TWI494579B - Time measurement module and method for semiconductor automatic test equipment - Google Patents

Description

Time measurement module and method for semiconductor automatic test equipment

The present invention relates to a time measurement module and method, and more particularly to a time measurement module and method for a semiconductor automatic test equipment.

In today's semiconductor industry, integrated circuit components must undergo a variety of electrical tests to determine their functional characteristics. One of the electrical tests is to measure the timing of the components. To perform this test, you must use a Time Measurement Unit (TMU). Due to the increasing complexity of testing in the semiconductor industry, and integrated circuit (IC) design engineers want to ensure that their integrated circuits meet the design requirements in terms of speed and response, most automated test equipment is on sale. At the time, both time measurement units are included. The time measurement unit must be used regardless of whether the test equipment is used to test an analog integrated circuit, a digital integrated circuit, or a mixed signal integrated circuit.

The time measurement unit is a common measurement unit in the semiconductor automatic test equipment (ATE). It is responsible for measuring the interval between the occurrence of two events or calculating the number of occurrences of events, usually used to measure the frequency of signals. /cycle, transmission delay, setup/hold time, rise time, fall time, duty cycle, etc.

In semiconductor test equipment, there are usually multiple time measurement units for comparing the time differences between different test channels. Because it is necessary to compare the differences between different test channels, each test channel must obtain the same count value. The data is meaningful when compared. Therefore, the synchronization architecture of the time measurement unit is an important issue between different test channels.

It is an object of the present invention to provide a time measurement module and method for a semiconductor automatic test device that synchronizes the reference of the timing of each time measurement unit by setting a synchronization circuit in each time measurement unit.

An object of the present invention is to provide a time measuring module and method for a semiconductor automatic testing device, which can synchronize each time measuring unit by synchronously resetting the time measuring units before measuring the object to be tested. The benchmark for timing.

In order to achieve the above-mentioned various purposes and effects, the present invention discloses a time measurement module for a semiconductor automatic test equipment. The time measurement module includes a plurality of time measurement units, and the time measurement units receive a reference. And a reset signal, wherein the time measuring units respectively comprise: a synchronization circuit for generating a working clock and a uniform energy signal according to the reference clock and the reset signal; and a reference counter electrically connected to the synchronization a circuit, the reference counter is configured to start counting according to the enable signal, and generate a reference counting signal according to the working clock; and a measuring circuit electrically connected to the synchronous circuit and the reference counter, wherein the measuring circuit is configured to receive an external test The signal, and the timing of the external signal to be tested is processed according to the reference counting signal.

The invention further discloses a time measuring method for a semiconductor automatic testing device, the method comprising: providing a reference clock and a reset signal to a plurality of time measuring units; generating a signal according to the reference clock and the reset signal according to the reference clock Working clock and consistent energy signal; and starting counting according to the enabling signal, and generating a parameter according to the working clock The test signal is counted; and an external signal to be tested is captured, and the timing of the external signal to be tested is processed according to the reference count signal.

10‧‧‧Semiconductor automatic test equipment

101‧‧‧System Control Unit

1011‧‧‧Sequence Control Unit

1013‧‧‧ Data Processing Unit

1015‧‧‧Data transmission interface

20‧‧‧Host

30‧‧‧Test object

CH ₁ ‧‧‧ test channel

CH ₂ ‧‧‧ test channel

CH _n ‧‧‧ test channel

CAP_1‧‧‧ capture unit

CAP_n‧‧‧ capture unit

CCU_1‧‧‧Channel Control Unit

CCU_2‧‧‧Channel Control Unit

CCU_n‧‧‧Channel Control Unit

CD_1‧‧‧Signal

CD_n‧‧‧ capture signal

CE‧‧‧Enable signal

CE_1‧‧‧Enable signal

CE_n‧‧‧Enable signal

DS_1‧‧‧External signal to be tested

DS_n‧‧‧External signal to be tested

DT‧‧‧Delayed time

IOP_1‧‧‧Input and output interface

IOP_2‧‧‧Input and output interface

IOP_n‧‧‧Input and output interface

LOG_1‧‧‧ logical unit

LOG_n‧‧‧ logical unit

MC_1‧‧‧Measurement circuit

MC_n‧‧‧Measurement circuit

PLL‧‧‧ phase-locked loop

PLL_1‧‧‧ phase-locked loop

PLL_n‧‧‧ phase-locked loop

PLC‧‧‧Enable Counter

PLC_1‧‧‧Enable Counter

PLC_n‧‧‧Enable Counter

PLT_1‧‧‧Lock time

PLT_n‧‧‧Lock time

RC_1‧‧‧ reference counter

RC_n‧‧‧ reference counter

RFS_1‧‧‧ reference counting signal

RFS_n‧‧‧ reference counting signal

RFC‧‧‧ reference clock

RFR‧‧‧Reset signal

SC‧‧‧Get the clock

SC_1‧‧‧Select the clock

SC_n‧‧‧Get the clock

SYC‧‧‧Synchronous Circuit

SYC_1‧‧‧Synchronous circuit

SYC_n‧‧‧Synchronous circuit

TMU_1‧‧‧ time measuring unit

TMU_2‧‧‧ time measuring unit

TMU_n‧‧‧ time measuring unit

WC‧‧‧ working hours

WC_1‧‧‧Working hours

WC_n‧‧‧Working hours

1 is a block diagram of a semiconductor automatic test apparatus of the present invention; FIG. 2 is a block diagram of a time measuring unit according to a first embodiment of the present invention; FIG. 3 is a view of the present invention A timing diagram of the time measuring unit of the first embodiment; FIG. 4 is a timing diagram of the time measuring unit of the first embodiment of the present invention for extracting an external signal to be tested; FIG. 5 is a timing diagram of A block diagram of a time measurement module according to a first embodiment of the present invention; FIG. 6 is a timing chart of a time measurement module according to a first embodiment of the present invention; FIG. 7 is a view of the present invention A block diagram of a time measurement module of the second embodiment; and FIG. 8 is a flow chart of a time measurement method of the semiconductor automatic test equipment of the present invention.

For a better understanding and understanding of the features and advantages of the present invention, the preferred embodiments and the detailed description are as follows: Please refer to Figure 1, which is the present invention. A block diagram of a semiconductor automatic test equipment. As shown, the semiconductor automatic test equipment 10 of the present invention includes a system control unit 101 and a plurality of test channels CH ₁ , CH ₂ -CH _n . The system control unit 101 includes a timing control unit 1011, a data processing unit 1013, and a data transmission interface 1015. The test channels CH ₁ , CH ₂ to CH _n respectively include a channel control unit CCU_1, CCU_2-CCU_n, and a time. The measuring unit TMU_1, TMU_2-TMU_n and an input/output interface IOP_1, IOP_2-IOP_n. The system control unit 101 is connected to a host 20 through a data transmission interface 1015. The sequence control unit 1011 of the system control unit 101 controls the channel control units CCU_1 and CCU-2-CCU_n according to instructions from the host 20 to respectively The channel control units CCU_1, CCU_2-CCU_n are provided to enable reference clocks and reset signals of the time measuring units TMU_1, TMU_2-TMU_n, so that the time measuring units TMU_1, TMU_2-TMU_n pass through the The input and output interfaces IOP_1 and IOP_2-IOP_n respectively measure the timings of the plurality of external signals to be tested DS_1, DS_2-DS_n generated by the object to be tested 30. The data processing unit 1013 is configured to process the data measured by the test channels CH ₁ and CH ₂ -CH _n and then transmit the data to the host 20 through the data transmission interface 1015.

Based on the above, the time measuring units TMU_1 and TMU_2-TMU_n are used to measure the timings of the external signals to be tested DS_1, DS_2-DS_n generated by the object to be tested 30, for example, to measure the interval between occurrences of two events or Calculate the number of occurrences of the event, such as the frequency/cycle of the object to be tested 30, the transmission delay, the setup/hold time, the rise time, the fall time, and the duty cycle, etc., and transmit the measured timing to the host 20, the host 20 Then compare the timing between different test channels to know the difference between different test channels. Therefore, the time measurement units TMU_1 and TMU_2-TMU_n of different test channels must be synchronized on the timing reference, otherwise the difference between the different test channels measured will be inaccurate.

Please refer to FIG. 2, which is a block diagram of a time measuring unit according to a first embodiment of the present invention. Since the structures and principles of the time measuring units TMU_1 and TMU_2-TMU_n of the time measuring module are the same, only the time measuring unit TMU_1 will be described here. As shown, the time measuring unit TMU_1 includes a synchronization circuit SYC_1, a reference counter RC_1, and a measurement circuit MC_1. Synchronization circuit SYC_1 The receive channel control unit CCU_1 outputs a reference clock RFC and a reset signal RFR, and generates a working clock WC_1, a coincidence signal CE_1 and a capture clock SC_1 according to the reference clock RFC and the reset signal RFR. The reference counter RC_1 is electrically connected to the synchronizing circuit SYC_1, and is configured to start counting the working clock WC_1 according to the enabling signal CE_1 to generate a reference counting signal RFS_1, and the reference counting signal RFS_1 corresponds to the working clock WC_1. The measuring circuit MC_1 is electrically connected to the synchronous circuit SYC_1 and the reference counter RC_1, and the measuring circuit MC_1 operates according to the working clock WC_1, and is configured to receive the external signal to be tested DS_1 outputted through the input/output interface IOP_1 for recording according to the reference counting signal RFS_1. Timing of external signal to be tested DS_1.

In addition, the synchronization circuit SYC_1 includes a phase locked loop PLL_1 and a uniform energy counter PLC_1. The phase-locked loop PLL_1 is configured to generate the working clock WC_1 according to the phase of the reference clock RFC, and the phase-locked loop PLL_1 generates the capture clock SC_1 according to the reference clock RFC, wherein the frequency of the capture clock SC_1 is greater than the working clock. The frequency of WC_1. The enable counter PLC_1 is configured to start counting the reference clock RFC according to the reset signal RFR, and generate a enable signal CE_1 after counting a delay time. The following describes the reason why the enable counter PLC_1 counts a delay time and generates the enable signal CE_1, which will not be described here.

The measurement circuit MC_1 includes a capture unit CAP_1 and a logic unit LOG_1. The capture unit CAP_1 operates according to the working clock WC_1, and is configured to extract an external signal DS_1 according to the capture clock SC_1 to generate a capture signal CD_1. The logic unit LOG_1 is electrically connected to the capture unit CAP_1 and the reference counter RC_1, and operates according to the working clock WC_1, and records the timing of capturing the signal CD_1 with the reference counting signal RFS_1 as a timing sequence, and transmits the recorded data via the data. The interface 1015 is transmitted to the host 20.

Please refer to FIG. 3, which is a timing diagram of the time measuring unit of the first embodiment of the present invention. As shown in the figure, the enable counter PLC_1, the phase locked loop PLL_1, the reference counter RC_1, the logic unit LOG_1 and the capture unit CAP_1 are reset according to the reset signal RFR at the start time. After the resetting, the enable counter PLC_1 starts counting the reference clock RFC, and generates the enable signal CE_1 after a delay time DT. At the same time, the phase-locked loop PLL_1 phase-locks the reference clock RFC and generates a working clock WC_1 after a phase-locked time PLT_1. After receiving the enable signal CE_1 and the working clock WC_1, the reference counter RC_1 starts counting the working clock WC_1 according to the enable signal CE_1 to generate the reference counting signal RFS_1.

In addition, please refer to FIG. 4, which is a timing diagram of the time measurement unit of the first embodiment of the present invention for extracting an external signal to be tested. As shown in the figure, after the reset signal RFR is reset, the phase-locked loop PLL_1 generates a clock pulse SC_1 according to the reference clock RFC generation frequency higher than the working clock WC_1. When the capture unit CAP_1 receives the working clock WC_1 After capturing the clock SC_1, the capture unit CAP_1 starts to operate, and the external signal to be tested DS_1 is captured according to the capture clock SC_1. When the external signal to be tested DS_1 changes or decreases, the capture unit CAP_1 is based on The clock signal SC_1 corresponding to the change time is generated by taking the clock SC_1. When the logic unit LOG_1 receives the working clock WC_1 and the reference counting signal RFS_1, the logic unit LOG_1 starts to operate, and uses the reference counting signal RFS_1 as a timing reference to record the timing of the change of the external signal to be tested DS_1, and records the recording. The data is transferred to the host 20.

Please refer to FIG. 5 and FIG. 6 together. FIG. 5 is a block diagram of a time measurement module according to a first embodiment of the present invention, and FIG. 6 is a timing diagram of a time measurement module according to the first embodiment of the present invention. Figure. As shown in the figure, only the time measuring units TMU_1 and TMU_n are used to represent the synchronization mode of each channel time measuring unit TMU_1-TMU_n, The architecture of the time measuring unit TMU_n is the same as that of the time measuring unit TMU_1, so it will not be described here.

As shown, the time measurement units TMU_1-TMU_n receive the same reference clock RFC and reset signal RFR through the channel control units CCU_1-CCU_n of each test channel, but since each phase-locked loop PLL_1-PLL_n The phase lock time PLT_1-PLT_n will be different, so the time when the phase-locked loop PLL_1-PLL_n generates the working clock WC_1-WC_n after receiving the reference clock RFC will also be different, so the present invention will each uniform energy counter PLC_1- PLC_n is set to count the same delay time DT, and the delay time DT is set equal to or greater than the longest phase lock time of the phase locked loops PLL_1-PLL_n.

In other words, the enable counters PLC_1-PLC_n of the present invention must generate the enable signals CE_1-CE_n after the phase-locked loops PLL_1-PLL_n generate the working clocks WC_1-WC_n and the capture clocks SC_n. Therefore, the reference counters RC_1-RC_n respectively generate the reference timing signals RFS_1-RFS_n of the same timing according to the working clocks WC_1-WC_n, and the capturing units CAP_1-CAP_n are respectively based on the working clocks WC_1-WC_n and the capturing time. The pulse SC_1-SC_n captures the external signal to be tested DS_1-DS_n, and outputs the capture signal CD_1-CD_n to the logic unit LOG_1-LOG_n, then the logic unit LOG_1-LOG_n simultaneously uses the reference timing signal RFS_1-RFS_n of the same timing as the timing. The reference records the time when the external sequence to be sequenced DS_1-DS_n changes, and transmits the recorded data to the host 20 to achieve the purpose of synchronizing the time measuring units TMU_1-TMU_n.

In addition, please refer to FIG. 7, which is a block diagram of a time measurement module according to a second embodiment of the present invention. The difference between this embodiment and the first embodiment is that the synchronization circuits SYC_1-SYC_n in the time measuring units TMU_1-TMU_n are removed, and The time measuring units TMU_1-TMU_n share the same synchronization circuit, and the remaining circuit architectures and principles are the same as in the first embodiment, and therefore will not be described again.

As shown in the figure, the time measurement module of this embodiment includes a synchronization circuit SYC, and the synchronization circuit SYC includes a phase locked loop PLL and a consistent energy counter PLC. The phase-locked loop PLL is configured to provide a capture clock SC to the capture units CAP_1-CAP_n, and provide a working clock WC to the reference counters RC_1-RC_n, the logic units LOG_1-LOG_n and the Take the unit CAP_1-CAP_n. The enable counter PLC is used to provide a consistent energy signal CE to the reference counters RC_1-RC_n.

Based on the above, since the time measuring units TMU_1-TMU_n share the same synchronous circuit SYC and receive the same working clock WC, the capture clock SC and the enable signal CE, the synchronization effect can also be achieved, and the circuit The working principle is the same as that of the first embodiment, so it will not be described again.

Please refer to FIG. 8 , which is a flow chart of a method for measuring the time of the semiconductor automatic test equipment of the present invention. As shown in the figure, first, step S10 is performed to provide a reference signal RFC and a reset signal RFR to the complex time measuring units TMU_1-TMU_n. Then, in step S20, the synchronization circuits SYC_1-SYC_n start counting the reference signal RFC according to the reset signal RFR for a delay time DT, generate the enable signal CE_1-CE_n, and lock the phase of the reference signal RFC to generate the working time. The pulses WC_1-WC_n and the acquisition clocks SC_1-SC_n.

Then, in step S30, the reference counters RC_1-RC_n start counting the working clocks WC_1-WC_n according to the enable signals CE_1-CE_n to generate reference counting signals RFS_1-RFS_n corresponding to the working clocks WC_1-WC_n. Then, in step S40, the measurement circuits MC_1-MC_n operate according to the working clocks WC_1-WC_n, and according to 撷 The clocks SC_1-SC_n are taken from the external signals to be tested DS_1-DS_n, and the captured signals CD_1-CD_n are generated, and the timings of the signals CD_1-CD_n are recorded by using the reference counting signals RFS_1-RFS_n as timing references, and The recorded data is transmitted to the host 20, in other words, the measurement circuits MC_1-MC_n operate according to the operating clocks WC_1-WC_n, and the timings of the external signals to be tested DS_1-DS_n are recorded in accordance with the reference counting signals RFS_1-RFS_n.

Based on the above, the present invention resets the time measuring units TMU_1-TMU_n by synchronously transmitting the reset signal RFR to the time measuring units TMU_1-TMU_n before measuring the object to be tested, and the synchronization circuits SYC_1 - SYC_n simultaneously counts the reference signal RFC according to the reset signal RFR to synchronize the reference of the timing of each time measurement unit (TMU_1 - TMU_n).

In summary, the time measurement module of the semiconductor automatic test equipment of the present invention includes a plurality of time measurement units, each of which includes a synchronization circuit, a reference counter and a measurement circuit, and the measurement method thereof By synchronously resetting the time measuring units before measuring the object to be tested, and by using the synchronization circuits to simultaneously enable the reference counters, the timings of the time measuring units are all the same, The purpose of synchronizing the time measuring units is achieved.

The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and the variations, modifications, and modifications of the shapes, structures, features, and spirits described in the claims of the present invention. All should be included in the scope of the patent application of the present invention.

The invention is a novel, progressive and available for industrial use, and should meet the requirements of the patent application stipulated in the Patent Law of China. With the application of the application, the praying office will grant the patent as soon as possible.

CAP_1‧‧‧ capture unit

CAP_n‧‧‧ capture unit

CD_1‧‧‧Signal

CD_n‧‧‧ capture signal

CE_1‧‧‧Enable signal

CE_n‧‧‧Enable signal

DS_1‧‧‧External signal to be tested

DS_n‧‧‧External signal to be tested

LOG_1‧‧‧ logical unit

LOG_n‧‧‧ logical unit

MC_1‧‧‧Measurement circuit

MC_n‧‧‧Measurement circuit

PLL_1‧‧‧ phase-locked loop

PLL_n‧‧‧ phase-locked loop

PLC_1‧‧‧Enable Counter

PLC_n‧‧‧Enable Counter

RC_1‧‧‧ reference counter

RC_n‧‧‧ reference counter

RFS_1‧‧‧ reference counting signal

RFS_n‧‧‧ reference counting signal

RFC‧‧‧ reference clock

RFR‧‧‧Reset signal

SC_1‧‧‧Select the clock

SC_n‧‧‧Get the clock

SYC_1‧‧‧Synchronous circuit

SYC_n‧‧‧Synchronous circuit

TMU_1‧‧‧ time measuring unit

TMU_n‧‧‧ time measuring unit

WC_1‧‧‧Working hours

WC_n‧‧‧Working hours

Claims (8)

A time measurement module for a semiconductor automatic test device, the time measurement module includes a plurality of time measurement units, the time measurement units receiving a reference clock and a reset signal, and the time measurement units respectively The method includes: a synchronization circuit for generating a working clock and a uniform energy signal according to the reference clock and the reset signal, the synchronization circuit comprising: a phase locked loop for generating the work according to the phase of the reference clock And a coincidence energy counter for counting according to the reset signal, and generating a enable signal after counting a delay time according to the reference clock; a reference counter electrically connected to the synchronization circuit, The reference counter is configured to start counting according to the enable signal, and generate a reference count signal according to the working clock; and a measuring circuit electrically connected to the synchronous circuit and the reference counter, the measuring circuit is configured to receive a The external signal to be tested is used as a reference for the timing of the reference counting signal, and the timing of the external signal to be tested is processed. The time measurement module of claim 1, wherein the delay time is equal to or greater than a phase lock time of the phase locked loop. The time measurement module of claim 1, wherein the measurement circuit comprises: a capture unit for extracting the external signal to be tested according to a capture clock and the working clock; Generating a capture signal; and a logic unit electrically connected to the capture unit, wherein the logic unit is configured to use the reference The test count signal processes the timing of the captured signal. The time measurement module of claim 3, wherein the synchronization circuit generates the capture clock according to the reference clock, and the frequency of the capture clock is greater than the frequency of the working clock. A method for measuring a time of a semiconductor automatic test device, the method comprising: providing a reference clock and a reset signal to a plurality of time measuring units; and generating a working clock and a synchronization according to the reference clock and the reset signal The signal can be generated by: locking the phase of the reference clock to generate the working clock; and starting counting according to the reset signal, and counting the delay time according to the reference clock to generate the enabling signal; The enable signal starts counting, and generates a reference counting signal according to the working clock; and extracts an external signal to be tested, and uses the reference counting signal as a timing reference to process the timing of the external signal to be tested. The time measuring method of claim 5, wherein the delay time is equal to or greater than a phase lock time that locks a phase of the reference clock. The time measuring method of claim 5, wherein each of the time measuring units captures the external signal to be tested, generates a signal, operates according to the working clock, and according to the reference Counting the signal and processing the timing of the captured signal. The time measuring method described in claim 7 further includes: generating a capture clock and providing to each of the time measuring units to extract the external signal to be tested according to the captured clock. And the capture signal is generated.