CN106950486A - Grouping time measuring module of automatic test equipment and method thereof - Google Patents
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- CN106950486A CN106950486A CN201610858429.3A CN201610858429A CN106950486A CN 106950486 A CN106950486 A CN 106950486A CN 201610858429 A CN201610858429 A CN 201610858429A CN 106950486 A CN106950486 A CN 106950486A
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- 238000012360 testing method Methods 0.000 title claims abstract description 223
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 claims description 80
- 230000001960 triggered effect Effects 0.000 claims description 9
- 238000012883 sequential measurement Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2882—Testing timing characteristics
Abstract
The invention discloses a grouping time measuring module of automatic test equipment and a method thereof. Each test group is provided with a plurality of test channels, and each test channel in each test group is provided with a channel control unit and a time measuring unit. The channel control unit is electrically connected with the time measuring unit and provides a test signal to the time measuring unit according to the trigger signal, so that the time measuring unit measures the time sequence of the signal to be measured according to the test signal. The signal to be tested is related to the object to be tested which is electrically connected with the test channel. The control unit is electrically connected with the test groups and generates a trigger signal to each test channel in the test groups according to the test groups designated by the selection signal.
Description
Technical field
Grouping time measurement module and its method of the present invention on a kind of ATE, particularly can be once
Property trigger it is same test group in TCH test channel carry out time-ordered measurement grouping time measurement module and its method.
Background technology
Integrated circuit component had to pass through before dispatching from the factory ATE (Automatic Testing Equipment,
ATE a variety of electric tests) are carried out, to determine the use function and quality of integrated circuit component.And time measurement module is automatic
A measure the item in test equipment, is mainly measured with multiple time measuring units (Time measurement init)
The signal frequency of to-be-measured integrated circuit element, transmission delay, foundation/retention time (setup/hold time), rise time
(rise time), fall time (falltime) and work period (duty cycle), to obtain to-be-measured integrated circuit element
Number or other tests that interval time, calculating event between time sequences, two events (event) generations of determinand occur
As a result.
However, in existing ATE, coming when with the TCH test channel (channels) with time measuring unit
When carrying out time-ordered measurement to integrated circuit component to be measured, the time measuring unit of each TCH test channel is required for being set once
Detection content, and when time-ordered measurement is proceeded by, each TCH test channel must also be triggered to proceed by measurement respectively,
For example when ATE will make 4 TCH test channels progress time-ordered measurements, 4 detection contents and execution are at least set altogether
4 triggerings.Consequently, it is possible to which existing ATE is when setting and triggering starts to expend the settings of many in measurement
Between and perform multiple tracks trigger.
The content of the invention
The invention reside in a kind of the grouping time measurement module and its method of ATE is provided, solution is used existing
The problem of some ATEs expend setting time and various trigger.
Disclosed herein ATE grouping time measurement module, with multiple test groups and control
Unit.Each test group includes multiple TCH test channels, and each TCH test channel in each test group has passage
Control unit and time measuring unit.Channel control unit is electrically connected with time measuring unit.Channel control unit is according to triggering
Signal provides test signal to time measuring unit, time measuring unit is measured the sequential of measured signal according to test signal.
Measured signal is associated with the determinand of TCH test channel electric connection.Control unit is electrically connected with test group, and according to selection letter
Number, produce each TCH test channel that trigger signal is tested in group to wherein at least one.Selection signal specifies one of them
Test group and carry out time-ordered measurement.
Disclosed herein ATE grouping Method Of Time Measurement, with according to selection signal, specify
Multiple test groups wherein at least one carries out time-ordered measurement, and each test group has multiple TCH test channels, and each
TCH test channel has time measuring unit.Each TCH test channel in appointed test group receives trigger signal.Triggering
Receive the time measuring unit of each TCH test channel of trigger signal.The time measuring unit measurement measured signal being triggered
Sequential.Measured signal is associated with the determinand of TCH test channel electric connection.
The grouping time measurement module and its method of ATE according to disclosed by the invention described above, by group
The mode of groupization TCH test channel, in terms of detection content is set, it is logical that ATE can disposably set multiple tests
Road, in terms of trigger, can also disposably trigger one or more test groups, make the TCH test channel in test group
It is triggered to carry out the time-ordered measurement of determinand, ATE setting is reduced according to this and the time of trigger, carry
Rise measurement efficiency.
More than on the explanation of this disclosure and the explanation of following embodiment to demonstrate with explaining the present invention
Spirit and principle, and provide the present invention patent claim further explain.
Brief description of the drawings
Fig. 1 is the functional block diagram of the ATE according to depicted in one embodiment of the invention.
Fig. 2 is the functional block diagram of the TCH test channel according to depicted in one embodiment of the invention.
Fig. 3 is the functional block diagram of the time measuring unit according to depicted in another embodiment of the present invention.
Fig. 4 is the step flow chart of grouping Method Of Time Measurement depicted according to yet another embodiment of the invention.
Wherein, reference：
10 ATEs
11 control units
13 channel control units
15 time measuring units
151 synchronous circuits
152 reference counts
153 measuring circuits
17 input/output interfaces
20 determinands
30 main frames
Ga~Gx tests group
A1~an, b1~bm, x1~xi TCH test channels
RFC refers to clock pulse
RFR reset signals
WC work time pulses
CE enable signals
SC captures clock pulse
RFS reference count signals
Embodiment
The detailed features and advantage of the narration present invention in detail in embodiments below, its content is enough to make any to be familiar with
The technology contents that relevant art understands the present invention are simultaneously implemented according to this, and content according to disclosed by this specification, apply for a patent
Scope and schema, it is any to be familiar with relevant art and be readily understood upon the purpose and advantage of correlation of the invention.Following embodiment
It is the viewpoint that the present invention is further described, but it is non-anyways to limit scope of the invention.
Refer to Fig. 1 and Fig. 2, Fig. 1 be the ATE according to depicted in one embodiment of the invention function block
Figure, Fig. 2 is the functional block diagram of the TCH test channel according to depicted in one embodiment of the invention.As shown in figure 1, ATE
10 have control unit 11 and multiple test group Ga~Gx, have multiple TCH test channels respectively again in each test group,
For example in test group Ga having has TCH test channel b1~bm and test group Gx in TCH test channel a1~an, test group Gb
In have TCH test channel x1~xi.
In the grouping time measurement module of ATE 10, each test in each test group is logical
Road has channel control unit and time measuring unit.For convenience of explanation, illustrated with TCH test channel a1, such as Fig. 2 institutes
Show, TCH test channel a1 has channel control unit 13, time measuring unit 15 and input/output interface 17.Channel control unit 13
Control unit 11 and time measuring unit 15 are electrically connected with, there is provided test to the trigger signal according to the generation of control unit 11
Signal makes time measuring unit 15 according to test signal to measure the sequential of measured signal to time measuring unit 15.Input is defeated
Outgoing interface 17 is electrically connected with time measuring unit 15 and determinand 20, and the measured signal of determinand 20 is associated with to receive, and
Measured signal is exported to time measuring unit 15.Measured signal is, for example, that ATE 10 exports to determinand 20 to examine
The signal of determinand 20 is surveyed, also for example, determinand 20 is replied to ATE 10 by the detection of ATE 10
Signal, the present embodiment refuse limitation.
In one embodiment, ATE 10 is electrically connected with main frame 30, and according to the selection letter under main frame 30
Number, specify multiple test group Ga~Gx wherein at least one test group to carry out time-ordered measurement.That is, when main frame 30 refers to
When location survey examination group Ga carries out time-ordered measurement, control unit 11 can produce trigger signal to each test tested in group Ga
Passage, makes each TCH test channel in test group Ga carry out time-ordered measurement.By taking the TCH test channel a1 for testing group Ga as an example
For, when the nominative testing group Ga of control unit 11 carries out time-ordered measurement, TCH test channel a1 channel control unit 13 can connect
Trigger signal is received, and exports test signal to time measuring unit 15, input and output are passed through with triggered time measuring unit 15
Interface 17 measures the sequential of measured signal.
In the present embodiment, TCH test channel, which is not limited, to be contained in the way of entity is connected in test group, and in difference
Test program in, TCH test channel can be configured in different test groups, such as when ATE 10 is treated to test
When surveying thing A, TCH test channel a1 is configured in test group Ga, when ATE 10 is to test determinand B, and test is logical
Road a1 is configured in test group Gb.In fact, TCH test channel is that the content of analyte detection to be measured is configured according to default
Test in group, for example presetting the TCH test channel of the identical content of detection can be configured in same test group, in other words, together
Each TCH test channel in one test group will be measured with identical setting to determinand, but be not limited.In
Art tool usually intellectual can also set different detection contents to each TCH test channel, and the present embodiment is not
Give limitation.
In order to become apparent from the method that time measuring unit 15 measures measured signal, hereby illustrate as an example.It refer to
Fig. 3, Fig. 3 are the functional block diagrams of the time measuring unit according to depicted in another embodiment of the present invention, as shown in figure 3, the time
Measuring unit 15 has synchronous circuit 151, reference count 152 and measuring circuit 153, and channel control unit 13 provides ginseng
Clock pulse RFC and reset signal RFR is examined as test signal to time measuring unit 15.
The reference clock pulse RFC that the receiving channel control unit 13 of synchronous circuit 151 of time measuring unit 15 is provided is with resetting
Signal RFR, and work time pulse WC, enable signal CE are produced respectively with reset signal RFR wherein at least one according to reference to clock pulse RFC
With capturing clock pulse SC, wherein work time pulse WC is exported to reference count 152 and measuring circuit 153, and enable signal CE is supplied to
Reference count 152, captures clock pulse SC and is supplied to measuring circuit 153.
The enable signal CE that reference count 152 is produced according to synchronous circuit 151, is counted to work time pulse WC, with
Reference count signal RFS is provided to measuring circuit 153.Measuring circuit 153 is operated according to work time pulse WC, and according to synchronization
The acquisition clock pulse SC that circuit 151 is produced, measured signal is captured by input/output interface 17.Measuring circuit 153 is by with reference in terms of
Number signal RFS measures and recorded the sequential of measured signal as the benchmark of sequential, and by the result of record via control unit 11
It is sent to main frame 30.
In another embodiment, test group Ga~Gx each TCH test channel is set with a measuring condition, and
When the time measuring unit of each TCH test channel measures the sequential of measured signal, time measuring unit foundation measuring condition,
Judge and record the time point of measured signal coincidence measurement condition.For example, measuring condition be, for example, pendulous frequency 10 times and
Threshold value is set as positive edge 2V.When measuring circuit 153 by input/output interface 17 measure measured signal in positive edge trigger and
When voltage reaches 2V, measuring circuit 153 records the time point, and continuously records 10 times.When the time of record coincidence measurement condition
During o'clock up to 10 times, measuring circuit 153 passes through channel control unit 13 and exports measurement result to control unit 11.Measurement result is
10 measured signals meet the time point of threshold value.In addition, in the present embodiment, measuring condition is set in each TCH test channel
In channel control unit 13, the measurement bar of each TCH test channel can be also set by other suitable modes in other embodiment
Part, the present embodiment refuses limitation.
In foregoing embodiment, although for by taking TCH test channel a1 as an example, actually have in art logical
Normal skill can from foregoing announcement, push away other TCH test channels function mode.Next, the automatic test of explanation is set
Standby 10 groupings set the mode of TCH test channel and triggering TCH test channel.For convenience of explanation, please referring again to Fig. 1, in Fig. 1
Although showing a determinand 20, actually determinand 20 can be one or more semiconductor elements to be measured.Citing
For, when there is 10 semiconductor elements to be measured, the pin A of each semiconductor element to be measured is set in detection identical
Hold, then the TCH test channel that the pin A of 10 semiconductor elements to be measured is electrically connected with can be set in test group Ga.In another
In a kind of embodiment, identical content is detected when pin B~F of a semiconductor to be measured is set, and pin G~K is set
When regular inspection surveys another content, then the TCH test channel that pin B~G is electrically connected with can be set in test group Gb, and pin G~
The TCH test channel that K is electrically connected with can be set in another test group Gc.
Similarly, in another embodiment, when there is 10 semiconductor elements to be measured, each semiconductor to be measured
Pin B~F of element is set detection identical content, when pin G~K is set another content of detection, 10 to be measured half
The TCH test channel that the pin B of the semiconductor element of each in conductor element~F is electrically connected with can be set in same test group
In group Gb, and the TCH test channel that the pin of each semiconductor element G~K is electrically connected with can be set in same test group
In Gc.
In one embodiment, passage corresponding table records the TCH test channel that each test group is included.Passage correspondence
Table can be stored in control unit 11 or other mnemons, when control unit 11 receives main frame 30 to set test
During the instruction of Air conduct measurement content, control unit 11 sets the measuring condition of each test group according to passage corresponding table.Example
When indicating test group Ga measuring condition such as main frame 30 for positive edge 2V, then control unit 11 can be automatically set test group Ga
In each TCH test channel a1~an measuring condition be positive edge 2V.In other words, the grouping time disclosed by the present embodiment
Measurement module, ATE 10 can disposably set the test in need for being set to identical measuring condition lead to
Road, and without respectively being set to each TCH test channel.On the other hand, it is automatic to survey when proceeding by time-ordered measurement
All TCH test channels that examination equipment 10 can also be triggered disposably in same test group carry out time-ordered measurement.
In order to become apparent from the embodiment for illustrating grouping time measurement module, come below with a specific actual example
Explanation.For by taking the running time that ATE 10 detects three chips to be measured as an example, ATE 10 is by surveying
Ping a1 and provide measurement signal to the pin pin1_1 of the first chip to be measured, measurement signal is provided to the by TCH test channel a2
The pin pin2_1 of the two chips to be measured and pin pin3_1 by TCH test channel a3 offer measurement signals to the 3rd chip to be measured.
Also, ATE 10 is tested the first chip to be measured by TCH test channel b1 and exported from pin pin1_2 to automatic test
The feedback signal of equipment 10, the second chip to be measured is tested by TCH test channel b2 is exported from pin pin2_2 to automatic test setting
Standby 10 feedback signal, the 3rd chip to be measured is tested by TCH test channel b3 and is exported from pin pin3_2 to ATE
10 feedback signal.
When main frame 30 indicates that ATE 10 sets TCH test channel a1~a3 measuring condition as positive edge triggering 2V's
Time point 10 times, and indicate that ATE 10 sets TCH test channel b1~b3 measuring condition as negative edge triggering 2V time
TCH test channel a1~a3 will be contained in test group Ga by point 10 times, ATE 10, TCH test channel b1~b3 bags
In the group Gb containing test, and the measuring condition for setting test group Ga by control unit 11 triggers 2V time point 10 as positive edge
It is secondary, and set time point 10 time of the test group Gb measuring condition for negative edge triggering 2V.
Then, the nominative testing group Ga of main frame 30 and test group Gb carry out time-ordered measurement.The foundation of ATE 10
Instruction under main frame 30, makes control unit 11 produce trigger signal to the TCH test channel a1~a3 and test group tested in group Ga
TCH test channel b1~b3 in group Gb.TCH test channel a1~a3 time measuring unit is triggered, and ATE 10 is carried
The measurement signal for being supplied to the first chip to be measured, the second chip to be measured and the second chip to be measured carries out time-ordered measurement.TCH test channel b1
Time measuring unit in~b3 is also triggered, the first chip to be measured, the second chip to be measured and the second chip to be measured are exported to
The feedback signal of ATE 10 carries out time-ordered measurement.
After TCH test channel a1~a3 and TCH test channel b1~b3 measurements terminate, each TCH test channel will can be surveyed respectively
Amount result export to control unit 11, or be each test group in TCH test channel measurement terminate after, then will test
The measurement result of group is exported to control unit 11, and the present embodiment refuses limitation.As TCH test channel a1~a3 and TCH test channel b1
~b3 exports the result of measurement to control unit 11, the contrastive test passage a1 of control unit 11 and TCH test channel b1 measurement
As a result, judge the measurement result of the running time of the first chip to be measured, contrastive test passage a2 and TCH test channel b2, judge second
The running time of chip to be measured, contrastive test passage a3 and TCH test channel b3 measurement result, judge the fortune of the 3rd chip to be measured
Make the time.In other words, control unit 11 is compared in two different test groups, to measure the to be measured logical of same chip to be measured
The measurement result in road, judges the test result of chip to be measured.In one embodiment, control unit 11 can also preset a survey
Test-object is accurate, and judges whether the test result of chip to be measured meets standard according to testing standard.
It is automatic to survey when the nominative testing group Ga of main frame 30 and test group Gb carries out time-ordered measurement in the present embodiment
Examination equipment 10 will test group Ga and test group Gb regards as another test group, and to test group Ga and test group Gb
Disposably trigger.In other embodiment, main frame 30 can also give an order to trigger test group Ga and test group respectively
Gb carries out time-ordered measurement, and the present embodiment refuses limitation.It is regarded as when ATE 10 will test group Ga and test group Gb
During for a test group to trigger, ATE 10 then can efficiently control test group Ga and test group
Gb carries out time-ordered measurement.
The mode of the grouping test passage of ATE 10 is for example set with software or firmware, entity circuit is connected,
Switch switching or other suitable implementations, the present embodiment refuse limitation.In addition, foregoing lifted embodiment is only said for convenience
It is bright to be used, and it is not used to the limitation present invention.
Next the present embodiment grouping Method Of Time Measurement is illustrated, for convenience of explanation please with reference to Fig. 1 and Fig. 4,
Fig. 4 is the step flow chart of grouping Method Of Time Measurement depicted according to yet another embodiment of the invention.As illustrated, in step
In rapid S401, control unit 11 is specified in multiple test group Ga~Gx according to selection signal, and at least one test group is carried out
Time-ordered measurement.In step S403, each TCH test channel in appointed test group receives trigger signal.In step
In S405, triggering receives the time measuring unit of each TCH test channel of trigger signal.In step S407, it is triggered
Time measuring unit measures the sequential of measured signal.Grouping Method Of Time Measurement described in the present embodiment has actually been taken off
It is exposed in the embodiment of foregoing description, the present embodiment not repeat specification herein
In summary it is described, the grouping time measurement module of the ATE according to disclosed by above-described embodiment and
Its method, ATE can by grouping test passage mode, disposably to multiple TCH test channels set, suppression
Or one or more test groups are selected, proceeded by with disposably to trigger each TCH test channel in test group and treated
The time-ordered measurement of thing is surveyed, ATE setting is reduced according to this and is carried out the time of trigger, and then lifts automatic test
The measurement efficiency of equipment.
Certainly, the present invention can also have other various embodiments, ripe in the case of without departing substantially from spirit of the invention and its essence
Various corresponding changes and deformation, but these corresponding changes and change ought can be made according to the present invention by knowing those skilled in the art
Shape should all belong to the protection domain of appended claims of the invention.
Claims (10)
1. a kind of grouping time measurement module of ATE, it is characterised in that including：
Multiple test groups, each test group includes each test in multiple TCH test channels, each test group
Passage includes a channel control unit and a time measuring unit, and the channel control unit is electrically connected with the time measuring unit,
The channel control unit according to a trigger signal provide a test signal to the time measuring unit, make the time measuring unit according to
The sequential of a measured signal is measured according to the test signal, the measured signal is associated with the one to be measured of TCH test channel electric connection
Thing；And
One control unit, is electrically connected with those test groups, and according to a selection signal, produces the trigger signal to those tests
Each TCH test channel in group's wherein at least one, the selection signal specifies those to test group's wherein at least one and carries out sequential
Measurement.
2. the grouping time measurement module of ATE according to claim 1, it is characterised in that each survey
Each TCH test channel of examination group is set with a measuring condition, when the time measuring unit measurement of each TCH test channel should
During the sequential of measured signal, the time measuring unit judges and records the measured signal to meet the measurement according to the measuring condition
The time point of condition.
3. the grouping time measurement module of ATE according to claim 2, it is characterised in that further include one
Passage corresponding table, the passage corresponding table indicates those TCH test channels that each test group is included, the control unit foundation
The passage corresponding table sets the measuring condition of each test group.
4. the grouping time measurement module of ATE according to claim 2, it is characterised in that the measurement bar
Part includes a pendulous frequency and a threshold value, meets the threshold value when the time measuring unit measures and records the measured signal
When time point reaches the pendulous frequency, the time measuring unit exports measurement result to the control unit.
5. the grouping time measurement module of ATE according to claim 4, it is characterised in that the control list
Member compares the measurement result of those TCH test channel wherein at least two, judges the test result of the determinand.
6. a kind of grouping Method Of Time Measurement of ATE, it is characterised in that including：
According to a selection signal, multiple test groups wherein at least one is specified to carry out time-ordered measurement, each test group includes
Multiple TCH test channels, and each TCH test channel includes a time measuring unit；
Each TCH test channel in the appointed test group receives a trigger signal；
Triggering receives the time measuring unit of each TCH test channel of the trigger signal；And
The time measuring unit being triggered measures the sequential of a measured signal, and it is electrical that the measured signal is associated with the TCH test channel
One determinand of connection.
7. the grouping Method Of Time Measurement of ATE according to claim 6, it is characterised in that each survey
Each TCH test channel in examination group is set with a measuring condition, and the sequential of the measured signal is measured in the time measuring unit
The step of in, comprising the time measuring unit according to the measuring condition, judge and record the measured signal to meet the measuring condition
Time point.
8. the grouping Method Of Time Measurement of ATE according to claim 7, it is characterised in that further include according to
The measuring condition of each test group is set according to a passage corresponding table, the passage corresponding table indicates each institute of test group
Comprising those TCH test channels.
9. the grouping Method Of Time Measurement of ATE according to claim 7, it is characterised in that the measurement bar
Part includes a pendulous frequency and a threshold value, in the time measuring unit according to the measuring condition, judges and records the letter to be measured
In the step of number meeting the time point of the measuring condition, comprising judging and record the measured signal to meet when the time measuring unit
When the time point of the threshold value reaches the pendulous frequency, time measuring unit output measurement result.
10. the grouping Method Of Time Measurement of ATE according to claim 9, it is characterised in that further include
The measurement result of those TCH test channel wherein at least two is compared, the test result of the determinand is judged.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104143266 | 2015-12-23 | ||
| TW104143266A TWI586979B (en) | 2015-12-23 | 2015-12-23 | Grouped time measuring module and grouped measuring method of automatic testing equipment |
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| CN106950486A true CN106950486A (en) | 2017-07-14 |
| CN106950486B CN106950486B (en) | 2020-06-16 |
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| CN109521350B (en) * | 2017-09-19 | 2021-05-07 | 京元电子股份有限公司 | Measuring apparatus and measuring method |
| CN114174843A (en) * | 2021-10-30 | 2022-03-11 | 长江存储科技有限责任公司 | Tester channel multiplexing in test equipment |
| CN114174843B (en) * | 2021-10-30 | 2024-01-30 | 长江存储科技有限责任公司 | Tester channel multiplexing in a test apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201723522A (en) | 2017-07-01 |
| CN106950486B (en) | 2020-06-16 |
| TWI586979B (en) | 2017-06-11 |
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