Around The World is significantly increasing the demand of polysilicon.
The method of production polysilicon has multiple, and hydrogen reduction method is modal a kind of method.This method is that silicon halogenide of purifying and the good hydrogen of purification are fed reduction furnace as raw material, and in hot environment, silicon halogenide and hydrogen generation chemical reaction generate polysilicon, and be deposited on the heating element (silicon rod of minor diameter).Chemical reaction is proceeded, and the polysilicon that is deposited on the heating element is more and more, silicon rod is chap gradually, has generated virtual height at last and has been about the polysilicon rod that 2.8m, diameter are about 150mm.
Polycrystalline silicon reducing furnace is the final generation equipment of polysilicon rod, generated in the process of polysilicon rod by hydrogen reducing at silicon halogenide, can emit a large amount of heat, working temperature in the reduction furnace surpasses 1000 ℃, the safe handling of the cooling direct relation reduction furnace of reduction furnace and the work-ing life of reduction furnace.
Polycrystalline silicon reducing furnace, domestic existing correlative study is illustrated respectively below.
Patent No. ZL 200420060144.8 also discloses a kind of hydrogen reduction furnace for polysilicon, this reduction furnace comprises end socket and the body of heater that has cooling water cavity, the chassis, inlet pipe under the chassis and vapor pipe, electrode on the chassis, described electrode is 12 pairs, i.e. 24 electrodes, and two circumference uniform distribution settings in the upper edge, chassis; Described inlet pipe mainly is made of a horizontal endless tube and 9 nozzles connections, and wherein 8 nozzles are arranged on the chassis between two circle electrodes and along same circumference uniform distribution, and a nozzle is arranged on the center chassis position.Be arranged on the excircle in 8 counter electrode, all the other 4 counter electrode are arranged on the inner periphery.In the electrode, positive and negative electrode is provided with on the chassis one by one at interval.The chassis is a water-cooled structure, and entrance of cooling water and outlet are set on it.Body of heater is provided with the form of double-layer glass structure.The end socket top is provided with joint flange.The main weak point of this patent is that visor does not adopt water-cooling structure, can not guarantee to surpass in reduction furnace steady in a long-term use the under 1000 ℃ of hot conditionss.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, and a kind of water-cooling double glass viewing mirror that has the New Polycrystalline Si reduction stove of water-cooling structure is provided.
The purpose of this utility model is achieved in that a kind of water-cooling double glass viewing mirror of New Polycrystalline Si reduction stove, comprise inner core, urceolus, flange III, flange II, flange I, inner layer glass, glass outer, entrance of cooling water I, entrance of cooling water II, cooling water outlet II and cooling water outlet I, described inner core and the coaxial setting of urceolus, inner core is plugged in the flange III endoporus, urceolus is arranged on flange III the inner, flange II and flange I successively stacked in the flange III outside, inner layer glass is arranged between flange III and the flange II, glass outer is arranged between flange II and the flange I, inner layer glass, surround a sealing cavity volume between glass outer and the flange II, flange II is provided with entrance of cooling water II and cooling water outlet II, and urceolus is provided with entrance of cooling water I and cooling water outlet I.Water coolant cools off glass outer, inner layer glass, inner core, urceolus.
Compare with visor with existing polycrystalline silicon reducing furnace, the utility model can guarantee long-term, the reliable operation of visor, with long-term, safety, the operation efficiently that realizes reduction furnace.
Description of drawings
Fig. 1 is the water-cooling double glass viewing mirror structural representation of the utility model New Polycrystalline Si reduction stove.
Among the figure: entrance of cooling water I 1, entrance of cooling water II 2, bolt 3, nut 4, glass outer 5, inner layer glass 6, flange I 7, flange II 8, cooling water outlet II 9, flange III 10, cooling water outlet I 11, inner core 12, urceolus 13.
Embodiment
Referring to Fig. 1, the water-cooling double glass viewing mirror of New Polycrystalline Si reduction stove mainly is made up of inner core 12, urceolus 13, flange III 10, flange II 8, flange I 7, inner layer glass 6, glass outer 5, entrance of cooling water I 2, entrance of cooling water II 1, cooling water outlet II 9 and cooling water outlet I 11.Described inner core 12 is plugged in flange III 10 endoporus with urceolus 13 coaxial settings, inner core 12, and urceolus 13 is arranged on flange III 10 the inners, flange II 8 and flange I 7 successively stacked in flange III 10 outsides, and fixing with bolt 3 and nut 4.Inner layer glass 6 is arranged between flange III 10 and the flange II 8.Glass outer 5 is arranged between flange II 8 and the flange I 7.Surround a sealing cavity volume between inner layer glass 6, glass outer 5 and the flange II 8.Flange II 8 is provided with entrance of cooling water II 2 and cooling water outlet II 9.Urceolus 12 is provided with entrance of cooling water I 1 and cooling water outlet I 11.One road water coolant enters, flows through gap between glass outer 5 and the inner layer glass 6 from entrance of cooling water II 2, and glass outer 5 and inner layer glass 6 are cooled off, and discharges from cooling water outlet II 9.Another road water coolant enters from entrance of cooling water I 1, and inner core 12, urceolus 13 are cooled off, and discharges from cooling water outlet I 11.
Claims (1)
1, a kind of water-cooling double glass viewing mirror of New Polycrystalline Si reduction stove, it is characterized in that described visor comprises inner core (12), urceolus (13), flange III (10), flange II (8), flange I (7), inner layer glass (6), glass outer (5), entrance of cooling water I (2), entrance of cooling water II (1), cooling water outlet II (9) and cooling water outlet I (11), described inner core (12) and the coaxial setting of urceolus (13), inner core (12) is plugged in flange III (10) endoporus, urceolus (13) is arranged on flange III (10) the inner, flange II (8) and flange I (7) successively stacked in flange III (10) outside, inner layer glass (6) is arranged between flange III (10) and the flange II (8), glass outer (5) is arranged between flange II (8) and the flange I (7), inner layer glass (6), surround a sealing cavity volume between glass outer (5) and the flange II (8), flange II (8) is provided with entrance of cooling water II (2) and cooling water outlet II (9), and urceolus (12) is provided with entrance of cooling water I (1) and cooling water outlet I (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200320495U CN201180089Y (en) | 2008-03-12 | 2008-03-12 | Water cooling double-layer glass viewing mirror of novel polysilicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200320495U CN201180089Y (en) | 2008-03-12 | 2008-03-12 | Water cooling double-layer glass viewing mirror of novel polysilicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201180089Y true CN201180089Y (en) | 2009-01-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200320495U Expired - Lifetime CN201180089Y (en) | 2008-03-12 | 2008-03-12 | Water cooling double-layer glass viewing mirror of novel polysilicon reduction furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN201180089Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100575843C (en) * | 2008-03-12 | 2009-12-30 | 江苏双良锅炉有限公司 | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror |
| CN102311120A (en) * | 2011-07-28 | 2012-01-11 | 中国恩菲工程技术有限公司 | Polysilicon reducing furnace and observation visor |
| CN109112624A (en) * | 2017-06-23 | 2019-01-01 | 镇江仁德新能源科技有限公司 | It is a kind of for producing the polycrystalline furnace of solar level high-efficiency polycrystalline silicon wafer |
-
2008
- 2008-03-12 CN CNU2008200320495U patent/CN201180089Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100575843C (en) * | 2008-03-12 | 2009-12-30 | 江苏双良锅炉有限公司 | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror |
| CN102311120A (en) * | 2011-07-28 | 2012-01-11 | 中国恩菲工程技术有限公司 | Polysilicon reducing furnace and observation visor |
| CN109112624A (en) * | 2017-06-23 | 2019-01-01 | 镇江仁德新能源科技有限公司 | It is a kind of for producing the polycrystalline furnace of solar level high-efficiency polycrystalline silicon wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20080312 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |