CN106847831A - 薄膜晶体管阵列基板及其制造方法 - Google Patents
薄膜晶体管阵列基板及其制造方法 Download PDFInfo
- Publication number
- CN106847831A CN106847831A CN201710134392.4A CN201710134392A CN106847831A CN 106847831 A CN106847831 A CN 106847831A CN 201710134392 A CN201710134392 A CN 201710134392A CN 106847831 A CN106847831 A CN 106847831A
- Authority
- CN
- China
- Prior art keywords
- film transistor
- data wire
- pixel cell
- insulating barrier
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 97
- 238000000034 method Methods 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 230000004888 barrier function Effects 0.000 claims abstract description 94
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 239000004065 semiconductor Substances 0.000 claims description 86
- 239000010408 film Substances 0.000 claims description 46
- 238000002161 passivation Methods 0.000 claims description 23
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 239000002184 metal Substances 0.000 description 27
- 229910052751 metal Inorganic materials 0.000 description 27
- 230000003287 optical effect Effects 0.000 description 17
- 239000000463 material Substances 0.000 description 8
- 238000009413 insulation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710134392.4A CN106847831A (zh) | 2017-03-08 | 2017-03-08 | 薄膜晶体管阵列基板及其制造方法 |
PCT/CN2017/080933 WO2018161411A1 (fr) | 2017-03-08 | 2017-04-18 | Substrat de réseau de transistor à couches minces et son procédé de fabrication |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710134392.4A CN106847831A (zh) | 2017-03-08 | 2017-03-08 | 薄膜晶体管阵列基板及其制造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106847831A true CN106847831A (zh) | 2017-06-13 |
Family
ID=59138163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710134392.4A Pending CN106847831A (zh) | 2017-03-08 | 2017-03-08 | 薄膜晶体管阵列基板及其制造方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN106847831A (fr) |
WO (1) | WO2018161411A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108538853A (zh) * | 2018-03-29 | 2018-09-14 | 武汉华星光电技术有限公司 | 显示装置及其阵列基板 |
CN111312066A (zh) * | 2018-12-12 | 2020-06-19 | 三星显示有限公司 | 包括非晶硅导电层的显示装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101398581A (zh) * | 2007-09-28 | 2009-04-01 | 群康科技(深圳)有限公司 | 液晶显示面板及其所采用的基板的制造方法 |
CN102116986A (zh) * | 2009-12-31 | 2011-07-06 | 上海天马微电子有限公司 | 电子纸显示装置及其制造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090129805A (ko) * | 2008-06-13 | 2009-12-17 | 엘지디스플레이 주식회사 | 횡전계형 액정표시장치용 어레이 기판 |
-
2017
- 2017-03-08 CN CN201710134392.4A patent/CN106847831A/zh active Pending
- 2017-04-18 WO PCT/CN2017/080933 patent/WO2018161411A1/fr active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101398581A (zh) * | 2007-09-28 | 2009-04-01 | 群康科技(深圳)有限公司 | 液晶显示面板及其所采用的基板的制造方法 |
CN102116986A (zh) * | 2009-12-31 | 2011-07-06 | 上海天马微电子有限公司 | 电子纸显示装置及其制造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108538853A (zh) * | 2018-03-29 | 2018-09-14 | 武汉华星光电技术有限公司 | 显示装置及其阵列基板 |
CN108538853B (zh) * | 2018-03-29 | 2019-12-31 | 武汉华星光电技术有限公司 | 显示装置及其阵列基板 |
CN111312066A (zh) * | 2018-12-12 | 2020-06-19 | 三星显示有限公司 | 包括非晶硅导电层的显示装置 |
CN111312066B (zh) * | 2018-12-12 | 2022-12-16 | 三星显示有限公司 | 包括非晶硅导电层的显示装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2018161411A1 (fr) | 2018-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20171026 Address after: 518132 No. 9-2 Ming Avenue, Gongming street, Guangming District, Guangdong, Shenzhen Applicant after: Shenzhen Huaxing photoelectric semiconductor display technology Co., Ltd. Address before: 518132 9-2, Guangming Road, Guangming New District, Guangdong, Shenzhen Applicant before: Shenzhen Huaxing Optoelectronic Technology Co., Ltd. |
|
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170613 |