CN107017192A - 一种机械运送装置 - Google Patents
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Abstract
本发明涉及机械装置技术领域，具体涉及一种机械运送装置，包括多个机械臂用于运送基板，每个机械臂上安装有多个机械垫用于托住基板；在机械臂上均匀加工有多个凹槽，机械垫的下部设在凹槽内，机械垫下部形状与凹槽形状相适配；机械垫下部为锥形在基板发生翘曲时用于随着基板的重力偏移。其由多个机械臂和安装在机械臂上的多个机械垫组成，在机械臂上均匀加工有多个凹槽，机械垫的下部加工成锥形，将其安装在凹槽内，该设计可在使用过程中随着表面受力的不同发生转动，提高垫的使用寿命，减少破片的发生，提高产品效率。
Description
技术领域
本发明涉及机械装置技术领域，尤其涉及一种机械运送装置。
背景技术
在TFT基板制作过程中，基板需要完成清洗、成膜、曝光显影、刻蚀、光阻剥离等不同道别的制程，这些制程需要在不同的机台内完成，在这一系列过程中，基板需要不断的通过机械臂进行机台间和机台内部的搬送。由于TFT基板厚度通常只有0.4～0.7mm，机械手臂承载基板时，因为基板厚度较薄的关系总会有一定的翘曲，基板与机械臂上的垫接触面减小，使用过程中常常发生垫磨损加剧，寿命减少的问题，严重时会发生因接触面减小摩擦力不足造成基板在机械手臂上位置偏移，发生破片。
发明内容
针对上述问题中存在的不足之处，本发明提供一种机械运送装置。
为实现上述目的，本发明提供一种机械运送装置，包括：
用于运送基板的多个机械臂，每一所述机械臂上安装有用于托住所述基板的机械垫；
在所述机械臂上均匀加工有多个凹槽，所述机械垫的下部设在所述凹槽内，所述机械垫下部形状与所述凹槽形状相适配；
所述机械垫的下部为锥形在所述基板发生翘曲时随着所述基板的重力偏移。
上述的机械运送装置，每个所述机械臂一端安装有用于限制所述基板滑出的挡块。
上述的机械运送装置，所述挡块靠近所述基板的一侧粘结有弹性垫。
上述的机械运送装置，所述机械垫的上部为圆柱形状，所述机械垫的上部和下部一体连接。
上述的机械运送装置，所述机械垫的上表面粘结有橡胶垫。
上述的机械运送装置，所述橡胶垫上压制有防滑纹或防滑凸点。
上述的机械运送装置，还包括控制装置和动力装置；其中，
所述动力装置与所述机械臂连接用于给所述机械臂提供动力；
所述控制装置和所述动力装置、所述机械臂连接用于控制所述机械臂和所述动力装置工作。
在上述技术方案中，本发明提供的机械运送装置，与现有技术相比，其由机械臂和安装在机械臂上的多个垫组成，在机械臂上均匀加工有多个凹槽，垫的下部加工成锥形，将其安装在凹槽内，该设计可使垫在使用过程中随着表面受力的不同发生转动，提高垫的使用寿命，减少破片的发生，提高产品效率。
附图说明
在下文中将基于实施例并参考附图来对本发明进行更详细的描述。
图1为本申请的一个实施例中机械运送装置的结构示意图。
图2为本申请的一个实施例中机械运送装置的机械臂与垫的连接示意图。
图3为本申请的一个实施例中机械运送装置的机械臂的结构示意图。
图4为本申请的一个实施例中机械运送装置的垫的结构示意图。
图5为本申请的一个实施例中机械运送装置的橡胶垫的结构示意图。
图6为本申请的一个实施例中机械运送装置的挡块的结构示意图。
具体实施方式
下面将结合附图对本发明作进一步说明。
如图1-4所示，示意性地显示了该机械运送装置，包括：用于运送基板2的机械臂1，以及安装在机械臂1上的多个机械垫3用于托住基板2。在机械臂1上均匀加工有多个凹槽11，机械垫3的下部落在凹槽11内，机械垫3下部形状与凹槽11形状相适配。机械垫3下部为锥形31或是半圆形用于随着基板2的重力偏移。
该设计可以使机械垫3在使用过程中随着表面受力的不同发生转动，进而保证基板2发生形变时仍能与机械垫3有充分的接触，防止发生机械垫3表面受力不均现象，提高机械垫3的使用寿命，减少机械垫3更换频率，降低运行成本，并可防止发生因摩擦力不足造成基板2破片，提高机台的生产效率。
在一个优选的实施例中，机械垫3的上部为圆柱形状32可更好的承受基板2得重量，提高稳定性。
在一个优选的实施例中，机械垫3的上部与机械垫3的下部连接处为圆弧面A33，在基本2发生翘曲时机械垫3可整体随着表面受力的不同发生转动，避免与凹槽11上部边缘发生卡顿的问题。机械垫3的上表面与机械垫3的侧壁连接处为圆弧面B34，机械垫3在受力转动时，不会将基板2表面划破，提高基板2成品率。
在一个优选的实施例中，机械臂1为多个。可根据实际需求增减机械臂1的数量，提高操作便捷性。
在一个实施例中，如图1所示，还包括与机械臂1相连接的控制装置和动力装置4。控制装置包括外壳，在外壳内部安装有主控制板，外壳上面安装有与主控制板相连接的按键和指示灯，方便操控。动力装置为直行电机，该电机与主控制板连接，动力效果好。
在一个优选的实施例中，如图5所示，机械垫3的上面粘结有橡胶垫35。在橡胶垫35上压制有防滑纹或防滑凸点。提高基板2在机械垫3上的稳定性不会轻易滑出去，可使基板2更好的贴服在机械垫3上表面。
在一个实施例中，如图6所示，机械臂1一端设有挡块12用于限制基板2滑出。挡块12与控制装置和动力装置4相对应，挡块12内侧粘结有弹性垫121提高与基板2接触。避免基板2滑出，提高了保护效果。
具体使用时：
将基板2放置在机械垫3上面，在两端发生翘曲时机械臂1上的机械垫3会随着重力改变倾斜方向，使机械垫3更好的与基板2贴合，避免滑落的问题，降低垫机械3的磨损，提高使用寿命，避免碎片的可能性，其结构简单使用方便快捷，安全性高。
虽然已经参考优选实施例对本发明进行了描述，但在不脱离本发明的范围的情况下，可以对其进行各种改进并且可以用等效物替换其中的部件。尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本发明并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。
Claims (7)
1.一种机械运送装置，其特征在于，包括：
用于运送基板(2)的多个机械臂(1)，每一所述机械臂(1)上安装有用于托住所述基板(2)的机械垫(3)；
在所述机械臂(1)上均匀加工有多个凹槽(11)，所述机械垫(3)的下部设在所述凹槽(11)内，所述机械垫(3)下部形状与所述凹槽(11)形状相适配；
所述机械垫(3)的下部为锥形(31)在所述基板(2)发生翘曲时随着所述基板(2)的重力偏移。
2.根据权利要求1所述的机械运送装置，其特征在于：每个所述机械臂(1)一端安装有用于限制所述基板(2)滑出的挡块(12)。
3.根据权利要求2所述的机械运送装置，其特征在于：所述挡块(12)靠近所述基板(2)的一侧粘结有弹性垫(121)。
4.根据权利要求1所述的机械运送装置，其特征在于：所述机械垫(3)的上部为圆柱形状(32)，所述机械垫(3)的上部和下部一体连接。
5.根据权利要求1所述的机械运送装置，其特征在于：所述机械垫(3)的上表面粘结有橡胶垫(35)。
6.根据权利要求5所述的机械运送装置，其特征在于：所述橡胶垫(35)上压制有防滑纹或防滑凸点。
7.根据权利要求1所述的机械运送装置，其特征在于：还包括控制装置和动力装置(4)；其中，
所述动力装置(4)与所述机械臂(1)连接用于给所述机械臂(1)提供动力；
所述控制装置和所述动力装置(4)、所述机械臂(1)连接用于控制所述机械臂(1)和所述动力装置(4)工作。
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108493146A (zh) * | 2018-04-01 | 2018-09-04 | 格润智能光伏南通有限公司 | 一种光伏组件标准板在线储存方法 |
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|---|---|---|---|---|
| CN1824592A (zh) * | 2005-02-25 | 2006-08-30 | 细美事有限公司 | 晶片传送装置 |
| KR20090116867A (ko) * | 2008-05-08 | 2009-11-12 | 주식회사 테스 | 기판 리프트 어셈블리 |
| CN102362341A (zh) * | 2009-03-31 | 2012-02-22 | 株式会社爱发科 | 一种夹持装置、输送装置及旋转传动装置 |
| CN203434134U (zh) * | 2013-05-24 | 2014-02-12 | 北京京东方光电科技有限公司 | 一种基板传送装置 |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1824592A (zh) * | 2005-02-25 | 2006-08-30 | 细美事有限公司 | 晶片传送装置 |
| KR20090116867A (ko) * | 2008-05-08 | 2009-11-12 | 주식회사 테스 | 기판 리프트 어셈블리 |
| CN102362341A (zh) * | 2009-03-31 | 2012-02-22 | 株式会社爱发科 | 一种夹持装置、输送装置及旋转传动装置 |
| CN203434134U (zh) * | 2013-05-24 | 2014-02-12 | 北京京东方光电科技有限公司 | 一种基板传送装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108493146A (zh) * | 2018-04-01 | 2018-09-04 | 格润智能光伏南通有限公司 | 一种光伏组件标准板在线储存方法 |
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