CN106950486B - Grouping time measuring module of automatic test equipment and method thereof - Google Patents
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Abstract
The invention discloses a grouping time measuring module of automatic test equipment and a method thereof. Each test group is provided with a plurality of test channels, and each test channel in each test group is provided with a channel control unit and a time measuring unit. The channel control unit is electrically connected with the time measuring unit and provides a test signal to the time measuring unit according to the trigger signal, so that the time measuring unit measures the time sequence of the signal to be measured according to the test signal. The signal to be tested is related to the object to be tested which is electrically connected with the test channel. The control unit is electrically connected with the test groups and generates a trigger signal to each test channel in the test groups according to the test groups designated by the selection signal.
Description
Technical Field
The invention relates to a grouping time measuring module of automatic test equipment and a method thereof, in particular to a grouping time measuring module and a method thereof which can trigger test channels in the same test group to carry out time sequence measurement at one time.
Background
Before the integrated circuit device is shipped, the integrated circuit device must be subjected to various electrical tests by Automatic Test Equipment (ATE) to determine the use function and quality of the integrated circuit device. The Time measurement module is a measurement item in an automatic test equipment, and mainly measures the signal frequency, transmission delay, setup/hold Time (setup/hold Time), rise Time (rise Time), fall Time (fall Time), and duty cycle of an integrated circuit device to be tested with a plurality of Time measurement units (Time measurement init) to obtain the operation timing of the integrated circuit device to be tested, the interval Time between two events (events) of the device to be tested, the number of events to be generated, or other test results.
However, in the conventional automatic test equipment, when the integrated circuit device under test is subjected to timing measurement by using the test channels (channels) having the time measuring units, the time measuring units of each test channel need to be set with the detection contents once, and each test channel also needs to be triggered to start the measurement when the timing measurement is started, for example, when the automatic test equipment is used to perform timing measurement on 4 test channels, at least 4 detection contents are set and 4 triggers are executed in total. As a result, the conventional automatic test equipment must spend much setup time and perform multi-triggering procedure for setting up and triggering the start measurement.
Disclosure of Invention
The invention provides a grouping time measuring module of automatic test equipment and a method thereof, which are used for solving the problems that the conventional automatic test equipment consumes set time and has various trigger programs.
The invention discloses a grouping time measuring module of automatic test equipment, which is provided with a plurality of test groups and a control unit. Each test group comprises a plurality of test channels, and each test channel in each test group is provided with a channel control unit and a time measuring unit. The channel control unit is electrically connected with the time measuring unit. The channel control unit provides a test signal to the time measurement unit according to the trigger signal, so that the time measurement unit measures the time sequence of the signal to be tested according to the test signal. The signal to be tested is related to the object to be tested which is electrically connected with the test channel. The control unit is electrically connected with the test groups and generates a trigger signal to each test channel in at least one of the test groups according to the selection signal. The selection signal designates one of the test groups to perform timing measurement.
The invention discloses a grouping time measuring method of automatic test equipment, which is characterized in that at least one of a plurality of test groups is appointed to carry out time sequence measurement according to a selection signal, each test group is provided with a plurality of test channels, and each test channel is provided with a time measuring unit. Each test channel in the designated test group receives a trigger signal. And triggering the time measuring unit of each test channel receiving the trigger signal. The triggered time measurement unit measures the timing of the signal under test. The signal to be tested is related to the object to be tested which is electrically connected with the test channel.
According to the grouping time measurement module of the automatic test equipment and the method thereof disclosed by the invention, by the way of grouping the test channels, the automatic test equipment can set a plurality of test channels at one time in the aspect of setting detection contents, and can trigger one or more test groups at one time in the aspect of triggering programs, so that the test channels in the test groups are triggered to carry out time sequence measurement on an object to be tested, thereby reducing the time for setting and triggering programs of the automatic test equipment and improving the measurement efficiency.
The foregoing description of the present disclosure and the following detailed description are presented to illustrate and explain the principles and spirit of the invention and to provide further explanation of the invention as claimed.
Drawings
Fig. 1 is a functional block diagram of an automatic test equipment according to an embodiment of the present invention.
Fig. 2 is a functional block diagram of a test channel according to an embodiment of the invention.
Fig. 3 is a functional block diagram of a time measurement unit according to another embodiment of the invention.
Fig. 4 is a flowchart illustrating a grouping time measurement method according to still another embodiment of the invention.
Wherein, the reference numbers:
10 automatic test equipment
11 control unit
13 channel control unit
15 time measuring unit
151 synchronous circuit
152 reference counter
153 measuring circuit
17 input/output interface
20 test substance
30 host
Ga-Gx test group
a 1-an, b 1-bm and x 1-xi test channels
RFC reference clock
RFR reset signal
WC working clock
CE enable signal
SC acquisition clock
RFS reference count signal
Detailed Description
The detailed features and advantages of the present invention are described in detail in the following embodiments, which are sufficient for anyone skilled in the art to understand the technical content of the present invention and to implement the present invention, and the related objects and advantages of the present invention can be easily understood by anyone skilled in the art according to the disclosure, claims and drawings of the present specification. The following examples further illustrate aspects of the present invention in detail, but are not intended to limit the scope of the present invention in any way.
Referring to fig. 1 and 2, fig. 1 is a functional block diagram of an automatic test equipment according to an embodiment of the present invention, and fig. 2 is a functional block diagram of a test channel according to an embodiment of the present invention. As shown in FIG. 1, the automatic test equipment 10 has a control unit 11 and a plurality of test groups Ga-Gx, each of which has a plurality of test channels, such as test channels a 1-an in the test group Ga, test channels b 1-bm in the test group Gb, and test channels x 1-xi in the test group Gx.
In the grouped time measurement module of the automatic test equipment 10, each test channel in each test group has a channel control unit and a time measurement unit. For convenience of description, the test channel a1 is used for illustration, and as shown in fig. 2, the test channel a1 includes a channel control unit 13, a time measuring unit 15, and an input/output interface 17. The channel control unit 13 is electrically connected to the control unit 11 and the time measurement unit 15, and is configured to provide a test signal to the time measurement unit 15 according to the trigger signal generated by the control unit 11, so that the time measurement unit 15 measures the timing sequence of the signal to be measured according to the test signal. The input/output interface 17 is electrically connected to the time measuring unit 15 and the object 20 to receive the signal to be measured related to the object 20 and output the signal to be measured to the time measuring unit 15. The signal to be tested is, for example, a signal output by the automatic test equipment 10 to the object 20 to be tested for detecting the object 20, and is, for example, a signal returned by the object 20 to be tested to the automatic test equipment 10 after being detected by the automatic test equipment 10, which is not limited in this embodiment.
In one embodiment, the automatic test equipment 10 is electrically connected to the host 30, and assigns at least one of the plurality of test groups Ga to Gx to perform timing measurement according to a selection signal from the host 30. That is, when the host 30 designates the test group Ga to perform timing measurement, the control unit 11 generates a trigger signal to each test channel in the test group Ga to perform timing measurement on each test channel in the test group Ga. Taking the test channel a1 of the test group Ga as an example, when the control unit 11 designates the test group Ga to perform timing measurement, the channel control unit 13 of the test channel a1 receives the trigger signal and outputs the test signal to the time measurement unit 15, so as to trigger the time measurement unit 15 to measure the timing of the signal to be measured through the input/output interface 17.
In the present embodiment, the test channels are not limited to be physically connected to the test groups, and in different test procedures, the test channels are configured in different test groups, for example, when the automatic test equipment 10 is used to test the object a, the test channel a1 is configured in the test group Ga, and when the automatic test equipment 10 is used to test the object B, the test channel a1 is configured in the test group Gb. In fact, the test channels are configured in the test group according to the content of the predetermined test on the object to be tested, for example, the test channels configured to detect the same content are configured in the same test group, in other words, each test channel in the same test group will measure the object to be tested with the same setting, but not limited thereto. One skilled in the art can set different detection contents for each test channel, and the embodiment is not limited thereto.
In order to clarify the method of measuring the signal under test by the time measuring unit 15, an embodiment is described. Referring to fig. 3, fig. 3 is a functional block diagram of a time measurement unit according to another embodiment of the invention, as shown in fig. 3, the time measurement unit 15 has a synchronization circuit 151, a reference counter 152 and a measurement circuit 153, and the channel control unit 13 provides a reference clock RFC and a reset signal RFR as test signals to the time measurement unit 15.
The synchronization circuit 151 of the time measurement unit 15 receives the reference clock RFC and the reset signal RFR provided by the channel control unit 13, and generates the working clock WC, the enable signal CE and the capture clock SC according to at least one of the reference clock RFC and the reset signal RFR, wherein the working clock WC is output to the reference counter 152 and the measurement circuit 153, the enable signal CE is provided to the reference counter 152, and the capture clock SC is provided to the measurement circuit 153.
The reference counter 152 counts the operation clock WC according to the enable signal CE generated by the synchronization circuit 151 to provide a reference count signal RFS to the measurement circuit 153. The measurement circuit 153 operates according to the operation clock WC and captures the signal to be measured through the input/output interface 17 according to the capture clock SC generated by the synchronization circuit 151. The measurement circuit 153 measures and records the timing of the signal to be measured with the reference count signal RFS as a reference of the timing, and transmits the recorded result to the host 30 via the control unit 11.
In another embodiment, each of the test channels of the test groups Ga to Gx is configured with a measurement condition, and when the time measurement unit of each test channel measures the timing sequence of the signal to be measured, the time measurement unit determines and records the time point at which the signal to be measured meets the measurement condition according to the measurement condition. For example, the measurement conditions are, for example, 10 times of measurement and the threshold value set to be a positive edge of 2V. When the measurement circuit 153 measures that the signal to be measured is triggered at the positive edge and the voltage reaches 2V through the input/output interface 17, the measurement circuit 153 records the time point and records the time point 10 times continuously. When the time point meeting the measurement condition is recorded 10 times, the measurement circuit 153 outputs the measurement result to the control unit 11 through the channel control unit 13. The measurement result is the time point when the signal to be measured meets the threshold value for 10 times. In addition, in the embodiment, the measurement condition is set in the channel control unit 13 of each test channel, and in other embodiments, the measurement condition of each test channel may also be set in other suitable manners, which is not limited in the embodiment.
Although the test channel a1 is taken as an example in the above embodiments, in fact, one of ordinary skill in the art can derive the operation of other test channels from the above disclosure. Next, a manner in which the automatic test equipment 10 groups the setting test channels and the triggering test channels will be described. For convenience of explanation, please refer to fig. 1 again, although fig. 1 shows one dut 20, the dut 20 may be one or more semiconductor devices to be tested. For example, when there are 10 semiconductor devices to be tested, the pins a of each semiconductor device to be tested are set to detect the same content, and the test channels electrically connected to the pins a of the 10 semiconductor devices to be tested are set in the test group Ga. In another embodiment, when the pins B to F of a semiconductor under test are set to detect the same content and the pins G to K are set to detect another content, the test channels electrically connected to the pins B to G are set in the test group Gb and the test channels electrically connected to the pins G to K are set in another test group Gc.
Similarly, in another embodiment, when there are 10 semiconductor devices to be tested, the pins B to F of each semiconductor device to be tested are set to detect the same content, and the pins G to K are set to detect another content, the test channels electrically connected to the pins B to F of each semiconductor device of the 10 semiconductor devices to be tested are set in the same test group Gb, and the test channels electrically connected to the pins G to K of each semiconductor device are set in the same test group Gc.
In one embodiment, the channel mapping table records the test channels included in each test group. The channel mapping table may be stored in the control unit 11 or other memory units, and when the control unit 11 receives an instruction from the host 30 to set the test channel detection content, the control unit 11 sets the measurement condition of each test group according to the channel mapping table. For example, when the host 30 indicates that the measurement condition of the test group Ga is positive edge 2V, the control unit 11 automatically sets the measurement condition of each of the test channels a 1-an in the test group Ga to be positive edge 2V. In other words, with the grouped time measurement module disclosed in this embodiment, the automatic test equipment 10 can set all the test channels that need to be set to the same measurement condition at one time without individually setting each test channel. On the other hand, when the timing measurement is started, the automatic test equipment 10 may also trigger all the test channels in the same test group to perform the timing measurement at one time.
In order to more clearly illustrate the implementation of the grouping time measurement module, a specific practical example is described below. Taking the operation time of the automatic test equipment 10 for testing three wafers to be tested as an example, the automatic test equipment 10 provides the measurement signal to the pin1_1 of the first wafer to be tested through the test channel a1, provides the measurement signal to the pin2_1 of the second wafer to be tested through the test channel a2, and provides the measurement signal to the pin3_1 of the third wafer to be tested through the test channel a 3. Furthermore, the automatic test equipment 10 tests the feedback signal outputted from the pin1_2 of the first wafer to be tested to the automatic test equipment 10 through the test channel b1, tests the feedback signal outputted from the pin2_2 of the second wafer to be tested to the automatic test equipment 10 through the test channel b2, and tests the feedback signal outputted from the pin3_2 of the third wafer to be tested to the automatic test equipment 10 through the test channel b 3.
When the host 30 instructs the automatic test equipment 10 to set the measurement condition of the test channels a 1-a 3 to be the time point of positive edge triggered 2V 10 times, and instructs the automatic test equipment 10 to set the measurement condition of the test channels b 1-b 3 to be the time point of negative edge triggered 2V 10 times, the automatic test equipment 10 will include the test channels a 1-a 3 in the test group Ga, include the test channels b 1-b 3 in the test group Gb, set the measurement condition of the test group Ga to be the time point of positive edge triggered 2V 10 times, and set the measurement condition of the test group Gb to be the time point of negative edge triggered 2V 10 times through the control unit 11.
Next, the host 30 designates the test group Ga and the test group Gb for timing measurement. The automatic test equipment 10 makes the control unit 11 generate trigger signals to the test channels a 1-a 3 in the test group Ga and the test channels b 1-b 3 in the test group Gb according to the instructions of the host 30. The time measuring units of the test channels a 1-a 3 are triggered to perform timing measurement on the measurement signals provided by the automatic test equipment 10 to the first wafer to be tested, the second wafer to be tested and the second wafer to be tested. The time measuring units in the test channels b 1-b 3 are also triggered to perform timing measurement on the feedback signals output to the automatic test equipment 10 by the first wafer to be tested, the second wafer to be tested and the second wafer to be tested.
After the measurement of the test channels a 1-a 3 and the test channels b 1-b 3 is finished, each test channel may output the measurement result to the control unit 11, or after the measurement of all the test channels in each test group is finished, output the measurement result of the test group to the control unit 11, which is not limited in this embodiment. After the test channels a 1-a 3 and the test channels b 1-b 3 output the measurement results to the control unit 11, the control unit 11 compares the measurement results of the test channel a1 and the test channel b1, determines the operation time of the first wafer to be tested, compares the measurement results of the test channel a2 and the test channel b2, determines the operation time of the second wafer to be tested, compares the measurement results of the test channel a3 and the test channel b3, and determines the operation time of the third wafer to be tested. In other words, the control unit 11 compares the measurement results of the channels to be tested of the same wafer in the two different test groups to determine the test result of the wafer to be tested. In one embodiment, the control unit 11 may also preset a test standard, and determine whether the test result of the wafer to be tested meets the standard according to the test standard.
In the present embodiment, when the host 30 designates the test group Ga and the test group Gb for timing measurement, the automatic test equipment 10 regards the test group Ga and the test group Gb as another test group and triggers the test group Ga and the test group Gb at a time. In other embodiments, the host 30 may also issue commands to trigger the test group Ga and the test group Gb to perform timing measurement, which is not limited in this embodiment. When the automatic test equipment 10 triggers the test group Ga and the test group Gb as one test group, the automatic test equipment 10 can more efficiently control the test group Ga and the test group Gb for timing measurement.
The manner in which the automatic test equipment 10 groups the test channels is, for example, software or firmware settings, physical circuit connections, switch switches, or other suitable implementations, which are not limited in this embodiment. In addition, the above-mentioned embodiments are only for convenience of illustration and are not intended to limit the invention.
Next, a method for measuring grouping time according to the present embodiment is described, and for convenience of description, fig. 1 and fig. 4 are also referred to, and fig. 4 is a flowchart illustrating steps of a method for measuring grouping time according to yet another embodiment of the present invention. As shown in the figure, in step S401, the control unit 11 designates at least one of the plurality of test groups Ga to Gx for timing measurement according to the selection signal. In step S403, each test channel in the designated test group receives a trigger signal. In step S405, the time measurement unit of each test channel receiving the trigger signal is triggered. In step S407, the triggered time measurement unit measures the timing of the signal to be measured. The grouping time measurement method described in the present embodiment is actually disclosed in the above-mentioned embodiments, and the description of the present embodiment is not repeated herein
In summary, according to the grouping time measurement module of the automatic test equipment and the method thereof disclosed in the embodiments, the automatic test equipment may set a plurality of test channels at one time by grouping the test channels, or select one or more test groups, so as to trigger each test channel in the test groups to start the time sequence measurement of the object to be tested at one time, thereby reducing the time for setting and triggering the automatic test equipment, and further improving the measurement efficiency of the automatic test equipment.
The present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it should be understood that various changes and modifications can be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. A grouped time measurement module for automatic test equipment, comprising:
the system comprises a plurality of test groups, a plurality of control units and a plurality of control units, wherein each test group comprises a plurality of test channels, each test channel in each test group comprises a channel control unit and a time measurement unit, the channel control unit is electrically connected with the time measurement unit, and the channel control unit provides a test signal to the time measurement unit according to a trigger signal, so that the time measurement unit measures the time sequence of a signal to be tested according to the test signal, and the signal to be tested is related to an object to be tested which is electrically connected with the test channels; and
a control unit, electrically connected to the test groups, for generating the trigger signal to each of the test channels in at least one of the test groups according to a selection signal, the selection signal designating at least one of the test groups to perform timing measurement;
the grouped time measurement module further comprises a channel corresponding table, the channel corresponding table records the test channels contained in each test group, when the control unit receives an instruction for setting the detection content of the test channels, the control unit sets the measurement condition of each test group at one time according to the channel corresponding table, and when the time sequence measurement is started, all the test channels in the same test group are triggered at one time to carry out the time sequence measurement;
in different test programs, the test channels are configured in different test groups, when the automatic test equipment is used for testing a first object to be tested, the first test channel is configured in the first test group, and when the automatic test equipment is used for testing a second object to be tested, the first test channel is configured in the second test group;
wherein each time measurement unit has a synchronization circuit, a reference counter and a measurement circuit, the channel control unit, the reference counter and the measurement circuit are electrically connected to the synchronization circuit respectively, the channel control unit is electrically connected to the reference counter and the measurement circuit, the reference counter is electrically connected to the measurement circuit, the measurement circuit is further electrically connected to the object to be tested, the synchronization circuit is used for generating a working clock, an enable signal and an extraction clock according to at least one of a reference clock and a reset signal from the channel control unit, the reference counter is used for providing a reference counting signal to the measuring circuit according to the enabling signal and the working clock pulse, the measurement circuit is used for capturing the signal to be measured according to the working clock and the capturing clock, and the measurement circuit is used for measuring the time sequence of the signal to be measured according to the reference counting signal.
2. The grouped time measurement module of automatic test equipment as claimed in claim 1, wherein each of the test channels of each of the test groups is configured with a measurement condition, and when the time measurement unit of each of the test channels measures the timing sequence of the signal under test, the time measurement unit determines and records the time point at which the signal under test meets the measurement condition according to the measurement condition.
3. The grouped time measurement module of automatic test equipment as claimed in claim 2, wherein the measurement condition includes a measurement count and a threshold value, and the time measurement unit outputs the measurement result to the control unit when the time measurement unit measures and records a time point at which the signal under test meets the threshold value for the measurement count.
4. The module of claim 3, wherein the control unit compares the measurement results of at least two of the test channels to determine the test result of the DUT.
5. A grouped time measurement method of automatic test equipment is characterized by comprising the following steps:
according to a selection signal, appointing at least one of a plurality of test groups to carry out time sequence measurement, wherein each test group comprises a plurality of test channels, and each test channel comprises a time measurement unit;
each test channel in the assigned test group receives a trigger signal;
triggering the time measuring unit of each test channel receiving the trigger signal; and
the triggered time measuring unit measures the time sequence of a signal to be measured, and the signal to be measured is related to an object to be measured which is electrically connected with the testing channel;
wherein, the grouping time measurement method further comprises:
setting the measurement condition of each test group according to a channel corresponding table, wherein the channel corresponding table indicates the test channels contained in each test group; when receiving the order for setting the test channel detection content, setting the measurement condition of each test group according to the channel corresponding table, and when starting to perform time sequence measurement, triggering all test channels in the same test group to perform time sequence measurement;
in different test programs, the test channels are configured in different test groups, when the automatic test equipment is used for testing a first object to be tested, the first test channel is configured in the first test group, and when the automatic test equipment is used for testing a second object to be tested, the first test channel is configured in the second test group;
each time measuring unit is provided with a synchronous circuit, a reference counter and a measuring circuit, the synchronous circuit generates a working clock, an enabling signal and a capturing clock according to at least one of a reference clock and a reset signal from the channel control unit, the reference counter provides a reference counting signal to the measuring circuit according to the enabling signal and the working clock, the measuring circuit captures the signal to be measured according to the working clock and the capturing clock and the measuring circuit measures the time sequence of the signal to be measured according to the reference counting signal.
6. The method as claimed in claim 5, wherein each of the test channels in each of the test groups has a measurement condition, and the step of the time measurement unit measuring the timing of the signal under test comprises the time measurement unit determining and recording a time point at which the signal under test meets the measurement condition according to the measurement condition.
7. The method as claimed in claim 6, wherein the measurement condition comprises a measurement count and a threshold, and the step of the time measurement unit determining and recording the time point at which the signal under test meets the measurement condition according to the measurement condition comprises the time measurement unit outputting the measurement result when the time measurement unit determines and records the time point at which the signal under test meets the threshold for the measurement count.
8. The method of claim 7, further comprising comparing at least two of the test channels to determine a test result of the object under test.
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| TWI645202B (en) * | 2018-04-12 | 2018-12-21 | 京元電子股份有限公司 | Measuring structure |
| TWI702411B (en) * | 2019-05-16 | 2020-08-21 | 致茂電子股份有限公司 | Multi-channel testing device |
| WO2023070614A1 (en) * | 2021-10-30 | 2023-05-04 | Yangtze Memory Technologies Co., Ltd. | Tester channel multiplexing in test equipment |
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| TWI586979B (en) | 2017-06-11 |
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