CN104808041B - A kind of method of testing and device of nitrogen oxide sensor chip pumps electric current - Google Patents
A kind of method of testing and device of nitrogen oxide sensor chip pumps electric current Download PDFInfo
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- CN104808041B CN104808041B CN201510253371.5A CN201510253371A CN104808041B CN 104808041 B CN104808041 B CN 104808041B CN 201510253371 A CN201510253371 A CN 201510253371A CN 104808041 B CN104808041 B CN 104808041B
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Abstract
The invention discloses a kind of method of testing and device of nitrogen oxide sensor chip pumps electric current, by applying heating voltage to nitrogen oxide sensor chip to be measured so that the functional area of chip is maintained at certain test temperature；Apply test voltage to the functional electrode of nitrogen oxide sensor chip to be measured, change the working condition of nitrogen oxide sensor chip to be measured, the pump electric current on each functional electrode of test chip；Test device provided by the invention includes chip fixture, main control module, temperature control module, test voltage control module and current detection module；Chip fixture has multiple contacts, for each electrode of nitrogen oxide sensor chip to be measured to be stably connected with the test device, to ensure to test effect；After nitrogen oxide sensor chip to be measured is gripped on chip fixture, the electrode contact steady contact with chip fixture respectively of nitrogen oxide sensor chip to be measured；It is used to connecting each terminal of chip to be measured in test device to correspond to respectively and is stably connected with the contact of chip fixture；Method of testing provided by the invention and device realize nitrogen oxide sensor pump electric current automatic detection, can effectively improve detection efficiency.
Description
Technical field
The invention belongs to chip testing technology field, more particularly, to a kind of survey of nitrogen oxide sensor chip pumps electric current
Method for testing and device.
Background technology
Nitrogen oxide sensor chip manufacturing process is extremely complex, after the completion of nitrogen oxide sensor chip manufacturing, it is necessary to its pump electricity
Stream carries out strict detection to judge whether it is qualified.Because nitrogen oxide sensor chip belongs to emerging product and sensor chip
Method of testing is more special, and some current existing method of testings are the exterior appearance progress for test nitrogen oxide sensor chip
Test；Whether the electrode either for nitrogen oxide sensor chip, which turns on, is tested；In nitrogen oxide sensor chip pumps electric current side
The method of testing and test device in face still belong to blank, and can nitrogen oxide sensor chip pump electric current of the normal work depending on chip
Whether requirement is reached, therefore, to having urgent actual demand for the device and method of nitrogen oxide sensor chip pumps testing current.
The content of the invention
The defects of measuring technology existing for nitrogen oxide sensor chip and the need to nitrogen oxide sensor chip pumps testing current
Ask, the invention provides a kind of method of testing and device of nitrogen oxide sensor chip pumps electric current, its object is to by will be to be measured
Nitrogen oxide sensor chip is heated to operating temperature, simulates the change of chip operation state under actual condition to test nitrogen oxide sensor
The electric signal of chip feedback, to test the pump electric current of nitrogen oxide sensor chip.
To achieve the above object, according to one aspect of the present invention, there is provided a kind of pump electric current of nitrogen oxide sensor chip
Method of testing, it is specific as follows：
(1) by controlling heating voltage, by nitrogen oxide sensor chip to be measured heating until its temperature reaches test temperature simultaneously
Its temperature is maintained into test temperature；
(2) after the temperature of nitrogen oxide sensor chip to be measured reaches test temperature, in main electrode, to determine oxygen electrode, comparison electric
Apply test voltage in pole, reference electrode and measuring electrode, and test voltage is uniformly increased with identical step-length so that loading
Test voltage on each electrode is increased to target voltage from 0V；
During test voltage is applied, main electrode is obtained, oxygen electrode is determined, compares electrode, reference electrode and measurement electricity
Pump electric current on extremely, obtain the relation between pump electric current and pump voltage on each electrode；Meanwhile according on each electrode
Electric current, the break-make situation of each electrode can also be judged.
Preferably, the adjusting step of test voltage is 0.1V, is adjusted at intervals of 100ms, target voltage 2.5V.
Preferably, above-mentioned steps (1) are specific as follows：
(1.1) according to Rt=R (1+ α T), obtain heating electrode resistance of the nitrogen oxide sensor chip to be measured in test temperature T
Value Rt；Wherein, α=0.00392, R are resistance of the heating electrode of nitrogen oxide sensor chip to be measured at 0 DEG C；
(1.2) by the heating electrode resistance RtAs target resistance, electricity is heated by constantly regulate heating voltage
Pole resistance increase, when heating electrode resistance reaches target resistance, nitrogen oxide sensor chip temperature to be measured reaches test temperature.
Wherein, resistance R of the heating electrode of nitrogen oxide sensor chip to be measured at 0 DEG C obtaining step is as follows：
(1.1.1) loads 2~4V heating voltage on the heating electrode of nitrogen oxide sensor chip to be measured, according to heating electricity
Electric current I on the loop of poleA, obtain the resistance R that nitrogen oxide sensor chip to be measured heats electrodeA；
(1.1.2) is according to platinum resistance temperature and resistance corresponding relation RPt100=R0(1+αTA), obtain current working temperature TA；
Wherein, α=0.00392, RPt100It is RTD known to zero degree resistance in working temperature TAUnder resistance value, R0For platinum electricity
The zero degree resistance of resistance, is given value；The purpose of this step is, by introducing RTD known to zero degree resistance value,
Current working temperature is obtained according to platinum resistance temperature and resistance corresponding relation；
(1.1.3) obtains resistance R, R=R of the heating electrode of nitrogen oxide sensor chip to be measured at 0 DEG CA/(1+αTA)。
Using heating means provided by the invention, nitrogen oxygen to be measured is controlled to pass by way of slowly uniformly increasing heating voltage
The heating-up temperature of sensor chip, can be effectively during nitrogen oxide sensor chip pumps testing current be avoided because heating electrode resistance
The problem of chip heating-up temperature inaccuracy caused by error, chip is avoided to damage while accurate test chip pump electric current.
To realize the object of the invention, it is another aspect of this invention to provide that providing a kind of nitrogen oxide sensor chip pumps electric current
Test device, including main control module, temperature control module, test voltage control module and current detection module；
Wherein, the first output end of the first input end connection main control module of temperature control module, the second input of temperature control module
End is used as thermometric end, and for connecting nitrogen oxide sensor chip to be measured, the first output end of temperature control module exports as heating voltage
End, for connecting nitrogen oxide sensor chip to be measured, the second output end connects the first input end of main control module；
Second output end of the first input end connection main control module of test voltage control module；Test voltage control module
The first output end as test voltage output end, for connecting nitrogen oxide sensor chip to be measured；Test voltage control module
Second output end connects the second input of main control module；
3rd output end of the first input end connection main control module of current detection module, the second of current detection module are defeated
Enter end as test current input terminal, for connecting nitrogen oxide sensor chip to be measured, the output end connection master of current detection module
Control the 3rd input of module；
Wherein, main control module has an interface with outside industrial computer communication, for arrange parameter；Temperature control module is in master
Control and provide heating voltage under the control of module for the heating electrode of nitrogen oxide sensor chip to be measured, and by nitrogen oxide sensor core to be measured
The temperature feedback of piece is to main control module；The heating electrode of nitrogen oxide sensor chip to be measured is in the presence of heating voltage so that treats
The functional area for surveying chip is maintained at test temperature；
Test voltage control module is that the functional electrode of nitrogen oxide sensor chip to be measured applies under the control of main control module
Adjustable test voltage, change the working condition of nitrogen oxide sensor chip to be measured；In course of exerting pressure, pass through current detection module
Pump electric current on detection function electrode, and pump current data is fed back into main control module；To judge the logical of each electrode of chip to be measured
Disconnected situation, and obtain the relation on each electrode of chip to be measured between pump electric current and pump voltage.
Preferably, the test device of nitrogen oxide sensor chip pumps electric current also includes being used for the chip gripper for fixing chip to be measured
Tool, chip fixture have N number of contact, and one end of contact connects the thermometric end, heating voltage output end, test voltage output end
Or test current input terminal, the other end connect the electrode of chip to be measured, realize the terminal of test device with treating via chip fixture
Being stably connected between the electrode of survey chip；Wherein, N is the positive integer not less than 3.
Preferably, the number of contacts N of chip fixture is 8, and test voltage control module has five test voltage output ends, electricity
Flowing detection module has five test current input terminals, and there is temperature control module thermometric end, heating voltage anode and heating voltage to bear
End；
First contact one end connection main electrode of chip fixture, the other end connect the first test voltage output end and first and surveyed
Try current input terminal；Oxygen electrode is determined in the connection of second contact one end, and the other end connects the second test voltage output end and the second test
Current input terminal；Electrode is compared in the connection of 3rd contact one end, and the other end connects the 3rd test voltage output end and the 3rd test electricity
Flow input；4th contact one end connects measuring electrode, and the other end connects the 4th test voltage output end and the 4th test electric current
Input；5th contact one end connects reference electrode, and the other end connects the 5th test voltage output end and the 5th test electric current is defeated
Enter end；6th contact portion one end connects thermometric electrode, and the other end connects the thermometric end of temperature control module；7th contact one end connects
Heating cathode, other end connection heating voltage anode；8th contact one end connection heating negative pole, other end connection heating voltage are born
End；Being stably connected between chip electrode to be measured and each terminal of test device is realized via chip fixture.
Preferably, the test device of nitrogen oxide sensor chip pumps electric current also includes test completion indicator lamp, relay indicating light
And power supply indicator；
The 5th of the 4th output end connection of test completion indicator lamp and main control module, relay indicating light and main control module is defeated
Go out end connection, the power switch connection of power supply indicator and main control module；
Test is completed indicator lamp and lighted after chip testing terminates；Relay indicating light is lighted after test is started, and power supply refers to
Show that lamp is lighted in the test device after electricity.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
(1) test device of nitrogen oxide sensor chip pumps electric current provided by the invention, nitrogen to be measured is fixed using chip fixture
Oxygen sensor chip, while the contact of each electrode and chip fixture of chip to be measured is steadily contacted, plays protection and treat
The effect of nitrogen oxide sensor chip electrode is surveyed, reduces the abrasion to nitrogen oxide sensor chip electrode to be measured；
(2) using the method for testing and device of nitrogen oxide sensor chip pumps electric current provided by the invention, nitrogen oxygen sensing is carried out
The pump testing current of device chip, without regulation heating-up temperature manually, without manually adjusting test voltage；Therefore, using this hair
The apparatus and method of bright offer, the detection of nitrogen oxide sensor chip pumps electric current mass can be achieved, have that detection speed is fast, detection side
Just the characteristics of, while there is repeatability；
(3) method of control nitrogen oxide sensor chip heating-up temperature provided by the invention, target is obtained by test temperature
Resistance, and reach the target resistance by adjusting heating voltage, and then chip temperature is accurately heated to test temperature
Purpose；This method has taken into full account difference of each chip individual on heating electrode resistance, with empirical formula in the prior art
The method for applying identical heating voltage to each chip is compared, and this method is adapted to oneself of all nitrogen oxide sensor chips
Dynamic computer heating control, and actual chips temperature is consistent with test temperature.
Brief description of the drawings
Fig. 1 is the system schematic of the embodiment of the present invention 1；
In all of the figs, identical reference is used for representing identical element or structure, wherein：1 is main control module,
2 be temperature control module, and 3 be test voltage control module, and 4 be current detection module.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
A kind of test device of nitrogen oxide sensor chip pumps electric current provided by the invention, including chip fixture, main control module,
Temperature control module, test voltage control module and current detection module；
During pump testing current applied to nitrogen oxide sensor chip, nitrogen oxide sensor chip to be measured is placed in chip fixture
Interior, each contact of each electrode and chip fixture of chip to be measured is steadily contacted；The fire end of test device, thermometric end, test
Connected between voltage output end and test current input terminal and chip electrode to be measured via chip fixture by wire；To nitrogen to be measured
The main electrode of oxygen sensor chip, determine oxygen electrode, compare 5 functional electrodes application surveys such as electrode, reference electrode and measuring electrode
Voltage is tried, oxygen electrode is determined to test nitrogen oxide sensor chip to be measured, compares electrode, reference electrode and measuring electrode in test voltage
Under pump electric current.
The method of testing and device of nitrogen oxide sensor chip pumps electric current provided by the invention, for testing nitrogen oxide sensor core
The pump current capability of this sensitive chip of piece, especially at 650 DEG C, test the pump electric current of nitrogen oxide sensor chip electrode.
1 and Fig. 1 with reference to embodiments, it is specifically described a kind of nitrogen oxide sensor chip pumps electric current provided by the invention
Method of testing and test device：
Embodiment 1 carries out pump using nitrogen oxide sensor ceramic chip as test object, using method of testing provided by the invention
The process of testing current is specific as follows：
(1) chip fixture fixed clamp nitrogen oxide sensor ceramic chip to be measured is used so that eight contacts of chip fixture
It is steadily contacted with eight electrodes of nitrogen oxide sensor ceramic chip to be measured；
(2) heater voltage signal that test device provides is carried in the heating electrode of nitrogen oxide sensor ceramic chip to be measured
On, chip to be measured is heated to 650 DEG C of test temperature, and be maintained at the temperature；
(3) 0~2.5V pump voltage signal is provided by test voltage control module 3, nitrogen oxygen to be measured is carried in respectively and passes
The main electrode of sensor ceramic chip, determine oxygen electrode, compare in electrode, reference electrode and measuring electrode；Specifically since 0V, often
Pump voltage is improved 0.1V by interval 100ms, until 2.5V；Detect pump electricity of the above-mentioned each functional electrode under different test voltages
Stream；
(4) test data is uploaded into outside industrial computer, is shown by outside industrial computer and preserve test data；
The test device is additionally provided with 3 status indicator lamps, by the state of indicator lamp, indicates the energization shape of test device
State, working condition and detection completion status.
In embodiment 1, the main control module 1 of the test device of nitrogen oxide sensor pump electric current uses 51 single-chip microcomputers, single-chip microcomputer
Should have at least 8K system programmable flash storage, 256 byte data memory spaces and the read-write interface of 32；This reality
Example is applied to realize using STC89C52 single chip；
First output end of the control signal input connection main control module 1 of temperature control module 2, the connection of the second input are to be measured
The thermometric electrode of nitrogen oxide sensor chip；The output end of temperature control module 2 connects the heating electrode of nitrogen oxide sensor chip to be measured；Temperature
Control the temperature feedback end connection main control module first input end of module 2；Temperature control module uses TLC5618 chips, and the chip has
The output of two-way 0~5V analog outputs, wherein A roads provides output voltage for test voltage control module, and it, which is exported, meets test
Voltage control module maximum voltage 2.5V requirement, can be used directly；The output of B roads provides heating electricity for temperature control module output end
Pressure, heating voltage must reach 15V, by increasing amplifying circuit on output circuit all the way at this to provide enough heating voltages；
Second output end of the control signal input connection main control module of test voltage control module 3, test voltage control
The output end of molding block connects the functional electrode of nitrogen oxide sensor chip to be measured, and the output end uses above-mentioned TLC5618 A roads
Export to provide 0~2.5V pump voltage, being embodied as Different electrodes by relay switching between difference in functionality electrode distinguishes
Apply pump voltage；The feedback end connection input of main control module second of test voltage control module；
3rd output end of the control signal input connection main control module of current detection module 4, current detection module
Input connects the functional electrode of nitrogen oxide sensor chip to be measured, the current feedback terminal connection main control module of current detection module
3rd input；Current detection module is realized using TCL2543 chips；It is specifically described exemplified by determining oxygen electrode current detecting：It is fixed
One 200 Ω of series connection resistance, the measurement pin of TLC2543 chips are connected to the 200 Ω resistance after oxygen electrode lead
Both ends, an electrical potential difference can be measured on 200 Ω resistance when having electric current to flow through to determine oxygen electrode, can be got by I=U/R
Determine the pump electric current of oxygen electrode；
On the one hand the test device provides heating voltage for nitrogen oxide sensor chip to be measured so that the functional areas of chip to be measured
Domain is maintained at 650 DEG C or so of test temperature；On the other hand, the main electrode to nitrogen oxide sensor chip to be measured, determine oxygen electrode, ratio
Apply measurement voltage compared with electrode and measuring electrode, and measurement voltage is slowly uniformly adjusted in test process.
With reference to embodiments 2 be specifically described in the pump current test method of nitrogen oxide sensor chip provided by the invention plus
The method of heat nitrogen oxide sensor chip to be measured, in embodiment 2, test temperature is 650 DEG C：
(1) 3V heating voltage is loaded on the heating electrode of nitrogen oxide sensor ceramic chip to be measured, measures heating electrode
Electric current on loop is 0.731A；According to the electric current and heating voltage, obtain in current working temperature TAUnder nitrogen oxygen to be measured sensing
The resistance R of the heating electrode of device ceramic chipAFor 4.1 Ω；
(2) RTD that a zero degree resistance is 100 Ω is introduced, according to platinum resistance temperature and resistance corresponding relation
RPt100=R0(1+ α T) obtains current working temperature TA；Wherein, α=0.00392；RPt100For RTD current resistive value；Platinum electricity
The zero degree resistance of resistance refers to resistance value of the RTD at 0 DEG C；This step is specific as follows：
(2.1) under step (1) described operating mode, it is known as loading on 100 Ω RTD in a zero degree resistance
5V voltages, it is 0.026A to measure the electric current on RTD；According to R=U/I, the RTD at a temperature of current working is obtained
Resistance RPt100For 109.2 Ω；
(2.2) according to platinum resistance temperature and resistance corresponding relation RPt100=R0(1+ α T), hindered with reference to RTD zero degree resistance
The R Pt100 values obtained in value and step (2.1), it is 23.4 DEG C to obtain current working temperature TA.
(3) according to RA=R0(1+ α T), with reference to RA=4.1 Ω and TA=23.4 DEG C, obtain nitrogen oxide sensor ceramic core to be measured
Resistance R of the heating electrode of piece at 0 DEG C is 3.75 Ω；
(4) according to Rt=R (1+ α T), the R obtained with reference to step (3) value, nitrogen oxide sensor ceramic core to be measured is obtained
Adding thermal resistance resistance Rt of the piece under 650 DEG C of test temperature is 13.3 Ω；
(5) the adding thermal resistance resistance of the nitrogen oxide sensor ceramic chip to be measured for getting step (4) at test temperature
13.3 Ω at the uniform velocity increase heating voltage so that chip generates heat as target resistance according to 0.2V per second speed；With nitrogen to be measured
Oxygen sensor ceramic chip generates heat, and it heats the resistance increase of electrode, when heating electrode resistance reaches 13.3 Ω, chip
Temperature accurately reaches 650 DEG C, maintains the heating voltage.
The method provided by embodiment 2, in the case of known to test temperature, target is obtained by test temperature and hindered
Value, and reach the target resistance by adjusting heating voltage, and then chip temperature is accurately heated to test temperature
Purpose；This method has taken into full account difference of each nitrogen oxide sensor chip individual to be measured in adding thermal resistance so that actual chips
Heating-up temperature keeps highly consistent with test temperature.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (7)
1. a kind of method of testing of nitrogen oxide sensor chip pumps electric current, it is characterised in that methods described is specific as follows：
(1) by controlling heating voltage, by nitrogen oxide sensor chip to be measured heating until its actual temperature reaches test temperature simultaneously
Its actual temperature is maintained into test temperature；
Judge that nitrogen oxide sensor chip actual temperature to be measured reaches test temperature according to following methods：
Reach target resistance when nitrogen oxide sensor chip to be measured heats electrode resistance, judge the actual temperature of nitrogen oxide sensor chip to be measured
The accurate test temperature for reaching setting of degree；The target resistance pushes away acquisition by the way that the test temperature of setting is counter；
(2) after the actual temperature of nitrogen oxide sensor chip to be measured reaches test temperature, in main electrode, to determine oxygen electrode, comparison electric
Apply test voltage in pole, reference electrode and measuring electrode, and test voltage is uniformly increased with identical step-length so that loading
Test voltage on each electrode is increased to target voltage from 0V；
Main electrode is obtained during test voltage is applied, oxygen electrode is determined, compares in electrode, reference electrode and measuring electrode
Pump electric current.
2. method of testing as claimed in claim 1, it is characterised in that the adjusting step of the test voltage is 0.1V, adjustment
At intervals of 100ms, target voltage 2.5V.
3. method of testing as claimed in claim 1 or 2, it is characterised in that the step (1) is specific as follows：
(1.1) according to Rt=R (1+ α T), obtain heating electrode resistance R of the nitrogen oxide sensor chip to be measured in test temperature Tt；
Wherein, α=0.00392, R are resistance of the heating electrode of nitrogen oxide sensor chip to be measured at 0 DEG C；
Wherein, resistance R of the heating electrode of nitrogen oxide sensor chip to be measured at 0 DEG C acquisition methods are as follows：
(1.1.1) loads 2~4V heating voltage on the heating electrode of nitrogen oxide sensor chip to be measured, is returned according to heating electrode
Electric current I on roadA, obtain the resistance R that nitrogen oxide sensor chip to be measured heats electrodeA；
(1.1.2) introduces RTD known to zero degree resistance value, according to platinum resistance temperature and resistance corresponding relation RPt100=R0(1+
αTA), obtain current working temperature TA；
Wherein, α=0.00392, RPt100It is RTD known to zero degree resistance in working temperature TAUnder resistance value, R0For
The zero degree resistance of RTD, is given value；
(1.1.3) obtains resistance R, R=R of the heating electrode of nitrogen oxide sensor chip to be measured at 0 DEG CA/(1+αTA)；
(1.2) by the heating electrode resistance RtAs target resistance, electrode resistance is heated by constantly regulate heating voltage
Increase, when heating electrode resistance reaches target resistance, judge that nitrogen oxide sensor chip temperature to be measured reaches test temperature.
4. a kind of test device of nitrogen oxide sensor chip pumps electric current, it is characterised in that the test device includes main control module
(1), temperature control module (2), test voltage control module (3) and current detection module (4)；
First output end of the first input end connection main control module (1) of the temperature control module (2), the second of temperature control module (2)
Input is as thermometric end, and for connecting nitrogen oxide sensor chip to be measured, the first output end of temperature control module (2) is as heating electricity
Output end is pressed, for connecting nitrogen oxide sensor chip to be measured, the first input end of the second output end connection main control module (1)；
Second output end of the first input end connection main control module (1) of the test voltage control module (3)；Test voltage control
First output end of molding block (2) is as test voltage output end, for connecting nitrogen oxide sensor chip to be measured；Test voltage control
Second input of the second output end connection main control module (1) of molding block (2)；
3rd output end of the first input end connection main control module of the current detection module (4), current detection module (4)
Second input is as test current input terminal, for connecting nitrogen oxide sensor chip to be measured, the output of current detection module (4)
3rd input of end connection main control module (1)；
The main control module (1) has an interface with outside industrial computer communication, for arrange parameter；The temperature control module
(2) the heating electrode for nitrogen oxide sensor chip to be measured under the control of main control module (1) provides heating voltage, by nitrogen oxygen to be measured
Sensor chip is heated until its actual temperature reaches test temperature and its actual temperature is maintained into test temperature；When nitrogen to be measured
Oxygen sensor chip heating electrode resistance reaches target resistance, judges that nitrogen oxide sensor chip actual temperature to be measured accurately reaches and sets
Fixed test temperature；
And by the temperature feedback of nitrogen oxide sensor chip to be measured to main control module (1)；The test voltage control module (2) is in master
It is the adjustable test voltage of functional electrode application of nitrogen oxide sensor chip to be measured under the control of control module (1), and with identical
Step-length uniformly increases test voltage so that the test voltage being carried on functional electrode is increased to target voltage from 0V；Change is treated
Survey the working condition of nitrogen oxide sensor chip；Current detection module (4) is used to detect the functional electrode in application test voltage
Pump electric current afterwards, and pump current data is fed back into main control module (1).
5. test device as claimed in claim 4, it is characterised in that also have N number of including chip fixture, the chip fixture
Contact, one end of contact connect the thermometric end, heating voltage output end, test voltage output end or test current input terminal,
The other end connects the electrode of chip to be measured；Wherein, N is the positive integer not less than 3；
The chip fixture is used to fix nitrogen oxide sensor chip to be measured, makes each electrode and chip fixture of chip to be measured
While contact is steadily contacted, plays a part of protection nitrogen oxide sensor chip electrode to be measured, reduce to nitrogen oxide sensor to be measured
The abrasion of chip electrode.
6. test device as claimed in claim 5, it is characterised in that the number of contacts N of the chip fixture is 8, the test
Voltage control module (3) has five test voltage output ends, and the current detection module (4) has five test electric current inputs
End, the temperature control module (2) have thermometric end, heating voltage anode and heating voltage negative terminal；
First contact one end connection main electrode of the chip fixture, the other end connect the first test voltage output end and first and surveyed
Try current input terminal；Oxygen electrode is determined in the connection of second contact one end, and the other end connects the second test voltage output end and the second test
Current input terminal；Electrode is compared in the connection of 3rd contact one end, and the other end connects the 3rd test voltage output end and the 3rd test electricity
Flow input；4th contact one end connects measuring electrode, and the other end connects the 4th test voltage output end and the 4th test electric current
Input；5th contact one end connects reference electrode, and the other end connects the 5th test voltage output end and the 5th test electric current is defeated
Enter end；6th contact portion one end connects thermometric electrode, and the other end connects the thermometric end；The connection heating of 7th contact one end is just
Pole, the other end connect the heating voltage anode；8th contact one end connection heating negative pole, the other end connect the heating voltage
Negative terminal.
7. the test device as described in any one of claim 4 to 6, it is characterised in that described device also includes test completion and referred to
Show lamp, relay indicating light and power supply indicator；
The 5th of the 4th output end connection of the test completion indicator lamp and main control module, relay indicating light and main control module is defeated
Go out end connection, the power switch connection of power supply indicator and main control module.
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| CN110308238A (en) * | 2018-03-20 | 2019-10-08 | 武汉科技大学 | It is a kind of for detecting the test device and method of NOx sensor performance |
| CN108872349B (en) * | 2018-06-21 | 2020-08-11 | 西安创研电子科技有限公司 | Method and device for testing gas sensitivity of nitrogen-oxygen sensor ceramic chip |
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| CN111751494A (en) * | 2020-05-22 | 2020-10-09 | 蚌埠煜明电子科技有限公司 | Detection apparatus for nitrogen oxygen sensor |
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