CN106849741B - 压电致动器、层叠致动器、压电马达、机器人以及机械手 - Google Patents

压电致动器、层叠致动器、压电马达、机器人以及机械手 Download PDF

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Publication number
CN106849741B
CN106849741B CN201610959198.5A CN201610959198A CN106849741B CN 106849741 B CN106849741 B CN 106849741B CN 201610959198 A CN201610959198 A CN 201610959198A CN 106849741 B CN106849741 B CN 106849741B
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China
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piezoelectric
piezoelectric actuator
actuator
substrates
piezoelectric elements
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Chinese (zh)
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CN106849741A (zh
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荒川丰
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
    • B25J15/0293—Gripping heads and other end effectors servo-actuated comprising parallel grippers having fingers directly connected to actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/123—Linear actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Reciprocating Pumps (AREA)
CN201610959198.5A 2015-11-13 2016-11-03 压电致动器、层叠致动器、压电马达、机器人以及机械手 Active CN106849741B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015222564A JP6601174B2 (ja) 2015-11-13 2015-11-13 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド及び送液ポンプ
JP2015-222564 2015-11-13

Publications (2)

Publication Number Publication Date
CN106849741A CN106849741A (zh) 2017-06-13
CN106849741B true CN106849741B (zh) 2020-02-21

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Country Status (4)

Country Link
US (1) US10497854B2 (enExample)
EP (1) EP3176842B1 (enExample)
JP (1) JP6601174B2 (enExample)
CN (1) CN106849741B (enExample)

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* Cited by examiner, † Cited by third party
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KR102049990B1 (ko) * 2013-03-28 2019-12-03 삼성전자주식회사 c-Met 항체 및 VEGF 결합 단편이 연결된 융합 단백질
JP6946893B2 (ja) * 2017-09-22 2021-10-13 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP2019170108A (ja) * 2018-03-26 2019-10-03 セイコーエプソン株式会社 圧電振動子および圧電振動子の製造方法
JP7345354B2 (ja) * 2019-10-25 2023-09-15 三菱電機株式会社 半導体装置

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CN1423276A (zh) * 2001-09-27 2003-06-11 松下电器产业株式会社 薄膜压电体元件及其制造方法以及使用该薄膜压电体元件的致动器装置
CN1445871A (zh) * 2002-03-15 2003-10-01 松下电器产业株式会社 薄膜压电元件及其制造方法和使用该压电元件的执行元件
CN1722600A (zh) * 2004-07-12 2006-01-18 精工爱普生株式会社 压电致动器及设备
CN103151951A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 促动器、机器手、机器人、电子部件输送装置及打印机
CN104022679A (zh) * 2014-06-25 2014-09-03 哈尔滨工业大学 夹持式纵弯复合超声电机振子

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CN1423276A (zh) * 2001-09-27 2003-06-11 松下电器产业株式会社 薄膜压电体元件及其制造方法以及使用该薄膜压电体元件的致动器装置
CN1445871A (zh) * 2002-03-15 2003-10-01 松下电器产业株式会社 薄膜压电元件及其制造方法和使用该压电元件的执行元件
CN1722600A (zh) * 2004-07-12 2006-01-18 精工爱普生株式会社 压电致动器及设备
CN103151951A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 促动器、机器手、机器人、电子部件输送装置及打印机
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Also Published As

Publication number Publication date
EP3176842A3 (en) 2017-08-23
US10497854B2 (en) 2019-12-03
CN106849741A (zh) 2017-06-13
JP6601174B2 (ja) 2019-11-06
JP2017093194A (ja) 2017-05-25
EP3176842A2 (en) 2017-06-07
EP3176842B1 (en) 2022-03-02
US20170141290A1 (en) 2017-05-18

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