CN106842650B - Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter - Google Patents
Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter Download PDFInfo
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- CN106842650B CN106842650B CN201710228690.XA CN201710228690A CN106842650B CN 106842650 B CN106842650 B CN 106842650B CN 201710228690 A CN201710228690 A CN 201710228690A CN 106842650 B CN106842650 B CN 106842650B
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- foreign matter
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- display base
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- laser
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Physics & Mathematics (AREA)
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- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention provides a kind of processing unit of display base plate foreign matter, the processing method of display base plate foreign matter, belongs to field of display technology, can solve the problems, such as that the particle foreign matter of existing grinding color membrane substrates is also easy to produce dust, causes physical damnification.The processing unit of display base plate foreign matter of the invention detects position, size and the pattern of foreign matter on display base plate using detection unit, then the foreign matter removed will be needed to be heated to molten state using fusing department according to the position of foreign matter, size and pattern makes its softening, foreign matter is ground with grind section again, such grinding greatly reduces the generation of particulate matter or dust, at the other positions that can prevent particulate matter scuffing or pollution displaying substrate.The processing unit of display base plate foreign matter of the invention is suitable for handling various display base plate foreign matters.
Description
Technical field
The invention belongs to field of display technology, and in particular to a kind of processing unit of display base plate foreign matter, display base plate are different
The processing method of object.
Background technique
TFT-LCD mainly includes array substrate (Array), color membrane substrates (CF), and be clipped in array substrate (Array),
Liquid crystal between color membrane substrates (CF).Wherein, the major function of color membrane substrates is to realize the color displays of TFT-LCD, color film base
Plate mainly passes through the production technologies such as coating, exposure, development, baking, forms black matrix, chromatic filter layer in glass baseplate surface
And spacer material, the effect of spacer material is support array substrate and color membrane substrates, so that gap between the two forms liquid crystal cell.It is color
In the processing procedure of ilm substrate, black matrix and the film layer of colorized optical filtering layer material are in incomplete oven-dried condition before baking, in equipment
Particle foreign matter in portion, environment is easily fallen on above-mentioned material surface, to adhere to or be wrapped in above-mentioned material, and subsequent
Particle foreign matter can not clean removal in processing procedure, be adhered in color film after causing baking, form bad point.When particle foreign matter height is super
It out when spacer material height, will form that bright spot, dim spot etc. are bad after to box, influence the performance of display device.Therefore in color film system
Cheng Zhong, it is necessary to which these particle foreign matters are removed.It is super using being detected by the way of the sliding of color membrane substrates surface in the prior art
Then the particle foreign matter of spacer material height out grinds the particle foreign matter beyond spacer material height by milling apparatus.
At least there are the following problems in the prior art for inventor's discovery: this physical grinding can generate powder during the grinding process
Dirt pollutes the display device around color membrane substrates, can also cause to cause certain physical damnification at grinding, forms bee eye.
Summary of the invention
The present invention it is existing grinding color membrane substrates particle foreign matter be also easy to produce dust, cause physical damnification aiming at the problem that,
A kind of processing unit of display base plate foreign matter, the processing method of display base plate foreign matter are provided.
Solving technical solution used by present invention problem is:
A kind of processing unit of display base plate foreign matter, comprising:
Detection unit, the foreign matter on display base plate for identification, and by recognition result feedback control unit；
Foreign matter processing unit, for will at least partly foreign matter be removed according to the recognition result of the detection unit；
The control unit being connect with the detection unit, foreign matter processing unit, for controlling detection unit, foreign matter processing list
Member operation.
Preferably, the detection unit includes image acquisition part and image processing part；Described image acquisition portion includes aobvious
Micro mirror and photograph apparatus；For amplifying the foreign matter on display base plate, described image acquisition portion is used for putting the microscope
Foreign matter on big display base plate is taken pictures to obtain the amplified image of foreign matter；Described image processing unit is used for according to
Position, size and the pattern of the gray scale identification foreign matter of the image of foreign matter.
Preferably, the foreign matter processing unit includes:
Fusing department, for foreign matter to be heated to molten state according to the recognition result of the detection unit；
Grind section is ground for the foreign matter to molten state to remove foreign matter.
Preferably, the fusing department includes laser, for foreign matter transmitting laser so that foreign matter is heated to melting
Melt state.
Preferably, the fusing department further includes reflecting mirror and focus lamp, the laser issued for adjusting the laser
Direction and laser intensity.
Preferably, the grind section includes the mobile bar connecting with control unit, and one end of the mobile bar, which is equipped with, grinds
Bistrique, the two sides of the mobile bar are respectively provided with an axis of rotation, and the both ends of the lapping tape are wound in respectively on the axis of rotation,
It is contacted with grinding head in the middle part of the lapping tape so that grinding head rubs under the drive of lapping tape.
The present invention also provides a kind of processing methods of display base plate foreign matter, comprising the following steps:
(1) using the foreign matter on detection unit identification display base plate；
(2) foreign matter processing unit will at least partly foreign matter be removed according to the recognition result of the detection unit.
Preferably, the step (2) includes:
The step of foreign matter is heated to by molten state using fusing department；
And the step of foreign matter is ground using grind section.
Preferably, described foreign matter is heated to molten state to be carried out simultaneously with described ground to foreign matter, or first will
Foreign matter is heated to molten state, then grinds to foreign matter.
Preferably, the foreign matter using on detection unit identification display base plate includes:
Foreign matter on display base plate take pictures and obtains the image of foreign matter；
Position, size and the pattern of foreign matter are identified according to the gray scale of the image of the foreign matter.
Preferably, foreign matter is heated to molten state packet using fusing department by the testing result according to the detection unit
It includes:
Fusing department calculates the laser intensity needed for melting foreign matter, and root according to the position of the foreign matter, size and pattern
Laser intensity needed for issuing according to from the calculated result to the foreign matter is so that foreign matter is heated to molten state.
Preferably, foreign matter is heated to molten state packet using fusing department by the testing result according to the detection unit
It includes:
Fusing department is issued to the foreign matter by weak to strong laser intensity, so that the foreign matter internal temperature reaches 200 DEG C
~500 DEG C.
Preferably, the energy of the laser is 0.75~5.5J/cm, and the laser connects with display base plate foreign matter surface
Touching temperature is 500 DEG C~800 DEG C.
The processing unit of display base plate foreign matter of the invention is using the position of foreign matter, ruler on detection unit detection display base plate
Then very little and pattern will need the foreign matter removed to be heated to molten state according to the position of foreign matter, size and pattern using fusing department
Make its softening, then foreign matter is ground with grind section, such grinding greatly reduces the generation of particulate matter or dust, can be with
At the other positions for preventing particulate matter scuffing or pollution displaying substrate.The processing unit of display base plate foreign matter of the invention is suitable for
Handle various display base plate foreign matters.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the processing unit of the display base plate foreign matter of the embodiment of the present invention 1；
Fig. 2 is the structural schematic diagram of the processing unit of the display base plate foreign matter of the embodiment of the present invention 2；
Fig. 3-6 is the image that the CCD of the embodiment of the present invention 2 is acquired；
Fig. 7-9 is the foreign matter altitude information figure that the processing unit of the display base plate foreign matter of the embodiment of the present invention 2 calculates；
Figure 10, Figure 11 are the partial structural diagram of the processing unit of the display base plate foreign matter of the embodiment of the present invention 2；
Wherein, appended drawing reference are as follows: 1, detection unit；11, image acquisition part；12, image processing part；13, microscope；14,
Photograph apparatus；2, foreign matter processing unit；21, fusing department；22, grind section；23, laser；24, reflecting mirror；25, focus lamp；26, it moves
Lever；27, grinding head；28, the axis of rotation；29, lapping tape；3, control unit；4, display panel；41, foreign matter.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, with reference to the accompanying drawing and specific embodiment party
Present invention is further described in detail for formula.
Embodiment 1:
The present embodiment provides a kind of processing units of display base plate foreign matter, as shown in Figure 1, including detection unit 1, at foreign matter
Manage unit 2, and the control unit 3 connecting with the detection unit 1, foreign matter processing unit 2.Wherein, detection unit 1 is for identification
Foreign matter on display base plate, and by recognition result feedback control unit 3；Foreign matter processing unit 2 is used for according to the detection unit 1
Recognition result will at least partly foreign matter remove；Control unit 3 is for controlling detection unit 1, the operation of foreign matter processing unit 2.
As one of the present embodiment preferred embodiment, the foreign matter processing unit 2 includes fusing department 21 and grinding
Portion 22, fusing department 21 are used to that foreign matter to be heated to molten state according to the recognition result of the detection unit 1；Grind section 22 for pair
The foreign matter of molten state is ground to remove foreign matter.
The processing unit of the display base plate foreign matter of the present embodiment detects the position of foreign matter on display base plate using detection unit 1
It sets, size and pattern, then the foreign matter removed will be needed to be heated to using fusing department 21 according to the position of foreign matter, size and pattern
Molten state makes its softening, then is ground with grind section 22 to foreign matter, and such grinding greatly reduces particulate matter or dust
It generates, at the other positions that particulate matter scuffing or pollution displaying substrate can be prevented.
Embodiment 2:
The present embodiment provides a kind of processing units of display base plate foreign matter, as shown in figures 1-8, including detection unit 1, foreign matter
Processing unit 2, and the control unit 3 being connect with the detection unit 1, foreign matter processing unit 2.Wherein, detection unit 1 is for knowing
Foreign matter 41 on other display base plate, and by recognition result feedback control unit 3；Foreign matter processing unit 2 is used for according to the detection
The recognition result of unit 1 will at least partly foreign matter 41 remove；Control unit 3 is for controlling detection unit 1, foreign matter processing unit 2
Operation.In the present embodiment control unit 3 using programmable logic controller (PLC) (Programmable Logic Controller,
PLC)。
Specifically, the detection unit 1 includes image acquisition part 11 and image processing part 12；It wraps in described image acquisition portion 11
Include microscope 13 and photograph apparatus 14；The microscope 13 for amplifying the foreign matter 41 on display base plate 4, adopt by described image
Collection portion 11 is for taking pictures to the foreign matter 41 on the display base plate 4 of amplification to obtain the amplified image of foreign matter 41；The figure
As processing unit 12 is used for position, size and the pattern of the gray scale identification foreign matter 41 according to the image of the foreign matter 41.More specifically,
Photograph apparatus 14 can select charge coupled cell (Charge-coupled Device, CCD).
That is, using the display base plate foreign matter of the present embodiment processing unit when, microscope 13 is first moved to inspection
The top of foreign matter 41 out, microscope 13 focus to foreign matter 41, CCD taken pictures (Fig. 3 is the picture that specific product is taken pictures,
Fig. 4 is the location drawing that the product pretest is surveyed, and vertical black line segment be the detection zone of delimitation in Fig. 4), pass through image processing part 12
Difference processing is carried out to the image of CCD acquisition, identifies 41 gray difference maximum point of foreign matter as 41 center of foreign matter.For example, can
To be irradiated using light filling, CCD detects the image of different gray scales, is compared by standard grayscale, according to the ash of the image of CCD acquisition
The depth of degree judges position, size and the pattern of foreign matter 41.Based on identical reason, when the display base plate foreign matter of the present embodiment
Processing unit is used to handle the foreign matter 41 of color membrane substrates, that is, when needing to remove the foreign matter 41 for exceeding spacer material height, due to difference
The reflection of the spacer material or foreign matter 41 of height and transmission are overlapped the image grayscale difference formed, such as Fig. 5, Fig. 6, can pass through figure
The intensity contrast of picture extracts corresponding grey parameter, referring to Fig. 7 Fig. 8, judges corresponding spacer material or 41 height of foreign matter accordingly such as
Shown in Fig. 9, part that the part in Fig. 9 more than 6.1572 μm as needs to remove.
As one of the present embodiment preferred embodiment, the foreign matter processing unit 2 includes fusing department 21 and grinding
Portion 22, fusing department 21 are used to that foreign matter 41 to be heated to molten state according to the recognition result of the detection unit 1；Grind section 22 is used for
The foreign matter 41 of molten state is ground to remove foreign matter 41.
Preferably, the fusing department 21 includes laser 23, for the foreign matter 41 transmitting laser so that foreign matter 41
It is heated to molten state.
Specifically, laser 23 can be ultraviolet laser 23, carbon dioxide ultraviolet laser 23 or other superlasers
Device 23.
Using the processing unit of the display base plate foreign matter of the present embodiment, display base plate Superficial Foreign Body 41 can be realized non-
Contact measurement, and judge the basic pattern of foreign matter 41, foreign matter 41 is pre-processed using laser, makes the form of foreign matter 41
It changes, then grind section 22 is recycled to carry out physical grinding, no dust may be implemented in this way, substantially reduce pollution.
Preferably, the fusing department 21 further includes reflecting mirror 24 and focus lamp 25, is sent out for adjusting the laser 23
The direction of laser out and the intensity of laser.
That is, as shown in Figure 10, position, the direction of reflecting mirror 24 are adjusted, to control the position of reflection light, side
To control the direction of laser and the half-intensity width of laser.For example, focus lamp 25 can choose adjustable reflex prism, lead to
Overregulating prism position can control laser focus position, control the range of focusing.
Preferably, the grind section 22 includes the mobile bar 26 connecting with control unit 3, one end of the mobile bar 26
Equipped with grinding head 27, the two sides of the mobile bar 26 are respectively provided with an axis of rotation 28, and the both ends of the lapping tape 29 are wound respectively
In on the axis of rotation 28,29 middle part of lapping tape is contacted with grinding head 27 so that grinding head 27 is under the drive of lapping tape 29
It rubs.
As shown in figure 11, mobile bar 26 can be moved up for controlling grind section 22 with respect to display base plate in tri- directions X, Y, Z
Dynamic, after the grinding head 27 that mobile bar 26 controls is moved to corresponding 41 position of foreign matter, 28 high speed rotation of the axis of rotation will
The foreign matter 41 melted removes, and since foreign matter 41 is in the softening state of melting, this not will cause dust etc. in the process
Pollution.
Embodiment 3:
The present embodiment provides a kind of processing methods of display base plate foreign matter, comprising the following steps:
(1) using the foreign matter on detection unit identification display base plate；
(2) foreign matter processing unit will at least partly foreign matter be removed according to the recognition result of the detection unit.
Embodiment 4:
The present embodiment provides a kind of processing methods of the display base plate foreign matter of embodiment 2, comprising the following steps:
S01, take pictures to the foreign matter on display base plate using CCD obtains foreign matter by the amplified image of microscope；
Position, size and the pattern of foreign matter are identified according to the gray scale of the image of the foreign matter.
S02, foreign matter is heated to by molten state using fusing department；And foreign matter is ground using grind section.
It foreign matter is heated to molten state is carried out simultaneously with described ground to foreign matter specifically, described, or first will be different
Object is heated to molten state, then grinds to foreign matter.
That is, detect that deformation occurs for foreign matter outer surface to CCD, become molten state, stop heating, then using grinding
Mill portion is ground by foreign matter position.It is such to be advantageous in that each layer ground away quickly melt, it grinds in this way
It is high-efficient, and there is dustless property.
Specifically, fusing department calculates swashing needed for melting foreign matter according to the position of the foreign matter, size and pattern first
Luminous intensity, laser issue required laser intensity so that foreign matter is heated to melting to the foreign matter according to the calculated result
State.
That is, laser intensity control makes foreign matter become the temperature that liquid is decomposed and evaporated unlikely.That is, logical
Foreign matter on normal color membrane substrates includes foreign matter when preparing color film film layer and the foreign matter that is formed when preparing spacer material, due to color film film
Layer is different from the material of spacer material, and therefore, the material of both foreign matters is also different, can usually be detected outside foreign matter according to CCD
Surface carries out judging that foreign matter is made of which kind of material, and the laser of corresponding energy is then emitted to the foreign matter.
Preferably, fusing department is issued to the foreign matter by weak to strong laser intensity, so that the foreign matter internal temperature
Reach 200 DEG C~500 DEG C.
Preferably, the energy of the laser is 0.75~5.5J/cm, and the laser connects with display base plate foreign matter surface
Touching temperature is 500 DEG C~800 DEG C.
That is, also may not necessarily first judge that foreign matter is made of which kind of material, it only need to be from weak to strong to the foreign matter
Laser is issued, so that foreign matter progressivelyes reach molten condition.
Obviously, also many modifications may be made to for the specific embodiment of the various embodiments described above；Such as: acquisition foreign matter image is adopted
Specific device component can be selected according to specific product, and the specific energy value of laser can carry out according to the actual situation
Adjustment.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (9)
1. a kind of processing unit of display base plate foreign matter characterized by comprising
Detection unit, the foreign matter on display base plate for identification, and by recognition result feedback control unit；
Foreign matter processing unit, for will at least partly foreign matter be removed according to the recognition result of the detection unit；
The control unit being connect with the detection unit, foreign matter processing unit, for controlling detection unit, foreign matter processing unit fortune
Row；
Wherein, the detection unit includes image acquisition part and image processing part；Described image acquisition portion includes microscope and bat
According to device；For the microscope for amplifying the foreign matter on display base plate, the photograph apparatus is used for the display base plate to amplification
On foreign matter take pictures to obtain the amplified image of foreign matter；Described image processing unit is used for according to the image of the foreign matter
Position, size and the pattern of gray scale identification foreign matter；
The foreign matter processing unit includes:
Fusing department, for foreign matter to be heated to molten state according to the recognition result of the detection unit；
Grind section is ground for the foreign matter to molten state to remove foreign matter.
2. the processing unit of display base plate foreign matter according to claim 1, which is characterized in that the fusing department includes laser
Device, for foreign matter transmitting laser so that foreign matter is heated to molten state.
3. the processing unit of display base plate foreign matter according to claim 2, which is characterized in that the fusing department further includes anti-
Mirror and focus lamp are penetrated, for adjusting the direction for the laser that the laser issues and the intensity of laser.
4. the processing unit of display base plate foreign matter according to claim 1, which is characterized in that the grind section includes grinding
One end of band, and the mobile bar connecting with control unit, the mobile bar is equipped with grinding head, and the two sides of the mobile bar are respectively set
There is an axis of rotation, the both ends of the lapping tape are wound in respectively on the axis of rotation, are connect in the middle part of the lapping tape with grinding head
Touching is so that grinding head rubs under the drive of lapping tape.
5. a kind of processing method of display base plate foreign matter, which comprises the following steps:
(1) using the foreign matter on detection unit identification display base plate；
(2) foreign matter processing unit will at least partly foreign matter be removed according to the recognition result of the detection unit；
Wherein, the step (2) includes:
The step of foreign matter is heated to by molten state using fusing department；
And the step of foreign matter is ground using grind section.
6. the processing method of display base plate foreign matter according to claim 5, which is characterized in that described to be heated to melting by foreign matter
Melt state to carry out simultaneously with described grind foreign matter；Or foreign matter is first heated to molten state, then foreign matter is ground.
7. the processing method of display base plate foreign matter according to claim 5, which is characterized in that described to be known using detection unit
Foreign matter on other display base plate includes:
Foreign matter on display base plate take pictures and obtains the image of foreign matter；
Position, size and the pattern of foreign matter are identified according to the gray scale of the image of the foreign matter.
8. the processing method of display base plate foreign matter according to claim 5, which is characterized in that described single according to the detection
Foreign matter is heated to molten state using fusing department by the testing result of member
Fusing department calculates the laser intensity needed for melting foreign matter according to the position of the foreign matter, size and pattern, and according to meter
The laser intensity needed for result is issued to the foreign matter is calculated so that foreign matter is heated to molten state.
9. the processing method of display base plate foreign matter according to claim 5, which is characterized in that described single according to the detection
Foreign matter is heated to molten state using fusing department by the testing result of member
Fusing department is issued to the foreign matter by weak to strong laser intensity, so that the foreign matter internal temperature reaches 200 DEG C~500
℃；
The energy of the laser is 0.75~5.5 J/cm, and the Contact Temperature on the laser and display base plate foreign matter surface is 500
DEG C~800 DEG C.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710228690.XA CN106842650B (en) | 2017-04-10 | 2017-04-10 | Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter |
| PCT/CN2018/081690 WO2018188497A1 (en) | 2017-04-10 | 2018-04-03 | Display substrate foreign matter processing device and display substrate foreign matter processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710228690.XA CN106842650B (en) | 2017-04-10 | 2017-04-10 | Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter |
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| Publication Number | Publication Date |
|---|---|
| CN106842650A CN106842650A (en) | 2017-06-13 |
| CN106842650B true CN106842650B (en) | 2019-06-07 |
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| CN201710228690.XA Expired - Fee Related CN106842650B (en) | 2017-04-10 | 2017-04-10 | Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter |
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| Country | Link |
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| CN (1) | CN106842650B (en) |
| WO (1) | WO2018188497A1 (en) |
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| CN106842650B (en) * | 2017-04-10 | 2019-06-07 | 京东方科技集团股份有限公司 | Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter |
| CN108428617A (en) * | 2018-03-12 | 2018-08-21 | 昆山国显光电有限公司 | A kind of clean method and device of glass substrate |
| CN110058439B (en) * | 2019-05-20 | 2021-03-23 | 成都中电熊猫显示科技有限公司 | Method and apparatus for removing foreign matter on color filter |
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| US3975177A (en) * | 1974-11-14 | 1976-08-17 | Central Glass Co., Ltd. | System for preventing cracking of glass ribbon in plate manufacturing |
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Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106842650B (en) * | 2017-04-10 | 2019-06-07 | 京东方科技集团股份有限公司 | Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter |
-
2017
- 2017-04-10 CN CN201710228690.XA patent/CN106842650B/en not_active Expired - Fee Related
-
2018
- 2018-04-03 WO PCT/CN2018/081690 patent/WO2018188497A1/en active Application Filing
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3975177A (en) * | 1974-11-14 | 1976-08-17 | Central Glass Co., Ltd. | System for preventing cracking of glass ribbon in plate manufacturing |
| JPH07241757A (en) * | 1994-03-07 | 1995-09-19 | Fuji Photo Film Co Ltd | Glass substrate polishing device |
| CN101320677A (en) * | 2003-08-25 | 2008-12-10 | 东京毅力科创株式会社 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| CN101657893A (en) * | 2007-04-25 | 2010-02-24 | 株式会社Snu精密 | The foreign matter detection of semiconductor crystal wafer and repair system and method thereof |
| CN201281691Y (en) * | 2008-09-03 | 2009-07-29 | 华映视讯（吴江）有限公司 | LCD panel foreign matter detection system |
| CN203054450U (en) * | 2013-01-28 | 2013-07-10 | 京东方科技集团股份有限公司 | Foreign matter inspection and treatment device and exposure machine |
| CN203502360U (en) * | 2013-09-27 | 2014-03-26 | 京东方科技集团股份有限公司 | Substrate inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018188497A1 (en) | 2018-10-18 |
| CN106842650A (en) | 2017-06-13 |
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