CN107045993A - Electro-migration testing device, electro-migration testing system and its method of testing - Google Patents

Electro-migration testing device, electro-migration testing system and its method of testing Download PDF

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Publication number
CN107045993A
CN107045993A CN201610083841.2A CN201610083841A CN107045993A CN 107045993 A CN107045993 A CN 107045993A CN 201610083841 A CN201610083841 A CN 201610083841A CN 107045993 A CN107045993 A CN 107045993A
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geodesic structure
treat
temperature
current
heated
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CN107045993B (en
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甘正浩
冯军宏
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Abstract

A kind of electro-migration testing device, electro-migration testing system and its method of testing, wherein electro-migration testing device include：For realizing the connection metal level with the electrical connection for treating geodesic structure；For treating the loading electrode that geodesic structure applies test voltage to described；Described treat that geodesic structure senses the sensing electrode of voltage under test conditions for obtaining；For treating the heater element that geodesic structure is heated to described.The present invention makes described to treat that the temperature of geodesic structure reaches the test condition by independent heater element, so that influence of the temperature to the electromigration for treating geodesic structure is separated with electric current to the influence for treating geodesic structure electromigration, the accuracy that the activation for treating geodesic structure obtained can be with the Activation Energy can be improved, and then the accuracy of obtained described treat geodesic structure out-of-service time under operating conditions is improved, effectively improve the accuracy of electro-migration testing.

Description

Electro-migration testing device, electro-migration testing system and its method of testing
Technical field
The present invention relates to field of semiconductor device test, more particularly to a kind of electro-migration testing device, electricity are moved Move test system and its method of testing.
Background technology
ELECTROMIGRATION PHENOMENON refers to the phenomenon that metal ion is migrated under electric field action.Work as semiconductor devices There is certain electric current to pass through during work, in metal interconnection structure.When current density is larger in metal interconnecting wires When, electronics is faced south hypervelocity motion under the driving of electrostatic field by negative electrode, forms electron wind (Electron Wind), metal ion orientation diffusion from cathode to anode under the driving of electron wind, so as to occur electromigration.
Electromigration occurs for the metal ion in metal interconnection structure, easily forms empty in metal interconnection structure , so as to cause open circuit or the short circuit of metal interconnection structure, and then there is leakage current increase even in hole or projection The phenomenon of component failure.
With the reduction of dimensions of semiconductor devices, the size of the metal interconnection structure in semiconductor devices is not yet Disconnected to reduce, so as to cause the current density in metal interconnection structure to be continuously increased, electromigration causes semiconductor The problem of component failure, is increasingly severe, so the electro-migration testing of metal interconnection structure is with regard to attention.
Traditional electro-migration testing method passes through package level reliability testing (Package Level Reliability Test) complete, this electro-migration testing method includes：By sample scribing, the wafer after scribing is carried out Encapsulation, loads baking oven by the chip after encapsulation and is tested.Scribing, encapsulation before being tested etc. are filled The damage of chip and the consumption of silicon chip are likely to cause with process.Electro-migration testing process from chip package to Test completion is needed to spend several time-of-weeks, and the quality of metal interconnection structure can not be monitored in real time. The survey of metal interconnection structure is carried out using wafer scale reliability testing (Wafer-Level Reliability Test) The problem of examination can avoid excessive cycle.
But in the prior art still there is test in the method for the wafer scale reliability testing of metal interconnection structure As a result inaccurate the problem of.
The content of the invention
The problem of present invention is solved is to provide a kind of electro-migration testing device, electro-migration testing system and its survey Method for testing, to improve the accuracy of electro-migration testing result.
To solve the above problems, the present invention provides a kind of electro-migration testing device, including：
Metal level is connected, one end is with treating that geodesic structure is connected, for realizing and the electrical connection for treating geodesic structure；
Electrode is loaded, and the connection metal level is not connected described treats that one end of geodesic structure is electrically connected, be used for Treat that geodesic structure applies test voltage to described, make it is described treat that the sensing electric current of geodesic structure reaches test condition, To realize electromigration；
Sensing electrode, treats that one end of geodesic structure is electrically connected, for obtaining with described in the connection metal level connection The sensing voltage of geodesic structure under test conditions is treated described in obtaining；
Heater element, for treating that geodesic structure is heated to described, makes described to treat that the temperature of geodesic structure reaches The test condition, realizes electromigration.
Optionally, the heater element includes one or more fin formula field effect transistors；It is one or Multiple fin formula field effect transistors are located at described treat below geodesic structure.
Optionally, it is described to treat the distance between geodesic structure and described heater element in 10nm to 1 μ m It is interior.
Optionally, it is described to treat that geodesic structure includes metal interconnecting wires or the metal interconnecting wires with connector.
Optionally, described to treat that geodesic structure is metal interconnecting wires, it is mutual that the connection metal level is located at the metal Line two ends, and be directly connected to the metal interconnecting wires.
Optionally, it is described to treat that geodesic structure is the metal interconnecting wires with plug structure, the connection metal level It is connected positioned at the metal interconnecting wires two ends, and by the connector with the metal interconnecting wires.
Optionally, the metal interconnecting wires are strip；The heater element includes multiple fin field effects Transistor, multiple fin formula field effect transistors have multiple fins, and multiple fins are mutually put down Go and be arranged in parallel with the metal interconnecting wires.
Optionally, the fin formula field effect transistor also includes grid structure, and the grid structure is across more The individual fin, and cover the part surface at the top of the fin with side wall；The metal interconnecting wires and institute The distance between grid structure top is stated in 10nm to 1 μ m.
Optionally, the connection metal level includes the first connection metal level and the second connection metal level, respectively Positioned at treating geodesic structure two ends；The loading electrode includes the first loading electrode and the second loading electrode, described First loading electrode is connected the not connected one end for treating geodesic structure of metal level with described first and is connected；Described second Loading electrode is connected the not connected one end for treating geodesic structure of metal level with described second and is connected；The sensing electrode Including the first sensing electrode and the second sensing electrode, first sensing electrode be located at the first loading electrode with Between treated geodesic structure；Second sensing electrode is located at the described second loading electrode and treats geodesic structure with described Between.
The present invention also provides a kind of electro-migration testing system, including：
The electro-migration testing device that the present invention is improved；
First heater, for changing the temperature for treating geodesic structure；
Temperature acquisition device, for being obtained when the first heater changes the structure temperature to be measured The structure temperature to be measured；
Power supply, for being treated when the first heater changes the structure temperature to be measured to described Geodesic structure is powered；
Test power supply, for by heater element to it is described treat that geodesic structure is heated during, to The loading electrode loading test voltage；
Voltage acquisition apparatus, is connected with the sensing electrode, for obtaining the voltage for treating geodesic structure；
Electric current acquisition device, treats that geodesic structure is connected with described, for obtaining the electric current for treating geodesic structure；
Heated current acquisition device, is connected with the heater element, and the heater element is passed through for obtaining Heated current；
Time acquisition device, the first out-of-service time of geodesic structure under test conditions is treated for obtaining；
Pretreatment unit, is connected with the temperature acquisition device, for changing in the first heater The structure temperature to be measured is obtained during the structure temperature to be measured；It is connected with the heated current acquisition device, For when heater element is passed through heated current, obtaining the heated current for being passed through heater element；Obtained with voltage Device is taken to be connected with electric current acquisition device, for obtaining the voltage and current for treating geodesic structure, and according to The resistance of geodesic structure is treated described in the voltage and current acquisition for treating geodesic structure；Change in first heater During the structure temperature to be measured, the pretreatment unit is used to obtain the temperature for treating geodesic structure and treats geodesic structure Resistance relation；Heated current is passed through to described when geodesic structure is heated to the heater element, The pretreatment unit is used for the relation for obtaining heated current and structural resistance to be measured；The pretreatment unit It is additionally operable to according to the relation and heated current and knot to be measured for treating resistance of the temperature of geodesic structure with treating geodesic structure The relation of structure resistance, obtains heated current and the relation of structure temperature to be measured；
Test processes device, is connected with voltage acquisition apparatus and electric current acquisition device, for obtaining described treat The voltage and current of geodesic structure, and treat according to being obtained the voltage and current resistance variations of geodesic structure Rate；It is connected with the heated current acquisition device, for when heater element is passed through heated current, obtaining It is passed through the heated current of heater element；The test processes device is additionally operable to be sentenced according to the resistance change rate Treat whether geodesic structure fails described in disconnected, judge described to be measured when the resistance change rate reaches predetermined threshold value Structural failure；It is connected with the time acquisition device, for being obtained when judging the structural failure to be measured It is described to treat the first out-of-service time of geodesic structure under test conditions；
Work disposal device, is connected with the pretreatment unit, for obtaining heated current and treating geodesic structure The relation of temperature；Be connected with the test processes device, for obtain the first out-of-service time and with it is described First out-of-service time corresponding sensing electric current；For according to first out-of-service time and combination heating electricity Stream and the activation energy that geodesic structure is treated described in the relation acquisition of structure temperature to be measured；For according to the sensing electricity Stream obtains the current density of the sensing electric current, and with reference to first failure corresponding with the sensing electric current Time obtains the Activation Energy；It is additionally operable to treat the activation energy and current density of geodesic structure according to Index treats the second out-of-service time of geodesic structure under running conditions described in obtaining.
Optionally, the first heater includes：Chuck can be heated；The voltage acquisition apparatus includes： Potentiometer；The electric current acquisition device includes：First galvanometer；The heated current acquisition device includes： Second galvanometer；The time acquisition device includes：Timer.
Accordingly, the present invention also provides a kind of test side using electro-migration testing device provided by the present invention Method, including：
Geodesic structure is treated in offer；
The resistance for treating geodesic structure under measurement different temperatures, to obtain the temperature and knot to be measured for the treatment of geodesic structure The relation of the resistance of structure；
Treat that geodesic structure is moved with the electricity described in claim 1 to claim 9 any one claim by described Move test device to be connected, be passed through heated current to the heater element and treat that geodesic structure is heated to described, And the resistance of geodesic structure is treated described in measuring, obtain the relation of heated current and structural resistance to be measured；
According to the temperature for treating geodesic structure and the relation for the resistance for treating geodesic structure, with reference to heated current and knot to be measured The relation of structure resistance, obtains heated current and the relation of structure temperature to be measured；
Heated current, which is passed through, to the heater element treats that geodesic structure is heated to described；
By heater element to it is described treat that geodesic structure is heated during, to it is described loading electrode add Test voltage is carried, and sensing electric current of the geodesic structure under the test voltage is treated described in acquisition and voltage is sensed, Based on the resistance change rate that geodesic structure is treated described in the sensing electric current and sensing voltage acquisition；
The structural failure to be measured is judged when resistance change rate reaches predetermined threshold value, acquisition treats that geodesic structure exists The first out-of-service time under test condition；
Relation based on heated current Yu structure temperature to be measured, loses with reference to corresponding with heated current first The effect time, obtain described in treat the activation energy of geodesic structure；
Based on heated current corresponding first out-of-service time, with reference to the current density of sensing electric current, institute is obtained State the Activation Energy for treating geodesic structure；
According to the activation energy and the Activation Energy for treating geodesic structure, with reference to first out-of-service time, Obtain the second out-of-service time of the test structure under running conditions.
Optionally, in the step of obtaining the relation for the resistance treated the temperature of geodesic structure and treat geodesic structure, pass through The temperature that geodesic structure is treated described in chuck change can be heated.
Optionally, the step for the treatment of the activation energy of geodesic structure described in obtaining includes：Based on heated current knot to be measured The relation of structure temperature, with reference to multiple heated currents one-to-one multiple first out-of-service times, obtain institute State the activation energy for treating geodesic structure.
Optionally, the step for the treatment of the Activation Energy of geodesic structure described in obtaining includes：Based on it is multiple plus It is thermocurrent one-to-one multiple first out-of-service times, multiple correspondingly with multiple first out-of-service times Sense circuit current density, obtain described in treat the Activation Energy of geodesic structure.
Optionally, the quantity of first out-of-service time is no less than 3.
Optionally, it is passed through heated current to the heater element and treats the step of geodesic structure is heated to described In, the heater element makes described to treat the temperature of geodesic structure in the range of 200 DEG C to 450 DEG C；Add to described In the step of carrying electrode loading test voltage, the test voltage makes the sensing electric current in 0.1MA/cm2 To in the range of 50MA/cm2.
Compared with prior art, technical scheme has advantages below：
The present invention is provided for treating the heater element that geodesic structure is heated to described, passes through independent heating Device treats that the temperature of geodesic structure reaches the test condition described in making, so that temperature treats geodesic structure to described The influence of electromigration is separated with electric current to the influence for treating geodesic structure electromigration, it is possible to increase obtained The activation for treating geodesic structure can and the Activation Energy accuracy, and then improve obtained described and treat The accuracy of geodesic structure out-of-service time under operating conditions, effectively improves the accuracy of electro-migration testing.Together When, relative to package level reliability testing, technical scheme can effectively shorten to described to be measured The time that structure is tested, improve testing efficiency.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the electro-migration testing device of metal interconnection structure in the prior art；
Fig. 2 to Fig. 3 is the structural representation of the embodiment of electro-migration testing device one of the present invention；
Fig. 4 and Fig. 5 are the structural representations of another embodiment of electro-migration testing device of the present invention；
Fig. 6 and Fig. 7 are the schematic diagrames of the embodiment of electro-migration testing system one of the present invention.
Embodiment
From background technology, there is the problem of test result is inaccurate in electro-migration testing of the prior art. In conjunction with electro-migration testing device in the prior art and its inaccurate problem of its test result of analysis of test methods The reason for：
With reference to Fig. 1, a kind of structure of the electro-migration testing device of metal interconnection structure in the prior art is shown Schematic diagram.
Shown in Fig. 1, the electro-migration testing structure is used to carry out electro-migration testing to metal interconnecting wires.Cause This treats that geodesic structure 10 is metal interconnecting wires.The electro-migration testing device has included the connection gold of connection function Belong to layer 20, the connection metal level 20 is arranged at the two ends for treating geodesic structure 10；Positioned at connection metal level 20 Away from the first load(ing) point f1 and the second load(ing) point f2, the first load(ing) point f1 for treating the one end of geodesic structure 10 It is used for on-load voltage with the second load(ing) point f2；The electro-migration testing device also includes adding positioned at first Loading point f1 and treat the first sensing points s1 between geodesic structure 10 and positioned at the second load(ing) point f2 and knot to be measured The second sensing points s2, the first sensing points s1 and the second sensing points s2 and the connection between structure 10 Metal level is directly electrically connected.
When carrying out electro-migration testing, under room temperature environment, pass through the first load(ing) point f1 and the second load(ing) point F2 applies the voltage bigger than under actual operating conditions, treats that real work is compared in formation in geodesic structure 10 described Under the conditions of bigger current density, with accelerate it is described treat the electromigration of geodesic structure 10, so as to accelerate described treat The failure of geodesic structure 10, obtain described in treat the first out-of-service time ttf of geodesic structure 10 under test conditionsstress。
In theory, the out-of-service time of ELECTROMIGRATION PHENOMENON can be retouched by blackbody formula (Black Equation) State：TTF=A × j-n×exp(Ea/ kT), wherein j is that electric current is close, and n represents the Activation Energy, EaFor institute The activation energy for treating geodesic structure is stated, k is Boltzmann constant, and T is the temperature for treating geodesic structure.
Therefore according to the first out-of-service time ttf under test conditionstress, and the knot to be measured during binding test The activation energy and the Activation Energy of geodesic structure, Jin Erke are treated described in temperature and the current density acquisition of structure To obtain the second out-of-service time ttf under condition of workop。
During actual test, flow through the high current for treating geodesic structure 10 can not only accelerate it is described to be measured The electromigration of structure 10, due to joule electrocaloric effect, can also cause the temperature hair for treating geodesic structure 10 Changing, cause it is described treat the change of the resistance of geodesic structure 10, and then cause the electricity for treating geodesic structure 10 Current density changes.That is, when carrying out electro-migration testing using the electro-migration testing device, The temperature for treating geodesic structure 10 is related to the size of the current density, therefore according to the described first failure Time ttfstressAnd the temperature and current density for treating geodesic structure 10 can not accurately obtain the knot to be measured The activation energy and current density of structure 10, so the second out-of-service time ttf under condition of work can not be obtained accuratelyop。
To solve the technical problem, the present invention provides a kind of electro-migration testing device, including：
Metal level is connected, one end is with treating that geodesic structure is connected, for realizing and the electrical connection for treating geodesic structure； Electrode is loaded, and the connection metal level is not connected described treats that one end of geodesic structure is electrically connected, for institute State and treat that geodesic structure applies test voltage, make it is described treat that the sensing electric current of geodesic structure reaches test condition, with reality Existing electromigration；Sensing electrode, treats that one end of geodesic structure is electrically connected with described in the connection metal level connection, Described the sensing voltage of geodesic structure under test conditions is treated for obtaining；Heater element, for being treated to described Geodesic structure is heated, make it is described treat that the temperature of geodesic structure reaches the test condition, realize electromigration.
The present invention is provided for treating the heater element that geodesic structure is heated to described, passes through independent heating Device treats that the temperature of geodesic structure reaches the test condition described in making, so that temperature treats geodesic structure to described The influence of electromigration the influence for treating geodesic structure electromigration is separated with electric current, it is possible to increase obtained The activation for treating geodesic structure can and the Activation Energy accuracy, and then improve obtained described The accuracy of treat geodesic structure out-of-service time under operating conditions, effectively improves the accuracy of electro-migration testing. Meanwhile, relative to package level reliability testing, technical scheme can effectively shorten to be treated to described The time that geodesic structure is tested, improve testing efficiency.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings The specific embodiment of the present invention is described in detail.
Referring to figs. 2 and 3 showing the structural representation of the embodiment of electro-migration testing device one of the present invention. Wherein Fig. 2 is the electro-migration testing device overlooking the structure diagram, and Fig. 3 is the three of Fig. 2 centre circles 120 Dimensional view.
It should be noted that the electro-migration testing device is used to obtain the out-of-service time for treating geodesic structure T1. The out-of-service time is used to weigh semiconductor components and devices and circuit reliability.It is described to treat that geodesic structure T1 be wrapped Include metal interconnecting wires or the metal interconnecting wires with connector.It is described to treat that geodesic structure T1 is in the present embodiment Metal interconnecting wires.
As shown in Fig. 2 the electro-migration testing device includes：
Metal level is connected, one end treats that geodesic structure T1 is connected with described, for treating geodesic structure T1 described in realizing Electrical connection.
Electromigration refers to the phenomenon that metal ion is migrated under electric field action.Therefore it is described in order to obtain Geodesic structure T1 out-of-service time is treated, it is necessary to treat to be passed through electric current in geodesic structure T1 to described, makes institute's knot to be measured Electromigration occurs for structure T1.Therefore the connection metal level is used to realize the electrical connection for treating geodesic structure T1, Treat to be passed through electric current in geodesic structure T1 to described by the connection metal level.
In the present embodiment, the connection metal level includes the first connection metal level M1 and the second connection metal level M2, described to treat that geodesic structure T1 is metal interconnecting wires, it is mutual that the connection metal level is located at the metal respectively Line two ends, and be directly connected to the metal interconnecting wires.
Electrode is loaded, and the connection metal level is not connected described treats that geodesic structure T1 one end electrically connect, use In treating that geodesic structure T1 applies test voltage to described, make described to treat that geodesic structure T1 sensing electric current reaches survey Strip part, to realize electromigration.
By treating geodesic structure T1 two ends on-load voltage described, make described to treat that geodesic structure T1 two ends form electricity Pressure difference, so as to treat to form electric current in geodesic structure T1 described.The loading electrode is used in the knot to be measured Structure T1 two ends apply test voltage, so as to treat to form electric current in geodesic structure T1 described, so that described treat Electromigration occurs for geodesic structure T1.
In the present embodiment, the loading electrode includes the first loading electrode F1 and the second loading electrode F2, institute State the first loading electrode F1 and the not connected one end phases for treating geodesic structure T1 of metal level M1 are connected with described first Even；The second loading electrode F2 is connected metal level M2 with described second and is not connected with treating geodesic structure T1's One end is connected.
Sensing electrode, treats that geodesic structure T1 one end is electrically connected with described in the connection metal level connection, is used for
The sensing voltages of geodesic structure T1 under test conditions are treated described in obtaining.
Because the loading electrode is realized and the electrical connection for treating geodesic structure T1 by the connection metal level, Therefore the voltage that the loading electrode applies, which has not only been carried in, treats geodesic structure T1, also has on connection metal level There is certain partial pressure, so in order to accurately obtain the voltage for treating geodesic structure T1 two ends, improving the electricity The accuracy of test is migrated, by the voltage that geodesic structure T1 two ends are treated described in sensing electrode acquisition.
In the present embodiment, the sensing electrode includes the first sensing electrode S1 and the second sensing electrode S2, institute The first sensing electrode S1 is stated between the first loading electrode F1 and treated geodesic structure T1；Second sense Electrode S2 is surveyed to be located at the described second loading electrode F2 and described treat between geodesic structure T1.
The electro-migration testing device also includes：Heater element 100, for treating that geodesic structure T1 enters to described Row heating, make it is described treat that geodesic structure T1 temperature reaches the test condition, realize electromigration.
The heater element 100 includes one or more fin formula field effect transistors 110.Due in fin In effect transistor 110, raceway groove is predominantly located in fin, that is to say, that channel current is limited in body In the limited fin of product, therefore fin formula field effect transistor 110 has stronger self-heating effect (Self-Heating Effect), therefore, it is possible to effectively produce suitable heat, to treat geodesic structure T1 to described Heated.
Specifically, one or more fin formula field effect transistors 110 are located at the lower section for treating geodesic structure T1, To realize geodesic structure T1 is treated using the heat produced after the fin formula field effect transistor 110 energization to described Heated.
Described to treat geodesic structure T1 metal interconnecting wires in the present embodiment, the metal interconnecting wires are strip. The heater element 100 includes multiple fin formula field effect transistors 110, multiple fin field effect crystal Pipe has multiple fins 111, and multiple fins 111 are parallel to each other and parallel with the metal interconnecting wires Set.
If it should be noted that described treat the distance between geodesic structure T1 and described heater element 100 too Greatly, then it can influence to treat the geodesic structure T1 efficiency of heating surface described in 100 pairs of the heater element；The knot to be measured If structure T1 and the distance between the heater element 100 are too small, it can influence described to treat geodesic structure T1 The accuracy of electro-migration testing.Therefore it is described to treat geodesic structure T1 and the heater element 100 in the present embodiment The distance between in 10nm to 1 μ m.
In the present embodiment, the multiple fin formula field effect transistor 110 also includes grid structure 112, described Grid structure 112 covers the top of fin 111 and the part of side wall across multiple fins 111 Surface.The metal interconnecting wires are located at the top of the grid structure 112, and with the grid structure 112 The distance between top h is in 10nm to 1 μ m.
With reference to Fig. 4 and Fig. 5, the structural representation of another embodiment of electro-migration testing device of the present invention is shown. Wherein Fig. 4 is the overlooking the structure diagram of the electro-migration testing device；Fig. 5 is Fig. 4 centre circles 220 Measurements of the chest, waist and hips view.
The present embodiment is repeated no more with previous embodiment something in common, and the present embodiment is different from previous embodiment Part is, in the present embodiment, described to treat that geodesic structure T2 is the metal interconnecting wires with connector.
Specifically, described treat that geodesic structure T2 is the metal interconnecting wires with connector, the connection metal level position It is connected in the metal interconnecting wires two ends, and by the connector with the metal interconnecting wires.
It is described to treat that geodesic structure T2 includes metal interconnecting wires T21 in the present embodiment, and it is located at metal respectively The first connector CT1 and the second connector CT2 at interconnection line T21 two ends.The first connection metal level M21 It is connected with the first connector CT1, and passes through the first connector CT1 and the metal interconnecting wires T21 It is connected；The second connection metal level M22 is connected with the second connector CT2, and passes through described second Connector CT2 is connected with the metal interconnecting wires T21.
It should be noted that in the present embodiment, the first connector CT1 and the second connector CT2 are located at institute State in one sides of the metal interconnecting wires T21 away from the heater element 200, therefore the metal interconnecting wires T21 With the distance between the heater element 200 be less than the connection metal level and the heater element 200 it Between distance.But during this way is only an example, other embodiments of the invention, first connector It can also be located at the metal interconnecting wires in the one side of the heater element with the second connector.This feelings Under condition, the distance between the metal interconnecting wires and the heater element are more than the connection metal level and institute The distance between heater element is stated, the present invention is without limitation.
Accordingly, the present invention also provides a kind of test side using electro-migration testing device provided by the present invention Method, including：
Geodesic structure is treated in offer；The resistance for treating geodesic structure, geodesic structure is treated to obtain under measurement different temperatures Temperature and treat geodesic structure resistance relation；Geodesic structure electro-migration testing provided by the present invention is treated by described Device is connected, and is passed through heated current to the heater element and treats that geodesic structure is heated to described, and measures The resistance for treating geodesic structure, obtains the relation of heated current and structural resistance to be measured；According to treating geodesic structure Temperature and treat geodesic structure resistance relation, with reference to the relation of heated current and structural resistance to be measured, obtain Obtain heated current and the relation of structure temperature to be measured；Heated current is passed through to the heater element to treat to described Geodesic structure is heated；By heater element to it is described treat that geodesic structure is heated during, to institute Loading electrode loading test voltage is stated, and sensing electricity of the geodesic structure under the test voltage is treated described in acquisition Flow and sensing voltage, based on the resistance variations that geodesic structure is treated described in the sensing electric current and sensing voltage acquisition Rate；The structural failure to be measured is judged when resistance change rate reaches predetermined threshold value, acquisition treats that geodesic structure exists The first out-of-service time under test condition；Relation based on heated current Yu structure temperature to be measured, with reference to The first corresponding out-of-service time of heated current, obtain described in treat the activation energy of geodesic structure；Based on heating electricity Corresponding first out-of-service time is flowed, with reference to the current density of sensing electric current, the electricity of geodesic structure is treated described in acquisition Current density index；According to the activation energy and the Activation Energy for treating geodesic structure, lost with reference to described first The effect time, obtain the second out-of-service time of the test structure under running conditions.
Step S100 is first carried out, and there is provided treat geodesic structure.
Specifically, described treat that geodesic structure can include metal interconnecting wires or the metal interconnecting wires with connector. It is described to treat that geodesic structure is metal interconnecting wires in the present embodiment.
Then the resistance for treating geodesic structure under step S200, measurement different temperatures is performed, it is to be measured to obtain The relation of resistance of the temperature of structure with treating geodesic structure.
Specifically, obtaining the step for the treatment of the temperature and the relation of the resistance for treating geodesic structure of geodesic structure includes： Choose multiple temperature preset values, and measure when it is described when the temperature of geodesic structure reaches the preset value described in The resistance of geodesic structure is treated, to obtain the relation treated the temperature of geodesic structure and treat the resistance of geodesic structure.
In the present embodiment, the temperature of geodesic structure can be treated described in chuck change by that can heat.Specifically, Heat chuck by described and treat that geodesic structure is heated to described, make described to treat that the temperature of geodesic structure reaches The temperature preset value；The resistance of geodesic structure is treated described in measurement simultaneously, to set up structure temperature to be measured and electricity Relation between resistance.
Specifically, measurement when it is described when the temperature of geodesic structure reaches the preset value described in treat geodesic structure During resistance, treat that geodesic structure is heated to described by the way that chuck can be heated, set by temperature detection It is standby that the temperature for treating geodesic structure is monitored, make described to treat that the temperature of geodesic structure reaches temperature preset value； Treat that geodesic structure is passed through electric current to described simultaneously, by obtaining described with the potentiometer for treating that geodesic structure is in parallel The voltage at geodesic structure two ends is treated, by with treating geodesic structure described in the acquisition of the galvanometer of the structures in series to be measured Interior electric current；Treat geodesic structure at the corresponding temperature according to being obtained the relation of electric current, voltage and resistance Resistance.
By measuring under multiple temperature preset values, the resistance for treating geodesic structure, set up described in treat geodesic structure Temperature and resistance relation.
Step S300 is performed afterwards, and geodesic structure and electro-migration testing device provided by the present invention are treated by described It is connected, is passed through heated current to the heater element and treats that geodesic structure is heated to described, and measures described The resistance of geodesic structure is treated, the relation of heated current and structural resistance to be measured is obtained.
Specifically, being passed through heated current to the heater element, make the heater element to the knot to be measured Structure is heated, and obtains the heated current by the galvanometer connected with the heater element；Simultaneously Treat that geodesic structure is passed through electric current to described, by obtaining described to be measured with the potentiometer for treating that geodesic structure is in parallel The voltage at structure two ends, by with treating electric in geodesic structure described in the acquisition of the galvanometer of the structures in series to be measured Stream；The resistance of geodesic structure is treated according to being obtained the relation of electric current, voltage and resistance.
It is passed through by HEATER FOR MEASURING part under different heating current conditions, the resistance for treating geodesic structure is obtained Obtain the relation of the heated current and the structural resistance to be measured.
Step S400 is performed, according to the temperature for the treatment of geodesic structure and the relation for the resistance for treating geodesic structure, with reference to adding The relation of thermocurrent and structural resistance to be measured, obtains heated current and the relation of structure temperature to be measured.
Step S500 is performed afterwards, heated current is passed through into the heater element again, to described to be measured Structure is heated.
In addition, by heater element to it is described treat that geodesic structure is heated during, perform step S600, To the loading electrode loading test voltage, and sense of the geodesic structure under the test voltage is treated described in acquisition Electric current and sensing voltage are surveyed, based on the resistance that geodesic structure is treated described in the sensing electric current and sensing voltage acquisition Rate of change.
Specifically, loading test voltage to the loading electrode by an external power source, make the knot to be measured Electric current is formed in structure；By obtaining the sensing electric current with the galvanometer of the structures in series to be measured, pass through The potentiometer being connected with the sensing electrode obtains the sensing voltage, and electric current is sensed and described based on described The resistance of geodesic structure is treated described in sensing voltage acquisition.
According to the design and use environment for treating geodesic structure, multiple experimental temperature value (T are selectedt) and it is many Individual experiment current value (It).According to the heated current and the relation of structure temperature to be measured, regulation is described to be added Thermocurrent, makes described to treat that the temperature of geodesic structure reaches the experimental temperature value Tt, and flow through described to be measured The electric current of structure respectively reaches the experiment current value It.And work as and treat that the electric current of geodesic structure reaches described in flowing through The experiment current value ItWhen, by treating the voltage of geodesic structure both sides, root described in sensing electrode acquisition According to the magnitude of voltage with flowing through electric current (the i.e. described experiment current value I for treating geodesic structuret), obtain described Treat the resistance R of geodesic structuret。
It should be noted that the method for testing is a kind of acceleration service life test method, it is to use than reality Bigger current density and Geng Gao temperature to be to accelerate to treat the failure of geodesic structure under condition of work, and based on real Treated under the conditions of testing the out-of-service time of geodesic structure, obtain described when the failure of geodesic structure under normal running conditions Between.Therefore, in the present embodiment, in the step of choosing multiple experimental temperature values and multiple test current value, The scope of the experimental temperature value is at 200 DEG C to 450 DEG C；The scope of the test current value exists 0.1MA/cm2To 50MA/cm2In the range of.
When being tested, when electric current is flowed through whne geodesic structure, treat to be formed with electric field in geodesic structure, described The metal ion treated in geodesic structure can produce displacement along the direction of the electric field in the presence of electric field, So as to produce mass transport, there is ELECTROMIGRATION PHENOMENON.The result of ELECTROMIGRATION PHENOMENON can make some portions of conductor Position produces cavity or whisker, so that the resistance R for treating geodesic structuretIncrease.So described treat geodesic structure Resistance RtChange can characterize the case of iontophoresis for treating geodesic structure.
Therefore according to the resistance for treating geodesic structure, the resistance change rate of geodesic structure is treated described in acquisition.This reality Apply in example, on the basis of the resistance that geodesic structure is treated described in during starting test, obtain and treated described in test process The resistance change rate of geodesic structure.
When the resistance change rate reaches predetermined threshold value, step 700 is performed, judges described to treat geodesic structure reality It is existing, treat the first out-of-service time TTF of geodesic structure under test conditions described in acquisition.
Obtain after the first out-of-service time TTF, perform step S800, based on heated current with treating geodesic structure temperature The relation of degree, with reference to first out-of-service time corresponding with heated current, treats swashing for geodesic structure described in acquisition Energy living.
According to blackbody formula, in fixed current value ItUnder the conditions of, according to out-of-service time TTF in electro-migration testing Formula, can obtain out-of-service time TTF and structure temperature T to be measuredtRelation：Ln (TTF)=Ea/kTt+c2, Wherein TTF is out-of-service time, jtFor current density, n is the Activation Energy, EaTo treat swashing for geodesic structure Energy living, k is Boltzmann constant, TtTo treat the temperature of geodesic structure, c2For constant.
So, the step for the treatment of the activation energy of geodesic structure described in acquisition includes：Geodesic structure is treated based on heated current The relation of temperature, with reference to multiple heated currents one-to-one multiple first out-of-service times, obtain described Treat the activation energy of geodesic structure.
According to heated current and the relation of structure temperature to be measured, multiple heated current institutes can be obtained right The structure temperature T to be measured answeredt, based on multiple out-of-service time TTF for treating geodesic structure and treating geodesic structure temperature Spend Tt, the activation energy E for treating geodesic structure can be obtainedaSize.
Specifically, can be according to multiple out-of-service time TTF for treating geodesic structure and structure temperature T to be measuredt, obtain Obtain out-of-service time TTF and structure temperature T to be measuredtRelation curve；According to the out-of-service time TTF and treating Geodesic structure temperature TtThe slope of the relation curve can be obtained, the slope value is described to treat geodesic structure Activation energy EaSize.
Obtain after the first out-of-service time TTF, can also carry out step S900, it is corresponding based on heated current First out-of-service time, with reference to the current density of sensing electric current, treat that the current density of geodesic structure refers to described in acquisition Number.
According to blackbody formula, in fixed temperature value TtUnder the conditions of, the out-of-service time can be with table in electro-migration testing It is shown as：TTF=A × jt -n×exp(Ea/kTt), wherein TTF is out-of-service time, jtFor current density, n is electricity Current density index, Ea is the activation energy for treating geodesic structure, and k is Boltzmann constant, TtTo treat geodesic structure, A is constant.So treating that the out-of-service time of geodesic structure and the relation of test electric current are：Ln (TTF)=- n*lnjt+c1, Wherein TTF is out-of-service time, jtFor current density, n is the Activation Energy, and Ea is to treat geodesic structure Activation energy, k is Boltzmann constant, TtFor test temperature, c1For constant.
So, the step for the treatment of the Activation Energy of geodesic structure described in acquisition includes：Based on multiple heating Electric current one-to-one multiple first out-of-service times, with the one-to-one multiple senses of multiple first out-of-service times Survey circuit current density, obtain described in treat the Activation Energy of geodesic structure.
According to multiple sensing electric current It, the current density j of the sensing electric current can be obtainedt, treated based on multiple The out-of-service time TTF of the geodesic structure and current density jt, can obtain the Activation Energy n's Size.
Specifically, can be according to multiple the first out-of-service time TTF and the current density j for treating geodesic structuret, Obtain the first out-of-service time TTF and the current density jtRelation curve；When being failed according to described first Between the TTF and current density jtThe slope of the relation curve can be obtained, the slope value is institute State the size for the Activation Energy n for treating geodesic structure.
It should be noted that in order to improve in measuring accuracy, the present embodiment, first out-of-service time TTF Quantity be no less than 3, that is to say, that the sensing electric current corresponding with first out-of-service time TTF ItAnd the quantity of heated current is no less than 3.
It is last obtain the activation for treating geodesic structure can with the Activation Energy after, execution step S1000, According to the activation energy and the Activation Energy for treating geodesic structure, with reference to first out-of-service time, obtain The second out-of-service time of the test structure under running conditions.
The method of testing is a kind of acceleration service life test method, to improve testing efficiency, the sensing electricity Flow and treat geodesic structure in normal work much larger than described with the temperature for treating geodesic structure corresponding to heated current When operating current IoWith operating temperature Io。
So according to blackbody formula, the out-of-service time can be expressed as：TTF=A × jt -n×exp(Ea/kTt).So Out-of-service time TTF when geodesic structure normal workoIt can be expressed as： TTFo=(jt/jop)n×exp[(1/Top-1/Tt)×Ea/ k] × TTF, wherein, jopFor the current density of operating current, jtTo sense the current density of electric current, n is the Activation Energy, EaTo treat the activation energy of geodesic structure, k is Boltzmann constant, TopFor operating temperature, TtTo treat the temperature of geodesic structure, TTF was the first out-of-service time.
Thus according to the current density j of operating currentop, sensing electric current current density jtAnd operating temperature Top, treat the temperature T of geodesic structuret, geodesic structure is treated with reference to described in being obtained step S800 and step S900 Activation can EaWith the Activation Energy n, the first out-of-service time TTF, it can obtain and described treat that geodesic structure exists The second out-of-service time TTF during normal worko。
Accordingly, the present invention also provides a kind of electro-migration testing system, including：
Electro-migration testing device provided by the present invention；First heater, for changing the knot to be measured The temperature of structure；Temperature acquisition device, for changing the structure temperature to be measured in the first heater When obtain the structure temperature to be measured；Power supply, for being treated described in first heater change Treat that geodesic structure is powered to described during geodesic structure temperature；Power supply is tested, for passing through heater element pair It is described treat that geodesic structure is heated during, to it is described loading electrode loading test voltage；Voltage is obtained Device, is connected with the sensing electrode, for obtaining the voltage for treating geodesic structure；Electric current acquisition device, Treat that geodesic structure is connected with described, for obtaining the electric current for treating geodesic structure；Heated current acquisition device, It is connected with the heater element, the heated current of the heater element is passed through for obtaining；Time obtains dress Put, the first out-of-service time of geodesic structure under test conditions is treated for obtaining；Pretreatment unit, it is and described Temperature acquisition device is connected, for being obtained when the first heater changes the structure temperature to be measured The structure temperature to be measured；It is connected with the heated current acquisition device, adds for being passed through in heater element During thermocurrent, the heated current for being passed through heater element is obtained；With voltage acquisition apparatus and electric current acquisition device Be connected, for obtaining the voltage and current for treating geodesic structure, and according to the voltage for treating geodesic structure and The resistance of geodesic structure is treated described in electric current acquisition；When first heater changes the structure temperature to be measured, The pretreatment unit is used to obtain the relation treated the temperature of geodesic structure and treat the resistance of geodesic structure；To described Heater element is passed through heated current to described when geodesic structure is heated, and the pretreatment unit is used to obtain Obtain the relation of heated current and structural resistance to be measured；The pretreatment unit is additionally operable to basis and treats geodesic structure The relation of resistance of the temperature with treating geodesic structure and the relation of heated current and structural resistance to be measured, are added Thermocurrent and the relation of structure temperature to be measured；Test processes device, is obtained with voltage acquisition apparatus and electric current Device is connected, for obtain it is described treat the voltage and current of geodesic structure, and obtained according to the voltage and current Obtain the resistance change rate for treating geodesic structure；It is connected with the heated current acquisition device, in heating When device is passed through heated current, the heated current for being passed through heater element is obtained；The test processes device is also For treating whether geodesic structure fails according to resistance change rate judgement, reached in the resistance change rate The structural failure to be measured is judged during to predetermined threshold value；It is connected with the time acquisition device, for sentencing The first out-of-service time of geodesic structure under test conditions is treated described in being obtained during the disconnected structural failure to be measured；Work Device is dealt with, is connected with the pretreatment unit, for obtaining heated current and structure temperature to be measured Relation；It is connected with the test processes device, for obtaining for the first out-of-service time and being lost with described first Effect time corresponding sensing electric current；For according to first out-of-service time and combine heated current with treating The activation energy of geodesic structure is treated described in the relation acquisition of geodesic structure temperature；For being obtained according to the sensing electric current The current density of the sensing electric current, and obtained with reference to first out-of-service time corresponding with the sensing electric current Obtain the Activation Energy；It is additionally operable to treat that the activation of geodesic structure can be obtained with the Activation Energy according to The second out-of-service time of geodesic structure under running conditions is treated described in obtaining.
With reference to Fig. 6, the structural representation of the embodiment of electro-migration testing system one of the present invention is shown.
The electro-migration testing system includes：
Electro-migration testing device 300 provided by the present invention.
The electro-migration testing device 300 is electro-migration testing device provided by the present invention, concrete scheme ginseng The embodiment of electro-migration testing device is stated before examination, and the present invention will not be repeated here.
Voltage acquisition apparatus 310, is connected with the sensing electrode 302, and described geodesic structure is treated for obtaining 303 voltage；Electric current acquisition device 320, treats that geodesic structure 303 is connected with described, for obtaining described treat The electric current of geodesic structure 303.
, it is necessary to treat to form electric current in geodesic structure 303 described in making during electro-migration testing is carried out, obtain The voltage for treating geodesic structure 303, the relation based on electric current, voltage and resistance obtains the knot to be measured The resistance of structure 303, by treating geodesic structure 303 described in the monitoring judgement for treating the resistance of geodesic structure 303 Whether fail.Therefore during electro-migration testing, it is necessary to obtain the voltage for treating geodesic structure 303 and Resistance, voltage acquisition apparatus 310 and electric current acquisition device 320 that geodesic structure 303 is connected are treated with described It is used to obtain the voltage and resistance for treating geodesic structure 303.
Specifically, in the present embodiment, the voltage acquisition apparatus 310 can include potentiometer, pass through institute State sensing electrode 302 and treat that geodesic structure 303 is in parallel with described；The electric current acquisition device 320 can include The first galvanometer that geodesic structure 303 is connected is treated with described.
First heater 330, for changing the temperature for treating geodesic structure 303；Temperature acquisition device 340, for the first heater 330 change it is described whne 303 temperature of geodesic structure when obtain described in treat The temperature of geodesic structure 303；Power supply 350, for changing described to be measured in the first heater 330 Treat that geodesic structure 303 is powered to described during 303 temperature of structure.
, it is necessary to set up acquisition heated current and treat the temperature of geodesic structure 303 during electro-migration testing is carried out Relation, specifically, obtaining heated current respectively and treating the relation and knot to be measured of the resistance of geodesic structure 303 The resistance of structure 303 and the relation for treating the temperature of geodesic structure 303, and according to heated current and treat the electricity of geodesic structure 303 The relation of resistance and treat the resistance of geodesic structure 303 and treat the temperature of geodesic structure 303 relation obtain heated current with The relation for treating the resistance of geodesic structure 303.
The first heater 330 is used to treat the resistance of geodesic structure 303 in acquisition and treats geodesic structure 303 The temperature of geodesic structure 303 is treated described in changing during the relation of temperature.In the present embodiment, described first adds Thermal 330 can be described to treat that geodesic structure 303 is heated on chuck described in being arranged at for that can heat chuck, The chuck that heats can produce heat so that the temperature for treating geodesic structure 303 rises.
The temperature acquisition device 340 treats the resistance of geodesic structure 303 for acquisition and treats the temperature of geodesic structure 303 The temperature of geodesic structure 303 is treated described in being obtained during relation, that is to say, that the temperature acquisition device 340 be used for the first heater 330 change it is described whne 303 temperature of geodesic structure when obtain described to be measured The temperature of structure 303.In the present embodiment, the temperature acquisition device 340 can be infrared temperature sensor, To treat the temperature of geodesic structure 303 described in acquisition.
The electro-migration testing system also includes：Power supply 360 is tested, for passing through 304 pairs of heater element It is described treat that geodesic structure 303 is heated during, to it is described loading electrode 301 loading test voltage； Heated current acquisition device 370, is connected with the heater element 304, and the heater is passed through for obtaining The heated current of part 304；Time acquisition device 380, geodesic structure 303 is treated under test conditions for obtaining The first out-of-service time.
, it is necessary to obtain the size that electric current is flowed through in the heater element 304 during electro-migration testing, And combine acquisition heated current and treat the relation of the temperature of geodesic structure 303, treat geodesic structure 303 described in acquisition Temperature.Therefore the heated current acquisition device 370, for during electro-migration testing, obtaining described The size of heated current, that is to say, that the heated current acquisition device 370, with the heater element 304 are connected, and the heated current of the heater element 304 is passed through for obtaining.Specifically, the heating electricity Stream acquisition device 370 can include the second galvanometer connected with the heater element 304.
The test power supply 360 is used to test to loading electrode 304 loading during electro-migration testing Voltage, that is to say, that the test power supply 360 is used to pass through 304 pairs of knots to be measured of heater element During structure 303 is heated, to the loading electrode 301 loading test voltage.
The time acquisition device 380 is used for during electro-migration testing is carried out, and timing is carried out, to obtain The first out-of-service time of geodesic structure 303 under test conditions is treated described in obtaining.Specifically, the time obtains Device 380 can include timer.
The electro-migration testing is a kind of accelerating lifetime testing, is using bigger than under actual operating conditions Current density and Geng Gao temperature are to accelerate to treat the failure of geodesic structure 303, and based on to be measured under experiment condition The out-of-service time of structure 303, obtain the out-of-service time for treating geodesic structure 303 under normal running conditions. That is, after the first out-of-service time under obtaining test condition, the electro-migration testing system base The second out-of-service time of geodesic structure 303 under running conditions is treated described in being obtained in first out-of-service time.
Specifically, the electro-migration testing system also includes：For obtaining heated current and treating geodesic structure 303 The pretreatment unit 410 of the relation of temperature, for obtain the first out-of-service time test processes device 420 with And for obtaining the work disposal device 430 of second out-of-service time according to first out-of-service time.
With reference to Fig. 7 is referred to, show the pretreatment unit 410, the test processes device 420 and The functional block diagram of the work disposal device 430.
The pretreatment unit 410 is connected with the temperature acquisition device 340, for adding described first Thermal 330 treats the temperature of geodesic structure 303 when 303 temperature of geodesic structure described in changing described in acquisition；With institute State heated current acquisition device 370 to be connected, for when heater element 304 is passed through heated current, obtaining It is passed through the heated current of heater element 304；With voltage acquisition apparatus 310 and the phase of electric current acquisition device 320 Even, for obtaining the voltage and current for treating geodesic structure 303, and according to the geodesic structure 303 for the treatment of The resistance of geodesic structure 303 is treated described in voltage and current acquisition；Change described treat in first heater 330 During geodesic structure temperature, the pretreatment unit 410 is used to obtain the temperature for treating geodesic structure 303 and knot to be measured The relation of the resistance of structure 303；Heated current, which is passed through, to the heater element 304 treats geodesic structure 303 to described When being heated, the pretreatment unit 410 is used to obtain heated current and treats the resistance of geodesic structure 303 Relation；The pretreatment unit 410 is additionally operable to basis and treats the temperature of geodesic structure 303 and treat geodesic structure 303 Resistance relation and heated current and treat the relation of the resistance of geodesic structure 303, obtain heated current with treating The relation of the temperature of geodesic structure 303.
Specifically, the pretreatment unit 410 includes：
Temperature unit 411, is connected with the temperature acquisition device 340, in the first heater 330 changes are described to treat the temperature of geodesic structure 303 when 303 temperature of geodesic structure described in acquisition.In the present embodiment, The temperature unit 411 is connected with the infrared temperature sensor, is treated in the card that heats to described During geodesic structure 303 is heated, the temperature of geodesic structure 303 is treated described in acquisition.
Heated current unit 413, is connected with the heated current acquisition device 370, in heater element 304 when being passed through heated current, obtains the heated current for being passed through heater element 304.It is described in the present embodiment Heated current unit 413 is connected with second galvanometer, is obtained for obtaining second galvanometer Flow through the size of the heated current of the heater element 304.
Resistance unit 412, is connected with voltage acquisition apparatus 310 and electric current acquisition device 320, for obtaining The voltage and current for treating geodesic structure 303, and obtained according to the voltage and current for treating geodesic structure 303 Obtain the resistance for treating geodesic structure 303.
The pretreatment unit 410 also includes first processing units 414, second processing unit 415 and electricity Flow temperature treating units 416.
The first processing units 414 are connected with the temperature unit 411 and the resistance unit 412, For first heater 330 change it is described whne 303 temperature of geodesic structure when, geodesic structure 303 is treated in acquisition Temperature and treat geodesic structure 303 resistance relation；The second processing unit 415 and the resistance list Member 412 is connected with the heated current unit 413, for being passed through heating electricity to the heater element 304 Stream when geodesic structure 303 is heated, obtains heated current and treats the pass of the resistance of geodesic structure 303 to described System.
The current temperature processing unit 416 is connected with the first processing units 414, for receiving State the acquisition of first processing units 414 treat the temperature of geodesic structure 303 and treat the relation of the resistance of geodesic structure 303； It is connected with the second processing unit 415, for the pass for receiving heated current Yu treating the resistance of geodesic structure 303 System；The current temperature processing unit 416 is based on treating the temperature of geodesic structure 303 and treats the resistance of geodesic structure 303 Relation and heated current obtain heated current and treat geodesic structure 303 with treating the sensitivity of geodesic structure 303 The relation of temperature.
Test processes device 420, is connected with voltage acquisition apparatus 310 and electric current acquisition device 320, is used for The voltage and current of geodesic structure 303 is treated described in obtaining, and obtains described to be measured according to the voltage and current The resistance change rate of structure 303；It is connected with the heated current acquisition device 370, in heater When part 304 is passed through heated current, the heated current for being passed through heater element 304 is obtained；The test processes Device 420 is additionally operable to treat whether geodesic structure fails according to judging the resistance change rate, in the electricity Resistive rate reaches treats that geodesic structure 303 fails during predetermined threshold value described in judgement；With the time acquisition device 380 are connected, for treating geodesic structure 303 in test described in judgement described in acquisition when geodesic structure 303 fails Under the conditions of the first out-of-service time.
Specifically, the test processes device 420 includes：Resistance variations unit 421 and failure judge single Member 422, for obtaining the resistance change rate for treating geodesic structure 303 and being judged according to the resistance change rate It is described to treat whether geodesic structure 303 fails.
Resistance variations unit 421, is connected with voltage acquisition apparatus 310 and electric current acquisition device 320, is used for The voltage and current of geodesic structure 303 is treated described in obtaining, and obtains described to be measured according to the voltage and current The resistance change rate of structure 303.
Predetermined threshold value, the failure judging unit 422 and institute are provided with the failure judging unit 422 State resistance numbered cell 421 to be connected, for obtaining the resistance that the resistance variations unit 421 is obtained Rate of change.It is described to realize that judging unit 422 passes through relatively more described resistance change rate and the predetermined threshold value Relative size, with judge it is described treat whether geodesic structure 303 fails, be more than in the resistance change rate described During predetermined threshold value, treat that geodesic structure 303 fails described in judgement.
The test processes device 420 also includes：Time acquisition unit 423 and heating for timing Electric current acquiring unit 424.
The heated current acquiring unit 424, is connected with the heated current acquisition device 370, for When heater element 304 is passed through heated current, the heated current for being passed through heater element 304 is obtained.Specifically, In the present embodiment, the heated current acquiring unit 424 is connected with second galvanometer, for obtaining Heated current size.
The time acquisition unit 423, is connected with the time acquisition device 380, for judging described The first out-of-service time of geodesic structure under test conditions is treated described in being obtained during structural failure to be measured.The present embodiment In, the time acquisition unit 423 is connected with the timer, for stopping timing in the timer When, obtain first out-of-service time.
Work disposal device 430, is connected with the pretreatment unit 410, for obtaining heated current with treating The relation of the temperature of geodesic structure 303；It is connected with the test processes device 420, is failed for obtaining first Time and the sensing electric current corresponding with first out-of-service time；During for being failed according to described first Between and with reference to heated current and treat the temperature of geodesic structure 303 relation obtain described in treat the activation of geodesic structure 303 Energy；For according to it is described sensing electric current obtain it is described sensing electric current current density, and with reference to the sense Survey corresponding the first out-of-service time acquisition the Activation Energy of electric current；It is additionally operable to according to described to be measured The activation of structure treats the second mistake of geodesic structure 303 under running conditions described in being obtained with the Activation Energy The effect time.
The work disposal device 430 include be used for obtain the Activation Energy dnesity index unit 431, For obtaining the activation energy unit 432 for treating the activation energy of geodesic structure 303 and being failed for obtaining second The second out-of-service time processing unit 433 of time.
The activation energy unit 432 is connected with the pretreatment unit 410, for obtain heated current with Treat the relation of the temperature of geodesic structure 303；Also it is connected with the test processes device 420, it is described for obtaining First out-of-service time；It is additionally operable to based on first out-of-service time and heated current and treats geodesic structure 303 The relation of temperature, obtain described in treat the activation energy of geodesic structure 303.
The dnesity index unit 431 is connected with the test processes device 420, is lost for obtaining first Effect time and the sensing electric current corresponding with first out-of-service time, and obtained according to the sensing electric current Obtain the current density of the sensing electric current；The dnesity index unit 431 is additionally operable to close according to the electric current Degree, and obtain the Activation Energy with reference to first out-of-service time corresponding with the sensing electric current.
The second out-of-service time processing unit 433 is connected with the activation energy unit 432, for obtaining The activation energy for treating geodesic structure 303；It is connected with the dnesity index unit 431, it is described for obtaining The Activation Energy；Second out-of-service time is additionally operable to the current density to be referred to according to the activation Number treats the second out-of-service time of geodesic structure 303 under running conditions described in obtaining.
Specifically, according to the design and use environment for treating geodesic structure, selecting multiple experimental temperature values (Tt2) and multiple experiment current value (It2)。
The heated current and the relation of structure temperature to be measured obtained according to the pretreatment unit 410, The size of the heated current is adjusted according to the reading of the heated current acquisition device 370, makes described treat The temperature of geodesic structure 303 reaches the experimental temperature value Tt2.And according to the electric current acquisition device 320 Reading adjusts the output voltage of the test voltage 360, makes that described to treat that geodesic structure electric current is respectively reached described Test current value It2。
It should be noted that the electro-migration testing system uses accelerating lifetime testing method, also It is to say, the electro-migration testing system is using the current density and Geng Gao bigger than under actual operating conditions Temperature is to accelerate to treat the failure of geodesic structure, and based on the out-of-service time that geodesic structure 303 is treated under experiment condition, Obtain the out-of-service time for treating geodesic structure 303 under normal running conditions.Therefore, in the present embodiment, choosing In the step of taking multiple experimental temperature values and multiple test current value, the scope of the experimental temperature value is at 200 DEG C To 450 DEG C；The scope of the test current value is in 0.1MA/cm2To 50MA/cm2In the range of.
When the temperature for treating geodesic structure 303 reaches the experimental temperature value Tt2, it is described to treat geodesic structure 303 Electric current reaches the experiment current value It2When, the resistance variations unit 420 is obtained according to the voltage and filled Put 310 and the voltage that is obtained of the electric current acquisition device 320 and resistance obtain described in treat geodesic structure 303 Resistance Rt2.The resistance variations unit 420 is always according to the resistance R for treating geodesic structure 303t2Obtain The resistance change rate.Specifically, in the present embodiment, geodesic structure 303 is treated described in during starting to test On the basis of resistance, the resistance change rate that geodesic structure 303 is treated described in test process is obtained.
When being tested, when electric current is flowed through whne geodesic structure, treat to be formed with electric field in geodesic structure 303, The metal ion treated in geodesic structure 303 can be produced along the direction of the electric field in the presence of the electric field , so as to produce mass transport, there is ELECTROMIGRATION PHENOMENON in raw displacement.The result of ELECTROMIGRATION PHENOMENON can make described Treat that some positions of geodesic structure 303 produce cavity or whisker, so that the resistance for treating geodesic structure 303 RtIncrease.So the structural resistance R to be measuredtRate of change can characterize the electricity for treating geodesic structure 303 Migration situation.
The failure judging unit 422 obtains the resistance variations that the resistance variations unit 421 is obtained Rate；Predetermined threshold value, the failure judging unit 422 are previously provided with the failure judging unit 422 Compare the relative size between the resistance change rate and the predetermined threshold value, when the resistance change rate is big When the predetermined threshold value, treat that geodesic structure 303 fails described in judgement.
When the temperature for treating geodesic structure 303 reaches the experimental temperature value Tt2, it is described to treat geodesic structure 303 Electric current reaches the experiment current value It2When, the time acquisition device 380 starts timing, is lost when described Effect judging unit 422 judges described when geodesic structure 303 fails, and the time acquisition device 380 stops Timing.The time acquisition unit 423 is connected with the time acquisition device 380, obtains the time The timing result of acquisition device 380, is the first out-of-service time TTF2。
According to blackbody formula, in fixed current value ItUnder the conditions of, according to out-of-service time TTF in electro-migration testing Formula, can obtain out-of-service time TTF and treat the temperature T of geodesic structure 303tRelation：Ln (TTF)=Ea/kTt+c2, Wherein TTF is out-of-service time, EaTo treat the activation energy of geodesic structure 303, k is Boltzmann constant, Tt To treat the temperature of geodesic structure 303, c2For constant.
According to heated current and the relation of structure temperature to be measured, the activation energy unit 432 can obtain many The structure temperature T to be measured corresponding to the individual heated currentt2, so as to obtain out-of-service time TTF2With treat The temperature T of geodesic structure 303t2Relation curve；The activation energy unit 432 is according to the out-of-service time TTF2 With structure temperature T to be measuredt2Relation curve can obtain the slope of the relation curve, the slope value is For the activation energy E for treating geodesic structure 303a2Size.
According to blackbody formula, in fixed temperature value TtUnder the conditions of, the out-of-service time can be with table in electro-migration testing It is shown as：TTF=A × jt -n×exp(Ea/kTt), wherein TTF is out-of-service time, jtFor current density, n is electricity Current density index, Ea is the activation energy for treating geodesic structure 303, and k is Boltzmann constant, TtFor knot to be measured The temperature of structure 303, A is constant.So treating that the out-of-service time of geodesic structure 303 and the relation of test electric current are： Ln (TTF)=- n*lnjt+c1, wherein TTF is out-of-service time, jtFor current density, n is the Activation Energy, c1For constant.
According to multiple sensing electric current It2, the dnesity index unit 431 can obtain the sensing electric current It2 Current density jt2, so as to obtain out-of-service time TTF2With the current density jt2Relation curve；It is described Dnesity index unit 431 is according to the out-of-service time TTF2With the current density jt2Relation curve can be with Obtain the slope of the relation curve, the slope value is described to treat that the current density of geodesic structure 303 refers to Number n2Size.
It should be noted that in order to improve in measuring accuracy, the present embodiment, first out-of-service time TTF Quantity be no less than 3, that is to say, that the sensing electric current corresponding with first out-of-service time TTF ItAnd the quantity of heated current is no less than 3.
So according to blackbody formula, the out-of-service time can be expressed as：TTF=A × jt -n×exp(Ea/kTt).So Out-of-service time TTF when 303 normal work of geodesic structureoIt can be expressed as： TTFo=(jt/jop)n×exp[(1/Top-1/Tt)×Ea/ k] × TTF, wherein, jopFor the current density of operating current, jtTo sense the current density of electric current, n is the Activation Energy, EaTo treat the activation energy of geodesic structure 303, K is Boltzmann constant, TopFor operating temperature, TtTo treat the temperature of geodesic structure 303, TTF is first Out-of-service time.
Therefore the last second out-of-service time processing unit 433 is according to the Activation Energy n2And The activation energy E for treating geodesic structure 303a2, and combine the current density j of operating currentop, sensing electric current Current density jtAnd work temperatureop, treat the temperature T of geodesic structure 303t, the first out-of-service time TTF, Obtain second out-of-service time TTF when geodesic structure 303 is in normal worko2。
To sum up, the present invention is provided for treating the heater element that geodesic structure is heated to described, passes through independence Heater element make it is described treat that the temperature of geodesic structure reaches the test condition so that temperature is treated to described The influence of the electromigration of geodesic structure is separated with electric current to the influence for treating geodesic structure electromigration, it is possible to increase The activation energy of geodesic structure and the accuracy of the Activation Energy are treated described in being obtained, and then raising is obtained Treat geodesic structure out-of-service time under operating conditions accuracy, effectively improve the standard of electro-migration testing True property.Meanwhile, relative to package level reliability testing, technical scheme can effectively shorten pair It is described to treat the time that geodesic structure is tested, improve testing efficiency.
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art, Without departing from the spirit and scope of the present invention, it can make various changes or modifications, therefore the guarantor of the present invention Shield scope should be defined by claim limited range.

Claims (17)

1. a kind of electro-migration testing device, it is characterised in that including：
Metal level is connected, one end is with treating that geodesic structure is connected, for realizing and the electrical connection for treating geodesic structure；
Electrode is loaded, and the connection metal level is not connected described treats that one end of geodesic structure is electrically connected, be used for Treat that geodesic structure applies test voltage to described, make it is described treat that the sensing electric current of geodesic structure reaches test condition, To realize electromigration；
Sensing electrode, treats that one end of geodesic structure is electrically connected, for obtaining with described in the connection metal level connection The sensing voltage of geodesic structure under test conditions is treated described in obtaining；
Heater element, for treating that geodesic structure is heated to described, makes described to treat that the temperature of geodesic structure reaches The test condition, realizes electromigration.
2. electro-migration testing device as claimed in claim 1, it is characterised in that the heater element includes one Individual or multiple fin formula field effect transistors；
One or more of fin formula field effect transistors are located at described treat below geodesic structure.
3. electro-migration testing device as claimed in claim 1, it is characterised in that it is described treat geodesic structure with it is described The distance between heater element is in 10nm to 1 μ m.
4. electro-migration testing device as claimed in claim 1, it is characterised in that described to treat that geodesic structure includes gold Belong to interconnection line or the metal interconnecting wires with connector.
5. electro-migration testing device as claimed in claim 4, it is characterised in that described to treat that geodesic structure is metal Interconnection line, the connection metal level be located at the metal interconnecting wires two ends, and with the metal interconnecting wires It is directly connected to.
6. electro-migration testing device as claimed in claim 4, it is characterised in that it is described treat geodesic structure be with The metal interconnecting wires of plug structure, the connection metal level is located at the metal interconnecting wires two ends, and logical The connector is crossed with the metal interconnecting wires to be connected.
7. the electro-migration testing device as described in claim 4,5 or 6, it is characterised in that the metal interconnection Line is strip；
The heater element includes multiple fin formula field effect transistors, multiple fin formula field effect transistors With multiple fins, and multiple fins are parallel to each other and be arranged in parallel with the metal interconnecting wires.
8. electro-migration testing device as claimed in claim 7, it is characterised in that the fin field effect crystal Pipe also includes grid structure, and the grid structure covers the fin top across multiple fins Portion and the part surface of side wall；
The distance between the metal interconnecting wires and grid structure top are in 10nm to 1 μ m.
9. electro-migration testing device as claimed in claim 1, it is characterised in that the connection metal level includes First connection metal level and the second connection metal level, respectively positioned at treating geodesic structure two ends；
It is described loading electrode include first loading electrode and second loading electrode, it is described first loading electrode with Described not connected one end for treating geodesic structure of first connection metal level is connected；It is described second loading electrode with it is described The not connected one end for treating geodesic structure of second connection metal level is connected；
The sensing electrode includes the first sensing electrode and the second sensing electrode, the first sensing electrode position Between the first loading electrode and treated geodesic structure；Second sensing electrode is located at the described second loading electricity Pole and described treat between geodesic structure.
10. a kind of electro-migration testing system, it is characterised in that including：
Electro-migration testing device as described in claim 1 to claim 9；
First heater, for changing the temperature for treating geodesic structure；
Temperature acquisition device, for being obtained when the first heater changes the structure temperature to be measured The structure temperature to be measured；
Power supply, for being treated when the first heater changes the structure temperature to be measured to described Geodesic structure is powered；
Test power supply, for by heater element to it is described treat that geodesic structure is heated during, to The loading electrode loading test voltage；
Voltage acquisition apparatus, is connected with the sensing electrode, for obtaining the voltage for treating geodesic structure；
Electric current acquisition device, treats that geodesic structure is connected with described, for obtaining the electric current for treating geodesic structure；
Heated current acquisition device, is connected with the heater element, and the heater element is passed through for obtaining Heated current；
Time acquisition device, the first out-of-service time of geodesic structure under test conditions is treated for obtaining；
Pretreatment unit, is connected with the temperature acquisition device, for changing in the first heater The structure temperature to be measured is obtained during the structure temperature to be measured；It is connected with the heated current acquisition device, For when heater element is passed through heated current, obtaining the heated current for being passed through heater element；Obtained with voltage Device is taken to be connected with electric current acquisition device, for obtaining the voltage and current for treating geodesic structure, and according to The resistance of geodesic structure is treated described in the voltage and current acquisition for treating geodesic structure；Change in first heater During the structure temperature to be measured, the pretreatment unit is used to obtain the temperature for treating geodesic structure and treats geodesic structure Resistance relation；Heated current is passed through to described when geodesic structure is heated to the heater element, The pretreatment unit is used for the relation for obtaining heated current and structural resistance to be measured；The pretreatment unit It is additionally operable to according to the relation and heated current and knot to be measured for treating resistance of the temperature of geodesic structure with treating geodesic structure The relation of structure resistance, obtains heated current and the relation of structure temperature to be measured；
Test processes device, is connected with voltage acquisition apparatus and electric current acquisition device, for obtaining described treat The voltage and current of geodesic structure, and treat according to being obtained the voltage and current resistance variations of geodesic structure Rate；It is connected with the heated current acquisition device, for when heater element is passed through heated current, obtaining It is passed through the heated current of heater element；The test processes device is additionally operable to be sentenced according to the resistance change rate Treat whether geodesic structure fails described in disconnected, judge described to be measured when the resistance change rate reaches predetermined threshold value Structural failure；It is connected with the time acquisition device, for being obtained when judging the structural failure to be measured It is described to treat the first out-of-service time of geodesic structure under test conditions；
Work disposal device, is connected with the pretreatment unit, for obtaining heated current and treating geodesic structure The relation of temperature；Be connected with the test processes device, for obtain the first out-of-service time and with it is described First out-of-service time corresponding sensing electric current；For according to first out-of-service time and combination heating electricity Stream and the activation energy that geodesic structure is treated described in the relation acquisition of structure temperature to be measured；For according to the sensing electricity Stream obtains the current density of the sensing electric current, and with reference to first failure corresponding with the sensing electric current Time obtains the Activation Energy；It is additionally operable to treat the activation energy and current density of geodesic structure according to Index treats the second out-of-service time of geodesic structure under running conditions described in obtaining.
11. electro-migration testing system as claimed in claim 10, it is characterised in that the first heater bag Include：Chuck can be heated；The voltage acquisition apparatus includes：Potentiometer；The electric current acquisition device bag Include：First galvanometer；The heated current acquisition device includes：Second galvanometer；The time is obtained Device is taken to include：Timer.
12. the electro-migration testing device described in a kind of utilization claim 1 to any one of claim 9 claim Method of testing, it is characterised in that including：
Geodesic structure is treated in offer；
The resistance for treating geodesic structure under measurement different temperatures, to obtain the temperature and knot to be measured for the treatment of geodesic structure The relation of the resistance of structure；
Treat that geodesic structure is moved with the electricity described in claim 1 to claim 9 any one claim by described Move test device to be connected, be passed through heated current to the heater element and treat that geodesic structure is heated to described, And the resistance of geodesic structure is treated described in measuring, obtain the relation of heated current and structural resistance to be measured；
According to the temperature for treating geodesic structure and the relation for the resistance for treating geodesic structure, with reference to heated current and knot to be measured The relation of structure resistance, obtains heated current and the relation of structure temperature to be measured；
Heated current, which is passed through, to the heater element treats that geodesic structure is heated to described；
By heater element to it is described treat that geodesic structure is heated during, to it is described loading electrode add Test voltage is carried, and sensing electric current of the geodesic structure under the test voltage is treated described in acquisition and voltage is sensed, Based on the resistance change rate that geodesic structure is treated described in the sensing electric current and sensing voltage acquisition；
The structural failure to be measured is judged when resistance change rate reaches predetermined threshold value, acquisition treats that geodesic structure exists The first out-of-service time under test condition；
Relation based on heated current Yu structure temperature to be measured, loses with reference to corresponding with heated current first The effect time, obtain described in treat the activation energy of geodesic structure；
Based on heated current corresponding first out-of-service time, with reference to the current density of sensing electric current, institute is obtained State the Activation Energy for treating geodesic structure；
According to the activation energy and the Activation Energy for treating geodesic structure, with reference to first out-of-service time, Obtain the second out-of-service time of the test structure under running conditions.
13. method of testing as claimed in claim 12, it is characterised in that obtain treat the temperature of geodesic structure with it is to be measured In the step of relation of the resistance of structure, the temperature of geodesic structure is treated described in chuck change by that can heat.
14. method of testing as claimed in claim 12, it is characterised in that the activation energy of geodesic structure is treated described in obtaining The step of include：Based on the relation of heated current structure temperature to be measured, with reference to multiple heated currents one One corresponding multiple first out-of-service times, obtain described in treat the activation energy of geodesic structure.
15. method of testing as claimed in claim 12, it is characterised in that treat that the electric current of geodesic structure is close described in obtaining The step of degree index, includes：Based on multiple heated currents one-to-one multiple first out-of-service times, With one-to-one multiple sensing circuit current density of multiple first out-of-service times, the knot to be measured is obtained The Activation Energy of structure.
16. the method for testing as described in claims 14 or 15, it is characterised in that first out-of-service time Quantity is no less than 3.
17. method of testing as claimed in claim 12, it is characterised in that be passed through heating electricity to the heater element Stream treats in the step of geodesic structure is heated that the heater element makes the temperature for treating geodesic structure to described Degree is in the range of 200 DEG C to 450 DEG C；
To in the step of the loading electrode loading test voltage, the test voltage makes the sensing electric current In 0.1MA/cm2To 50MA/cm2In the range of.
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CN108152699A (en) * 2017-12-27 2018-06-12 中国电子产品可靠性与环境试验研究所 The electromigration lifetime time tester and its test method of contact hole
CN108152699B (en) * 2017-12-27 2020-07-10 中国电子产品可靠性与环境试验研究所 Electromigration service life testing device and testing method of contact hole
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CN111965512A (en) * 2020-07-28 2020-11-20 广西大学 Reliability test system and method for ultraviolet light-emitting device and storage medium
CN112834911A (en) * 2021-01-06 2021-05-25 上海燧原智能科技有限公司 Electromigration test method, device, equipment and storage medium
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