CN107045993B - Electro-migration testing device, electro-migration testing system and its test method - Google Patents

Electro-migration testing device, electro-migration testing system and its test method Download PDF

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CN107045993B
CN107045993B CN201610083841.2A CN201610083841A CN107045993B CN 107045993 B CN107045993 B CN 107045993B CN 201610083841 A CN201610083841 A CN 201610083841A CN 107045993 B CN107045993 B CN 107045993B
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geodesic structure
temperature
current
geodesic
heated
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CN107045993A (en
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甘正浩
冯军宏
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A kind of electro-migration testing device, electro-migration testing system and its test method, wherein electro-migration testing device include: for realizing with the connection metal layer being electrically connected to geodesic structure；For to it is described to geodesic structure apply test voltage load electrode；For obtaining the sensing electrode to geodesic structure sensing voltage under test conditions；For to the heating device heated to geodesic structure.The present invention makes the temperature to geodesic structure reach the test condition by independent heating device, to make influence of the temperature to the electromigration to geodesic structure separate with electric current to the influence to geodesic structure electromigration, it can be improved obtained described to the activation energy of geodesic structure and the accuracy of the Activation Energy, and then the accuracy to geodesic structure out-of-service time under operating conditions obtained is improved, effectively improve the accuracy of electro-migration testing.

Description

Electro-migration testing device, electro-migration testing system and its test method
Technical field
The present invention relates to field of semiconductor device test, in particular to a kind of electro-migration testing device, electro-migration testing system System and its test method.
Background technique
ELECTROMIGRATION PHENOMENON refers to that there is a phenomenon where migrate for metal ion under electric field action.When semiconductor devices work, There is certain electric current to pass through in metal interconnection structure.When current density is larger in metal interconnecting wires, drive of the electronics in electrostatic field Faced south hypervelocity movement, formed electron wind (Electron Wind) by cathode under dynamic, metal ion under the driving of electron wind from Cathode is oriented to anode to spread, so that electromigration occur.
Electromigration occurs for the metal ion in metal interconnection structure, is easy to form cavity or convex in metal interconnection structure It rises, to cause the open circuit or short circuit of metal interconnection structure, and then the phenomenon that leakage current increases even component failure occurs.
With the reduction of dimensions of semiconductor devices, the size of the metal interconnection structure in semiconductor devices also constantly reduces, It is continuously increased so as to cause the current density in metal interconnection structure, the problem of electromigration causes semiconductor device failure is increasingly Seriously, so the electro-migration testing of metal interconnection structure just has attracted much attention.
Traditional electro-migration testing method passes through package level reliability test (Package Level Reliability Test it) completes, this electro-migration testing method includes: that sample scribing is packaged the wafer after scribing, after encapsulation Chip be packed into baking oven tested.The assembling process such as scribing, encapsulation before being tested are likely to cause the damage of chip With the consumption of silicon wafer.Electro-migration testing process is completed to need to spend several weeks from chip package to test, and can not be to gold The quality for belonging to interconnection structure is monitored in real time.Using wafer scale reliability test (Wafer-Level Reliability Test the problem of) test of progress metal interconnection structure can be avoided excessive cycle.
But in the prior art the method for the wafer scale reliability test of metal interconnection structure still there are test results not Accurate problem.
Summary of the invention
Problems solved by the invention is to provide a kind of electro-migration testing device, electro-migration testing system and its test method, To improve the accuracy of electro-migration testing result.
To solve the above problems, the present invention provides a kind of electro-migration testing device, comprising:
Connect metal layer, one end is connected with to geodesic structure, for realizing with being electrically connected to geodesic structure；
Load electrode, be electrically connected with described connection metal layer not connected described one end to geodesic structure, be used for it is described to Geodesic structure applies test voltage, so that the sensing electric current to geodesic structure is reached test condition, to realize electromigration；
Sensing electrode be electrically connected with described connection metal layer connection described one end to geodesic structure, for described in obtaining to The sensing voltage of geodesic structure under test conditions；
Heating device makes the temperature to geodesic structure reach the test for heating to described to geodesic structure Condition realizes electromigration.
Optionally, the heating device includes one or more fin formula field effect transistors；It is one or more of described Fin formula field effect transistor is located at described to below geodesic structure.
Optionally, it is described to the distance between geodesic structure and the heating device in 10nm to 1 μ m.
Optionally, described to geodesic structure includes metal interconnecting wires or with the metal interconnecting wires of plug.
Optionally, described to geodesic structure is metal interconnecting wires, and the connection metal layer is located at the metal interconnecting wires both ends, And it is directly connected to the metal interconnecting wires.
Optionally, it is described to geodesic structure be the metal interconnecting wires with plug structure, the connection metal layer be located at described in Metal interconnecting wires both ends, and be connected by the plug with the metal interconnecting wires.
Optionally, the metal interconnecting wires are strip；The heating device includes multiple fin formula field effect transistors, more A fin formula field effect transistor has multiple fins, and multiple fins are parallel to each other and put down with the metal interconnecting wires Row setting.
Optionally, the fin formula field effect transistor further includes gate structure, and the gate structure is across multiple fins Portion, and cover the part of the surface at the top of the fin with side wall；Between at the top of the metal interconnecting wires and the gate structure Distance is in 10nm to 1 μ m.
Optionally, the connection metal layer includes the first connection metal layer and the second connection metal layer, is located to be measured Structure both ends；The load electrode includes the first load electrode and the second load electrode, the first load electrode and described the One not connected one end to geodesic structure of connection metal layer is connected；The second load electrode connect metal layer with described second and does not connect The one end for receiving geodesic structure is connected；The sensing electrode includes the first sensing electrode and the second sensing electrode, first sensing Electrode is located at the first load electrode and institute between geodesic structure；Second sensing electrode is located at the second load electrode and institute It states between geodesic structure.
The present invention also provides a kind of electro-migration testing systems, comprising:
The electro-migration testing device that the present invention is improved；
First heater, for changing the temperature to geodesic structure；
Temperature acquisition device, it is described to be measured for being obtained when the first heater changes the structure temperature to be measured Structure temperature；
Power supply, for the first heater change the structure temperature to be measured when to it is described to geodesic structure into Row power supply；
Test power supply, for by heating device to it is described heated to geodesic structure during, to the load Electrode load test voltage；
Voltage acquisition apparatus is connected with the sensing electrode, for obtaining the voltage to geodesic structure；
Electric current acquisition device is connected with described to geodesic structure, for obtaining the electric current to geodesic structure；
Heated current acquisition device is connected with the heating device, for obtaining the heating electricity for being passed through the heating device Stream；
Time acquisition device, for obtaining the first out-of-service time to geodesic structure under test conditions；
Pretreatment unit is connected with the temperature acquisition device, described to be measured for changing in the first heater The structure temperature to be measured is obtained when structure temperature；It is connected with the heated current acquisition device, for being passed through in heating device When heated current, the heated current for being passed through heating device is obtained；It is connected with voltage acquisition apparatus and electric current acquisition device, for obtaining The voltage and current to geodesic structure is taken, and the electricity to geodesic structure is obtained according to the voltage and current to geodesic structure Resistance；When first heater changes the structure temperature to be measured, the pretreatment unit is used to obtain the temperature to geodesic structure With the relationship of the resistance to geodesic structure；Heated current is passed through to described when geodesic structure heats to the heating device, institute Pretreatment unit is stated for obtaining the relationship of heated current Yu structural resistance to be measured；The pretreatment unit is also used to according to be measured The temperature of structure and the relationship of the resistance to geodesic structure and the relationship of heated current and structural resistance to be measured, obtain heated current With the relationship of structure temperature to be measured；
Test processes device is connected with voltage acquisition apparatus and electric current acquisition device, described to geodesic structure for obtaining Voltage and current, and the resistance change rate to geodesic structure is obtained according to the voltage and current；It is obtained with the heated current Device is taken to be connected, for obtaining the heated current for being passed through heating device when heating device is passed through heated current；At the test Whether reason device fails described in being also used to be judged according to the resistance change rate to geodesic structure, reaches pre- in the resistance change rate If judging the structural failure to be measured when threshold value；It is connected with the time acquisition device, for described to geodesic structure mistake in judgement First out-of-service time to geodesic structure under test conditions is obtained when effect；
Work disposal device is connected with the pretreatment unit, for obtaining the pass of heated current Yu structure temperature to be measured System；It is connected with the test processes device, for obtaining the first out-of-service time and corresponding with first out-of-service time Sense electric current；For according to first out-of-service time and in conjunction with the relationship of heated current and structure temperature to be measured obtain described in The activation energy of geodesic structure；For according to it is described sensing electric current obtain it is described sensing electric current current density, and in conjunction with the sense Survey the electric current corresponding first out-of-service time acquisition the Activation Energy；It is also used to according to the activation energy to geodesic structure Second out-of-service time to geodesic structure under running conditions is obtained with the Activation Energy.
Optionally, the first heater includes: that can heat chuck；The voltage acquisition apparatus includes: potentiometer；Institute Stating electric current acquisition device includes: the first galvanometer；The heated current acquisition device includes: the second galvanometer；The time is obtained Taking device includes: timer.
Correspondingly, the present invention also provides a kind of test methods using electro-migration testing device provided by the present invention, comprising:
It provides to geodesic structure；
The resistance to geodesic structure under different temperatures is measured, to obtain the temperature to geodesic structure and the resistance to geodesic structure Relationship；
It is filled described to electro-migration testing described in geodesic structure and claim 1 to any one of claim 9 claim Set connected, Xiang Suoshu heating device is passed through heated current and heats to described to geodesic structure, and measures described to geodesic structure Resistance obtains the relationship of heated current and structural resistance to be measured；
According to the temperature and the relationship of the resistance to geodesic structure to geodesic structure, in conjunction with heated current and structural resistance to be measured Relationship obtains the relationship of heated current and structure temperature to be measured；
Heated current is passed through to the heating device to heat to described to geodesic structure；
By heating device to it is described heated to geodesic structure during, to load electrode load test electricity Pressure, and obtain the sensing electric current and sensing voltage to geodesic structure under the test voltage, based on the sensing electric current with Sensing voltage obtains the resistance change rate to geodesic structure；
The structural failure to be measured is judged when resistance change rate reaches preset threshold, is obtained to geodesic structure in test condition Under the first out-of-service time；
Relationship based on heated current Yu structure temperature to be measured, in conjunction with the first out-of-service time corresponding with heated current, Obtain the activation energy to geodesic structure；
The knot to be measured is obtained in conjunction with the current density of sensing electric current based on heated current corresponding first out-of-service time The Activation Energy of structure；
According to the activation energy and the Activation Energy to geodesic structure, in conjunction with first out-of-service time, described in acquisition Test the second out-of-service time of structure under running conditions.
Optionally, in the step of obtaining the temperature and the relationship of the resistance to geodesic structure to geodesic structure, by the way that card can be heated Disk changes the temperature to geodesic structure.
Optionally, the step of obtaining the activation energy to geodesic structure includes: based on heated current structure temperature to be measured Relationship, in conjunction with multiple heated currents one-to-one multiple first out-of-service times, obtain the activation energy to geodesic structure.
Optionally, the step of obtaining the Activation Energy to geodesic structure includes: to be based on and multiple heated currents one One corresponding multiple first out-of-service times were obtained with one-to-one multiple sensing circuit current density of multiple first out-of-service times Obtain the Activation Energy to geodesic structure.
Optionally, the quantity of first out-of-service time is no less than 3.
Optionally, Xiang Suoshu heating device is passed through heated current in described the step of heating to geodesic structure, described Heating device makes the temperature to geodesic structure within the scope of 200 DEG C to 450 DEG C；To the load electrode load test voltage In step, the test voltage makes the sensing electric current in 0.1MA/cm2 to 50MA/cm2 range.
Compared with prior art, technical solution of the present invention has the advantage that
The present invention is arranged for making institute by independent heating device to the heating device heated to geodesic structure It states and reaches the test condition to the temperature of geodesic structure, to make temperature to the influence to geodesic structure electromigration and electric current pair The influence to geodesic structure electromigration separates, and can be improved the activation energy and current density to geodesic structure obtained and refers to Several accuracys, and then the accuracy to geodesic structure out-of-service time under operating conditions obtained is improved, it effectively improves The accuracy of electro-migration testing.Meanwhile relative to package level reliability test, technical solution of the present invention can be effectively shortened pair The time tested to geodesic structure improves testing efficiency.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the electro-migration testing device of metal interconnection structure in the prior art；
Fig. 2 to Fig. 3 is the structural schematic diagram of one embodiment of electro-migration testing device of the present invention；
Fig. 4 and Fig. 5 is the structural schematic diagram of another embodiment of electro-migration testing device of the present invention；
Fig. 6 and Fig. 7 is the schematic diagram of one embodiment of electro-migration testing system of the present invention.
Specific embodiment
It can be seen from background technology that there is test result inaccuracy in electro-migration testing in the prior art.Now in conjunction with Electro-migration testing device and its reason of its test result inaccuracy problem of analysis of test methods in the prior art:
With reference to Fig. 1, a kind of structural schematic diagram of the electro-migration testing device of metal interconnection structure in the prior art is shown.
Shown in Fig. 1, the electro-migration testing structure is used to carry out electro-migration testing to metal interconnecting wires.Therefore to geodesic structure 10 be metal interconnecting wires.The electro-migration testing device has included the connection metal layer 20 of connection function, the connection metal layer 20 are set to the both ends to geodesic structure 10；Positioned at connection metal layer 20 far from the first load(ing) point f1 and the to 10 one end of geodesic structure Two load(ing) point f2, the first load(ing) point f1 and the second load(ing) point f2 are used for on-load voltage；The electro-migration testing device Further include positioned at the first load(ing) point f1 and between geodesic structure 10 the first sensing points s1 and be located at the second load(ing) point f2 and to The second sensing points s2, the first sensing points s1 and the second sensing points s2 and the connection metal layer between geodesic structure 10 is direct Electrical connection.
When carrying out electro-migration testing, under room temperature environment, ratio is applied by the first load(ing) point f1 and the second load(ing) point f2 Bigger voltage under actual operating conditions, described close to form the electric current bigger than under actual operating conditions in geodesic structure 10 Degree, to accelerate the failure to geodesic structure 10, is obtained described to geodesic structure with accelerating the electromigration to geodesic structure 10 10 the first out-of-service time ttf under test conditionsstress。
Theoretically, the out-of-service time of ELECTROMIGRATION PHENOMENON can be described by blackbody formula (Black Equation): TTF= A×j-n×exp(Ea/ kT), wherein j is that electric current is close, and n indicates the Activation Energy, EaFor the activation energy to geodesic structure, k For Boltzmann constant, T is the temperature to geodesic structure.
Therefore according to the first out-of-service time ttf under test conditionstress, and during binding test to geodesic structure Temperature and current density obtain the activation energy and the Activation Energy to geodesic structure, and then can obtain under operating condition The second out-of-service time ttfop。
During actual test, flow through the high current to geodesic structure 10 can not only accelerate it is described to geodesic structure 10 Electromigration can also cause the temperature to geodesic structure 10 to change due to joule electrocaloric effect, cause described to geodesic structure The variation of 10 resistance, and then the current density to geodesic structure 10 is caused to change.That is, using the electromigration When test device carries out electro-migration testing, the temperature to geodesic structure 10 is related to the size of the current density, therefore root According to the first out-of-service time ttfstressAnd the temperature and current density to geodesic structure 10 can not accurately obtain it is described to The activation energy and current density of geodesic structure 10, so the second out-of-service time ttf under operating condition can not be obtained accuratelyop。
To solve the technical problem, the present invention provides a kind of electro-migration testing device, comprising:
Connect metal layer, one end is connected with to geodesic structure, for realizing with being electrically connected to geodesic structure；Load electricity Pole is electrically connected, for testing to described apply to geodesic structure with the not connected described one end to geodesic structure of the connection metal layer Voltage makes the sensing electric current to geodesic structure reach test condition, to realize electromigration；Sensing electrode, with the connection gold Belong to the described one end to geodesic structure of layer connection to be electrically connected, for obtaining the sensing voltage to geodesic structure under test conditions； Heating device makes the temperature to geodesic structure reach the test condition, realizes for heating to described to geodesic structure Electromigration.
The present invention is arranged for making institute by independent heating device to the heating device heated to geodesic structure It states and reaches the test condition to the temperature of geodesic structure, to make influence and electric current of the temperature to the electromigration to geodesic structure The influence to geodesic structure electromigration is separated, can be improved the activation energy and current density to geodesic structure obtained The accuracy of index, and then the accuracy to geodesic structure out-of-service time under operating conditions obtained is improved, effectively mention The accuracy of high electro-migration testing.Meanwhile relative to package level reliability test, technical solution of the present invention can be effectively shortened To the time tested to geodesic structure, testing efficiency is improved.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention Specific embodiment be described in detail.
Referring to figs. 2 and 3, the structural schematic diagram of one embodiment of electro-migration testing device of the present invention is shown.Wherein Fig. 2 is The electro-migration testing device overlooking structure diagram, Fig. 3 are the 3-D views of Fig. 2 centre circle 120.
It should be noted that the electro-migration testing device is used to obtain the out-of-service time to geodesic structure T1.The failure Time is for measuring semiconductor components and devices and circuit reliability.It is described to may include metal interconnecting wires to geodesic structure T1 or have The metal interconnecting wires of plug.In the present embodiment, it is described to geodesic structure T1 be metal interconnecting wires.
As shown in Fig. 2, the electro-migration testing device includes:
Metal layer is connected, one end is connected with described to geodesic structure T1, for realizing the electrical connection to geodesic structure T1.
Electromigration refers to that there is a phenomenon where migrate under electric field action for metal ion.Therefore described to geodesic structure in order to obtain The out-of-service time of T1, need to make to described to be passed through electric current in geodesic structure T1 electromigration occurs to geodesic structure T1.Therefore described Metal layer is connected for realizing the electrical connection to geodesic structure T1, by the connection metal layer to described in geodesic structure T1 It is passed through electric current.
In the present embodiment, the connection metal layer includes the first connection metal layer M1 and second connects metal layer M2, described Be metal interconnecting wires to geodesic structure T1, the connection metal layer is located at the metal interconnecting wires both ends, and with the metal Interconnection line is directly connected to.
Electrode is loaded, is electrically connected, is used for described with the not connected described one end to geodesic structure T1 of the connection metal layer Apply test voltage to geodesic structure T1, so that the sensing electric current to geodesic structure T1 is reached test condition, to realize electromigration.
It is described to the both ends geodesic structure T1 formation voltage difference by, to the both ends geodesic structure T1 on-load voltage, making described, thus Described to form electric current in geodesic structure T1.The load electrode is used to apply test voltage to the both ends geodesic structure T1 described, Thus described to form electric current in geodesic structure T1, so that described occur electromigration to geodesic structure T1.
In the present embodiment, the load electrode includes the first load electrode F1 and the second load electrode F2, and described first adds Load electrode F1 connect the not connected one end to geodesic structure T1 metal layer M1 with described first and is connected；It is described second load electrode F2 with The not connected one end to geodesic structure T1 the second connection metal layer M2 is connected.
Sensing electrode is electrically connected with described described one end to geodesic structure T1 of connection metal layer connection, is used for
Obtain the sensing voltage to geodesic structure T1 under test conditions.
Since the load electrode is realized and being electrically connected to geodesic structure T1, institute by the connection metal layer The voltage that load electrode applies is stated not only to load to geodesic structure T1, connecting also has certain partial pressure on metal layer, so In order to accurately obtain the voltage to the both ends geodesic structure T1, the accuracy of the electro-migration testing is improved, the sensing is passed through Electrode obtains the voltage to the both ends geodesic structure T1.
In the present embodiment, the sensing electrode includes the first sensing electrode S1 and the second sensing electrode S2, first sense It surveys electrode S1 and is located at the first load electrode F1 and institute between geodesic structure T1；The second sensing electrode S2 is located at described second and adds Carry electrode F2 and described between geodesic structure T1.
The electro-migration testing device further include: heating device 100 makes for heating to described to geodesic structure T1 The temperature to geodesic structure T1 reaches the test condition, realizes electromigration.
The heating device 100 includes one or more fin formula field effect transistors 110.Due in fin field effect crystal In pipe 110, channel is predominantly located in fin, that is to say, that channel current is limited in the fin of finite volume, therefore fin Field effect transistor 110 has stronger self-heating effect (Self-Heating Effect), therefore can effectively generate quite Heat, to be heated to described to geodesic structure T1.
Specifically, one or more fin formula field effect transistors 110 are located at the lower section to geodesic structure T1, to realize benefit The heat generated after being powered with the fin formula field effect transistor 110 is heated to described to geodesic structure T1.
In the present embodiment, described to geodesic structure T1 metal interconnecting wires, the metal interconnecting wires are strip.The heater Part 100 includes multiple fin formula field effect transistors 110, and multiple fin formula field effect transistors have multiple fins 111, and more A fin 111 is parallel to each other and is arranged in parallel with the metal interconnecting wires.
If, can shadow it should be noted that described too big to the distance between geodesic structure T1 and the heating device 100 The heating device 100 is rung to the heating efficiency to geodesic structure T1；It is described to geodesic structure T1 and the heating device 100 it If distance between is too small, will affect the accuracy to geodesic structure T1 electro-migration testing.Therefore described in the present embodiment To the distance between geodesic structure T1 and the heating device 100 in 10nm to 1 μ m.
In the present embodiment, the multiple fin formula field effect transistor 110 further includes gate structure 112, the gate structure 112 across multiple fins 111, and cover the part of the surface at fin 111 top and side wall.The metal interconnecting wires position Above the gate structure 112, and with h the distance between at the top of the gate structure 112 in 10nm to 1 μ m.
With reference to Fig. 4 and Fig. 5, the structural schematic diagram of another embodiment of electro-migration testing device of the present invention is shown.Wherein Fig. 4 It is the overlooking structure diagram of the electro-migration testing device；Fig. 5 is the measurements of the chest, waist and hips view of Fig. 4 centre circle 220.
The present embodiment is repeated no more with previous embodiment something in common, and the present embodiment and previous embodiment difference exist In, in the present embodiment, it is described to geodesic structure T2 be the metal interconnecting wires with plug.
It to geodesic structure T2 is the metal interconnecting wires with plug specifically, described, the connection metal layer is located at the gold Belong to interconnection line both ends, and is connected by the plug with the metal interconnecting wires.
In the present embodiment, described to geodesic structure T2 includes metal interconnecting wires T21, and is located at metal interconnecting wires T21 The first plug CT1 and the second plug CT2 at both ends.The first connection metal layer M21 is connected with the first plug CT1, and It is connected by the first plug CT1 with the metal interconnecting wires T21；The second connection metal layer M22 is inserted with described second It fills in CT2 to be connected, and is connected by the second plug CT2 with the metal interconnecting wires T21.
It should be noted that the first plug CT1 and the second plug CT2 are located at metal interconnection in the present embodiment In one side of the line T21 far from the heating device 200, therefore between the metal interconnecting wires T21 and the heating device 200 Distance is less than the distance between the connection metal layer and the heating device 200.But this way is only an example, this hair In bright other embodiments, first plug and the second plug can also be located at the metal interconnecting wires close to the heating device One side on.In this case, the distance between the metal interconnecting wires and the heating device are greater than the connection metal layer The distance between described heating device, the present invention are without limitation.
Correspondingly, the present invention also provides a kind of test methods using electro-migration testing device provided by the present invention, comprising:
It provides to geodesic structure；Measure the resistance to geodesic structure under different temperatures, with obtain the temperature to geodesic structure with The relationship of resistance to geodesic structure；It is connected described to geodesic structure electro-migration testing device provided by the present invention, to the heating Device is passed through heated current and heats to described to geodesic structure, and measures the resistance to geodesic structure, obtains heated current With the relationship of structural resistance to be measured；According to geodesic structure temperature with to geodesic structure resistance relationship, in conjunction with heated current with The relationship of structural resistance to be measured obtains the relationship of heated current and structure temperature to be measured；Heating electricity is passed through to the heating device Stream is heated to described to geodesic structure；By heating device to it is described heated to geodesic structure during, Xiang Suoshu Electrode load test voltage is loaded, and obtains the sensing electric current and sensing voltage to geodesic structure under the test voltage, The resistance change rate to geodesic structure is obtained based on the sensing electric current and sensing voltage；Reach default threshold in resistance change rate The structural failure to be measured is judged when value, obtains the first out-of-service time to geodesic structure under test conditions；Based on heated current The swashing to geodesic structure is obtained in conjunction with the first out-of-service time corresponding with heated current with the relationship of structure temperature to be measured Energy living；It is obtained described to geodesic structure based on heated current corresponding first out-of-service time in conjunction with the current density of sensing electric current The Activation Energy；It is obtained according to the activation energy and the Activation Energy to geodesic structure in conjunction with first out-of-service time The second out-of-service time of the test structure under running conditions.
Step S100 is first carried out, provides to geodesic structure.
It to geodesic structure may include metal interconnecting wires or with the metal interconnecting wires of plug specifically, described.This implementation Example in, it is described to geodesic structure be metal interconnecting wires.
Then step S200 is executed, the resistance to geodesic structure under different temperatures is measured, to obtain the temperature to geodesic structure The relationship of degree and the resistance to geodesic structure.
Specifically, the step of obtaining the temperature and the relationship to the resistance of geodesic structure to geodesic structure includes: that selection is more A temperature preset value, and resistance to geodesic structure described in measuring when described when the temperature of geodesic structure reaches the preset value, with Obtain the temperature and the relationship of the resistance to geodesic structure to geodesic structure.
In the present embodiment, the temperature to geodesic structure can be changed by the way that chuck can be heated.Specifically, can described in Heating chuck is heated to described to geodesic structure, and the temperature to geodesic structure is made to reach the temperature preset value；It surveys simultaneously The amount resistance to geodesic structure, with the relationship established between structure temperature and resistance to be measured.
Specifically, measurement when it is described when the temperature of geodesic structure reaches the preset value described in geodesic structure resistance mistake Cheng Zhong is heated to described to geodesic structure by that can heat chuck, by temperature testing equipment to the temperature to geodesic structure Degree is monitored, and the temperature to geodesic structure is made to reach temperature preset value；It is passed through electric current to geodesic structure to described simultaneously, is passed through Obtain the voltage to geodesic structure both ends with the potentiometer in parallel to geodesic structure, by with the structures in series to be measured Galvanometer obtains described to electric current in geodesic structure；According to the relationship of electric current, voltage and resistance obtain it is described to geodesic structure in phase Resistance at a temperature of answering.
By measuring under multiple temperature preset values, the resistance to geodesic structure, establish the temperature to geodesic structure with The relationship of resistance.
Step S300 is executed later, is connected described to geodesic structure with electro-migration testing device provided by the present invention, to The heating device is passed through heated current and heats to described to geodesic structure, and measures the resistance to geodesic structure, obtains The relationship of heated current and structural resistance to be measured.
Specifically, being passed through heated current to the heating device, add the heating device to geodesic structure to described Heat, and by obtaining the heated current with the concatenated galvanometer of the heating device；Electricity is passed through to geodesic structure to described simultaneously Stream, by the voltage described in being obtained with the potentiometer in parallel to geodesic structure to geodesic structure both ends, by with the knot to be measured The concatenated galvanometer of structure obtains described to electric current in geodesic structure；It is obtained according to the relationship of electric current, voltage and resistance described to be measured The resistance of structure.
It is passed through under different heating current conditions by HEATER FOR MEASURING part, the resistance to geodesic structure, obtains described add The relationship of thermocurrent and the structural resistance to be measured.
Execute step S400, according to geodesic structure temperature with to geodesic structure resistance relationship, in conjunction with heated current with The relationship of structural resistance to be measured obtains the relationship of heated current and structure temperature to be measured.
Step S500 is executed later, is passed through heated current into the heating device again, is carried out to described to geodesic structure Heating.
In addition, by heating device to it is described heated to geodesic structure during, execute step S600, Xiang Suoshu Electrode load test voltage is loaded, and obtains the sensing electric current and sensing voltage to geodesic structure under the test voltage, The resistance change rate to geodesic structure is obtained based on the sensing electric current and sensing voltage.
Specifically, making described to be formed in geodesic structure by an external power supply to the load electrode load test voltage Electric current；By obtaining the sensing electric current with the galvanometer of the structures in series to be measured, pass through what is be connected with the sensing electrode Potentiometer obtains the sensing voltage, obtains the resistance to geodesic structure based on the sensing electric current and the sensing voltage.
According to the design and use environment to geodesic structure, multiple experimental temperature value (T are selectedt) and multiple experiments electricity Flow valuve (It).According to the relationship of the heated current and structure temperature to be measured, the heated current is adjusted, is made described to geodesic structure Temperature reach the experimental temperature value Tt, and flow through the electric current to geodesic structure and respectively reach the experiment current value It。 And reach the experiment current value I when flowing through the electric current to geodesic structuretWhen, by the sensing electrode obtain it is described to The voltage of geodesic structure two sides according to the voltage value and flows through electric current (the i.e. described experiment current value I to geodesic structuret), Obtain the resistance R to geodesic structuret。
It should be noted that the test method is a kind of acceleration service life test method, it is using than actual operating conditions Under bigger current density and higher temperature to accelerate the failure to geodesic structure, and based on the mistake under experiment condition to geodesic structure The time is imitated, the out-of-service time to geodesic structure under normal running conditions is obtained.Therefore, in the present embodiment, multiple experiments are chosen In the step of temperature value and multiple test current value, the range of the experimental temperature value is at 200 DEG C to 450 DEG C；The test electricity The range of flow valuve is in 0.1MA/cm2To 50MA/cm2In range.
When being tested, when electric current flows through when geodesic structure, to be formed with electric field in geodesic structure, in the effect of the electric field Lower described can generate along the direction of the electric field to the metal ion in geodesic structure is displaced, to generate mass transport, occurs ELECTROMIGRATION PHENOMENON.The result of ELECTROMIGRATION PHENOMENON can make certain positions of conductor generate cavity or whisker, to make the knot to be measured The resistance R of structuretIncrease.So the structural resistance R to be measuredtVariation can characterize the case of iontophoresis to geodesic structure.
Therefore according to the resistance to geodesic structure, the resistance change rate to geodesic structure is obtained.In the present embodiment, with Described in when starting test to the resistance of geodesic structure on the basis of, obtain resistance change rate to geodesic structure described in test process.
When the resistance change rate reaches preset threshold, step 700 is executed, judgement is described to be realized to geodesic structure, is obtained The first out-of-service time TTF to geodesic structure under test conditions.
After obtaining the first out-of-service time TTF, execution step S800, the relationship based on heated current Yu structure temperature to be measured, In conjunction with the first out-of-service time corresponding with heated current, the activation energy to geodesic structure is obtained.
According to blackbody formula, in fixed current value ItUnder the conditions of, it, can according to out-of-service time TTF formula in electro-migration testing To obtain out-of-service time TTF and structure temperature T to be measuredtRelationship: ln (TTF)=Ea/kTt+c2, wherein TTF is out-of-service time, jt For current density, n is the Activation Energy, EaFor the activation energy to geodesic structure, k is Boltzmann constant, TtFor to geodesic structure Temperature, c2For constant.
So the step of obtaining the activation energy to geodesic structure includes: the pass based on heated current structure temperature to be measured System, in conjunction with multiple heated currents one-to-one multiple first out-of-service times, obtain the activation energy to geodesic structure.
According to the relationship of heated current and structure temperature to be measured, can obtain described corresponding to multiple heated currents Structure temperature T to be measuredt, based on multiple out-of-service time TTF to geodesic structure and structure temperature T to be measuredt, can obtain described to be measured The activation energy E of structureaSize.
Specifically, can be according to multiple out-of-service time TTF to geodesic structure and structure temperature T to be measuredt, obtain the out-of-service time TTF and structure temperature T to be measuredtRelation curve；According to the out-of-service time TTF and structure temperature T to be measuredtIt can obtain described The slope of relation curve, the slope value are the activation energy E to geodesic structureaSize.
After obtaining the first out-of-service time TTF, step S900 can also be performed, when failing based on heated current corresponding first Between, in conjunction with the current density of sensing electric current, obtain the Activation Energy to geodesic structure.
According to blackbody formula, in fixed temperature value TtUnder the conditions of, the out-of-service time can indicate in electro-migration testing are as follows: TTF =A × jt -n×exp(Ea/kTt), wherein TTF is out-of-service time, jtFor current density, n is the Activation Energy, and Ea is to be measured The activation energy of structure, k are Boltzmann constant, TtFor to geodesic structure, A is constant.So to geodesic structure out-of-service time and Test the relationship of electric current are as follows: ln (TTF)=- n*lnjt+c1, wherein TTF is out-of-service time, jtFor current density, n is that electric current is close Index is spent, Ea is the activation energy to geodesic structure, and k is Boltzmann constant, TtFor test temperature, c1For constant.
So the step of obtaining the Activation Energy to geodesic structure includes: to be based on multiple heated currents one by one Corresponding multiple first out-of-service times obtain with one-to-one multiple sensing circuit current density of multiple first out-of-service times The Activation Energy to geodesic structure.
According to multiple sensing electric current It, the current density j of the sensing electric current can be obtainedt, based on multiple to geodesic structure The out-of-service time TTF and current density jt, the size of the Activation Energy n can be obtained.
Specifically, can be according to multiple the first out-of-service time TTF and the current density j to geodesic structuret, obtain first The out-of-service time TTF and current density jtRelation curve；According to first out-of-service time TTF and the current density jt The slope of the relation curve can be obtained, the slope value is the size of the Activation Energy n to geodesic structure.
It should be noted that in the present embodiment, the quantity of the first out-of-service time TTF is not in order to improve measuring accuracy Less than 3, that is to say, that sensing electric current I corresponding with the first out-of-service time TTFtAnd the quantity of heated current is equal No less than 3.
Finally after acquisition is described to the activation energy and the Activation Energy of geodesic structure, step S1000 is executed, according to institute The activation energy and the Activation Energy to geodesic structure are stated, in conjunction with first out-of-service time, the test structure is obtained and is working Under the conditions of the second out-of-service time.
The test method is a kind of acceleration service life test method, for improve testing efficiency, the sensing electric current and with To the temperature of geodesic structure much larger than the operating current I to geodesic structure in normal work corresponding to heated currentoAnd work Make temperature Io。
So the out-of-service time can indicate are as follows: TTF=A × j according to blackbody formulat -n×exp(Ea/kTt).So described Out-of-service time TTF when geodesic structure works normallyoIt can indicate are as follows: TTFo=(jt/jop)n×exp[(1/Top-1/Tt)× Ea/ k] × TTF, wherein jopFor the current density of operating current, jtFor the current density for sensing electric current, n refers to for current density Number, EaFor the activation energy to geodesic structure, k is Boltzmann constant, TopFor operating temperature, TtFor the temperature to geodesic structure, TTF is First out-of-service time.
Thus according to the current density j of operating currentop, sensing electric current current density jtAnd work temperatureop, it is to be measured The temperature T of structuret, in conjunction with step S800 and step S900 obtain described in activation energy E to geodesic structureaAnd the Activation Energy N, the first out-of-service time TTF can obtain the second out-of-service time TTF to geodesic structure in normal worko。
Correspondingly, the present invention also provides a kind of electro-migration testing systems, comprising:
Electro-migration testing device provided by the present invention；First heater, for changing the temperature to geodesic structure； Temperature acquisition device, it is described to geodesic structure temperature for being obtained when the first heater changes the structure temperature to be measured Degree；Power supply, for being supplied to geodesic structure when the first heater changes the structure temperature to be measured described Electricity；Test power supply, for by heating device to it is described heated to geodesic structure during, add to the load electrode Carry test voltage；Voltage acquisition apparatus is connected with the sensing electrode, for obtaining the voltage to geodesic structure；Electric current obtains Device is taken, is connected with described to geodesic structure, for obtaining the electric current to geodesic structure；Heated current acquisition device, and it is described Heating device is connected, for obtaining the heated current for being passed through the heating device；Time acquisition device, for obtaining to geodesic structure The first out-of-service time under test conditions；Pretreatment unit is connected with the temperature acquisition device, for adding described first Thermal obtains the structure temperature to be measured when changing the structure temperature to be measured；It is connected with the heated current acquisition device, For obtaining the heated current for being passed through heating device when heating device is passed through heated current；With voltage acquisition apparatus and electric current Acquisition device is connected, for obtaining the voltage and current to geodesic structure, and according to the voltage and current to geodesic structure Obtain the resistance to geodesic structure；When first heater changes the structure temperature to be measured, the pretreatment unit is used In the relationship for obtaining the temperature to geodesic structure with the resistance to geodesic structure；To the heating device be passed through heated current to it is described to When geodesic structure is heated, the pretreatment unit is used to obtain the relationship of heated current Yu structural resistance to be measured；The pre- place Reason device is also used to according to the temperature to geodesic structure with the relationship and heated current of the resistance to geodesic structure and to geodesic structure electricity The relationship of resistance obtains the relationship of heated current and structure temperature to be measured；Test processes device, is obtained with voltage acquisition apparatus and electric current Device is taken to be connected, for obtaining the voltage and current to geodesic structure, and it is described to be measured according to voltage and current acquisition The resistance change rate of structure；It is connected with the heated current acquisition device, for obtaining when heating device is passed through heated current It is passed through the heated current of heating device；The test processes device is also used to judge the knot to be measured according to the resistance change rate Whether structure fails, and the structural failure to be measured is judged when the resistance change rate reaches preset threshold；It is obtained with the time Device is connected, for obtained when judge the structural failure to be measured it is described when geodesic structure under test conditions first fail when Between；Work disposal device is connected with the pretreatment unit, for obtaining the relationship of heated current Yu structure temperature to be measured；With The test processes device is connected, for obtaining the first out-of-service time and sensing corresponding with first out-of-service time electricity Stream；For according to first out-of-service time and in conjunction with the relationship of heated current and structure temperature to be measured obtain described in geodesic structure Activation energy；For according to it is described sensing electric current obtain it is described sensing electric current current density, and in conjunction with the sensing electric current Corresponding first out-of-service time obtains the Activation Energy；It is also used to according to the activation energy and electric current to geodesic structure Dnesity index obtains second out-of-service time to geodesic structure under running conditions.
With reference to Fig. 6, the structural schematic diagram of one embodiment of electro-migration testing system of the present invention is shown.
The electro-migration testing system includes:
Electro-migration testing device 300 provided by the present invention.
The electro-migration testing device 300 is electro-migration testing device provided by the present invention, and concrete scheme refers to aforementioned electricity The embodiment of test device is migrated, details are not described herein by the present invention.
Voltage acquisition apparatus 310 is connected with the sensing electrode 302, for obtaining the voltage to geodesic structure 303； Electric current acquisition device 320 is connected with described to geodesic structure 303, for obtaining the electric current to geodesic structure 303.
During carrying out electro-migration testing, need to make described to form electric current, the acquisition knot to be measured in geodesic structure 303 The voltage of structure 303, relationship based on electric current, voltage and resistance obtain the resistance to geodesic structure 303, by it is described to Whether the monitoring judgement of 303 resistance of geodesic structure is described fails to geodesic structure 303.Therefore it during electro-migration testing, needs to obtain The voltage and resistance to geodesic structure 303 is obtained, with the voltage acquisition apparatus 310 and electric current being connected to geodesic structure 303 Acquisition device 320 is for obtaining the voltage and resistance to geodesic structure 303.
Specifically, the voltage acquisition apparatus 310 may include potentiometer in the present embodiment, pass through the sensing electrode 302 with it is described in parallel to geodesic structure 303；The electric current acquisition device 320 may include with described to geodesic structure 303 concatenated One galvanometer.
First heater 330, for changing the temperature to geodesic structure 303；Temperature acquisition device 340 is used for It is described to 303 temperature of geodesic structure that the first heater 330 changes acquisition when 303 temperature of geodesic structure；Power supply 350, it described is supplied to geodesic structure 303 when 303 temperature of geodesic structure described for changing in the first heater 330 Electricity.
During carrying out electro-migration testing, need to establish acquisition heated current and the relationship to 303 temperature of geodesic structure, tool Body, heated current is obtained respectively with the relationship to 303 resistance of geodesic structure and to 303 resistance of geodesic structure and to geodesic structure 303 The relationship of temperature, and according to heated current with the relationship to 303 resistance of geodesic structure and to 303 resistance of geodesic structure and to geodesic structure The relationship of 303 temperature obtains heated current and the relationship to 303 resistance of geodesic structure.
The first heater 330 is for obtaining to 303 resistance of geodesic structure and the relationship to 303 temperature of geodesic structure During change it is described to 303 temperature of geodesic structure.In the present embodiment, the first heater 330 can be that can heat card Disk, it is described to geodesic structure 303 be set to it is described can heat on chuck, it is described heat chuck can generate heat so that it is described to The temperature of geodesic structure 303 rises.
The temperature acquisition device 340 is used to obtain to 303 resistance of geodesic structure and the process to 303 temperature relation of geodesic structure Temperature described in middle acquisition to geodesic structure 303, that is to say, that the temperature acquisition device 340 is used in the first heating dress It sets described in being obtained when 303 temperature of geodesic structure described in 330 changes to 303 temperature of geodesic structure.In the present embodiment, the temperature is obtained Device 340 can be infrared temperature sensor, to obtain the temperature to geodesic structure 303.
The electro-migration testing system further include: test power supply 360, for passing through heating device 304 to described to be measured During structure 303 is heated, to the 301 load test voltage of load electrode；Heated current acquisition device 370, with The heating device 304 is connected, for obtaining the heated current for being passed through the heating device 304；Time acquisition device 380 is used In first out-of-service time of the acquisition to geodesic structure 303 under test conditions.
During electro-migration testing, need to obtain the size that electric current is flowed through in the heating device 304, and combine and obtain Heated current and the relationship to 303 temperature of geodesic structure, obtain the temperature to geodesic structure 303.Therefore the heated current obtains Device 370 is taken, for obtaining the size of the heated current, that is to say, that the heated current during electro-migration testing Acquisition device 370 is connected, for obtaining the heated current for being passed through the heating device 304 with the heating device 304.Specifically , the heated current acquisition device 370 may include and concatenated second galvanometer of the heating device 304.
The test power supply 360 is used for during electro-migration testing to the 304 load test voltage of load electrode, also To say, the test power supply 360 be used for by heating device 304 to it is described heated to geodesic structure 303 during, to The 301 load test voltage of load electrode.
The time acquisition device 380 is used for during carrying out electro-migration testing, carries out timing, described to be measured to obtain The first out-of-service time of structure 303 under test conditions.Specifically, the time acquisition device 380 may include timer.
The electro-migration testing is a kind of accelerating lifetime testing, is using the current density bigger than under actual operating conditions Accelerate the failure to geodesic structure 303 with higher temperature, and based on the out-of-service time under experiment condition to geodesic structure 303, obtains Obtain the out-of-service time to geodesic structure 303 under normal running conditions.That is, first in the case where obtaining test condition fails After time, the electro-migration testing system is based on described in first out-of-service time acquisition to geodesic structure 303 in operating condition Under the second out-of-service time.
Specifically, the electro-migration testing system further include: for obtaining heated current and the pass to 303 temperature of geodesic structure The pretreatment unit 410 of system, the test processes device 420 for obtaining for the first out-of-service time and for according to it is described first lose The effect time obtains the work disposal device 430 of second out-of-service time.
In conjunction with reference Fig. 7, show at the pretreatment unit 410, the test processes device 420 and the work Manage the functional block diagram of device 430.
The pretreatment unit 410 is connected with the temperature acquisition device 340, in the first heater 330 It is described to 303 temperature of geodesic structure to change acquisition when 303 temperature of geodesic structure；With 370 phase of heated current acquisition device Even, for obtaining the heated current for being passed through heating device 304 when heating device 304 is passed through heated current；It obtains and fills with voltage It sets 310 to be connected with electric current acquisition device 320, for obtaining the voltage and current to geodesic structure 303, and according to described to be measured The voltage and current of structure 303 obtains the resistance to geodesic structure 303；Change the knot to be measured in first heater 330 When structure temperature, the pretreatment unit 410 is used to obtain temperature and the relationship of the resistance to geodesic structure 303 to geodesic structure 303； Heated current is passed through to described when geodesic structure 303 heats to the heating device 304, and the pretreatment unit 410 is used Relationship in obtaining heated current and to 303 resistance of geodesic structure；The pretreatment unit 410 is also used to according to geodesic structure 303 Temperature and the relationship and heated current of the resistance to geodesic structure 303 and relationship to 303 resistance of geodesic structure, obtain heating electricity Stream and the relationship to 303 temperature of geodesic structure.
Specifically, the pretreatment unit 410 includes:
Temperature unit 411 is connected with the temperature acquisition device 340, for changing institute in the first heater 330 It states described in being obtained when 303 temperature of geodesic structure to 303 temperature of geodesic structure.In the present embodiment, the temperature unit 411 with it is described red Outer temperature sensor is connected, it is described heat card to it is described heated to geodesic structure 303 during, obtain it is described to The temperature of geodesic structure 303.
Heated current unit 413 is connected with the heated current acquisition device 370, adds for being passed through in heating device 304 When thermocurrent, the heated current for being passed through heating device 304 is obtained.In the present embodiment, the heated current unit 413 and described the Two galvanometer are connected, for obtaining the size for the heated current for flowing through the heating device 304 that second galvanometer obtains.
Resistance unit 412 is connected with voltage acquisition apparatus 310 and electric current acquisition device 320, for obtaining the knot to be measured The voltage and current of structure 303, and the resistance to geodesic structure 303 is obtained according to the voltage and current to geodesic structure 303.
The pretreatment unit 410 further includes at first processing units 414, the second processing unit 415 and current temperature Manage unit 416.
The first processing units 414 are connected with the temperature unit 411 and the resistance unit 412, for first Heating device 330 changes described when 303 temperature of geodesic structure, temperature of the acquisition to geodesic structure 303 and the resistance to geodesic structure 303 Relationship；Described the second processing unit 415 is connected with the resistance unit 412 and the heated current unit 413, is used for institute It states heating device 304 and is passed through heated current to described when geodesic structure 303 heats, obtain heated current and to geodesic structure The relationship of 303 resistance.
The current temperature processing unit 416 is connected with the first processing units 414, for receiving first processing The relationship to 303 temperature of geodesic structure and to 303 resistance of geodesic structure that unit 414 obtains；With 415 phase of the second processing unit Even, for receiving heated current and the relationship to 303 resistance of geodesic structure；The current temperature processing unit 416 is based on knot to be measured 303 temperature of structure, with to 303 sensitivity of geodesic structure, obtains heated current with to 303 sensitivity of geodesic structure and heated current With the relationship to 303 temperature of geodesic structure.
Test processes device 420 is connected with voltage acquisition apparatus 310 and electric current acquisition device 320, for obtain it is described to The voltage and current of geodesic structure 303, and the resistance change rate to geodesic structure 303 is obtained according to the voltage and current；With The heated current acquisition device 370 is connected, for when heating device 304 is passed through heated current, acquisition to be passed through heating device 304 heated current；The test processes device 420 be also used to be judged according to the resistance change rate it is described to geodesic structure whether Failure judges described to the failure of geodesic structure 303 when the resistance change rate reaches preset threshold；With the time acquisition device 380 are connected, for judgement it is described obtained when geodesic structure 303 fails it is described to geodesic structure 303 under test conditions first Out-of-service time.
Specifically, the test processes device 420 includes: resistance variations unit 421 and failure judging unit 422, it is used for It obtains the resistance change rate to geodesic structure 303 and whether is lost according to resistance change rate judgement is described to geodesic structure 303 Effect.
Resistance variations unit 421 is connected with voltage acquisition apparatus 310 and electric current acquisition device 320, for obtain it is described to The voltage and current of geodesic structure 303, and the resistance change rate to geodesic structure 303 is obtained according to the voltage and current.
Preset threshold is provided in the failure judging unit 422, the failure judging unit 422 is numbered with the resistance Unit 421 is connected, the resistance change rate obtained for obtaining the resistance variations unit 421.The realization judging unit 422 by comparing the resistance change rate and the preset threshold relative size, with judgement described in whether lost to geodesic structure 303 Effect, when the resistance change rate is greater than the preset threshold, judgement is described to fail to geodesic structure 303.
The test processes device 420 further include: time acquisition unit 423 and heated current for timing obtain single Member 424.
The heated current acquiring unit 424 is connected with the heated current acquisition device 370, in heating device 304 when being passed through heated current, obtains the heated current for being passed through heating device 304.Specifically, in the present embodiment, the heating electricity Stream acquiring unit 424 is connected with second galvanometer, for obtaining heated current size.
The time acquisition unit 423 is connected with the time acquisition device 380, for described to geodesic structure in judgement First out-of-service time to geodesic structure under test conditions is obtained when failure.In the present embodiment, the time acquisition unit 423 are connected with the timer, for obtaining first out-of-service time when the timer stops timing.
Work disposal device 430 is connected with the pretreatment unit 410, for obtaining heated current and to geodesic structure 303 The relationship of temperature；It is connected with the test processes device 420, when for obtaining for the first out-of-service time and fail with described first Between corresponding sensing electric current；For according to first out-of-service time and combination heated current and to 303 temperature of geodesic structure Relationship obtains the activation energy to geodesic structure 303；Electric current for obtaining the sensing electric current according to the sensing electric current is close Degree, and the Activation Energy is obtained in conjunction with the first out-of-service time corresponding with the sensing electric current；It is also used to according to institute State obtained when the activation energy of geodesic structure and the Activation Energy it is described when the second failure under running conditions of geodesic structure 303 Between.
The work disposal device 430 includes for obtaining the dnesity index unit 431 of the Activation Energy, for obtaining It is described to the activation energy unit 432 of 303 activation energy of geodesic structure and at the second out-of-service time for obtaining for the second out-of-service time Manage unit 433.
The activation energy unit 432 is connected with the pretreatment unit 410, for obtaining heated current and to geodesic structure The relationship of 303 temperature；Also it is connected with the test processes device 420, for obtaining first out-of-service time；It is also used to be based on First out-of-service time and heated current and the relationship to 303 temperature of geodesic structure, obtain the activation to geodesic structure 303 Energy.
The dnesity index unit 431 is connected with the test processes device 420, for obtain the first out-of-service time and Sensing electric current corresponding with first out-of-service time, and it is close according to the electric current that the sensing electric current obtains the sensing electric current Degree；The dnesity index unit 431 is also used to according to the current density, and in conjunction with the sensing electric current corresponding first Out-of-service time obtains the Activation Energy.
The second out-of-service time processing unit 433 is connected with the activation energy unit 432, for obtaining the knot to be measured The activation energy of structure 303；It is connected with the dnesity index unit 431, for obtaining the Activation Energy；Second failure Time be also used to be obtained according to the activation energy and the Activation Energy it is described to geodesic structure 303 under running conditions the Two out-of-service times.
Specifically, selecting multiple experimental temperature value (T according to the design and use environment to geodesic structuret2) and it is more A experiment current value (It2)。
The relationship of the heated current and structure temperature to be measured that are obtained according to the pretreatment unit 410, according to described The reading of heated current acquisition device 370 adjusts the size of the heated current, and the temperature to geodesic structure 303 is made to reach institute State experimental temperature value Tt2.And the output voltage of the test voltage 360 is adjusted according to the reading of the electric current acquisition device 320, The experiment current value I is respectively reached to geodesic structure electric current described in makingt2。
It should be noted that the electro-migration testing system is using accelerating lifetime testing method, that is to say, that described Electro-migration testing system uses the current density bigger than under actual operating conditions and higher temperature to accelerate to geodesic structure Failure, and based on the out-of-service time under experiment condition to geodesic structure 303, it obtains described to geodesic structure 303 under normal running conditions Out-of-service time.Therefore, in the present embodiment, in the step of choosing multiple experimental temperature values and multiple test current value, the reality The range of temperature value is tested at 200 DEG C to 450 DEG C；The range of the test current value is in 0.1MA/cm2To 50MA/cm2In range.
When the temperature to geodesic structure 303 reaches the experimental temperature value Tt2, described to reach institute to 303 electric current of geodesic structure State experiment current value It2When, the resistance variations unit 420 is according to the voltage acquisition apparatus 310 and the electric current acquisition device 320 voltages and resistance obtained obtain the resistance R to geodesic structure 303t2.The resistance variations unit 420 is also according to institute State the resistance R to geodesic structure 303t2Obtain the resistance change rate.Specifically, in the present embodiment, when starting test described in On the basis of the resistance of geodesic structure 303, the resistance change rate described in test process to geodesic structure 303 is obtained.
When being tested, when electric current flows through when geodesic structure, to be formed with electric field in geodesic structure 303, in the electric field Lower described can generate along the direction of the electric field to the metal ion in geodesic structure 303 of effect is displaced, so that it is defeated to generate quality , there is ELECTROMIGRATION PHENOMENON in fortune.The result of ELECTROMIGRATION PHENOMENON can make certain positions to geodesic structure 303 generate cavity or brilliant Must, to make the resistance R to geodesic structure 303tIncrease.So the structural resistance R to be measuredtChange rate can characterize institute State the case of iontophoresis to geodesic structure 303.
The failure judging unit 422 obtains the resistance change rate that the resistance variations unit 421 obtains；The mistake Be previously provided with preset threshold in effect judging unit 422, the failure judging unit 422 resistance change rate with it is described Relative size between preset threshold judges described to be measured when the resistance change rate is greater than or equal to the preset threshold Structure 303 fails.
When the temperature to geodesic structure 303 reaches the experimental temperature value Tt2, described to reach institute to 303 electric current of geodesic structure State experiment current value It2When, the time acquisition device 380 starts timing, judge when the failure judging unit 422 described in When geodesic structure 303 fails, the time acquisition device 380 stops timing.The time acquisition unit 423 is obtained with the time Device 380 is connected, and obtains the timing result of the time acquisition device 380, is the first out-of-service time TTF2。
According to blackbody formula, in fixed current value ItUnder the conditions of, it, can according to out-of-service time TTF formula in electro-migration testing To obtain out-of-service time TTF and to 303 temperature T of geodesic structuretRelationship: ln (TTF)=Ea/kTt+c2, when wherein TTF is failure Between, EaFor the activation energy to geodesic structure 303, k is Boltzmann constant, TtFor the temperature to geodesic structure 303, c2For constant.
According to the relationship of heated current and structure temperature to be measured, the activation energy unit 432 can obtain it is multiple described plus The structure temperature T to be measured corresponding to thermocurrentt2, to obtain out-of-service time TTF2With to 303 temperature T of geodesic structuret2Pass It is curve；The activation energy unit 432 is according to the out-of-service time TTF2With structure temperature T to be measuredt2Relation curve can obtain The slope of the relation curve is obtained, the slope value is the activation energy E to geodesic structure 303a2Size.
According to blackbody formula, in fixed temperature value TtUnder the conditions of, the out-of-service time can indicate in electro-migration testing are as follows: TTF =A × jt -n×exp(Ea/kTt), wherein TTF is out-of-service time, jtFor current density, n is the Activation Energy, and Ea is to be measured The activation energy of structure 303, k are Boltzmann constant, TtFor to 303 temperature of geodesic structure, A is constant.So to geodesic structure 303 The relationship of out-of-service time and test electric current are as follows: ln (TTF)=- n*lnjt+c1, wherein TTF is out-of-service time, jtFor current density, N is the Activation Energy, c1For constant.
According to multiple sensing electric current It2, the dnesity index unit 431 can obtain the sensing electric current It2Electric current it is close Spend jt2, to obtain out-of-service time TTF2With the current density jt2Relation curve；The dnesity index unit 431 is according to institute State out-of-service time TTF2With the current density jt2Relation curve can obtain the slope of the relation curve, the slope value The as described the Activation Energy n to geodesic structure 3032Size.
It should be noted that in the present embodiment, the quantity of the first out-of-service time TTF is not in order to improve measuring accuracy Less than 3, that is to say, that sensing electric current I corresponding with the first out-of-service time TTFtAnd the quantity of heated current is equal No less than 3.
So the out-of-service time can indicate are as follows: TTF=A × j according to blackbody formulat -n×exp(Ea/kTt).So described Out-of-service time TTF when geodesic structure 303 works normallyoIt can indicate are as follows: TTFo=(jt/jop)n×exp[(1/Top-1/Tt) ×Ea/ k] × TTF, wherein jopFor the current density of operating current, jtFor the current density for sensing electric current, n refers to for current density Number, EaFor the activation energy to geodesic structure 303, k is Boltzmann constant, TopFor operating temperature, TtFor the temperature to geodesic structure 303 Degree, TTF were the first out-of-service time.
Therefore the last second out-of-service time processing unit 433 is according to the Activation Energy n2And it is described to be measured The activation energy E of structure 303a2, and combine the current density j of operating currentop, sensing electric current current density jtAnd operating temperature Top, to the temperature T of geodesic structure 303t, the first out-of-service time TTF, obtain it is described to geodesic structure 303 in normal work second Out-of-service time TTFo2。
To sum up, the present invention is arranged for passing through independent heater to the heating device heated to geodesic structure Part makes the temperature to geodesic structure reach the test condition, to make influence of the temperature to the electromigration to geodesic structure The influence to geodesic structure electromigration is separated with electric current, can be improved the activation energy and electricity to geodesic structure obtained The accuracy of current density index, and then the accuracy to geodesic structure out-of-service time under operating conditions obtained is improved, Effectively improve the accuracy of electro-migration testing.Meanwhile relative to package level reliability test, technical solution of the present invention can have Effect shortened to the time tested to geodesic structure, improved testing efficiency.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute Subject to the range of restriction.

Claims (16)

1. a kind of electro-migration testing system characterized by comprising
Electro-migration testing device, the electro-migration testing device includes: connection metal layer, and one end is connected with to geodesic structure, is used for It realizes and being electrically connected to geodesic structure；Electrode is loaded, with the not connected described one end to geodesic structure of the connection metal layer Electrical connection, for making the sensing electric current to geodesic structure reach test condition to geodesic structure application test voltage to described, with Realize electromigration；Sensing electrode is electrically connected with described described one end to geodesic structure of connection metal layer connection, described for obtaining To the sensing voltage of geodesic structure under test conditions；Heating device makes described to be measured for heating to described to geodesic structure The temperature of structure reaches the test condition, realizes electromigration；
First heater, for changing the temperature to geodesic structure；
Temperature acquisition device, it is described to geodesic structure for being obtained when the first heater changes the structure temperature to be measured Temperature；
Power supply, for being supplied to geodesic structure when the first heater changes the structure temperature to be measured described Electricity；
Test power supply, for by heating device to it is described heated to geodesic structure during, to the load electrode Load test voltage；
Voltage acquisition apparatus is connected with the sensing electrode, for obtaining the voltage to geodesic structure；
Electric current acquisition device is connected with described to geodesic structure, for obtaining the electric current to geodesic structure；
Heated current acquisition device is connected with the heating device, for obtaining the heated current for being passed through the heating device；
Time acquisition device, for obtaining the first out-of-service time to geodesic structure under test conditions；
Pretreatment unit is connected with the temperature acquisition device, described to geodesic structure for changing in the first heater The structure temperature to be measured is obtained when temperature；It is connected with the heated current acquisition device, for being passed through heating in heating device When electric current, the heated current for being passed through heating device is obtained；It is connected with voltage acquisition apparatus and electric current acquisition device, for obtaining The voltage and current to geodesic structure is stated, and the resistance to geodesic structure is obtained according to the voltage and current to geodesic structure； First heater change the structure temperature to be measured when, the pretreatment unit be used for obtains to geodesic structure temperature and to The relationship of the resistance of geodesic structure；Heated current is passed through to described when geodesic structure heats to the heating device, it is described pre- Processing unit is used to obtain the relationship of heated current Yu structural resistance to be measured；The pretreatment unit is also used to according to geodesic structure Temperature with to geodesic structure resistance relationship and heated current and structural resistance to be measured relationship, obtain heated current and to The relationship of geodesic structure temperature；
Test processes device is connected with voltage acquisition apparatus and electric current acquisition device, for obtaining the voltage to geodesic structure And electric current, and the resistance change rate to geodesic structure is obtained according to the voltage and current；It obtains and fills with the heated current It sets connected, for when heating device is passed through heated current, obtains the heated current for being passed through heating device；The test processes dress It sets and whether fails described in being also used to be judged according to the resistance change rate to geodesic structure, reach default threshold in the resistance change rate The structural failure to be measured is judged when value；It is connected with the time acquisition device, for when judging the structural failure to be measured Obtain first out-of-service time to geodesic structure under test conditions；
Work disposal device is connected with the pretreatment unit, for obtaining the relationship of heated current Yu structure temperature to be measured；With The test processes device is connected, for obtaining the first out-of-service time and sensing corresponding with first out-of-service time electricity Stream；For according to first out-of-service time and in conjunction with the relationship of heated current and structure temperature to be measured obtain described in geodesic structure Activation energy；For according to it is described sensing electric current obtain it is described sensing electric current current density, and in conjunction with the sensing electric current Corresponding first out-of-service time obtains the Activation Energy；It is also used to according to the activation energy and electric current to geodesic structure Dnesity index obtains second out-of-service time to geodesic structure under running conditions.
2. electro-migration testing system as described in claim 1, which is characterized in that the first heater includes: that can heat Chuck；The voltage acquisition apparatus includes: potentiometer；The electric current acquisition device includes: the first galvanometer；The heated current Acquisition device includes: the second galvanometer；The time acquisition device includes: timer.
3. electro-migration testing system as described in claim 1, which is characterized in that the heating device includes one or more fins Formula field effect transistor；One or more of fin formula field effect transistors are located at described to below geodesic structure.
4. electro-migration testing system as described in claim 1, which is characterized in that it is described to geodesic structure and the heating device it Between distance in 10nm to 1 μ m.
5. electro-migration testing system as described in claim 1, which is characterized in that it is described to geodesic structure include metal interconnecting wires or Metal interconnecting wires with plug.
6. electro-migration testing system as claimed in claim 5, which is characterized in that it is described to geodesic structure be metal interconnecting wires, institute It states connection metal layer and is located at the metal interconnecting wires both ends, and be directly connected to the metal interconnecting wires.
7. electro-migration testing system as claimed in claim 5, which is characterized in that it is described to geodesic structure be with plug structure Metal interconnecting wires, the connection metal layer is located at the metal interconnecting wires both ends, and is interconnected by the plug and the metal Line is connected.
8. the electro-migration testing system as described in claim 5,6 or 7, which is characterized in that the metal interconnecting wires are strip； The heating device includes multiple fin formula field effect transistors, and multiple fin formula field effect transistors have multiple fins, and Multiple fins are parallel to each other and are arranged in parallel with the metal interconnecting wires.
9. electro-migration testing system as claimed in claim 8, which is characterized in that the fin formula field effect transistor further includes grid Pole structure, the gate structure cover the part of the surface at the top of the fin with side wall across multiple fins；The gold Belong to the distance between interconnection line and gate structure top in 10nm to 1 μ m.
10. electro-migration testing system as described in claim 1, which is characterized in that the connection metal layer includes the first connection Metal layer and the second connection metal layer, are located to geodesic structure both ends；The load electrode includes the first load electrode and the Two load electrodes, the first load electrode connect the not connected one end to geodesic structure of metal layer with described first and are connected；It is described Second load electrode connect the not connected one end to geodesic structure of metal layer with described second and is connected；The sensing electrode includes first Sensing electrode and the second sensing electrode, first sensing electrode are located at the first load electrode and institute between geodesic structure；It is described Second sensing electrode is located at the second load electrode and described between geodesic structure.
11. a kind of test using electro-migration testing system described in any one of claim 1 to claim 10 claim Method characterized by comprising
It provides to geodesic structure；
The resistance to geodesic structure under different temperatures is measured, to obtain the pass of the temperature to geodesic structure with the resistance to geodesic structure System；
By described to geodesic structure and electro-migration testing system described in claim 1 to claim 10 any one claim Electro-migration testing device is connected, and Xiang Suoshu heating device is passed through heated current and heats to described to geodesic structure, and measures institute The resistance to geodesic structure is stated, the relationship of heated current and structural resistance to be measured is obtained；
According to the temperature and the relationship of the resistance to geodesic structure to geodesic structure, in conjunction with the pass of heated current and structural resistance to be measured System obtains the relationship of heated current and structure temperature to be measured；
Heated current is passed through to the heating device to heat to described to geodesic structure；
By heating device to it is described heated to geodesic structure during, to the load electrode load test voltage, And the sensing electric current and sensing voltage to geodesic structure under the test voltage is obtained, it is based on the sensing electric current and sensing Voltage obtains the resistance change rate to geodesic structure；
Judge the structural failure to be measured when resistance change rate reaches preset threshold, obtains to geodesic structure under test conditions First out-of-service time；
Relationship based on heated current Yu structure temperature to be measured is obtained in conjunction with the first out-of-service time corresponding with heated current The activation energy to geodesic structure；
It is obtained described to geodesic structure based on heated current corresponding first out-of-service time in conjunction with the current density of sensing electric current The Activation Energy；
The test is obtained in conjunction with first out-of-service time according to the activation energy and the Activation Energy to geodesic structure The second out-of-service time of structure under running conditions.
12. test method as claimed in claim 11, which is characterized in that obtain the temperature to geodesic structure and the electricity to geodesic structure In the step of relationship of resistance, change the temperature to geodesic structure by the way that chuck can be heated.
13. test method as claimed in claim 11, which is characterized in that the step of obtaining the activation energy to geodesic structure is wrapped Include: the relationship based on heated current Yu structure temperature to be measured fails in conjunction with multiple heated currents one-to-one multiple first Time obtains the activation energy to geodesic structure.
14. test method as claimed in claim 11, which is characterized in that obtain the Activation Energy to geodesic structure Step include: based on multiple heated currents one-to-one multiple first out-of-service times, one by one with multiple first out-of-service times Corresponding multiple sensing circuit current density obtain the Activation Energy to geodesic structure.
15. test method according to claim 13 or 14, which is characterized in that the quantity of first out-of-service time is no less than 3.
16. test method as claimed in claim 11, which is characterized in that Xiang Suoshu heating device is passed through heated current to described In the step of being heated to geodesic structure, the heating device makes the temperature to geodesic structure in 200 DEG C to 450 DEG C ranges It is interior；
In the step of to the load electrode load test voltage, the test voltage makes the sensing electric current in 0.1MA/cm2It arrives 50MA/cm2In range.
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